CN101284447B - 喷嘴板、喷嘴板的制造方法、液滴喷出头及液滴喷出装置 - Google Patents

喷嘴板、喷嘴板的制造方法、液滴喷出头及液滴喷出装置 Download PDF

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Publication number
CN101284447B
CN101284447B CN200710185787.3A CN200710185787A CN101284447B CN 101284447 B CN101284447 B CN 101284447B CN 200710185787 A CN200710185787 A CN 200710185787A CN 101284447 B CN101284447 B CN 101284447B
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CN
China
Prior art keywords
layer
nozzle plate
silicon
liquid chamber
silicon layer
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Expired - Fee Related
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CN200710185787.3A
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English (en)
Chinese (zh)
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CN101284447A (zh
Inventor
樱井直明
山边纯成
小泉洋
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Toshiba Tec Corp
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Toshiba Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN200710185787.3A 2006-12-26 2007-12-26 喷嘴板、喷嘴板的制造方法、液滴喷出头及液滴喷出装置 Expired - Fee Related CN101284447B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-350146 2006-12-26
JP2006350146A JP4936880B2 (ja) 2006-12-26 2006-12-26 ノズルプレート、ノズルプレートの製造方法、液滴吐出ヘッド及び液滴吐出装置

Publications (2)

Publication Number Publication Date
CN101284447A CN101284447A (zh) 2008-10-15
CN101284447B true CN101284447B (zh) 2011-08-10

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Country Status (3)

Country Link
US (1) US8136920B2 (enExample)
JP (1) JP4936880B2 (enExample)
CN (1) CN101284447B (enExample)

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WO2008117716A1 (ja) * 2007-03-28 2008-10-02 Konica Minolta Holdings, Inc. 液体吐出ヘッド及び液体吐出装置
JP2010143055A (ja) * 2008-12-18 2010-07-01 Seiko Epson Corp ノズル基板、液滴吐出ヘッド、及びノズル基板の製造方法
JP5218164B2 (ja) 2009-03-10 2013-06-26 セイコーエプソン株式会社 ノズル基板の製造方法及び液滴吐出ヘッドの製造方法
JP5345034B2 (ja) * 2009-09-28 2013-11-20 富士フイルム株式会社 撥液膜形成方法
US8210649B2 (en) * 2009-11-06 2012-07-03 Fujifilm Corporation Thermal oxide coating on a fluid ejector
KR101197945B1 (ko) 2010-07-21 2012-11-05 삼성전기주식회사 잉크젯 프린트 헤드 및 그 제조방법
CN103328089B (zh) * 2010-12-21 2016-09-07 哈佛学院院长等 喷雾干燥技术
JP5900742B2 (ja) * 2012-04-02 2016-04-06 三菱電機株式会社 液体噴出装置とその製造方法およびノズルプレートの製造方法
US9220852B2 (en) * 2012-04-10 2015-12-29 Boehringer Ingelheim Microparts Gmbh Method for producing trench-like depressions in the surface of a wafer
WO2016118120A1 (en) * 2015-01-20 2016-07-28 Hewlett-Packard Development Company, L.P. Liquid-gas separator
JP6512985B2 (ja) * 2015-08-03 2019-05-15 キヤノン株式会社 シリコン基板の加工方法
KR101863292B1 (ko) * 2016-01-22 2018-05-30 포항공과대학교 산학협력단 노즐 및 그의 표면 처리 방법
CN108944051B (zh) * 2017-11-20 2019-08-09 广东聚华印刷显示技术有限公司 喷嘴的表面处理方法
JP7047587B2 (ja) * 2018-05-16 2022-04-05 コニカミノルタ株式会社 インクジェットヘッドおよびインクジェット画像形成装置
JP7384561B2 (ja) * 2019-02-18 2023-11-21 ローム株式会社 ノズル基板、インクジェットプリントヘッドおよびノズル基板の製造方法
US20210104638A1 (en) * 2019-10-04 2021-04-08 Sensors Unlimited, Inc. Visible-swir hyper spectral photodetectors with reduced dark current
JP7334335B2 (ja) * 2020-03-30 2023-08-28 富士フイルム株式会社 液体吐出構造体、液体吐出ヘッド及び液体吐出装置
JP2022049855A (ja) * 2020-09-17 2022-03-30 株式会社リコー 液体吐出ヘッド、液体吐出ユニット及び液体を吐出する装置
CN117529407A (zh) * 2021-06-22 2024-02-06 柯尼卡美能达株式会社 喷嘴板、液滴吐出头、液滴吐出装置以及喷嘴板的制造方法

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CN1272818A (zh) * 1998-06-18 2000-11-08 松下电器产业株式会社 流体喷射装置及其制造方法
CN2736166Y (zh) * 2003-07-15 2005-10-26 兄弟工业株式会社 液体输送装置

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US6155670A (en) * 1997-03-05 2000-12-05 Hewlett-Packard Company Method and apparatus for improved ink-drop distribution in inkjet printing
JPH09216368A (ja) 1996-02-13 1997-08-19 Seiko Epson Corp インクジェットノズルプレートおよびその製造方法
JP2001212966A (ja) * 2000-02-04 2001-08-07 Seiko Epson Corp 親水性構造及びインクジェット記録ヘッド
JP2003266394A (ja) * 2002-03-14 2003-09-24 Seiko Epson Corp シリコンデバイスの製造方法及びインクジェット式記録ヘッドの製造方法並びにシリコンウェハ
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JP4889450B2 (ja) * 2005-11-11 2012-03-07 株式会社リコー 液体吐出ヘッド及び画像形成装置、液滴を吐出する装置、記録方法

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CN1272818A (zh) * 1998-06-18 2000-11-08 松下电器产业株式会社 流体喷射装置及其制造方法
CN2736166Y (zh) * 2003-07-15 2005-10-26 兄弟工业株式会社 液体输送装置

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JP特开2005-238842A 2005.09.08

Also Published As

Publication number Publication date
US8136920B2 (en) 2012-03-20
US20080211871A1 (en) 2008-09-04
CN101284447A (zh) 2008-10-15
JP4936880B2 (ja) 2012-05-23
JP2008155591A (ja) 2008-07-10

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SE01 Entry into force of request for substantive examination
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Effective date of registration: 20181114

Address after: Tokyo, Japan

Patentee after: TOSHIBA TEC Kabushiki Kaisha

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Patentee before: Toshiba Corp.

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Granted publication date: 20110810