JP5148814B2 - 漏れ電流を減少させ、単位面積あたりのキャパシタンスを改善した、電界効果トランジスタおよび受動コンデンサを有する半導体装置 - Google Patents
漏れ電流を減少させ、単位面積あたりのキャパシタンスを改善した、電界効果トランジスタおよび受動コンデンサを有する半導体装置 Download PDFInfo
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0805—Capacitors only
Description
本発明は様々な変形および代替の形態をとりうるが、その特定の実施形態を例示のために図面に示し、本明細書において詳細に説明する。しかしながら、特定の実施形態についての本明細書中の説明は、開示された特定の形態に本発明を限定しようとするものではなく、むしろ反対に、添付の特許請求の範囲に規定される本発明の精神および範囲の範疇に入る、すべての変形物、均等物および代替物を含むことを意図している、ことを理解してもらいたい。
Claims (8)
- 電界効果トランジスタ素子および受動コンデンサを含む半導体装置を形成する方法であって、
分離構造によって分離された第1半導体領域と第2半導体領域とが形成された基板を提供するステップと、
コンデンサ絶縁体として用いるために、前記第1半導体領域表面に、第1誘電率を持ち、第1の厚みを持つ単一の第1高誘電率絶縁層をデポジションするステップと、
前記単一の第1高誘電率絶縁層がデポジションされた後に少なくとも前記の第1半導体領域をマスキングするステップと、
少なくとも前記単一の第1高誘電率絶縁層のマスクされていない部分を取り除くステップと、
前記単一の第1高誘電率絶縁層の露出部分上にキャップ層を形成するステップと、
前記第1高誘電率絶縁層を形成した後、かつ前記キャップ層の形成後に、前記第2半導体領域表面に、前記電界効果トランジスタのゲート絶縁層として用いられる、第2誘電率を持ち、第2の厚みを持つ単一の第2絶縁層を形成するステップと、
前記第1高誘電率絶縁層および第2絶縁層上に形成された導電材料の層をパターン化して、前記電界効果トランジスタ素子および前記受動コンデンサを作るステップと、を含み、
前記第1誘電率は前記第2誘電率よりも高く、
前記第2の厚みは前記第1の厚みよりも薄い、方法。 - 少なくとも前記単一の第1高誘電率絶縁層のマスクされていない部分を取り除くステップは、少なくとも前記単一の第1高誘電率誘電層のマスクされていない部分を選択的に異方性エッチングするステップおよび選択的に等方性エッチングするステップのうちの1つを含む、請求項1記載の方法。
- 前記単一の第2絶縁層を形成するステップは、前記基板を酸化するステップ、前記基板を高速熱酸化するステップ、および、前記単一の第2絶縁層をデポジションするステップのうちの少なくとも1つを含む、請求項1記載の方法。
- 電界効果トランジスタ素子および受動コンデンサを含む半導体装置を製造する方法であって、
分離構造を形成することによって、第1能動領域および第2能動領域を定義するステップと、
コンデンサ絶縁体として用いるために、前記第1能動領域表面上に単一の第1高誘電率絶縁層を形成するステップと、
前記単一の第1高誘電率絶縁層を形成した後、前記電界効果トランジスタのゲート絶縁層として用いられる、単一の第2絶縁層を前記第2能動領域表面に形成するステップと、を含み、
前記単一の第1高誘電率絶縁層の誘電率は前記単一の第2絶縁層のそれよりも高く、
前記単一の第2絶縁層の厚みは前記単一の第1高誘電率絶縁層の厚みよりも薄い、方法。 - 前記単一の第1高誘電率絶縁層を形成するステップは、第1誘電率を持つ材料をデポジションするステップと、前記第1誘電率を持つ材料がデポジションされた後に少なくとも前記第1半導体領域をマスキングするステップと、前記材料のマスクされていない部分を取り除くステップとを含む、請求項4記載の方法。
- 前記材料のマスクされていない部分を取り除くステップは、前記材料の前記マスクされていない部分を選択的に異方性エッチングするステップおよび選択的に等方性エッチングするステップのうちの1つを含む、請求項5記載の方法。
- 前記単一の第2絶縁層を形成するステップの前に、前記単一の第1高誘電率絶縁層の露出部分上にキャップ層を形成するステップをさらに含む、請求項4記載の方法。
- 前記単一の第2絶縁層を形成するステップは、前記基板を酸化するステップ、前記基板を高速熱酸化するステップ、および、前記単一の第2絶縁層をデポジションするステップのうちの少なくとも1つを含む、請求項4記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10240423A DE10240423B4 (de) | 2002-09-02 | 2002-09-02 | Halbleiterelement mit einem Feldeffekttransistor und einem passiven Kondensator mit reduziertem Leckstrom und einer verbesserten Kapazität pro Einheitsfläche und Verfahren zu dessen Herstellung |
DE10240423.2 | 2002-09-02 | ||
US10/403,481 US6821840B2 (en) | 2002-09-02 | 2003-03-31 | Semiconductor device including a field effect transistor and a passive capacitor having reduced leakage current and an improved capacitance per unit area |
US10/403,481 | 2003-03-31 | ||
PCT/US2003/027367 WO2004021440A1 (en) | 2002-09-02 | 2003-08-29 | Semiconductor device including a field effect transistor and a passive capacitor having reduced leakage current and an improved capacitance per unit area |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005537652A JP2005537652A (ja) | 2005-12-08 |
JP2005537652A5 JP2005537652A5 (ja) | 2007-06-07 |
JP5148814B2 true JP5148814B2 (ja) | 2013-02-20 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004532040A Expired - Lifetime JP5148814B2 (ja) | 2002-09-02 | 2003-08-29 | 漏れ電流を減少させ、単位面積あたりのキャパシタンスを改善した、電界効果トランジスタおよび受動コンデンサを有する半導体装置 |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1535332B1 (ja) |
JP (1) | JP5148814B2 (ja) |
KR (1) | KR20050057084A (ja) |
CN (1) | CN1299362C (ja) |
AU (1) | AU2003263042A1 (ja) |
WO (1) | WO2004021440A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4673589B2 (ja) * | 2004-08-16 | 2011-04-20 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP4669246B2 (ja) * | 2004-08-16 | 2011-04-13 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
WO2008083378A2 (en) * | 2007-01-01 | 2008-07-10 | Sandisk Corporation | Integrated circuits and methods with two types of decoupling capacitors |
WO2019239804A1 (ja) * | 2018-06-15 | 2019-12-19 | 株式会社村田製作所 | キャパシタおよびその製造方法 |
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JPS582071A (ja) * | 1981-06-25 | 1983-01-07 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
US4466177A (en) * | 1983-06-30 | 1984-08-21 | International Business Machines Corporation | Storage capacitor optimization for one device FET dynamic RAM cell |
JPS62118559A (ja) * | 1985-11-18 | 1987-05-29 | Nec Corp | 半導体装置 |
JPH01222469A (ja) * | 1988-03-01 | 1989-09-05 | Fujitsu Ltd | 半導体記憶装置とその製造方法 |
JPH0236559A (ja) * | 1988-07-26 | 1990-02-06 | Nec Corp | 半導体装置及びその製造方法 |
JPH0654794B2 (ja) * | 1988-11-16 | 1994-07-20 | 三洋電機株式会社 | 半導体集積回路 |
JPH02214152A (ja) * | 1989-02-15 | 1990-08-27 | Olympus Optical Co Ltd | 半導体装置及びその製造方法 |
JP2881824B2 (ja) * | 1989-07-13 | 1999-04-12 | 株式会社デンソー | 半導体装置の製造方法 |
JPH05326841A (ja) * | 1992-05-25 | 1993-12-10 | Nec Corp | 半導体装置の製造方法 |
JP3415712B2 (ja) * | 1995-09-19 | 2003-06-09 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
JPH118352A (ja) * | 1997-06-14 | 1999-01-12 | Toshiba Microelectron Corp | 半導体集積回路装置及びその製造方法 |
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JP2000174132A (ja) * | 1998-12-08 | 2000-06-23 | Matsushita Electronics Industry Corp | 半導体装置の製造方法 |
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KR20010017820A (ko) * | 1999-08-14 | 2001-03-05 | 윤종용 | 반도체 소자 및 그 제조방법 |
US6417537B1 (en) * | 2000-01-18 | 2002-07-09 | Micron Technology, Inc. | Metal oxynitride capacitor barrier layer |
US6566191B2 (en) * | 2000-12-05 | 2003-05-20 | International Business Machines Corporation | Forming electronic structures having dual dielectric thicknesses and the structure so formed |
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2003
- 2003-08-29 EP EP03791994A patent/EP1535332B1/en not_active Expired - Lifetime
- 2003-08-29 CN CNB038208407A patent/CN1299362C/zh not_active Expired - Lifetime
- 2003-08-29 JP JP2004532040A patent/JP5148814B2/ja not_active Expired - Lifetime
- 2003-08-29 AU AU2003263042A patent/AU2003263042A1/en not_active Abandoned
- 2003-08-29 WO PCT/US2003/027367 patent/WO2004021440A1/en active Application Filing
- 2003-08-29 KR KR1020057003572A patent/KR20050057084A/ko active Search and Examination
Also Published As
Publication number | Publication date |
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WO2004021440A1 (en) | 2004-03-11 |
KR20050057084A (ko) | 2005-06-16 |
EP1535332A1 (en) | 2005-06-01 |
EP1535332B1 (en) | 2012-04-11 |
CN1685511A (zh) | 2005-10-19 |
CN1299362C (zh) | 2007-02-07 |
JP2005537652A (ja) | 2005-12-08 |
AU2003263042A1 (en) | 2004-03-19 |
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