CN1917241B - 一种光发射器件 - Google Patents
一种光发射器件 Download PDFInfo
- Publication number
- CN1917241B CN1917241B CN2006101095818A CN200610109581A CN1917241B CN 1917241 B CN1917241 B CN 1917241B CN 2006101095818 A CN2006101095818 A CN 2006101095818A CN 200610109581 A CN200610109581 A CN 200610109581A CN 1917241 B CN1917241 B CN 1917241B
- Authority
- CN
- China
- Prior art keywords
- tunnel junction
- junction layer
- type tunnel
- layer
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 claims abstract description 125
- 229910045601 alloy Inorganic materials 0.000 claims description 82
- 239000000956 alloy Substances 0.000 claims description 82
- 239000004065 semiconductor Substances 0.000 claims description 70
- 239000011777 magnesium Substances 0.000 claims description 36
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 35
- 229910052749 magnesium Inorganic materials 0.000 claims description 35
- 230000000694 effects Effects 0.000 claims description 31
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 26
- 239000011701 zinc Substances 0.000 claims description 26
- 229910052725 zinc Inorganic materials 0.000 claims description 26
- 230000002950 deficient Effects 0.000 claims description 18
- 239000011575 calcium Substances 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 11
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 11
- 239000011135 tin Substances 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 229910052790 beryllium Inorganic materials 0.000 claims description 9
- 229910052791 calcium Inorganic materials 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 8
- 239000005864 Sulphur Substances 0.000 claims description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 229910052793 cadmium Inorganic materials 0.000 claims description 8
- 239000011669 selenium Substances 0.000 claims description 8
- 229910052714 tellurium Inorganic materials 0.000 claims description 8
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 8
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 5
- 229910052711 selenium Inorganic materials 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 2
- 239000002019 doping agent Substances 0.000 abstract 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical group [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 28
- 229910002601 GaN Inorganic materials 0.000 description 27
- 238000000034 method Methods 0.000 description 18
- 230000005693 optoelectronics Effects 0.000 description 18
- 238000010586 diagram Methods 0.000 description 16
- 239000000203 mixture Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 230000005641 tunneling Effects 0.000 description 6
- 230000004913 activation Effects 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 238000001451 molecular beam epitaxy Methods 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 229910000952 Be alloy Inorganic materials 0.000 description 3
- 229910000882 Ca alloy Inorganic materials 0.000 description 3
- 229910000925 Cd alloy Inorganic materials 0.000 description 3
- 229910000861 Mg alloy Inorganic materials 0.000 description 3
- 229910001370 Se alloy Inorganic materials 0.000 description 3
- 229910001297 Zn alloy Inorganic materials 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- UPBXZSPHDQYPDY-UHFFFAOYSA-N arsanylidyneerbium Chemical compound [Er]#[As] UPBXZSPHDQYPDY-UHFFFAOYSA-N 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- -1 diethyl tellurides Chemical class 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- VQNPSCRXHSIJTH-UHFFFAOYSA-N cadmium(2+);carbanide Chemical compound [CH3-].[CH3-].[Cd+2] VQNPSCRXHSIJTH-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- HQWPLXHWEZZGKY-UHFFFAOYSA-N diethylzinc Chemical compound CC[Zn]CC HQWPLXHWEZZGKY-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- LGRLWUINFJPLSH-UHFFFAOYSA-N methanide Chemical compound [CH3-] LGRLWUINFJPLSH-UHFFFAOYSA-N 0.000 description 1
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 1
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 description 1
- 229910000058 selane Inorganic materials 0.000 description 1
- RWWNQEOPUOCKGR-UHFFFAOYSA-N tetraethyltin Chemical compound CC[Sn](CC)(CC)CC RWWNQEOPUOCKGR-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Led Devices (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/203,917 US7473941B2 (en) | 2005-08-15 | 2005-08-15 | Structures for reducing operating voltage in a semiconductor device |
| US11/203,917 | 2005-08-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1917241A CN1917241A (zh) | 2007-02-21 |
| CN1917241B true CN1917241B (zh) | 2010-10-06 |
Family
ID=37398551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006101095818A Expired - Fee Related CN1917241B (zh) | 2005-08-15 | 2006-08-14 | 一种光发射器件 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7473941B2 (enExample) |
| EP (1) | EP1755173B1 (enExample) |
| JP (1) | JP5143384B2 (enExample) |
| KR (1) | KR101242933B1 (enExample) |
| CN (1) | CN1917241B (enExample) |
| DE (1) | DE602006004119D1 (enExample) |
| TW (1) | TWI339447B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11011674B2 (en) | 2017-07-25 | 2021-05-18 | Xiamen San'an Optoelectronics Co., Ltd. | Multi-layered tunnel junction structure, light emitting device having the same, and production method of such device |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070227588A1 (en) * | 2006-02-15 | 2007-10-04 | The Regents Of The University Of California | Enhanced tunnel junction for improved performance in cascaded solar cells |
| KR100809243B1 (ko) * | 2006-04-27 | 2008-02-29 | 삼성전기주식회사 | 질화물막 제조방법 및 질화물 구조 |
| JP4827706B2 (ja) * | 2006-12-04 | 2011-11-30 | シャープ株式会社 | 窒化物半導体発光素子 |
| DE102007003991A1 (de) * | 2007-01-26 | 2008-07-31 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterchip mit einem Tunnelübergang |
| DE102007019079A1 (de) | 2007-01-26 | 2008-07-31 | Osram Opto Semiconductors Gmbh | Verfahren zum Herstellen eines optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip |
| JP5148885B2 (ja) * | 2007-01-30 | 2013-02-20 | シャープ株式会社 | 窒化物半導体発光素子 |
| TW200905928A (en) * | 2007-03-29 | 2009-02-01 | Univ California | Dual surface-roughened N-face high-brightness LED |
| DE102007031926A1 (de) * | 2007-07-09 | 2009-01-15 | Osram Opto Semiconductors Gmbh | Strahlungsemittierender Halbleiterkörper |
| WO2009009111A2 (en) * | 2007-07-10 | 2009-01-15 | The Board Of Trustees Of The Leland Stanford Junior University | GaInNAsSB SOLAR CELLS GROWN BY MOLECULAR BEAM EPITAXY |
| DE102008028036A1 (de) * | 2008-02-29 | 2009-09-03 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterkörper mit Tunnelübergang und Verfahren zur Herstellung eines solchen |
| US20100319764A1 (en) * | 2009-06-23 | 2010-12-23 | Solar Junction Corp. | Functional Integration Of Dilute Nitrides Into High Efficiency III-V Solar Cells |
| US20110114163A1 (en) * | 2009-11-18 | 2011-05-19 | Solar Junction Corporation | Multijunction solar cells formed on n-doped substrates |
| US20110232730A1 (en) | 2010-03-29 | 2011-09-29 | Solar Junction Corp. | Lattice matchable alloy for solar cells |
| US9214580B2 (en) | 2010-10-28 | 2015-12-15 | Solar Junction Corporation | Multi-junction solar cell with dilute nitride sub-cell having graded doping |
| US8962991B2 (en) | 2011-02-25 | 2015-02-24 | Solar Junction Corporation | Pseudomorphic window layer for multijunction solar cells |
| US8766087B2 (en) | 2011-05-10 | 2014-07-01 | Solar Junction Corporation | Window structure for solar cell |
| JP5678806B2 (ja) * | 2011-06-07 | 2015-03-04 | 株式会社デンソー | 半導体レーザ及びその製造方法 |
| WO2013074530A2 (en) | 2011-11-15 | 2013-05-23 | Solar Junction Corporation | High efficiency multijunction solar cells |
| TWI470826B (zh) * | 2012-03-30 | 2015-01-21 | Phostek Inc | 發光二極體裝置 |
| US9153724B2 (en) | 2012-04-09 | 2015-10-06 | Solar Junction Corporation | Reverse heterojunctions for solar cells |
| IL225872A (en) * | 2013-04-22 | 2015-03-31 | Semi Conductor Devices An Elbit Systems Rafael Partnership | Photo detector semi-conductor with barrier |
| TWI597862B (zh) * | 2013-08-30 | 2017-09-01 | 晶元光電股份有限公司 | 具阻障層的光電半導體元件 |
| EP3761375A1 (en) | 2014-02-05 | 2021-01-06 | Array Photonics, Inc. | Monolithic multijunction power converter |
| JP6462456B2 (ja) * | 2015-03-31 | 2019-01-30 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
| US20170110613A1 (en) | 2015-10-19 | 2017-04-20 | Solar Junction Corporation | High efficiency multijunction photovoltaic cells |
| JP6708442B2 (ja) * | 2016-03-01 | 2020-06-10 | 学校法人 名城大学 | 窒化物半導体発光素子 |
| TWI617048B (zh) * | 2016-06-29 | 2018-03-01 | 光鋐科技股份有限公司 | 具有穿隧接合層的磊晶結構、p型半導體結構朝上的製程中間結構及其製造方法 |
| US10930808B2 (en) | 2017-07-06 | 2021-02-23 | Array Photonics, Inc. | Hybrid MOCVD/MBE epitaxial growth of high-efficiency lattice-matched multijunction solar cells |
| WO2019067553A1 (en) | 2017-09-27 | 2019-04-04 | Solar Junction Corporation | SHORT-LENGTH WAVELENGTH INFRARED OPTOELECTRONIC DEVICES HAVING DILUTED NITRIDE LAYER |
| JP6964875B2 (ja) * | 2017-11-10 | 2021-11-10 | 学校法人 名城大学 | 窒化物半導体発光素子の製造方法 |
| JP7169613B2 (ja) * | 2017-11-10 | 2022-11-11 | 学校法人 名城大学 | 窒化物半導体発光素子の製造方法 |
| EP3939085A1 (en) | 2019-03-11 | 2022-01-19 | Array Photonics, Inc. | Short wavelength infrared optoelectronic devices having graded or stepped dilute nitride active regions |
| KR102253285B1 (ko) * | 2019-10-10 | 2021-05-18 | (주)큐에스아이 | 반도체 레이저 다이오드 소자 및 그 제조 방법 |
| JP7481618B2 (ja) | 2020-03-30 | 2024-05-13 | 日亜化学工業株式会社 | 窒化物半導体素子の製造方法 |
| CN112103352B (zh) * | 2020-09-18 | 2022-02-01 | 苏州长光华芯光电技术股份有限公司 | 一种半导体器件及其制造方法 |
| WO2024237161A1 (ja) * | 2023-05-12 | 2024-11-21 | 住友電気工業株式会社 | 半導体積層体および光半導体素子 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5825052A (en) * | 1994-08-26 | 1998-10-20 | Rohm Co., Ltd. | Semiconductor light emmitting device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US4131904A (en) * | 1977-06-29 | 1978-12-26 | Rca Corporation | Degradation resistance of semiconductor electroluminescent devices |
| US4223336A (en) * | 1978-03-14 | 1980-09-16 | Microwave Semiconductor Corp. | Low resistivity ohmic contacts for compound semiconductor devices |
| JPH01194379A (ja) | 1988-01-29 | 1989-08-04 | Toshiba Corp | 可視光発光素子 |
| JP3504976B2 (ja) | 1994-08-26 | 2004-03-08 | ローム株式会社 | 半導体発光素子 |
| JP3461112B2 (ja) | 1997-12-19 | 2003-10-27 | 昭和電工株式会社 | Iii族窒化物半導体発光素子 |
| US6657300B2 (en) | 1998-06-05 | 2003-12-02 | Lumileds Lighting U.S., Llc | Formation of ohmic contacts in III-nitride light emitting devices |
| US6375923B1 (en) | 1999-06-24 | 2002-04-23 | Altair Nanomaterials Inc. | Processing titaniferous ore to titanium dioxide pigment |
| TW515116B (en) * | 2001-12-27 | 2002-12-21 | South Epitaxy Corp | Light emitting diode structure |
| US6878975B2 (en) * | 2002-02-08 | 2005-04-12 | Agilent Technologies, Inc. | Polarization field enhanced tunnel structures |
| US6765238B2 (en) * | 2002-09-12 | 2004-07-20 | Agilent Technologies, Inc. | Material systems for semiconductor tunnel-junction structures |
| DE10329079B4 (de) | 2003-06-27 | 2014-10-23 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Halbleiterbauelement |
| JP2005123476A (ja) | 2003-10-17 | 2005-05-12 | Sharp Corp | 半導体レーザ素子とその製造方法 |
| KR20050093319A (ko) * | 2004-03-18 | 2005-09-23 | 삼성전기주식회사 | 발광효율이 개선된 질화물 반도체 발광소자 및 그 제조방법 |
-
2005
- 2005-08-15 US US11/203,917 patent/US7473941B2/en not_active Expired - Fee Related
-
2006
- 2006-08-04 TW TW095128650A patent/TWI339447B/zh not_active IP Right Cessation
- 2006-08-08 DE DE602006004119T patent/DE602006004119D1/de active Active
- 2006-08-08 EP EP06016546A patent/EP1755173B1/en not_active Not-in-force
- 2006-08-14 KR KR1020060076549A patent/KR101242933B1/ko not_active Expired - Fee Related
- 2006-08-14 CN CN2006101095818A patent/CN1917241B/zh not_active Expired - Fee Related
- 2006-08-15 JP JP2006221375A patent/JP5143384B2/ja not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5825052A (en) * | 1994-08-26 | 1998-10-20 | Rohm Co., Ltd. | Semiconductor light emmitting device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11011674B2 (en) | 2017-07-25 | 2021-05-18 | Xiamen San'an Optoelectronics Co., Ltd. | Multi-layered tunnel junction structure, light emitting device having the same, and production method of such device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007053376A (ja) | 2007-03-01 |
| EP1755173B1 (en) | 2008-12-10 |
| KR20070020347A (ko) | 2007-02-21 |
| KR101242933B1 (ko) | 2013-03-12 |
| TW200715616A (en) | 2007-04-16 |
| US7473941B2 (en) | 2009-01-06 |
| EP1755173A2 (en) | 2007-02-21 |
| CN1917241A (zh) | 2007-02-21 |
| DE602006004119D1 (de) | 2009-01-22 |
| US20070034853A1 (en) | 2007-02-15 |
| TWI339447B (en) | 2011-03-21 |
| JP5143384B2 (ja) | 2013-02-13 |
| EP1755173A3 (en) | 2007-06-20 |
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