JP4936880B2 - ノズルプレート、ノズルプレートの製造方法、液滴吐出ヘッド及び液滴吐出装置 - Google Patents

ノズルプレート、ノズルプレートの製造方法、液滴吐出ヘッド及び液滴吐出装置 Download PDF

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Publication number
JP4936880B2
JP4936880B2 JP2006350146A JP2006350146A JP4936880B2 JP 4936880 B2 JP4936880 B2 JP 4936880B2 JP 2006350146 A JP2006350146 A JP 2006350146A JP 2006350146 A JP2006350146 A JP 2006350146A JP 4936880 B2 JP4936880 B2 JP 4936880B2
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JP
Japan
Prior art keywords
layer
silicon
silicon layer
nozzle plate
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006350146A
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English (en)
Japanese (ja)
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JP2008155591A (ja
JP2008155591A5 (enExample
Inventor
直明 桜井
純成 山辺
洋 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
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Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2006350146A priority Critical patent/JP4936880B2/ja
Priority to US11/962,912 priority patent/US8136920B2/en
Priority to CN200710185787.3A priority patent/CN101284447B/zh
Publication of JP2008155591A publication Critical patent/JP2008155591A/ja
Publication of JP2008155591A5 publication Critical patent/JP2008155591A5/ja
Application granted granted Critical
Publication of JP4936880B2 publication Critical patent/JP4936880B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2006350146A 2006-12-26 2006-12-26 ノズルプレート、ノズルプレートの製造方法、液滴吐出ヘッド及び液滴吐出装置 Expired - Fee Related JP4936880B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006350146A JP4936880B2 (ja) 2006-12-26 2006-12-26 ノズルプレート、ノズルプレートの製造方法、液滴吐出ヘッド及び液滴吐出装置
US11/962,912 US8136920B2 (en) 2006-12-26 2007-12-21 Nozzle plate, method for manufacturing nozzle plate, droplet discharge head, and droplet discharge apparatus
CN200710185787.3A CN101284447B (zh) 2006-12-26 2007-12-26 喷嘴板、喷嘴板的制造方法、液滴喷出头及液滴喷出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006350146A JP4936880B2 (ja) 2006-12-26 2006-12-26 ノズルプレート、ノズルプレートの製造方法、液滴吐出ヘッド及び液滴吐出装置

Publications (3)

Publication Number Publication Date
JP2008155591A JP2008155591A (ja) 2008-07-10
JP2008155591A5 JP2008155591A5 (enExample) 2009-11-12
JP4936880B2 true JP4936880B2 (ja) 2012-05-23

Family

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Family Applications (1)

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JP2006350146A Expired - Fee Related JP4936880B2 (ja) 2006-12-26 2006-12-26 ノズルプレート、ノズルプレートの製造方法、液滴吐出ヘッド及び液滴吐出装置

Country Status (3)

Country Link
US (1) US8136920B2 (enExample)
JP (1) JP4936880B2 (enExample)
CN (1) CN101284447B (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008117716A1 (ja) * 2007-03-28 2008-10-02 Konica Minolta Holdings, Inc. 液体吐出ヘッド及び液体吐出装置
JP2010143055A (ja) * 2008-12-18 2010-07-01 Seiko Epson Corp ノズル基板、液滴吐出ヘッド、及びノズル基板の製造方法
JP5218164B2 (ja) 2009-03-10 2013-06-26 セイコーエプソン株式会社 ノズル基板の製造方法及び液滴吐出ヘッドの製造方法
JP5345034B2 (ja) * 2009-09-28 2013-11-20 富士フイルム株式会社 撥液膜形成方法
US8210649B2 (en) * 2009-11-06 2012-07-03 Fujifilm Corporation Thermal oxide coating on a fluid ejector
KR101197945B1 (ko) 2010-07-21 2012-11-05 삼성전기주식회사 잉크젯 프린트 헤드 및 그 제조방법
CN103328089B (zh) * 2010-12-21 2016-09-07 哈佛学院院长等 喷雾干燥技术
JP5900742B2 (ja) * 2012-04-02 2016-04-06 三菱電機株式会社 液体噴出装置とその製造方法およびノズルプレートの製造方法
US9220852B2 (en) * 2012-04-10 2015-12-29 Boehringer Ingelheim Microparts Gmbh Method for producing trench-like depressions in the surface of a wafer
WO2016118120A1 (en) * 2015-01-20 2016-07-28 Hewlett-Packard Development Company, L.P. Liquid-gas separator
JP6512985B2 (ja) * 2015-08-03 2019-05-15 キヤノン株式会社 シリコン基板の加工方法
KR101863292B1 (ko) * 2016-01-22 2018-05-30 포항공과대학교 산학협력단 노즐 및 그의 표면 처리 방법
CN108944051B (zh) * 2017-11-20 2019-08-09 广东聚华印刷显示技术有限公司 喷嘴的表面处理方法
JP7047587B2 (ja) * 2018-05-16 2022-04-05 コニカミノルタ株式会社 インクジェットヘッドおよびインクジェット画像形成装置
JP7384561B2 (ja) * 2019-02-18 2023-11-21 ローム株式会社 ノズル基板、インクジェットプリントヘッドおよびノズル基板の製造方法
US20210104638A1 (en) * 2019-10-04 2021-04-08 Sensors Unlimited, Inc. Visible-swir hyper spectral photodetectors with reduced dark current
JP7334335B2 (ja) * 2020-03-30 2023-08-28 富士フイルム株式会社 液体吐出構造体、液体吐出ヘッド及び液体吐出装置
JP2022049855A (ja) * 2020-09-17 2022-03-30 株式会社リコー 液体吐出ヘッド、液体吐出ユニット及び液体を吐出する装置
CN117529407A (zh) * 2021-06-22 2024-02-06 柯尼卡美能达株式会社 喷嘴板、液滴吐出头、液滴吐出装置以及喷嘴板的制造方法

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US6155670A (en) * 1997-03-05 2000-12-05 Hewlett-Packard Company Method and apparatus for improved ink-drop distribution in inkjet printing
JPH09216368A (ja) 1996-02-13 1997-08-19 Seiko Epson Corp インクジェットノズルプレートおよびその製造方法
JP4357600B2 (ja) 1998-06-18 2009-11-04 パナソニック株式会社 流体噴射装置
JP2001212966A (ja) * 2000-02-04 2001-08-07 Seiko Epson Corp 親水性構造及びインクジェット記録ヘッド
JP2003266394A (ja) * 2002-03-14 2003-09-24 Seiko Epson Corp シリコンデバイスの製造方法及びインクジェット式記録ヘッドの製造方法並びにシリコンウェハ
JP2004209707A (ja) * 2002-12-27 2004-07-29 Canon Inc インクジェットヘッドの製造方法
JP2004237448A (ja) * 2003-02-03 2004-08-26 Canon Inc 液体吐出ヘッド素子
JP2005035013A (ja) 2003-07-15 2005-02-10 Brother Ind Ltd 液体移送装置の製造方法
JP4246583B2 (ja) * 2003-09-24 2009-04-02 株式会社日立産機システム インクジェット記録装置
KR100561864B1 (ko) 2004-02-27 2006-03-17 삼성전자주식회사 잉크젯 프린트헤드의 노즐 플레이트 표면에 소수성코팅막을 형성하는 방법
JP4654458B2 (ja) * 2004-12-24 2011-03-23 リコープリンティングシステムズ株式会社 シリコン部材の陽極接合法及びこれを用いたインクジェットヘッド製造方法並びにインクジェットヘッド及びこれを用いたインクジェット記録装置
JP4889450B2 (ja) * 2005-11-11 2012-03-07 株式会社リコー 液体吐出ヘッド及び画像形成装置、液滴を吐出する装置、記録方法

Also Published As

Publication number Publication date
US8136920B2 (en) 2012-03-20
US20080211871A1 (en) 2008-09-04
CN101284447A (zh) 2008-10-15
CN101284447B (zh) 2011-08-10
JP2008155591A (ja) 2008-07-10

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