JP5008424B2 - 振動子の製造方法 - Google Patents

振動子の製造方法 Download PDF

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Publication number
JP5008424B2
JP5008424B2 JP2007054469A JP2007054469A JP5008424B2 JP 5008424 B2 JP5008424 B2 JP 5008424B2 JP 2007054469 A JP2007054469 A JP 2007054469A JP 2007054469 A JP2007054469 A JP 2007054469A JP 5008424 B2 JP5008424 B2 JP 5008424B2
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JP
Japan
Prior art keywords
leg
axis
vibration
vibrator
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007054469A
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English (en)
Japanese (ja)
Other versions
JP2007279022A5 (enExample
JP2007279022A (ja
Inventor
泉 山本
卓 森谷
池田　　智夫
村上　　淳
明弘 塩路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Original Assignee
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Holdings Co Ltd, Citizen Watch Co Ltd filed Critical Citizen Holdings Co Ltd
Priority to JP2007054469A priority Critical patent/JP5008424B2/ja
Priority to US11/716,662 priority patent/US7637159B2/en
Publication of JP2007279022A publication Critical patent/JP2007279022A/ja
Publication of JP2007279022A5 publication Critical patent/JP2007279022A5/ja
Application granted granted Critical
Publication of JP5008424B2 publication Critical patent/JP5008424B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/4984—Retaining clearance for motion between assembled parts

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2007054469A 2006-03-14 2007-03-05 振動子の製造方法 Expired - Fee Related JP5008424B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007054469A JP5008424B2 (ja) 2006-03-14 2007-03-05 振動子の製造方法
US11/716,662 US7637159B2 (en) 2006-03-14 2007-03-12 Vibration gyro and the process of producing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006069234 2006-03-14
JP2006069234 2006-03-14
JP2007054469A JP5008424B2 (ja) 2006-03-14 2007-03-05 振動子の製造方法

Publications (3)

Publication Number Publication Date
JP2007279022A JP2007279022A (ja) 2007-10-25
JP2007279022A5 JP2007279022A5 (enExample) 2010-04-15
JP5008424B2 true JP5008424B2 (ja) 2012-08-22

Family

ID=38680598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007054469A Expired - Fee Related JP5008424B2 (ja) 2006-03-14 2007-03-05 振動子の製造方法

Country Status (2)

Country Link
US (1) US7637159B2 (enExample)
JP (1) JP5008424B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7946173B2 (en) * 2005-11-08 2011-05-24 Panasonic Corporation Angular velocity sensor and process for producing the same
WO2009020015A1 (ja) * 2007-08-06 2009-02-12 Nihon Dempa Kogyo Co., Ltd. 音叉型水晶振動子及びその周波数調整方法
JP2010060361A (ja) * 2008-09-02 2010-03-18 Murata Mfg Co Ltd 音叉型振動子、音叉型振動子の製造方法および角速度センサ
JP5652155B2 (ja) * 2010-11-24 2015-01-14 セイコーエプソン株式会社 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
JP5974629B2 (ja) * 2012-05-23 2016-08-23 セイコーエプソン株式会社 振動片、振動片の製造方法、角速度センサー、電子機器、移動体
KR102698387B1 (ko) * 2015-02-06 2024-08-22 더 유니버시티 오브 노쓰 캐롤라이나 엣 채플 힐 최적화된 인간 응고 인자 viii 유전자 발현 카세트 및 그의 용도
US11054259B2 (en) * 2016-07-26 2021-07-06 Kyocera Corporation Angular velocity sensor, sensor element, and multi-axis angular velocity sensor
JP2018162975A (ja) * 2017-03-24 2018-10-18 セイコーエプソン株式会社 角速度センサーの製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
JPH08261766A (ja) * 1995-03-20 1996-10-11 Clarion Co Ltd 振動ジャイロスコープ
JPH10170271A (ja) * 1996-12-09 1998-06-26 Toyota Motor Corp 角速度検出装置
JPH11108667A (ja) * 1997-10-07 1999-04-23 Hitachi Ltd 角速度検出装置
JP3553418B2 (ja) * 1999-05-25 2004-08-11 シャープ株式会社 振動型ジャイロスコープ、振動型ジャイロスコープの形成方法および調整方法
JP2002243451A (ja) 2001-02-19 2002-08-28 Matsushita Electric Ind Co Ltd 角速度センサおよびその特性調整方法
JP4068370B2 (ja) 2001-09-07 2008-03-26 シチズンホールディングス株式会社 振動ジャイロ
JP2004093158A (ja) 2002-08-29 2004-03-25 Kinseki Ltd 圧電振動式慣性センサー素子とその製造方法及びレーザー加工装置
JP2004294354A (ja) 2003-03-28 2004-10-21 Citizen Watch Co Ltd 振動体の特性調整方法及びこの調整方法により形成された振動ジャイロ
JP2005051685A (ja) * 2003-07-31 2005-02-24 Matsushita Electric Works Ltd 超音波センサの共振周波数調整方法及び装置
JP2006038717A (ja) * 2004-07-29 2006-02-09 Citizen Watch Co Ltd 圧電ジャイロとその製造方法

Also Published As

Publication number Publication date
US20080022769A1 (en) 2008-01-31
US7637159B2 (en) 2009-12-29
JP2007279022A (ja) 2007-10-25

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