JP5143384B2 - 半導体素子の作動電圧を低下させるための構造 - Google Patents

半導体素子の作動電圧を低下させるための構造 Download PDF

Info

Publication number
JP5143384B2
JP5143384B2 JP2006221375A JP2006221375A JP5143384B2 JP 5143384 B2 JP5143384 B2 JP 5143384B2 JP 2006221375 A JP2006221375 A JP 2006221375A JP 2006221375 A JP2006221375 A JP 2006221375A JP 5143384 B2 JP5143384 B2 JP 5143384B2
Authority
JP
Japan
Prior art keywords
tunnel junction
type
layer
dopants
junction layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006221375A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007053376A (ja
JP2007053376A5 (enExample
Inventor
バージニア・エム・ロビンス
スティーブン・ディー・レスター
ジェフェリー・エヌ・ミラー
デイビッド・ボアー
Original Assignee
アバゴ・テクノロジーズ・イーシービーユー・アイピー(シンガポール)プライベート・リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アバゴ・テクノロジーズ・イーシービーユー・アイピー(シンガポール)プライベート・リミテッド filed Critical アバゴ・テクノロジーズ・イーシービーユー・アイピー(シンガポール)プライベート・リミテッド
Publication of JP2007053376A publication Critical patent/JP2007053376A/ja
Publication of JP2007053376A5 publication Critical patent/JP2007053376A5/ja
Application granted granted Critical
Publication of JP5143384B2 publication Critical patent/JP5143384B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/305Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Led Devices (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Lasers (AREA)
JP2006221375A 2005-08-15 2006-08-15 半導体素子の作動電圧を低下させるための構造 Expired - Fee Related JP5143384B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/203917 2005-08-15
US11/203,917 US7473941B2 (en) 2005-08-15 2005-08-15 Structures for reducing operating voltage in a semiconductor device

Publications (3)

Publication Number Publication Date
JP2007053376A JP2007053376A (ja) 2007-03-01
JP2007053376A5 JP2007053376A5 (enExample) 2009-09-17
JP5143384B2 true JP5143384B2 (ja) 2013-02-13

Family

ID=37398551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006221375A Expired - Fee Related JP5143384B2 (ja) 2005-08-15 2006-08-15 半導体素子の作動電圧を低下させるための構造

Country Status (7)

Country Link
US (1) US7473941B2 (enExample)
EP (1) EP1755173B1 (enExample)
JP (1) JP5143384B2 (enExample)
KR (1) KR101242933B1 (enExample)
CN (1) CN1917241B (enExample)
DE (1) DE602006004119D1 (enExample)
TW (1) TWI339447B (enExample)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070227588A1 (en) * 2006-02-15 2007-10-04 The Regents Of The University Of California Enhanced tunnel junction for improved performance in cascaded solar cells
KR100809243B1 (ko) * 2006-04-27 2008-02-29 삼성전기주식회사 질화물막 제조방법 및 질화물 구조
JP4827706B2 (ja) * 2006-12-04 2011-11-30 シャープ株式会社 窒化物半導体発光素子
DE102007003991A1 (de) * 2007-01-26 2008-07-31 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip mit einem Tunnelübergang
DE102007019079A1 (de) 2007-01-26 2008-07-31 Osram Opto Semiconductors Gmbh Verfahren zum Herstellen eines optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip
JP5148885B2 (ja) * 2007-01-30 2013-02-20 シャープ株式会社 窒化物半導体発光素子
TW200905928A (en) * 2007-03-29 2009-02-01 Univ California Dual surface-roughened N-face high-brightness LED
DE102007031926A1 (de) * 2007-07-09 2009-01-15 Osram Opto Semiconductors Gmbh Strahlungsemittierender Halbleiterkörper
WO2009009111A2 (en) * 2007-07-10 2009-01-15 The Board Of Trustees Of The Leland Stanford Junior University GaInNAsSB SOLAR CELLS GROWN BY MOLECULAR BEAM EPITAXY
DE102008028036A1 (de) * 2008-02-29 2009-09-03 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterkörper mit Tunnelübergang und Verfahren zur Herstellung eines solchen
US20100319764A1 (en) * 2009-06-23 2010-12-23 Solar Junction Corp. Functional Integration Of Dilute Nitrides Into High Efficiency III-V Solar Cells
US20110114163A1 (en) * 2009-11-18 2011-05-19 Solar Junction Corporation Multijunction solar cells formed on n-doped substrates
US20110232730A1 (en) 2010-03-29 2011-09-29 Solar Junction Corp. Lattice matchable alloy for solar cells
US9214580B2 (en) 2010-10-28 2015-12-15 Solar Junction Corporation Multi-junction solar cell with dilute nitride sub-cell having graded doping
US8962991B2 (en) 2011-02-25 2015-02-24 Solar Junction Corporation Pseudomorphic window layer for multijunction solar cells
US8766087B2 (en) 2011-05-10 2014-07-01 Solar Junction Corporation Window structure for solar cell
JP5678806B2 (ja) * 2011-06-07 2015-03-04 株式会社デンソー 半導体レーザ及びその製造方法
WO2013074530A2 (en) 2011-11-15 2013-05-23 Solar Junction Corporation High efficiency multijunction solar cells
TWI470826B (zh) * 2012-03-30 2015-01-21 Phostek Inc 發光二極體裝置
US9153724B2 (en) 2012-04-09 2015-10-06 Solar Junction Corporation Reverse heterojunctions for solar cells
IL225872A (en) * 2013-04-22 2015-03-31 Semi Conductor Devices An Elbit Systems Rafael Partnership Photo detector semi-conductor with barrier
TWI597862B (zh) * 2013-08-30 2017-09-01 晶元光電股份有限公司 具阻障層的光電半導體元件
EP3761375A1 (en) 2014-02-05 2021-01-06 Array Photonics, Inc. Monolithic multijunction power converter
JP6462456B2 (ja) * 2015-03-31 2019-01-30 ルネサスエレクトロニクス株式会社 半導体装置および半導体装置の製造方法
US20170110613A1 (en) 2015-10-19 2017-04-20 Solar Junction Corporation High efficiency multijunction photovoltaic cells
JP6708442B2 (ja) * 2016-03-01 2020-06-10 学校法人 名城大学 窒化物半導体発光素子
TWI617048B (zh) * 2016-06-29 2018-03-01 光鋐科技股份有限公司 具有穿隧接合層的磊晶結構、p型半導體結構朝上的製程中間結構及其製造方法
US10930808B2 (en) 2017-07-06 2021-02-23 Array Photonics, Inc. Hybrid MOCVD/MBE epitaxial growth of high-efficiency lattice-matched multijunction solar cells
CN107482091B (zh) 2017-07-25 2019-10-22 天津三安光电有限公司 一种用于多结led的隧穿结、多结led及其制备方法
WO2019067553A1 (en) 2017-09-27 2019-04-04 Solar Junction Corporation SHORT-LENGTH WAVELENGTH INFRARED OPTOELECTRONIC DEVICES HAVING DILUTED NITRIDE LAYER
JP6964875B2 (ja) * 2017-11-10 2021-11-10 学校法人 名城大学 窒化物半導体発光素子の製造方法
JP7169613B2 (ja) * 2017-11-10 2022-11-11 学校法人 名城大学 窒化物半導体発光素子の製造方法
EP3939085A1 (en) 2019-03-11 2022-01-19 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having graded or stepped dilute nitride active regions
KR102253285B1 (ko) * 2019-10-10 2021-05-18 (주)큐에스아이 반도체 레이저 다이오드 소자 및 그 제조 방법
JP7481618B2 (ja) 2020-03-30 2024-05-13 日亜化学工業株式会社 窒化物半導体素子の製造方法
CN112103352B (zh) * 2020-09-18 2022-02-01 苏州长光华芯光电技术股份有限公司 一种半导体器件及其制造方法
WO2024237161A1 (ja) * 2023-05-12 2024-11-21 住友電気工業株式会社 半導体積層体および光半導体素子

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131904A (en) * 1977-06-29 1978-12-26 Rca Corporation Degradation resistance of semiconductor electroluminescent devices
US4223336A (en) * 1978-03-14 1980-09-16 Microwave Semiconductor Corp. Low resistivity ohmic contacts for compound semiconductor devices
JPH01194379A (ja) 1988-01-29 1989-08-04 Toshiba Corp 可視光発光素子
JP3504976B2 (ja) 1994-08-26 2004-03-08 ローム株式会社 半導体発光素子
US5825052A (en) * 1994-08-26 1998-10-20 Rohm Co., Ltd. Semiconductor light emmitting device
JP3461112B2 (ja) 1997-12-19 2003-10-27 昭和電工株式会社 Iii族窒化物半導体発光素子
US6657300B2 (en) 1998-06-05 2003-12-02 Lumileds Lighting U.S., Llc Formation of ohmic contacts in III-nitride light emitting devices
US6375923B1 (en) 1999-06-24 2002-04-23 Altair Nanomaterials Inc. Processing titaniferous ore to titanium dioxide pigment
TW515116B (en) * 2001-12-27 2002-12-21 South Epitaxy Corp Light emitting diode structure
US6878975B2 (en) * 2002-02-08 2005-04-12 Agilent Technologies, Inc. Polarization field enhanced tunnel structures
US6765238B2 (en) * 2002-09-12 2004-07-20 Agilent Technologies, Inc. Material systems for semiconductor tunnel-junction structures
DE10329079B4 (de) 2003-06-27 2014-10-23 Osram Opto Semiconductors Gmbh Strahlungsemittierendes Halbleiterbauelement
JP2005123476A (ja) 2003-10-17 2005-05-12 Sharp Corp 半導体レーザ素子とその製造方法
KR20050093319A (ko) * 2004-03-18 2005-09-23 삼성전기주식회사 발광효율이 개선된 질화물 반도체 발광소자 및 그 제조방법

Also Published As

Publication number Publication date
JP2007053376A (ja) 2007-03-01
EP1755173B1 (en) 2008-12-10
KR20070020347A (ko) 2007-02-21
KR101242933B1 (ko) 2013-03-12
TW200715616A (en) 2007-04-16
US7473941B2 (en) 2009-01-06
EP1755173A2 (en) 2007-02-21
CN1917241A (zh) 2007-02-21
DE602006004119D1 (de) 2009-01-22
US20070034853A1 (en) 2007-02-15
CN1917241B (zh) 2010-10-06
TWI339447B (en) 2011-03-21
EP1755173A3 (en) 2007-06-20

Similar Documents

Publication Publication Date Title
JP5143384B2 (ja) 半導体素子の作動電圧を低下させるための構造
KR102494071B1 (ko) 발광 소자 및 그것을 제조하는 방법
US6720570B2 (en) Gallium nitride-based semiconductor light emitting device
EP1881535B1 (en) Nitride based semiconductor element and method for fabricating the same
US20130270514A1 (en) Low resistance bidirectional junctions in wide bandgap semiconductor materials
US20080118999A1 (en) Method of fabricating a nitride semiconductor light emitting device
US20120313109A1 (en) Nitride Semiconductor Light Emitting Device and Fabrication Method Thereof
US20140225059A1 (en) LED with Improved Injection Efficiency
US20120007048A1 (en) III-Nitride Based Semiconductor Structure with Multiple Conductive Tunneling Layer
US20150311290A1 (en) Epitaxial wafer and switch element and light-emitting element using same
US9362445B2 (en) Light-emitting device
US9806223B2 (en) Optoelectronic semiconductor chip and method for the production thereof
US20150001560A1 (en) Light emitting devices
US7786550B2 (en) P-type semiconductor and semiconductor hetero material and manufacturing methods thereof
KR20150036513A (ko) Iii-질화물 구조체들에서의 나노파이프 결함들의 감소 또는 제거
US7015515B2 (en) Group III nitride compound semiconductor device having a superlattice structure
KR20140094807A (ko) 발광소자
JP2015170792A (ja) 半導体発光素子および半導体発光素子の製造方法ならびに半導体素子
KR102359845B1 (ko) 발광 소자 및 그것을 제조하는 방법
US20100176373A1 (en) Fabrication method of nitride semiconductor light emitting device and nitride semiconductor light emitting device thereby
KR20120029215A (ko) 반도체 발광소자 및 이를 제조하는 방법
KR20160022032A (ko) n형 질화물 반도체층의 성장 방법, 발광 다이오드 및 그 제조 방법
RU2306634C1 (ru) Полупроводниковая светоизлучающая гетероструктура

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090804

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090804

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111213

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120312

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120724

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121012

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20121023

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121121

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151130

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

LAPS Cancellation because of no payment of annual fees