JP5218412B2 - ケイ素含有被膜の製造方法、ケイ素含有被膜および半導体装置 - Google Patents
ケイ素含有被膜の製造方法、ケイ素含有被膜および半導体装置 Download PDFInfo
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Description
式(4)において、ε(誘電率)とCの関係を式(9)に示す。
{(9)式中、Sは電極面積、ε0は真空の誘電率、εrは絶縁膜の誘電率、dは配線間隔である)。
前記シラン系化合物が、式(1)〜(3)のいずれかで表される化合物からなる群から選ばれた少なくとも二つの化合物について、それぞれX1,X2およびX3の少なくともいずれか一つを取り去り、窒素を介して互いに結合させて得られる窒素介在化合物を含むこと、前記窒素介在化合物が、式(4)〜(7)のいずれかで表される化合物を含むこと、
前記感光性官能基が、フェニル基、ビニル基およびピリジニル基からなる群から選ばれた基であること、前記シラン系化合物のケイ素の一原子に結合する前記感光性官能基の数が少なくとも2以上であること、とりわけ、前記シラン系化合物のケイ素の一原子に結合する前記感光性官能基の数が3であること、前記光が紫外線または電子線であること、とりわけ、前記紫外線が真空紫外線であること、加熱処理を行うことを含むこと、前記光照射前、前記光照射中および前記光照射後の少なくともいずれかの時点で前記加熱処理を行うこと、が好ましい形態である。
3 サイドウォール絶縁膜
5a ソース拡散層
5b ドレイン拡散層
6 層間絶縁膜
7 ストッパ膜
8 TiNバリアメタル膜
9 ブランケットW
10 試験膜(すなわち、本発明に係るケイ素含有被膜)
11 多孔質ケイ素含有絶縁膜
12 試験膜
13 試験膜
14 Cu
15 拡散防止膜
16 多孔質ケイ素含有絶縁膜
17 試験膜
18 多孔質ケイ素含有絶縁膜
19 試験膜
20 試験膜
21 Cu
22 拡散防止膜
(1) Si基板上に形成した多孔質ケイ素含有絶縁膜(ケイ素と酸素とを主として含み、炭素と水素とも含むSiO2ライクな膜、「セラメートNCS」;触媒化成工業製)を作製した。
(8) 図1〜6を参照して、ステップ1に従って、素子間分離膜(2)で分離され、ソース拡散層(5a)とドレイン拡散層(5b)とサイドウォール絶縁膜(3)とを有するゲート電極を形成したトランンジスタ層が形成されたSiウエハ(1)に、ステップ2に従って、層間絶縁膜(6)、ストッパ膜(7)を形成し、電極取り出し用のコンタクトホールを形成した。
このような構成の多層配線構造体を試作し、試作した多層配線構造体を用いて100万個の連続ビアの歩留まり、配線抵抗、実効層間容量および、断面の電子顕微鏡観察によるCuの絶縁層への拡散の有無を表2に示した。断面の電子顕微鏡観察によるCuの絶縁層への拡散の有無の判定は、試作した多層配線構造体を大気中で200℃、1時間処理した後に行った。この条件で拡散がなければ、バリア膜として実用上問題ないものと判断される。表2中、実施例8〜14は、それぞれ実施例1〜7のケイ素含有被膜を使用した例である。
(9) 実施例8〜14のエッチングストッパ膜(10),(17)およびCMPストッパ膜(12),(19)を従来エッチングストッパ・CMPストッパ膜としてのSiC膜30nmに替えて多層配線構造体を試作した。
(10) 実施例8〜14のCuの絶縁層への拡散防止のためのバリア膜(13),(20)を従来のバリアメタル膜TaN10nmに替えて多層配線構造体を試作した。この多層配線構造体を用いて100万個の連続ビアの歩留まり、配線抵抗、実効層間容量および、断面の電子顕微鏡観察によるCuの絶縁層への拡散の有無を表4に示した。
実施例1〜7におけるケイ素含有被膜に代えて、表1で示す、従来のバリアメタル膜TaNおよび従来のエッチングストッパ・CMPストッパ膜(SiC膜)を、多孔質ケイ素含有絶縁膜上に、TaN膜においてはスパッタ法を用い、SiC膜においてはプラズマCVDを用いて、膜を形成した。
試験膜(10),試験膜(12),試験膜(17)および試験膜(19)に代えて比較例2と同一のSiC膜(10,12,17,19)(各膜厚30nm)を使用し、試験膜(13)および試験膜(20)に代えて比較例1と同一のTaN膜(13)(各膜厚10nm)を使用し、試験膜/多孔質ケイ素含有絶縁膜/試験膜/多孔質ケイ素含有絶縁膜の順に加工する代わりに、比較例に係る膜/多孔質ケイ素含有絶縁膜/比較例に係る膜/多孔質ケイ素含有絶縁膜の順に加工した以外は実施例8〜14と同様にして、多層配線構造体を試作した。この多層配線構造体を用いて100万個の連続ビアの歩留まり、配線抵抗、実効層間容量および、断面の電子顕微鏡観察によるCuの絶縁層への拡散の有無を表2に示した。
Claims (5)
- 半導体装置に含まれる、密度が2.4g/cm3以上3.25g/cm3以下のケイ素含有被膜の製造方法であって、
感光性官能基を有する少なくとも一種類のシラン系化合物の溶液を塗布し、次いで、150℃以下の温度で加熱して前記溶液中の溶媒を取り除いてケイ素含有被膜前駆体を形成し、
その後に少なくとも一種類の光を単独または組み合わせて当該ケイ素含有被膜前駆体に照射して当該ケイ素含有被膜を得、
前記ケイ素含有被膜前駆体の形成から前記照射までの間を150℃以下の温度に維持する、
ことを含み、
前記ケイ素含有被膜がバリア膜を含み、
前記シラン系化合物が、下記一般式(1)〜(3)のいずれかで表される化合物
(ここで、式(1)〜(3)中、R1,R2およびR3は、互いに独立に、水素、炭素数1〜4の脂肪族炭化水素基または、置換基を含んでいてもよい炭素数6〜8の芳香族炭化水素基または、置換基を含んでいてもよい炭素数4〜8の複素芳香族基を表し、X1,X2およびX3は、互いに独立に、クロロ基、水酸基、炭素数1〜3のアルコキシ基または、炭素数1〜4のアルキルアミノ基を表す。ただし、式(1)〜(3)のそれぞれには、R1,R2および/またはR3として少なくとも一つの感光性官能基が含まれる。)
からなる群から選ばれた少なくとも二つの化合物について、それぞれX1,X2およびX3の少なくともいずれか一つを取り去り、窒素を介して互いに結合させて得られる窒素介在化合物を含む、
ケイ素含有被膜の製造方法。 - 前記窒素介在化合物が、式(4)〜(7)のいずれかで表される化合物を含む、請求項1に記載のケイ素含有被膜の製造方法。
(ここで、式(4)〜(7)中、R1,R2およびR3は、互いに独立に、水素、炭素数1〜4の脂肪族炭化水素基または、置換基を含んでいてもよい炭素数6〜8の芳香族炭化水素基または、置換基を含んでいてもよい炭素数4〜8の複素芳香族基を表し、X2およびX3は、互いに独立に、クロロ基、水酸基、炭素数1〜3のアルコキシ基または炭素数1〜4のアルキルアミノ基を表す。nは3〜5の整数を表す。ただし、式(4)〜(7)のそれぞれには、R1,R2および/またはR3として少なくとも一つの感光性官能基が含まれる。)。 - 請求項1または2に記載の方法で作製されたケイ素含有被膜。
- 請求項1または2のいずれかに記載の方法で作製されたケイ素含有被膜を含む半導体装置。
- 多層配線構造を含む、請求項4に記載の半導体装置。
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