JP5059705B2 - 発光デバイス - Google Patents
発光デバイス Download PDFInfo
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- JP5059705B2 JP5059705B2 JP2008182592A JP2008182592A JP5059705B2 JP 5059705 B2 JP5059705 B2 JP 5059705B2 JP 2008182592 A JP2008182592 A JP 2008182592A JP 2008182592 A JP2008182592 A JP 2008182592A JP 5059705 B2 JP5059705 B2 JP 5059705B2
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- 3dpg
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- emitting device
- light emitting
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- 239000000463 material Substances 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 31
- 230000010287 polarization Effects 0.000 claims description 30
- 239000013078 crystal Substances 0.000 claims description 24
- 125000006850 spacer group Chemical group 0.000 claims description 16
- 239000012535 impurity Substances 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 220
- 238000005094 computer simulation Methods 0.000 description 23
- 238000000034 method Methods 0.000 description 12
- 239000000969 carrier Substances 0.000 description 10
- 238000009826 distribution Methods 0.000 description 10
- 150000004767 nitrides Chemical class 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000007480 spreading Effects 0.000 description 5
- 238000003892 spreading Methods 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000006798 recombination Effects 0.000 description 4
- 238000005215 recombination Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000002269 spontaneous effect Effects 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- -1 for example Chemical class 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 238000001534 heteroepitaxy Methods 0.000 description 1
- 238000003331 infrared imaging Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Description
Rs≡Rc(n)+Rc(p)+Rb(n)+Rb(p)
ここで、Rc(n)及びRc(p)は、それぞれnコンタクト及びpコンタクトの接触抵抗を表し、Rb(n)及びRb(p)は、それぞれn型エピタキシャル層およびp型エピタキシャル層のバルク抵抗を表す。例えば、約460nmのGaNのLEDは2.7eVのバンドギャップを持つ。損失のない系であれば、LEDも2.7eVの動作電圧を持つであろう。しかしながら、現実には、直列抵抗に寄与する各成分に関する電圧ペナルティ(penalty)が存在する。この電圧ペナルティは公称のバンドギャップ電圧を超える「過剰電圧」として記述できる。このように、各成分の直列抵抗を低減することにより過剰電圧は低減することができ、その結果、デバイスの電力効率とLED内の横方向電流拡がりにおいて大きな改善が図られる。
Claims (8)
- n型半導体層と、
p型半導体層と、
前記n型半導体層と前記p型半導体層との間に挟まれた活性領域と、
前記活性領域とは反対側の前記n型半導体層の面側に配置された3次元分極傾斜(3DPG)構造と
を備え、
前記3次元分極傾斜(3DPG)構造は、少なくとも一つの繰り返し可能な積層単位および最終層を備え、前記少なくとも1つの繰り返し可能な積層単位は前記n型半導体層と前記最終層との間に挟まれており、
前記繰り返し可能な積層単位は、組成が後方傾斜しており、もしくは第1の材料から第2の材料へ傾斜距離にわたって組成が傾斜しており、かつ、前記n型半導体層に隣接して配置されている後方傾斜層と、前記後方傾斜層に近接して前記n型半導体層の反対側に配置されたシリコン(Si)デルタ・ドープ層とを備え、
前記最終層は前記後方傾斜層と同じ構造の層である
ことを特徴とする発光デバイス。 - 前記3次元分極傾斜(3DPG)構造は、ウルツァイト型結晶構造を有し、[0001]結晶方向に沿って成長されることを特徴とする請求項1に記載の発光デバイス。
- 前記後方傾斜層は、直線状の組成傾斜を有することを特徴とする請求項1または2に記載の発光デバイス。
- 前記後方傾斜層は、非直線状の組成傾斜を有することを特徴とする請求項1から3のいずれか一項に記載の発光デバイス。
- 前記繰り返し可能な積層単位は、前記シリコン(Si)デルタ・ドープ層に隣接して前記後方傾斜層の反対側に配置されたn型スペーサ層を更に備えることを特徴とする請求項1から4のいずれか一項に記載の発光デバイス。
- 前記繰り返し可能な積層単位は、前記3次元分極傾斜(3DPG)構造内で15から20回繰り返されることを特徴とする請求項1から5のいずれか一項に記載の発光デバイス。
- 前記3次元分極傾斜(3DPG)構造は、ウルツァイト型結晶構造を有し、[000−1]結晶方向に沿って成長されることを特徴とする請求項1から6のいずれか一項に記載の発光デバイス。
- 前記後方傾斜層は不純物材料でドープされていないことを特徴とする請求項1から7のいずれか一項に記載の発光デバイス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/900,952 US8519437B2 (en) | 2007-09-14 | 2007-09-14 | Polarization doping in nitride based diodes |
US11/900,952 | 2007-09-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009071277A JP2009071277A (ja) | 2009-04-02 |
JP5059705B2 true JP5059705B2 (ja) | 2012-10-31 |
Family
ID=39739654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008182592A Active JP5059705B2 (ja) | 2007-09-14 | 2008-07-14 | 発光デバイス |
Country Status (3)
Country | Link |
---|---|
US (2) | US8519437B2 (ja) |
EP (1) | EP2037509B1 (ja) |
JP (1) | JP5059705B2 (ja) |
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2007
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2008
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EP2037509B1 (en) | 2017-06-07 |
US20090072254A1 (en) | 2009-03-19 |
EP2037509A1 (en) | 2009-03-18 |
JP2009071277A (ja) | 2009-04-02 |
US8519437B2 (en) | 2013-08-27 |
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