JP5190303B2 - 搬送装置及び処理装置 - Google Patents
搬送装置及び処理装置 Download PDFInfo
- Publication number
- JP5190303B2 JP5190303B2 JP2008146588A JP2008146588A JP5190303B2 JP 5190303 B2 JP5190303 B2 JP 5190303B2 JP 2008146588 A JP2008146588 A JP 2008146588A JP 2008146588 A JP2008146588 A JP 2008146588A JP 5190303 B2 JP5190303 B2 JP 5190303B2
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- JP
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- Prior art date
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- 238000012545 processing Methods 0.000 title claims description 84
- 238000012546 transfer Methods 0.000 claims description 52
- 230000007246 mechanism Effects 0.000 claims description 30
- 239000000758 substrate Substances 0.000 description 59
- 230000032258 transport Effects 0.000 description 54
- 230000005540 biological transmission Effects 0.000 description 19
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 13
- 238000003860 storage Methods 0.000 description 7
- 230000007723 transport mechanism Effects 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 6
- 230000001965 increasing effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 239000003638 chemical reducing agent Substances 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Robotics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008146588A JP5190303B2 (ja) | 2008-06-04 | 2008-06-04 | 搬送装置及び処理装置 |
TW98118376A TWI469904B (zh) | 2008-06-04 | 2009-06-03 | Handling device and handling device |
KR1020090049046A KR101188487B1 (ko) | 2008-06-04 | 2009-06-03 | 반송 장치 및 처리 장치 |
CN2009101427978A CN101599449B (zh) | 2008-06-04 | 2009-06-04 | 搬送装置以及处理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008146588A JP5190303B2 (ja) | 2008-06-04 | 2008-06-04 | 搬送装置及び処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009292570A JP2009292570A (ja) | 2009-12-17 |
JP5190303B2 true JP5190303B2 (ja) | 2013-04-24 |
Family
ID=41420826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008146588A Active JP5190303B2 (ja) | 2008-06-04 | 2008-06-04 | 搬送装置及び処理装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5190303B2 (zh) |
KR (1) | KR101188487B1 (zh) |
CN (1) | CN101599449B (zh) |
TW (1) | TWI469904B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6523838B2 (ja) * | 2015-07-15 | 2019-06-05 | 東京エレクトロン株式会社 | プローブカード搬送装置、プローブカード搬送方法及びプローブ装置 |
CN105110006B (zh) * | 2015-09-10 | 2017-06-09 | 京东方科技集团股份有限公司 | 一种机械手臂及基板的转运方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3650495B2 (ja) * | 1995-12-12 | 2005-05-18 | 東京エレクトロン株式会社 | 半導体処理装置、その基板交換機構及び基板交換方法 |
TW490564B (en) * | 1999-02-01 | 2002-06-11 | Mirae Corp | A carrier handling apparatus for module IC handler, and method thereof |
JP4302575B2 (ja) * | 2003-05-30 | 2009-07-29 | 東京エレクトロン株式会社 | 基板搬送装置および真空処理装置 |
JP4319504B2 (ja) | 2003-10-06 | 2009-08-26 | 東京エレクトロン株式会社 | 基板搬送装置および基板処理システム |
JP4495509B2 (ja) * | 2004-04-30 | 2010-07-07 | 株式会社ダイヘン | トランスファロボット |
JP2007054939A (ja) * | 2005-08-26 | 2007-03-08 | Mitsubishi Electric Corp | 産業用ロボット及びその輸送方法 |
JP4754304B2 (ja) * | 2005-09-02 | 2011-08-24 | 東京エレクトロン株式会社 | 基板処理装置、ロードロック室ユニット、および搬送装置の搬出方法 |
JP2007186321A (ja) | 2006-01-16 | 2007-07-26 | Murata Mach Ltd | 板材の搬送システム |
KR101218112B1 (ko) * | 2007-12-05 | 2013-01-21 | 히라따기꼬오 가부시키가이샤 | 기판 반송 장치 및 기판 반송 장치의 제어 방법 |
-
2008
- 2008-06-04 JP JP2008146588A patent/JP5190303B2/ja active Active
-
2009
- 2009-06-03 TW TW98118376A patent/TWI469904B/zh active
- 2009-06-03 KR KR1020090049046A patent/KR101188487B1/ko active IP Right Grant
- 2009-06-04 CN CN2009101427978A patent/CN101599449B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
KR20090127082A (ko) | 2009-12-09 |
KR101188487B1 (ko) | 2012-10-05 |
JP2009292570A (ja) | 2009-12-17 |
TWI469904B (zh) | 2015-01-21 |
CN101599449A (zh) | 2009-12-09 |
CN101599449B (zh) | 2011-09-07 |
TW201012726A (en) | 2010-04-01 |
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