JP4897318B2 - ピエゾ抵抗素子及びその製造方法 - Google Patents
ピエゾ抵抗素子及びその製造方法 Download PDFInfo
- Publication number
- JP4897318B2 JP4897318B2 JP2006072750A JP2006072750A JP4897318B2 JP 4897318 B2 JP4897318 B2 JP 4897318B2 JP 2006072750 A JP2006072750 A JP 2006072750A JP 2006072750 A JP2006072750 A JP 2006072750A JP 4897318 B2 JP4897318 B2 JP 4897318B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- piezoresistive element
- layer
- groove
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 239000004065 semiconductor Substances 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 51
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 238000009792 diffusion process Methods 0.000 claims description 13
- 239000012535 impurity Substances 0.000 claims description 11
- 238000005468 ion implantation Methods 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 6
- 238000001039 wet etching Methods 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 4
- 229910052796 boron Inorganic materials 0.000 claims 4
- 239000010410 layer Substances 0.000 description 60
- 230000001133 acceleration Effects 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 230000007547 defect Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 230000005685 electric field effect Effects 0.000 description 4
- 238000002513 implantation Methods 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02D—FOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
- E02D17/00—Excavations; Bordering of excavations; Making embankments
- E02D17/02—Foundation pits
- E02D17/04—Bordering surfacing or stiffening the sides of foundation pits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02D—FOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
- E02D17/00—Excavations; Bordering of excavations; Making embankments
- E02D17/06—Foundation trenches ditches or narrow shafts
- E02D17/08—Bordering or stiffening the sides of ditches trenches or narrow shafts for foundations
- E02D17/083—Shoring struts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02D—FOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
- E02D2200/00—Geometrical or physical properties
- E02D2200/11—Height being adjustable
- E02D2200/115—Height being adjustable with separate pieces
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02D—FOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
- E02D2200/00—Geometrical or physical properties
- E02D2200/16—Shapes
- E02D2200/1671—Shapes helical or spiral
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02D—FOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
- E02D2600/00—Miscellaneous
- E02D2600/20—Miscellaneous comprising details of connection between elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
- G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
Description
Electrical Mechanical System)、欧州ではMIST(Micro System Technology)と呼ばれている。
(1)拡散法あるいはイオン注入法によって半導体基板に不純物を添加することにより、基板の表面に抵抗層を形成する。
(2)半導体基板表面に不純物拡散層を形成した後、その上に反対の導電型の不純物拡散層をさらに形成することにより、半導体基板内部に埋め込み抵抗層を形成する。
(3)特開平7−131035号公報に示されているように、半導体基板(例えば、n型)に、その基板表面層の導電型を残したままの状態で、当該半導体基板とは異なる導電型(例えば、p型)のドーパントを高エネルギー(例えば、1MeV)でイオン注入することによって、基板内部に埋め込み抵抗層を形成する。
Reliability 1 (2001) 1657-1662 又は、Sensors and Actuators A110 (2004) 150-156 に説明されている。
ここで、埋め込み層124a(シリコン膜124)の導電型は、SOI層106と同じn型とする。なお、SOI層106の導電型がp型の場合には、埋め込み層124aについてもp型とする。
12 ビーム
14 錘
18 ピエゾ抵抗素子
106 SOI層
110 コンタクト領域
114 溝
120 抵抗層
124a 多結晶膜
130 アルミ配線
Claims (17)
- ピエゾ抵抗素子を製造する方法において、
半導体基板に溝を形成する工程と;
前記溝の内部に前記半導体基板と異なる導電型の抵抗層を形成する工程と;
前記抵抗層の上部に前記半導体基板と同じ導電型のシリコン層を形成する工程とを含むことを特徴とするピエゾ抵抗素子の製造方法。 - 前記シリコン層は、多結晶シリコン層であることを特徴とする請求項1に記載の方法。
- 前記抵抗層は、ボロンイオン注入による埋め込み不純物拡散層であることを特徴とする請求項1又は2に記載の方法。
- 前記溝は、ウェットエッチングにより形成されることを特徴とする請求項1,2又は3に記載の方法。
- 前記溝を形成する前に、コンタクトホール形成領域に対応する位置にイオン注入を行って一対のコンタクト領域を形成し、
前記一対のコンタクト領域の間に前記溝を形成することを特徴とする請求項1,2,3又は4に記載の方法。 - ピエゾ抵抗素子を有する半導体装置の製造方法において、
前記ピエゾ抵抗素子を形成するにあたり、
半導体基板上のコンタクトホール形成領域に対応する位置にイオン注入を行って一対のコンタクト領域を形成し;
前記半導体基板の前記一対のコンタクト領域の間に溝を形成し;
前記溝の内部に前記半導体基板と異なる導電型の抵抗層を形成し;
前記抵抗層の上部に前記半導体基板と同じ導電型のシリコン層を形成し;
前記一対のコンタクト領域に配線を施すことを特徴とする半導体装置の製造方法。 - 前記シリコン層は、多結晶シリコン層であることを特徴とする請求項6に記載の半導体装置の製造方法。
- 前記抵抗層は、ボロンイオン注入による埋め込み不純物拡散層であることを特徴とする請求項6又は7に記載の半導体装置の製造方法。
- 前記溝は、ウェットエッチングにより形成されることを特徴とする請求項6,7又は8に記載の半導体装置の製造方法。
- 半導体基板内に形成されるピエゾ抵抗素子において、
前記半導体基板内に形成された一対のコンタクト領域と;
前記半導体基板と異なる導電型であり、前記半導体基板の前記一対のコンタクト領域の間に形成された溝の内部に形成された抵抗層と;
前記半導体基板と同じ導電型であり、前記抵抗層の上に形成されたシリコン層とを備えたこと特徴とするピエゾ抵抗素子。 - 前記シリコン層は、多結晶シリコン層であることを特徴とする請求項10に記載のピエゾ抵抗素子。
- 前記抵抗層は、ボロンイオン注入による埋め込み不純物拡散層であることを特徴とする請求項10又は11に記載のピエゾ抵抗素子。
- 前記溝は、結晶ウェットエッチングにより形成されることを特徴とする請求項10,11又は12に記載のピエゾ抵抗素子。
- ピエゾ抵抗素子を有する半導体装置において、
前記ピエゾ抵抗素子は、
半導体基板内に形成された一対のコンタクト領域と;
前記半導体基板と異なる導電型であり、前記半導体基板の前記一対のコンタクト領域の間に形成された溝の内部に形成された抵抗層と;
前記半導体基板と同じ導電型であり、前記抵抗層の上に形成されたシリコン層とを備えていること特徴とする半導体装置。 - 前記シリコン層は、多結晶シリコン層であることを特徴とする請求項14に記載の半導体装置。
- 前記抵抗層は、ボロンイオン注入による埋め込み不純物拡散層であることを特徴とする請求項14又は15に記載の半導体装置。
- 前記溝は、ウェットエッチングにより形成されることを特徴とする請求項14,15又は16に記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006072750A JP4897318B2 (ja) | 2006-03-16 | 2006-03-16 | ピエゾ抵抗素子及びその製造方法 |
US11/649,217 US20070215966A1 (en) | 2006-03-16 | 2007-01-04 | Piezoresistance element and semiconductor device having the same |
KR1020070004931A KR20070094453A (ko) | 2006-03-16 | 2007-01-16 | 피에조 저항 소자 및 그 제조 방법 |
CNA2007100042841A CN101038864A (zh) | 2006-03-16 | 2007-01-19 | 压电电阻元件及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006072750A JP4897318B2 (ja) | 2006-03-16 | 2006-03-16 | ピエゾ抵抗素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007250869A JP2007250869A (ja) | 2007-09-27 |
JP4897318B2 true JP4897318B2 (ja) | 2012-03-14 |
Family
ID=38516919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006072750A Active JP4897318B2 (ja) | 2006-03-16 | 2006-03-16 | ピエゾ抵抗素子及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20070215966A1 (ja) |
JP (1) | JP4897318B2 (ja) |
KR (1) | KR20070094453A (ja) |
CN (1) | CN101038864A (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4610447B2 (ja) * | 2005-08-31 | 2011-01-12 | Okiセミコンダクタ株式会社 | 半導体装置とその製造方法及び検査方法 |
EP2275825A1 (en) * | 2009-07-10 | 2011-01-19 | Yamaha Corporation | Uniaxial acceleration sensor |
DE102010012607B4 (de) * | 2010-03-24 | 2012-01-26 | Eads Deutschland Gmbh | HF-MEMS-Schalter |
JP2018077201A (ja) * | 2016-11-11 | 2018-05-17 | ソニーセミコンダクタソリューションズ株式会社 | センサ素子、慣性センサ及び電子機器 |
JP6981901B2 (ja) * | 2018-03-13 | 2021-12-17 | アズビル株式会社 | ピエゾ抵抗型センサ |
US11764111B2 (en) * | 2019-10-24 | 2023-09-19 | Texas Instruments Incorporated | Reducing cross-wafer variability for minimum width resistors |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55112864U (ja) * | 1979-02-02 | 1980-08-08 | ||
US5107309A (en) * | 1989-12-18 | 1992-04-21 | Honeywell Inc. | Double diffused leadout for a semiconductor device |
US5589810A (en) * | 1991-03-28 | 1996-12-31 | The Foxboro Company | Semiconductor pressure sensor and related methodology with polysilicon diaphragm and single-crystal gage elements |
JP2596351B2 (ja) * | 1993-12-08 | 1997-04-02 | 日本電気株式会社 | 半導体加速度センサとその製造方法 |
EP1207378B1 (en) * | 1999-08-20 | 2007-08-08 | Hitachi, Ltd. | Semiconductor pressure sensor and pressure sensing device |
JP3633555B2 (ja) * | 2001-12-25 | 2005-03-30 | 株式会社デンソー | 半導体力学量センサ |
JP2005181232A (ja) * | 2003-12-24 | 2005-07-07 | Citizen Watch Co Ltd | 電気機械変換器とその製造方法 |
JP2005283393A (ja) * | 2004-03-30 | 2005-10-13 | Fujitsu Media Device Kk | 慣性センサ |
JP4272115B2 (ja) * | 2004-06-03 | 2009-06-03 | Okiセミコンダクタ株式会社 | 加速度センサ及びその製造方法 |
JP2006030158A (ja) * | 2004-06-15 | 2006-02-02 | Canon Inc | 半導体装置およびその製造方法 |
-
2006
- 2006-03-16 JP JP2006072750A patent/JP4897318B2/ja active Active
-
2007
- 2007-01-04 US US11/649,217 patent/US20070215966A1/en not_active Abandoned
- 2007-01-16 KR KR1020070004931A patent/KR20070094453A/ko not_active Application Discontinuation
- 2007-01-19 CN CNA2007100042841A patent/CN101038864A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2007250869A (ja) | 2007-09-27 |
US20070215966A1 (en) | 2007-09-20 |
KR20070094453A (ko) | 2007-09-20 |
CN101038864A (zh) | 2007-09-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9145292B2 (en) | Cavity structures for MEMS devices | |
JP5559369B2 (ja) | センサおよびセンサの製造方法 | |
JP4858547B2 (ja) | 半導体装置およびその製造方法 | |
JP4897318B2 (ja) | ピエゾ抵抗素子及びその製造方法 | |
US8558327B2 (en) | Micromechanical component and corresponding production method | |
US20110221455A1 (en) | Micromechanical component and method for its production | |
JP2000031440A (ja) | Soiウエハの製造方法 | |
US9991340B2 (en) | Mechanical stress-decoupling in semiconductor device | |
JP4784641B2 (ja) | 半導体装置およびその製造方法 | |
TWI634069B (zh) | 混合整合構件及其製造方法 | |
JP5874609B2 (ja) | 半導体装置およびその製造方法 | |
JP2009016717A (ja) | 半導体装置およびその製造方法 | |
US8633088B2 (en) | Glass frit wafer bond protective structure | |
KR20000028948A (ko) | 각속도 센서 제조방법 | |
KR20180101719A (ko) | 다층 mems 부품을 제조하기 위한 방법 및 상응하는 다층 mems 부품 | |
JP6865787B2 (ja) | 半導体歪検出素子及びmemsアクチュエータデバイス | |
JP4952069B2 (ja) | 加速度センサの製造方法 | |
JP4783914B2 (ja) | 半導体力学量センサおよび半導体力学量センサの製造方法 | |
JP2008100325A (ja) | Mems・半導体複合回路及びその製造方法 | |
TWI588918B (zh) | 具精確間隙機電晶圓結構與及其製作方法 | |
KR20070096942A (ko) | 게터링 방법 및 이를 이용한 웨이퍼 | |
JP2008244156A (ja) | 半導体装置およびその製造方法 | |
JP6142735B2 (ja) | 半導体圧力センサ | |
JP4783915B2 (ja) | 半導体力学量センサ | |
JP2004212401A (ja) | 半導体力学量センサ及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080730 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20081210 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20091201 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20111122 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20111222 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4897318 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150106 Year of fee payment: 3 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |