JP5195419B2 - 熱処理炉 - Google Patents
熱処理炉 Download PDFInfo
- Publication number
- JP5195419B2 JP5195419B2 JP2008506283A JP2008506283A JP5195419B2 JP 5195419 B2 JP5195419 B2 JP 5195419B2 JP 2008506283 A JP2008506283 A JP 2008506283A JP 2008506283 A JP2008506283 A JP 2008506283A JP 5195419 B2 JP5195419 B2 JP 5195419B2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- insulating material
- heat treatment
- heat insulating
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims description 123
- 239000011810 insulating material Substances 0.000 claims description 119
- 238000005192 partition Methods 0.000 claims description 15
- 238000009413 insulation Methods 0.000 claims description 7
- 239000007769 metal material Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000011230 binding agent Substances 0.000 description 42
- 239000000919 ceramic Substances 0.000 description 37
- 238000010304 firing Methods 0.000 description 19
- 239000000463 material Substances 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 230000005855 radiation Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000012546 transfer Methods 0.000 description 9
- 238000005238 degreasing Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 239000012535 impurity Substances 0.000 description 7
- 238000009833 condensation Methods 0.000 description 6
- 230000005494 condensation Effects 0.000 description 6
- 229910010293 ceramic material Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 239000000567 combustion gas Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910000953 kanthal Inorganic materials 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/003—Apparatus, e.g. furnaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/638—Removal thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0041—Chamber type furnaces specially adapted for burning bricks or pottery
- F27B17/0075—Heating devices therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/0003—Linings or walls
- F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008506283A JP5195419B2 (ja) | 2006-03-23 | 2007-03-16 | 熱処理炉 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006081539 | 2006-03-23 | ||
JP2006081539 | 2006-03-23 | ||
PCT/JP2007/055410 WO2007108417A1 (ja) | 2006-03-23 | 2007-03-16 | 熱処理炉 |
JP2008506283A JP5195419B2 (ja) | 2006-03-23 | 2007-03-16 | 熱処理炉 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007108417A1 JPWO2007108417A1 (ja) | 2009-08-06 |
JP5195419B2 true JP5195419B2 (ja) | 2013-05-08 |
Family
ID=38522446
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008506283A Active JP5195419B2 (ja) | 2006-03-23 | 2007-03-16 | 熱処理炉 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8696350B2 (de) |
JP (1) | JP5195419B2 (de) |
CN (1) | CN101389914B (de) |
DE (1) | DE112007000703B4 (de) |
WO (1) | WO2007108417A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180021826A (ko) * | 2015-06-29 | 2018-03-05 | 코닝 인코포레이티드 | 제조 라인,프로세스 및 소결된 물품 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9408537B2 (en) * | 2008-11-14 | 2016-08-09 | At&T Intellectual Property I, Lp | System and method for performing a diagnostic analysis of physiological information |
KR101218852B1 (ko) * | 2010-01-05 | 2013-01-18 | 주식회사 엘지실트론 | 단결정 성장장치의 단열장치 및 이를 포함하는 단결정 성장장치 |
JP2011195371A (ja) * | 2010-03-19 | 2011-10-06 | Hitachi Zosen Corp | 熱cvd装置における断熱体 |
JP5810588B2 (ja) * | 2011-03-31 | 2015-11-11 | Dowaサーモテック株式会社 | 浸炭雰囲気炉用熱反射板及び浸炭処理方法 |
DE102011107847A1 (de) * | 2011-07-01 | 2013-01-03 | Forschungszentrum Jülich GmbH | Modulares Ofensystem |
CN102732970B (zh) * | 2012-07-16 | 2015-12-16 | 登封市蓝天石化光伏电力装备有限公司 | 一种晶体生长炉用隔热装置 |
JP6017246B2 (ja) * | 2012-09-27 | 2016-10-26 | Dowaサーモテック株式会社 | 熱処理炉 |
CN103409720B (zh) * | 2013-08-23 | 2016-02-03 | 深圳市华星光电技术有限公司 | 一种镀膜机坩埚 |
US10766165B2 (en) | 2015-06-29 | 2020-09-08 | Corning Incorporated | Manufacturing line, process, and sintered article |
US10486332B2 (en) | 2015-06-29 | 2019-11-26 | Corning Incorporated | Manufacturing system, process, article, and furnace |
JP2024509798A (ja) | 2021-03-09 | 2024-03-05 | クアンタムスケープ バッテリー,インコーポレイテッド | 高速セラミック処理技術及び装備 |
KR20240031226A (ko) * | 2021-05-10 | 2024-03-07 | 덴켄-하이덴탈 가부시키가이샤 | 소성로 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62167096U (de) * | 1986-04-10 | 1987-10-23 | ||
JPH10318681A (ja) * | 1997-05-16 | 1998-12-04 | Murata Mfg Co Ltd | 断熱カバーおよび熱処理炉 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2002241A (en) * | 1931-10-30 | 1935-05-21 | Diascope Corp Ltd | Electric furnace muffle construction |
US3026399A (en) * | 1958-11-06 | 1962-03-20 | Lighter Stephen | Food heater |
GB1027222A (en) * | 1962-05-03 | 1966-04-27 | Pilkington Brothers Ltd | Improvements in or relating to heat treatment furnaces |
US3370155A (en) * | 1964-09-08 | 1968-02-20 | Instron Corp | Environmental stress-strain test chamber |
HU166885B (de) * | 1973-11-02 | 1975-06-28 | ||
US4268708A (en) * | 1979-04-19 | 1981-05-19 | Autoclave Engineers, Inc. | Apparatus for vacuum sintering and hot isostatic pressing |
JPS62167096A (ja) | 1986-01-20 | 1987-07-23 | 前田 昌彦 | 楽譜用五線 |
CN87201904U (zh) * | 1987-02-09 | 1988-01-27 | 陈自强 | 红外全反射式工业炉 |
US4916290A (en) * | 1987-07-27 | 1990-04-10 | Hawkins Junior F | Portable oven and an improved method for heating food |
JP2553633B2 (ja) * | 1988-05-19 | 1996-11-13 | 住友電気工業株式会社 | 高温炉の断熱方法 |
CN2037835U (zh) * | 1988-08-04 | 1989-05-17 | 李芧华 | 箱式炉真空室式隔热装置 |
DE9317009U1 (de) * | 1993-04-07 | 1994-03-03 | Strassentest ACS Baustoff-Prüfsysteme Vertriebs GmbH, 63755 Alzenau | Vorrichtung zur Ermittlung des Bindemittelgehaltes einer Probe eines bituminösen Baustoffs |
JPH0721389A (ja) | 1993-07-06 | 1995-01-24 | Meidensha Corp | 図形のゆがみ補正方法と重心算定方法 |
US6021155A (en) * | 1998-02-23 | 2000-02-01 | Jones; William R. | Heat treating furnace having improved hot zone |
CN2396356Y (zh) * | 1999-05-28 | 2000-09-13 | 赵献涛 | 一种新型真空退火炉 |
JP3479020B2 (ja) * | 2000-01-28 | 2003-12-15 | 東京エレクトロン株式会社 | 熱処理装置 |
JP2002305157A (ja) * | 2000-12-28 | 2002-10-18 | Tokyo Electron Ltd | ハニカム構造断熱体及び熱再利用システム |
US6765178B2 (en) * | 2000-12-29 | 2004-07-20 | Applied Materials, Inc. | Chamber for uniform substrate heating |
US6435866B1 (en) * | 2001-02-16 | 2002-08-20 | Delphi Technologies, Inc. | Radiation furnace with independently controlled heating elements |
US6683283B2 (en) * | 2002-05-10 | 2004-01-27 | Dynisco Hot Runners Inc. Canada | Apparatus and method for heating injection molding fluid |
US7780439B2 (en) * | 2004-11-17 | 2010-08-24 | Duncan Enterprises | Kilns for the processing ceramics and methods for using such kilns |
US7312422B2 (en) * | 2006-03-17 | 2007-12-25 | Momentive Performance Materials Inc. | Semiconductor batch heating assembly |
JP5084546B2 (ja) * | 2007-02-27 | 2012-11-28 | Juki株式会社 | 動圧形流体軸受用スリーブの製造方法および動圧形流体軸受用スリーブ |
-
2007
- 2007-03-16 WO PCT/JP2007/055410 patent/WO2007108417A1/ja active Application Filing
- 2007-03-16 DE DE112007000703.6T patent/DE112007000703B4/de active Active
- 2007-03-16 CN CN2007800061677A patent/CN101389914B/zh active Active
- 2007-03-16 JP JP2008506283A patent/JP5195419B2/ja active Active
-
2008
- 2008-09-23 US US12/235,952 patent/US8696350B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62167096U (de) * | 1986-04-10 | 1987-10-23 | ||
JPH10318681A (ja) * | 1997-05-16 | 1998-12-04 | Murata Mfg Co Ltd | 断熱カバーおよび熱処理炉 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180021826A (ko) * | 2015-06-29 | 2018-03-05 | 코닝 인코포레이티드 | 제조 라인,프로세스 및 소결된 물품 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2007108417A1 (ja) | 2009-08-06 |
US20090029307A1 (en) | 2009-01-29 |
WO2007108417A1 (ja) | 2007-09-27 |
US8696350B2 (en) | 2014-04-15 |
DE112007000703T5 (de) | 2009-02-05 |
DE112007000703B4 (de) | 2015-09-24 |
CN101389914A (zh) | 2009-03-18 |
CN101389914B (zh) | 2012-07-25 |
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