JP5003277B2 - 薄膜の結晶化方法、薄膜半導体装置の製造方法、電子機器の製造方法、および表示装置の製造方法 - Google Patents
薄膜の結晶化方法、薄膜半導体装置の製造方法、電子機器の製造方法、および表示装置の製造方法 Download PDFInfo
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- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
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Description
図1および図2は、本発明の半導体装置の製造方法を、薄膜トランジスタ基板の製造に適用した場合の断面工程図を示す。
図8には、上述のようにして作製された薄膜トランジスタ基板を用いた表示装置5の一例として、有機EL表示装置の一構成例を説明するための概略のパネル構成図である。
以上説明した本発明に係る表示装置は、図11〜図15に示す様々な電子機器、例えば、デジタルカメラ、ノート型パーソナルコンピュータ、携帯電話等の携帯端末装置、ビデオカメラなど、電子機器に入力された映像信号、若しくは、電子機器内で生成した映像信号を、画像若しくは映像として表示するあらゆる分野の電子機器の表示装置に適用することが可能である。以下に、本発明が適用される電子機器の一例について説明する。
Claims (18)
- 基板上に薄膜を成膜する工程と、
前記薄膜上に光吸収層を成膜する工程と、
前記光吸収層に対してエネルギー線を、前記光吸収層のうちの表面側のみを酸化させ、他の部分の爆発的酸化を発生させない範囲内の照射エネルギーで照射することにより、当該光吸収層において前記エネルギー線の熱変換によって発生させた熱と前記酸化の反応熱とにより前記薄膜を結晶化させる工程とを行う
薄膜の結晶化方法。 - 前記光吸収層にエネルギー線を照射する際には、
前記エネルギー線のパワー密度を100kW/cm2以上、照射時間を1m秒以下とする
請求項1に記載の薄膜の結晶化方法。 - 前記光吸収層を、前記薄膜上にバッファ層を介して形成する
請求項1または2に記載の薄膜の結晶化方法。 - 前記バッファ層として、SiNx,SiOxまたはSiONを用いる
請求項3に記載の薄膜の結晶化方法。 - 前記薄膜として非晶質の半導体薄膜を成膜する
請求項1に記載の薄膜の結晶化方法。 - 前記エネルギー線の照射は大気中で行われる
請求項1に記載の薄膜の結晶化方法。 - 前記エネルギー線として、連続発振レーザを用いる
請求項1に記載の薄膜の結晶化方法。 - 前記連続発振レーザとして、発振波長が200nm〜2000nmのものを用いる
請求項7に記載の薄膜の結晶化方法。 - 前記エネルギー線の照射は、前記薄膜が微結晶化するようにエネルギーを制御して行われる
請求項1に記載の薄膜の結晶化方法。 - 前記エネルギー線の照射は、前記光吸収層に対して照射位置を相対的に移動させながら行う
請求項1に記載の薄膜の結晶化方法。 - 前記エネルギー線の照射は、前記光吸収層の選択された位置に対して部分的に行う
請求項1に記載の薄膜の結晶化方法。 - 前記光吸収層として、モリブデン(Mo),タンタル(Ta),チタン(Ti),タングステン(W)またはコバルト(Co)を用いるか、あるいはWSi,MoSi,TiSi,TaSi,CoSiのケイ素化合物を用いる
請求項1に記載の薄膜の結晶化方法。 - 基板上に半導体薄膜を成膜する工程と、
前記半導体薄膜上に光吸収層を成膜する工程と、
前記光吸収層に対してエネルギー線を、前記光吸収層のうちの表面側のみを酸化させ、他の部分の爆発的酸化を発生させない範囲内の照射エネルギーで照射することにより、当該光吸収層において前記エネルギー線の熱変換によって発生させた熱と前記酸化の反応熱とにより前記半導体薄膜を結晶化させる工程とを行う
薄膜半導体装置の製造方法。 - 前記半導体薄膜を成膜する工程の前に、
前記基板上にゲート電極を形成し、当該ゲート電極をゲート絶縁膜で覆う工程を行う
請求項13に記載の薄膜半導体装置の製造方法。 - 前記半導体薄膜を結晶化させる工程の後、
前記光吸収層を除去し、ゲート絶縁膜を介してゲート電極を形成する工程を行う
請求項13に記載の薄膜半導体装置の製造方法。 - 前記半導体薄膜を結晶化させる工程では、
前記ゲート電極でのエネルギー線の吸収による発熱も併用する
請求項14に記載の薄膜半導体装置の製造方法。 - 基板上に薄膜半導体素子を設けてなる電子機器の製造方法において、
前記薄膜半導体素子を形成する際には、
前記基板上に半導体薄膜を成膜する工程と、
前記半導体薄膜上に光吸収層を成膜する工程と、
前記光吸収層に対してエネルギー線を、前記光吸収層のうちの表面側のみを酸化させ、他の部分の爆発的酸化を発生させない範囲内の照射エネルギーで照射することにより、当該光吸収層において前記エネルギー線の熱変換によって発生させた熱と前記酸化の反応熱とにより前記半導体薄膜を結晶化させる工程とを行う
電子機器の製造方法。 - 基板上に薄膜半導体素子とこれに接続された画素電極とを形成する表示装置の製造方法において、
前記薄膜半導体素子を形成する際には、
前記基板上に半導体薄膜を成膜する工程と、
前記半導体薄膜上に光吸収層を成膜する工程と、
前記光吸収層に対してエネルギー線を、前記光吸収層のうちの表面側のみを酸化させ、他の部分の爆発的酸化を発生させない範囲内の照射エネルギーで照射することにより、当該光吸収層において前記エネルギー線の熱変換によって発生させた熱と前記酸化の反応熱とにより前記半導体薄膜を結晶化させる工程とを行う
表示装置の製造方法。
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---|---|---|---|
JP2007132785A JP5003277B2 (ja) | 2007-05-18 | 2007-05-18 | 薄膜の結晶化方法、薄膜半導体装置の製造方法、電子機器の製造方法、および表示装置の製造方法 |
CN2008800165967A CN101681815B (zh) | 2007-05-18 | 2008-04-30 | 薄膜的结晶化方法、薄膜半导体装置的制造方法、电子设备的制造方法及显示装置的制造方法 |
KR1020097026248A KR101442875B1 (ko) | 2007-05-18 | 2008-04-30 | 박막의 결정화 방법, 박막 반도체 장치의 제조 방법, 전자 기기의 제조 방법, 및 표시 장치의 제조 방법 |
PCT/JP2008/058275 WO2008142970A1 (ja) | 2007-05-18 | 2008-04-30 | 薄膜の結晶化方法、薄膜半導体装置の製造方法、電子機器の製造方法、および表示装置の製造方法 |
US12/600,595 US8168518B2 (en) | 2007-05-18 | 2008-04-30 | Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device |
US13/441,556 US8518756B2 (en) | 2007-05-18 | 2012-04-06 | Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device |
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JP2007132785A JP5003277B2 (ja) | 2007-05-18 | 2007-05-18 | 薄膜の結晶化方法、薄膜半導体装置の製造方法、電子機器の製造方法、および表示装置の製造方法 |
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US (2) | US8168518B2 (ja) |
JP (1) | JP5003277B2 (ja) |
KR (1) | KR101442875B1 (ja) |
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Families Citing this family (13)
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JP5003277B2 (ja) * | 2007-05-18 | 2012-08-15 | ソニー株式会社 | 薄膜の結晶化方法、薄膜半導体装置の製造方法、電子機器の製造方法、および表示装置の製造方法 |
JP2010182819A (ja) * | 2009-02-04 | 2010-08-19 | Sony Corp | 薄膜トランジスタおよび表示装置 |
CN102067285A (zh) * | 2009-05-01 | 2011-05-18 | 株式会社日本制钢所 | 结晶膜的制造方法及制造装置 |
JP5564879B2 (ja) * | 2009-10-01 | 2014-08-06 | 三菱電機株式会社 | 非晶質半導体膜の結晶化方法、並びに薄膜トランジスタ、半導体装置、表示装置、及びその製造方法 |
TWI528418B (zh) | 2009-11-30 | 2016-04-01 | 應用材料股份有限公司 | 在半導體應用上的結晶處理 |
JP2011119397A (ja) * | 2009-12-02 | 2011-06-16 | Canon Inc | 半導体装置及びその製造方法 |
WO2013069045A1 (ja) * | 2011-11-07 | 2013-05-16 | パナソニック株式会社 | 薄膜トランジスタ装置の製造方法、薄膜トランジスタ装置および表示装置 |
CN102832169A (zh) * | 2012-08-28 | 2012-12-19 | 京东方科技集团股份有限公司 | 阵列基板及其制备方法、显示器件 |
KR102580219B1 (ko) * | 2015-12-15 | 2023-09-20 | 삼성디스플레이 주식회사 | 박막 트랜지스터, 이의 제조 방법 및 이를 포함하는 표시 장치 |
US20190067338A1 (en) * | 2017-08-28 | 2019-02-28 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Amoled Substrate and Method for Manufacturing Same |
CN108039352B (zh) * | 2017-12-18 | 2020-06-05 | 武汉华星光电半导体显示技术有限公司 | 阵列基板及其制造方法 |
US10651257B2 (en) | 2017-12-18 | 2020-05-12 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Array substrate and manufacturing method thereof |
CN112542386B (zh) * | 2020-11-03 | 2022-07-08 | 北海惠科光电技术有限公司 | 显示面板和薄膜晶体管的制造方法及其制造设备 |
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JPS62199012A (ja) * | 1986-02-27 | 1987-09-02 | Agency Of Ind Science & Technol | 薄膜の再結晶化方法 |
JPH07335890A (ja) * | 1994-06-03 | 1995-12-22 | Seiko Epson Corp | 薄膜半導体装置の製造方法 |
US7078321B2 (en) * | 2000-06-19 | 2006-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
JP4780860B2 (ja) * | 2000-06-19 | 2011-09-28 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2004128261A (ja) * | 2002-10-03 | 2004-04-22 | Seiko Epson Corp | 半導体薄膜及び薄膜トランジスタの製造方法、電気光学装置及び電子機器 |
JP2004134577A (ja) | 2002-10-10 | 2004-04-30 | Seiko Epson Corp | 半導体薄膜の製造方法、薄膜トランジスタ、半導体装置、薄膜太陽電池、複合半導体装置の製造方法、電気光学装置及び電子機器 |
JP4954495B2 (ja) | 2005-04-27 | 2012-06-13 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2007324425A (ja) | 2006-06-02 | 2007-12-13 | Sony Corp | 薄膜半導体装置及びその製造方法と表示装置 |
JP5003277B2 (ja) * | 2007-05-18 | 2012-08-15 | ソニー株式会社 | 薄膜の結晶化方法、薄膜半導体装置の製造方法、電子機器の製造方法、および表示装置の製造方法 |
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- 2008-04-30 KR KR1020097026248A patent/KR101442875B1/ko not_active IP Right Cessation
- 2008-04-30 WO PCT/JP2008/058275 patent/WO2008142970A1/ja active Application Filing
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US8168518B2 (en) | 2012-05-01 |
CN101681815B (zh) | 2011-10-26 |
KR20100017836A (ko) | 2010-02-16 |
WO2008142970A1 (ja) | 2008-11-27 |
JP2008288425A (ja) | 2008-11-27 |
CN101681815A (zh) | 2010-03-24 |
US20120196395A1 (en) | 2012-08-02 |
US20100159619A1 (en) | 2010-06-24 |
KR101442875B1 (ko) | 2014-09-19 |
US8518756B2 (en) | 2013-08-27 |
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