JP5339975B2 - X線位相イメージングに用いられる位相格子、該位相格子を用いたx線位相コントラスト像の撮像装置、x線コンピューター断層撮影システム - Google Patents
X線位相イメージングに用いられる位相格子、該位相格子を用いたx線位相コントラスト像の撮像装置、x線コンピューター断層撮影システム Download PDFInfo
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- JP5339975B2 JP5339975B2 JP2009058270A JP2009058270A JP5339975B2 JP 5339975 B2 JP5339975 B2 JP 5339975B2 JP 2009058270 A JP2009058270 A JP 2009058270A JP 2009058270 A JP2009058270 A JP 2009058270A JP 5339975 B2 JP5339975 B2 JP 5339975B2
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- Japan
- Prior art keywords
- phase
- grating
- ray
- diffraction grating
- protrusion
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/06—Diaphragms
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
- A61B6/4291—Arrangements for detecting radiation specially adapted for radiation diagnosis the detector being combined with a grid or grating
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/48—Diagnostic techniques
- A61B6/484—Diagnostic techniques involving phase contrast X-ray imaging
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
- G02B5/1871—Transmissive phase gratings
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
- G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Medical Informatics (AREA)
- Optics & Photonics (AREA)
- High Energy & Nuclear Physics (AREA)
- Heart & Thoracic Surgery (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Biophysics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009058270A JP5339975B2 (ja) | 2008-03-13 | 2009-03-11 | X線位相イメージングに用いられる位相格子、該位相格子を用いたx線位相コントラスト像の撮像装置、x線コンピューター断層撮影システム |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008064709 | 2008-03-13 | ||
| JP2008064709 | 2008-03-13 | ||
| JP2009058270A JP5339975B2 (ja) | 2008-03-13 | 2009-03-11 | X線位相イメージングに用いられる位相格子、該位相格子を用いたx線位相コントラスト像の撮像装置、x線コンピューター断層撮影システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009244260A JP2009244260A (ja) | 2009-10-22 |
| JP2009244260A5 JP2009244260A5 (enExample) | 2012-04-26 |
| JP5339975B2 true JP5339975B2 (ja) | 2013-11-13 |
Family
ID=41061181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009058270A Expired - Fee Related JP5339975B2 (ja) | 2008-03-13 | 2009-03-11 | X線位相イメージングに用いられる位相格子、該位相格子を用いたx線位相コントラスト像の撮像装置、x線コンピューター断層撮影システム |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8718228B2 (enExample) |
| JP (1) | JP5339975B2 (enExample) |
| WO (1) | WO2009113726A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4246038A4 (en) * | 2020-12-29 | 2024-05-01 | Huawei Technologies Co., Ltd. | COMPOSITE GRATING AND PRODUCTION METHOD THEREOF, DIFFRACTIVE OPTICAL WAVEGUIDE AND ELECTRONIC DEVICE |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102197303A (zh) | 2008-10-29 | 2011-09-21 | 佳能株式会社 | X射线成像装置和x射线成像方法 |
| US8559594B2 (en) | 2008-10-29 | 2013-10-15 | Canon Kabushiki Kaisha | Imaging apparatus and imaging method |
| RU2539333C2 (ru) * | 2009-05-19 | 2015-01-20 | Конинклейке Филипс Электроникс Н.В. | Дифракционная решетка для получения изображений методом фазового контраста |
| JP5773624B2 (ja) | 2010-01-08 | 2015-09-02 | キヤノン株式会社 | 微細構造体の製造方法 |
| JP2015178683A (ja) * | 2010-01-08 | 2015-10-08 | キヤノン株式会社 | 金属吸収格子及びタルボ干渉計 |
| JP5538936B2 (ja) * | 2010-02-10 | 2014-07-02 | キヤノン株式会社 | 解析方法、プログラム、記憶媒体、x線位相イメージング装置 |
| JP5548085B2 (ja) * | 2010-03-30 | 2014-07-16 | 富士フイルム株式会社 | 回折格子の調整方法 |
| DE102010019991A1 (de) * | 2010-05-10 | 2011-11-10 | Siemens Aktiengesellschaft | Computertomographiesystem |
| EP2585817B1 (en) * | 2010-06-28 | 2020-01-22 | Paul Scherrer Institut | A method for x-ray phase contrast and dark-field imaging using an arrangement of gratings in planar geometry |
| JP2012013530A (ja) * | 2010-06-30 | 2012-01-19 | Fujifilm Corp | 回折格子及びその製造方法、並びに放射線撮影装置 |
| JP5504104B2 (ja) * | 2010-08-31 | 2014-05-28 | 株式会社東芝 | Moコリメータおよびそれを用いたX線検出器並びにCT装置 |
| CN103079469B (zh) * | 2010-09-03 | 2016-02-24 | 皇家飞利浦电子股份有限公司 | 利用改善的采样的微分相位对比成像 |
| US20130163717A1 (en) * | 2010-09-08 | 2013-06-27 | Canon Kabushiki Kaisha | Imaging apparatus |
| JP2012103237A (ja) * | 2010-10-14 | 2012-05-31 | Canon Inc | 撮像装置 |
| JP6060082B2 (ja) * | 2010-10-19 | 2017-01-11 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 微分位相コントラスト画像形成のための回折格子、システム、装置、方法、コンピュータプログラム及び媒体 |
| RU2013126110A (ru) * | 2010-11-08 | 2014-12-20 | Конинклейке Филипс Электроникс Н.В. | Дифракционная решетка для получения фазоконтрастного изображения |
| WO2012073545A1 (en) * | 2010-11-29 | 2012-06-07 | Canon Kabushiki Kaisha | Method of manufacturing an x-ray diffraction grating microstructure for imaging apparatus |
| JP2012143553A (ja) * | 2010-12-24 | 2012-08-02 | Fujifilm Corp | 放射線画像撮影装置および放射線画像検出器 |
| JP5944413B2 (ja) * | 2011-02-07 | 2016-07-05 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | ダイナミックレンジを増大する微分位相コントラスト撮像装置及び方法 |
| JP5860613B2 (ja) * | 2011-05-26 | 2016-02-16 | 株式会社オプトニクス精密 | X線干渉計用の回折格子及びその製造方法 |
| JP2013188286A (ja) * | 2012-03-13 | 2013-09-26 | Fujifilm Corp | 放射線画像撮影用グリッド及びその製造方法、並びに放射線画像撮影システム |
| FI20126119L (fi) * | 2012-10-29 | 2014-04-30 | Teknologian Tutkimuskeskus Vtt Oy | Interferometrinen dynaamihila-kuvannusmenetelmä, diffraktiohila ja kuvannuslaitteisto |
| US8989347B2 (en) | 2012-12-19 | 2015-03-24 | General Electric Company | Image reconstruction method for differential phase contrast X-ray imaging |
| US9014333B2 (en) | 2012-12-31 | 2015-04-21 | General Electric Company | Image reconstruction methods for differential phase contrast X-ray imaging |
| EP2827339A1 (en) * | 2013-07-16 | 2015-01-21 | Canon Kabushiki Kaisha | Source grating, interferometer, and object information acquisition system |
| JP6362103B2 (ja) * | 2013-09-04 | 2018-07-25 | キヤノン株式会社 | 遮蔽格子及びトールボット干渉計 |
| CN105612584B (zh) * | 2013-10-07 | 2018-12-04 | 西门子医疗有限公司 | 相衬x射线成像设备及其相位光栅 |
| JPWO2017094294A1 (ja) * | 2015-12-02 | 2018-09-27 | コニカミノルタ株式会社 | X線タルボ撮影装置 |
| RU2601867C1 (ru) * | 2015-12-09 | 2016-11-10 | Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Нижегородский государственный университет им. Н.И. Лобачевского" | Устройство для управления сходимостью рентгеновского пучка и способ изготовления дифракционного блока в составе указанного устройства (варианты) |
| KR102543948B1 (ko) | 2016-05-17 | 2023-06-15 | 삼성전자주식회사 | 클럭 신호 생성기 및 기판 검사 장치 |
| WO2018066198A1 (ja) * | 2016-10-06 | 2018-04-12 | 株式会社島津製作所 | 回折格子ユニット、格子ユニットの製造方法およびx線位相イメージ撮影装置 |
| JP6753342B2 (ja) * | 2017-03-15 | 2020-09-09 | 株式会社島津製作所 | 放射線格子検出器およびx線検査装置 |
| RU175213U1 (ru) * | 2017-08-03 | 2017-12-01 | Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Нижегородский государственный университет им. Н.И. Лобачевского" | Устройство для управления сходимостью рентгеновского пучка с её настройкой |
| EP3762778B1 (en) * | 2018-03-06 | 2025-07-09 | Applied Materials, Inc. | Method of building a 3d functional optical material stacking structure |
| JP6984783B2 (ja) * | 2019-02-21 | 2021-12-22 | 株式会社島津製作所 | X線位相イメージング装置およびx線位相イメージング方法 |
| CN110916712B (zh) * | 2019-11-29 | 2022-04-29 | 清华大学 | 光栅成像系统及其扫描方法 |
| EP3832392A1 (en) * | 2019-12-05 | 2021-06-09 | Lumileds Holding B.V. | Method for manufacturing lighting device |
| US12055737B2 (en) * | 2022-05-18 | 2024-08-06 | GE Precision Healthcare LLC | Aligned and stacked high-aspect ratio metallized structures |
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| JP3416976B2 (ja) * | 1993-02-08 | 2003-06-16 | セイコーエプソン株式会社 | 位相マスク及び位相マスク再生装置 |
| JP3019723B2 (ja) | 1994-06-09 | 2000-03-13 | 株式会社ニコン | 回折光学素子の製造方法 |
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| DE102006037281A1 (de) | 2006-02-01 | 2007-08-09 | Siemens Ag | Röntgenoptisches Durchstrahlungsgitter einer Fokus-Detektor-Anordnung einer Röntgenapparatur zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen von einem Untersuchungsobjekt |
| DE102006017291B4 (de) * | 2006-02-01 | 2017-05-24 | Paul Scherer Institut | Fokus/Detektor-System einer Röntgenapparatur zur Erzeugung von Phasenkontrastaufnahmen, Röntgensystem mit einem solchen Fokus/Detektor-System sowie zugehöriges Speichermedium und Verfahren |
| DE102006037254B4 (de) * | 2006-02-01 | 2017-08-03 | Paul Scherer Institut | Fokus-Detektor-Anordnung zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen mit röntgenoptischen Gittern, sowie Röntgen-System, Röntgen-C-Bogen-System und Röntgen-Computer-Tomographie-System |
| DE102006063048B3 (de) * | 2006-02-01 | 2018-03-29 | Siemens Healthcare Gmbh | Fokus/Detektor-System einer Röntgenapparatur zur Erzeugung von Phasenkontrastaufnahmen |
| DE102006017290B4 (de) * | 2006-02-01 | 2017-06-22 | Siemens Healthcare Gmbh | Fokus/Detektor-System einer Röntgenapparatur, Röntgen-System und Verfahren zur Erzeugung von Phasenkontrastaufnahmen |
| DE102006037255A1 (de) * | 2006-02-01 | 2007-08-02 | Siemens Ag | Fokus-Detektor-Anordnung einer Röntgenapparatur zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen |
| DE102006037256B4 (de) * | 2006-02-01 | 2017-03-30 | Paul Scherer Institut | Fokus-Detektor-Anordnung einer Röntgenapparatur zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen sowie Röntgensystem, Röntgen-C-Bogen-System und Röntgen-CT-System |
| DE102006037282B4 (de) * | 2006-02-01 | 2017-08-17 | Siemens Healthcare Gmbh | Fokus-Detektor-Anordnung mit röntgenoptischem Gitter zur Phasenkontrastmessung |
| US7714368B2 (en) * | 2006-06-26 | 2010-05-11 | Aptina Imaging Corporation | Method and apparatus providing imager pixel array with grating structure and imager device containing the same |
| US7609392B2 (en) | 2006-06-28 | 2009-10-27 | California Institute Of Technology | Harmonically matched diffraction grating pair |
| US7920676B2 (en) * | 2007-05-04 | 2011-04-05 | Xradia, Inc. | CD-GISAXS system and method |
| US7924973B2 (en) * | 2007-11-15 | 2011-04-12 | Csem Centre Suisse D'electronique Et De Microtechnique Sa | Interferometer device and method |
| DE102008048688B4 (de) * | 2008-09-24 | 2011-08-25 | Paul Scherrer Institut | Röntgen-CT-System zur Erzeugung tomographischer Phasenkontrast- oder Dunkelfeldaufnahmen |
| EP2168488B1 (de) * | 2008-09-30 | 2013-02-13 | Siemens Aktiengesellschaft | Röntgen-CT-System zur Röntgen-Phasenkontrast-und/oder Röntgen-Dunkelfeld-Bildgebung |
| CN102197303A (zh) * | 2008-10-29 | 2011-09-21 | 佳能株式会社 | X射线成像装置和x射线成像方法 |
| US7949095B2 (en) * | 2009-03-02 | 2011-05-24 | University Of Rochester | Methods and apparatus for differential phase-contrast fan beam CT, cone-beam CT and hybrid cone-beam CT |
| JP5459659B2 (ja) * | 2009-10-09 | 2014-04-02 | キヤノン株式会社 | X線位相コントラスト像の撮像に用いられる位相格子、該位相格子を用いた撮像装置、x線コンピューター断層撮影システム |
-
2009
- 2009-03-11 JP JP2009058270A patent/JP5339975B2/ja not_active Expired - Fee Related
- 2009-03-12 WO PCT/JP2009/055375 patent/WO2009113726A2/en not_active Ceased
- 2009-03-12 US US12/922,145 patent/US8718228B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4246038A4 (en) * | 2020-12-29 | 2024-05-01 | Huawei Technologies Co., Ltd. | COMPOSITE GRATING AND PRODUCTION METHOD THEREOF, DIFFRACTIVE OPTICAL WAVEGUIDE AND ELECTRONIC DEVICE |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009244260A (ja) | 2009-10-22 |
| WO2009113726A2 (en) | 2009-09-17 |
| US8718228B2 (en) | 2014-05-06 |
| WO2009113726A3 (en) | 2009-12-03 |
| US20110013743A1 (en) | 2011-01-20 |
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