JP5218000B2 - 基板保管供給システム - Google Patents

基板保管供給システム Download PDF

Info

Publication number
JP5218000B2
JP5218000B2 JP2008317172A JP2008317172A JP5218000B2 JP 5218000 B2 JP5218000 B2 JP 5218000B2 JP 2008317172 A JP2008317172 A JP 2008317172A JP 2008317172 A JP2008317172 A JP 2008317172A JP 5218000 B2 JP5218000 B2 JP 5218000B2
Authority
JP
Japan
Prior art keywords
cassette
substrate
axis direction
empty
receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008317172A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010137975A (ja
Inventor
賢輔 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP2008317172A priority Critical patent/JP5218000B2/ja
Priority to TW098141370A priority patent/TWI430933B/zh
Priority to CN2009102580250A priority patent/CN101746605B/zh
Priority to KR1020090122348A priority patent/KR101183043B1/ko
Publication of JP2010137975A publication Critical patent/JP2010137975A/ja
Application granted granted Critical
Publication of JP5218000B2 publication Critical patent/JP5218000B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
JP2008317172A 2008-12-12 2008-12-12 基板保管供給システム Expired - Fee Related JP5218000B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008317172A JP5218000B2 (ja) 2008-12-12 2008-12-12 基板保管供給システム
TW098141370A TWI430933B (zh) 2008-12-12 2009-12-03 Storage and supply of the substrate system
CN2009102580250A CN101746605B (zh) 2008-12-12 2009-12-09 保管及供给基板的系统
KR1020090122348A KR101183043B1 (ko) 2008-12-12 2009-12-10 기판을 보관 및 공급하는 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008317172A JP5218000B2 (ja) 2008-12-12 2008-12-12 基板保管供給システム

Publications (2)

Publication Number Publication Date
JP2010137975A JP2010137975A (ja) 2010-06-24
JP5218000B2 true JP5218000B2 (ja) 2013-06-19

Family

ID=42348454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008317172A Expired - Fee Related JP5218000B2 (ja) 2008-12-12 2008-12-12 基板保管供給システム

Country Status (4)

Country Link
JP (1) JP5218000B2 (ko)
KR (1) KR101183043B1 (ko)
CN (1) CN101746605B (ko)
TW (1) TWI430933B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104029455B (zh) * 2013-03-07 2016-12-28 营口金辰机械股份有限公司 自动上、下组件玻璃机
CN103787067B (zh) * 2014-01-23 2017-01-25 北京京东方显示技术有限公司 基板传送装置
KR101569180B1 (ko) * 2014-03-20 2015-11-16 주식회사 프로텍 자재 접착 장치
CN104129914B (zh) * 2014-07-24 2016-04-06 蓝思科技股份有限公司 弹匣式玻璃自动化上下料装置
TWI588046B (zh) * 2016-11-16 2017-06-21 盟立自動化股份有限公司 可固定卡匣的台車裝置
WO2019061461A1 (zh) * 2017-09-30 2019-04-04 贺碧先 一种瓷片上料到位检测装置
CN109693941B (zh) * 2019-01-31 2020-04-10 武汉华星光电半导体显示技术有限公司 液晶面板的传输设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09156714A (ja) * 1995-12-07 1997-06-17 Kawasaki Steel Corp 自動倉庫
JP2002167038A (ja) * 2000-11-30 2002-06-11 Ishikawajima Harima Heavy Ind Co Ltd 基板移載装置
JP4133489B2 (ja) 2003-03-24 2008-08-13 大日本スクリーン製造株式会社 基板待機装置およびそれを備えた基板処理装置
TWI224576B (en) * 2003-08-11 2004-12-01 Chi Mei Optoelectronics Corp Substrate transporting device for sequential cassette
JP2006347424A (ja) * 2005-06-17 2006-12-28 Nsk Ltd 搬送台車
JP4941627B2 (ja) 2005-06-23 2012-05-30 シンフォニアテクノロジー株式会社 ワーク収納装置
JP4840595B2 (ja) * 2007-02-20 2011-12-21 株式会社Ｉｈｉ 基板搬送機
JP4824664B2 (ja) * 2007-03-09 2011-11-30 大日本スクリーン製造株式会社 基板処理装置
JP4842897B2 (ja) * 2007-08-06 2011-12-21 株式会社シライテック 供給、搬出装置

Also Published As

Publication number Publication date
KR101183043B1 (ko) 2012-09-20
JP2010137975A (ja) 2010-06-24
CN101746605B (zh) 2012-11-21
TW201111256A (en) 2011-04-01
CN101746605A (zh) 2010-06-23
KR20100068202A (ko) 2010-06-22
TWI430933B (zh) 2014-03-21

Similar Documents

Publication Publication Date Title
JP5218000B2 (ja) 基板保管供給システム
EP2353797B1 (en) Substrate transfer robot and system
CN104245176B (zh) 板材搬送设备及使用了它的板材加工系统
JP4744425B2 (ja) 基板処理装置
JP2008213060A (ja) 多関節ロボット
EP3476772B1 (en) Conveyance system
JP5006411B2 (ja) 基板搬送装置
JPWO2007004551A1 (ja) コンテナ搬送装置及びコンテナ搬送システム
JP2010021292A (ja) 基板昇降移送装置及び基板処理移送システム
WO2015114850A1 (ja) 基板搬送システムおよび方法
KR100914378B1 (ko) 자세 변환 장치 및 기판 반송 장치
JP4891265B2 (ja) 部品供給装置
KR101394482B1 (ko) 기판 처리장치
JP4602359B2 (ja) 液晶基板の搬送装置
TWI426044B (zh) 基板處理裝置及使用於其之基板搬送裝置
JP5446896B2 (ja) 基板搬送装置
KR20180077734A (ko) 기판이송장치
JP2017120818A (ja) 製造システム
JP4416120B2 (ja) スイング式パレット交換装置
JP2010238764A (ja) 基板昇降移送装置及び基板処理移送システム
JP2009043846A (ja) 基板搬送装置
JP5115850B2 (ja) 板状ワーク垂直搬送装置
JP2007134734A5 (ko)
JP2005145713A (ja) 基板の搬送装置
JP5474328B2 (ja) 基板搬送ロボット

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20111026

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20121026

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121030

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121116

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130205

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130218

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160315

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160315

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees