JP5135164B2 - ボンディング方法 - Google Patents
ボンディング方法 Download PDFInfo
- Publication number
- JP5135164B2 JP5135164B2 JP2008272414A JP2008272414A JP5135164B2 JP 5135164 B2 JP5135164 B2 JP 5135164B2 JP 2008272414 A JP2008272414 A JP 2008272414A JP 2008272414 A JP2008272414 A JP 2008272414A JP 5135164 B2 JP5135164 B2 JP 5135164B2
- Authority
- JP
- Japan
- Prior art keywords
- pressing load
- output power
- load
- vibration
- electrode pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 29
- 238000003825 pressing Methods 0.000 claims description 105
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 18
- 229910052802 copper Inorganic materials 0.000 claims description 18
- 239000010949 copper Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 description 12
- 230000008859 change Effects 0.000 description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 230000000630 rising effect Effects 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- 230000007704 transition Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000027455 binding Effects 0.000 description 1
- 238000009739 binding Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
- B23K20/005—Capillary welding
- B23K20/007—Ball bonding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
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- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
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- Engineering & Computer Science (AREA)
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- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
Description
また、本発明の他の一態様によれば、銅を含む金属体を被接合体に対して押圧しつつ前記金属体に振動を印加して、前記金属体を前記被接合体に接合させるボンディング方法であって、前記金属体に振動を印加し、その振動が印加された状態のまま前記金属体を前記被接合体に接触させるステップと、前記被接合体に対する前記金属体の押圧荷重を徐々に増大させていき第1の押圧荷重にするステップと、前記押圧荷重が前記第1の押圧荷重に達した後、前記押圧荷重を前記第1の押圧荷重よりも小さい第2の押圧荷重にすると同時または前記第2の押圧荷重にした後に前記振動の印加を一旦停止し、前記振動の印加を一旦停止した後、徐々に前記振動の出力パワーを増大させていき、前記第1の押圧荷重のときに印加されていた第1の出力パワーよりも大きな第2の出力パワーにするステップと、を有することを特徴とするボンディング方法が提供される。
ここで、図1(a)は、キャピラリ20の上下方向の位置の時間変位を表す。図1(a)における直線の傾きが大きいほど、キャピラリ20の下降または上昇の速度が大きい。図1(b)は、被接合体である電極パッド(例えばアルミニウムからなる)11に対するボール部22の押圧荷重(電極パッド11がボール部22から受ける実荷重)の時間変化を表す。ボール部22にはキャピラリ20を介して押圧力が与えられる。図1(c)は、ボール部22(またはボール部22と電極パッド11との圧着面)での超音波振動の出力パワー(または振幅)の時間変化を表す。
図8(a)は、比較例におけるキャピラリ20の上下方向の位置の時間変位を表す。図8(b)は、比較例における電極パッド11に対するボール部22の押圧荷重(電極パッド11がボール部22から受ける実荷重)の時間変化を表す。図8(c)は、ボール部22(またはボール部22と電極パッド11との押圧面)での超音波振動の出力パワー(または振幅)の時間変化を表す。また、各時間t1、t2、t3におけるボール部22の状態をそれぞれ図8(d)、(e)、(f)に模式的に示す。
Claims (5)
- 銅を含む金属体を被接合体に対して押圧しつつ前記金属体に振動を印加して、前記金属体を前記被接合体に接合させるボンディング方法であって、
前記金属体に振動を印加し、その振動が印加された状態のまま前記金属体を前記被接合体に接触させるステップと、
前記被接合体に対する前記金属体の押圧荷重を徐々に増大させていき第1の押圧荷重にするステップと、
前記押圧荷重が前記第1の押圧荷重に達した後、前記押圧荷重を前記第1の押圧荷重よりも小さい第2の押圧荷重にすると同時または前記第2の押圧荷重にした後に、前記振動の出力パワーを、前記第1の押圧荷重のときに印加されていた第1の出力パワーより徐々に増大させていき第2の出力パワーにするステップと、
を有することを特徴とするボンディング方法。 - 銅を含む金属体を被接合体に対して押圧しつつ前記金属体に振動を印加して、前記金属体を前記被接合体に接合させるボンディング方法であって、
前記金属体に振動を印加し、その振動が印加された状態のまま前記金属体を前記被接合体に接触させるステップと、
前記被接合体に対する前記金属体の押圧荷重を徐々に増大させていき第1の押圧荷重にするステップと、
前記押圧荷重が前記第1の押圧荷重に達した後、前記押圧荷重を前記第1の押圧荷重よりも小さい第2の押圧荷重にすると同時または前記第2の押圧荷重にした後に前記振動の印加を一旦停止し、前記振動の印加を一旦停止した後、徐々に前記振動の出力パワーを増大させていき、前記第1の押圧荷重のときに印加されていた第1の出力パワーよりも大きな第2の出力パワーにするステップと、
を有することを特徴とするボンディング方法。 - 前記押圧荷重を前記第1の押圧荷重から前記第2の押圧荷重に低下させた後に、前記振動の出力パワーを前記第1の出力パワーから徐々に低下させて前記振動の印加を一旦停止する請求項2記載のンディング方法。
- 前記第2の押圧荷重の大きさは、0より大きく且つ前記第1の押圧荷重の大きさの1/2以下であることを特徴とする請求項1〜3のいずれか1つに記載のボンディング方法。
- 前記金属体は、ワイヤの端部に形成されたボール部であることを特徴とする請求項1〜4のいずれか1つに記載のボンディング方法。
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US12/556,918 US8308049B2 (en) | 2008-10-22 | 2009-09-10 | Wire bonding method |
TW098134959A TWI424511B (zh) | 2008-10-22 | 2009-10-15 | 結合方法 |
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JP2012138476A (ja) * | 2010-12-27 | 2012-07-19 | Renesas Electronics Corp | 半導体装置の製造方法 |
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US8907485B2 (en) * | 2012-08-24 | 2014-12-09 | Freescale Semiconductor, Inc. | Copper ball bond features and structure |
JP6810222B2 (ja) * | 2014-07-11 | 2021-01-06 | ローム株式会社 | 電子装置 |
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US11517977B2 (en) * | 2017-09-15 | 2022-12-06 | Tech-Sonic, Inc. | Dual cam servo weld splicer |
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