JP2695402C - - Google Patents
Info
- Publication number
- JP2695402C JP2695402C JP2695402C JP 2695402 C JP2695402 C JP 2695402C JP 2695402 C JP2695402 C JP 2695402C
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vacuum
- vacuum processing
- chamber
- belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 191
- 230000000875 corresponding Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 11
- 210000000282 Nails Anatomy 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 210000000078 Claw Anatomy 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 210000002381 Plasma Anatomy 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003028 elevating Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000002522 swelling Effects 0.000 description 1
Family
ID=
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