JP4924685B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP4924685B2 JP4924685B2 JP2009218324A JP2009218324A JP4924685B2 JP 4924685 B2 JP4924685 B2 JP 4924685B2 JP 2009218324 A JP2009218324 A JP 2009218324A JP 2009218324 A JP2009218324 A JP 2009218324A JP 4924685 B2 JP4924685 B2 JP 4924685B2
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- 239000004065 semiconductor Substances 0.000 title claims description 179
- 238000004519 manufacturing process Methods 0.000 title claims description 42
- 239000000758 substrate Substances 0.000 claims description 112
- 238000000034 method Methods 0.000 claims description 47
- 238000002955 isolation Methods 0.000 claims description 35
- 230000015572 biosynthetic process Effects 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
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Description
(第1実施形態)
図1は、第1実施形態に係る半導体装置の概略構成を示す断面図である。図2は、第1実施形態に係る半導体装置のパワー部によって構成される回路図である。図3は、第1実施形態に係る半導体装置の製造工程を示す工程図であり、(a)は素子形成工程、(b)は薄厚工程、(c)はトレンチ形成工程、(d)は不純物注入工程を示す。図4は、第1実施形態に係る半導体装置の製造工程を示す工程図であり、(a)は絶縁膜形成工程、(b)は除去工程、(c)は金属膜形成工程、(d)はパッド形成工程を示す。なお、図1、図3、及び図4では、煩雑となることを避けるために、後述する縦型MOSFET31のゲート32と電気的に接続される内部配線17と、後述する横型MOSFET51のゲート52と電気的に接続される内部配線17と、該内部配線17と電気的に接続される貫通電極12と、を省略している。
次に、本発明の第2実施形態を、図6及び図7に基づいて説明する。図6は、第2実施形態に係る半導体装置の概略構成を示す断面図である。図7は、第2実施形態に係る半導体装置のパワー部によって構成される回路図である。
次に、本発明の第3実施形態を、図10及び図11に基づいて説明する。図10は、第3実施形態に係る半導体装置のパワー部の概略構成を示す断面図である。図11は、第3実施形態に係る半導体装置のパワー部によって構成される回路図である。
11・・・絶縁分離トレンチ
12・・・貫通電極
20・・・リード
30・・・パワー部
31・・・縦型MOSFET
50・・・制御部
51・・・横型MOSFET
100・・・半導体装置
Claims (10)
- 絶縁分離トレンチによって半導体基板が複数の素子形成領域に区画され、各素子形成領域に少なくとも1つの電子素子が形成された半導体装置であって、
前記電子素子として、複数の電極が前記半導体基板の一面及その裏面に分けて配置され、複数の前記電極のうち対をなす電極間において前記半導体基板の厚さ方向に電流が流れる縦型トランジスタ素子と、複数の電極が前記半導体基板の一面側にまとめて配置され、複数の前記電極のうち対をなす電極間において前記半導体基板の一面に沿う方向に電流が流れる横型トランジスタ素子と、を含み、
前記縦型トランジスタ素子及び前記横型トランジスタ素子それぞれのPN接合部は、前記半導体基板の一面側表層に形成され、
前記半導体基板の一面上に位置する前記電子素子の電極のうち、前記縦型トランジスタ素子の電極の一部は、前記半導体基板の一面全面を覆うように前記一面上に配置された1枚のリードと電気的に接続され、
前記リードと接続された電極を除く前記半導体基板の一面上に位置する前記電子素子の電極は、前記半導体基板を前記厚さ方向に貫通する貫通電極を介して、前記半導体基板の裏面に配置された対応するワイヤボンディング用パッドと電気的に接続されていることを特徴とする半導体装置。 - 前記半導体基板の一面全面を覆うように、前記一面上に配置された金属層と、前記縦型トランジスタ素子の電極の一部とが電気的に接続されており、
前記金属層は、導電性接着剤を介して前記リードと機械的及び電気的に接続されていることを特徴とする請求項1に記載の半導体装置。 - 前記絶縁分離トレンチとして、前記半導体基板を前記厚さ方向に貫通するトレンチ内に、該トレンチの側壁に位置する絶縁膜を介して導電部材が配置された導電体内蔵トレンチを含み、
前記貫通電極は、前記半導体基板を前記厚さ方向に貫通するトレンチ内に、該トレンチの側壁に位置する絶縁膜を介して導電部材が配置されたものであり、
前記貫通電極として、前記導電体内蔵トレンチを含むことを特徴とする請求項1又は請求項2に記載の半導体装置。 - 前記半導体基板は、前記リードを搭載面として回路基板に搭載され、前記回路基板とともにモールド成形されることを特徴とする請求項1〜3いずれか1項に記載の半導体装置。
- 全ての前記縦型トランジスタ素子の対をなす電極における、前記半導体基板の一面に形成された電極は、前記リードと電気的に接続されていることを特徴とする請求項1〜4いずれか1項に記載の半導体装置。
- 同一チャネル型の、2つの縦型トランジスタ素子が直列接続されてハーフブリッジ回路が構成されていることを特徴とする請求項1〜4いずれか1項に記載の半導体装置。
- 異なるチャネル型の、2つの縦型トランジスタ素子が直列接続されてハーフブリッジ回路が構成されていることを特徴とする請求項1〜4いずれか1項に記載の半導体装置。
- 3組の前記ハーフブリッジ回路によって、3層インバータ回路が構成されていることを特徴とする請求項6又は請求項7に記載の半導体装置。
- 請求項1〜8いずれか1項に記載の半導体装置の製造方法であって、
前記電子素子における前記半導体基板の一面側の構成要素を形成する第1素子形成工程と、
前記半導体基板を前記半導体基板の裏面側から研削することで、前記半導体基板の厚さを薄くする薄厚工程と、
該薄厚工程終了後、前記半導体基板の裏面から一面に達するトレンチを形成し、前記トレンチを構成する側壁に絶縁膜を形成し、該絶縁膜によって囲まれた空間の少なくとも1つに導電部材を充填するトレンチ形成工程と、
該トレンチ形成工程終了後、前記電子素子における前記半導体基板の裏面側の構成要素を形成する第2素子形成工程と、を有することを特徴とする半導体装置の製造方法。 - 請求項1〜8いずれか1項に記載の半導体装置の製造方法であって、
前記半導体基板に、前記半導体基板の一面から所定深さに達する未貫通のトレンチを形成し、該トレンチを構成する側壁に絶縁膜を形成し、該絶縁膜によって囲まれた空間の少なくとも1つに導電部材を充填するトレンチ形成工程と、
該トレンチ形成工程終了後、前記電子素子における前記半導体基板の一面側の構成要素を形成する第1素子形成工程と、
該第1素子形成工程終了後、前記トレンチが前記半導体基板の一面と裏面とを貫通するように、前記半導体基板を前記半導体基板の裏面側から研削することで、前記半導体基板の厚さを薄くする薄厚工程と、
該薄厚工程終了後、前記電子素子における前記半導体基板の裏面側の構成要素を形成する第2素子形成工程と、を有することを特徴とする半導体装置の製造方法。
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