JP4851672B2 - 改良されたスパッタリングターゲット及びその製法並びに使用 - Google Patents

改良されたスパッタリングターゲット及びその製法並びに使用 Download PDF

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Publication number
JP4851672B2
JP4851672B2 JP2001544390A JP2001544390A JP4851672B2 JP 4851672 B2 JP4851672 B2 JP 4851672B2 JP 2001544390 A JP2001544390 A JP 2001544390A JP 2001544390 A JP2001544390 A JP 2001544390A JP 4851672 B2 JP4851672 B2 JP 4851672B2
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JP
Japan
Prior art keywords
metal
zinc
target
backing
sputtered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2001544390A
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English (en)
Japanese (ja)
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JP2003516473A5 (enExample
JP2003516473A (ja
Inventor
ハーティグ，クラウス
ヴァンデルストラーテン，ヨハン
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Bekaert NV SA
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Bekaert NV SA
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Publication date
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Publication of JP2003516473A5 publication Critical patent/JP2003516473A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C18/00—Alloys based on zinc
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C23C4/08—Metallic material containing only metal elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP2001544390A 1999-12-03 2000-12-01 改良されたスパッタリングターゲット及びその製法並びに使用 Expired - Fee Related JP4851672B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16896599P 1999-12-03 1999-12-03
US60/168,965 1999-12-03
PCT/US2000/042533 WO2001042522A2 (en) 1999-12-03 2000-12-01 Sputtering target and methods of making same

Publications (3)

Publication Number Publication Date
JP2003516473A JP2003516473A (ja) 2003-05-13
JP2003516473A5 JP2003516473A5 (enExample) 2008-01-31
JP4851672B2 true JP4851672B2 (ja) 2012-01-11

Family

ID=22613726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001544390A Expired - Fee Related JP4851672B2 (ja) 1999-12-03 2000-12-01 改良されたスパッタリングターゲット及びその製法並びに使用

Country Status (8)

Country Link
US (1) US6787003B2 (enExample)
EP (1) EP1235948B1 (enExample)
JP (1) JP4851672B2 (enExample)
AT (1) ATE306571T1 (enExample)
AU (1) AU4515201A (enExample)
DE (1) DE60023176T2 (enExample)
ES (1) ES2250229T3 (enExample)
WO (1) WO2001042522A2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002027057A2 (en) * 2000-09-25 2002-04-04 Cardinal Cg Company Sputtering target and method of making same
JP3355373B1 (ja) * 2001-06-14 2002-12-09 鈴鹿工業高等専門学校長 すず−亜鉛合金膜の製造方法
JP4413008B2 (ja) * 2001-08-13 2010-02-10 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム スパッタターゲットを製造する方法
WO2004013372A1 (ja) 2002-08-02 2004-02-12 Idemitsu Kosan Co.,Ltd. スパッタリングターゲット及び焼結体及びそれらを利用して製造した導電膜、並びに有機ｅｌ素子及びそれに用いる基板
WO2004016823A1 (ja) * 2002-08-12 2004-02-26 Nikko Materials Company, Limited シリコン基板又はシリコンスパッタリングターゲット及びこれらの製造方法
US7118726B2 (en) 2002-12-13 2006-10-10 Clark Manufacturing, Llc Method for making oxide compounds
US20050072668A1 (en) * 2003-10-06 2005-04-07 Heraeus, Inc. Sputter target having modified surface texture
EP1557863B1 (en) * 2004-01-22 2011-12-21 Canon Kabushiki Kaisha Antistatic film, spacer using it and picture display unit
US20050236270A1 (en) * 2004-04-23 2005-10-27 Heraeus, Inc. Controlled cooling of sputter targets
US20060144697A1 (en) * 2005-01-06 2006-07-06 Centre Luxembourgeois de Recherches pour le Verre et la Ceramique S.A. (C.R.V.C.) Dudelange Method of making coated article by sputtering cast target to form zinc oxide inclusive layer(s)
US20060289304A1 (en) * 2005-06-22 2006-12-28 Guardian Industries Corp. Sputtering target with slow-sputter layer under target material
US8123919B2 (en) * 2005-09-20 2012-02-28 Guardian Industries Corp. Sputtering target with bonding layer of varying thickness under target material
CA2626073A1 (en) * 2005-11-01 2007-05-10 Cardinal Cg Company Reactive sputter deposition processes and equipment
US20070134500A1 (en) * 2005-12-14 2007-06-14 Klaus Hartig Sputtering targets and methods for depositing film containing tin and niobium
US20070289869A1 (en) * 2006-06-15 2007-12-20 Zhifei Ye Large Area Sputtering Target
AT504220B1 (de) * 2006-12-13 2008-04-15 Miba Gleitlager Gmbh Gleitlager
JP5798482B2 (ja) * 2008-07-08 2015-10-21 ソレラス・アドヴァンスト・コーティングス・ビーヴイビーエー 第１の相および第２の相を含む酸化物スパッタターゲットの製造方法
KR20150003713U (ko) * 2013-02-01 2015-10-12 어플라이드 머티어리얼스, 인코포레이티드 도핑된 아연 타겟
CN103320760B (zh) * 2013-07-12 2015-04-15 长春理工大学 MgZnO薄膜叠靶射频磁控溅射制备方法
EP2947175A1 (en) * 2014-05-21 2015-11-25 Heraeus Deutschland GmbH & Co. KG CuSn, CuZn and Cu2ZnSn sputter targets
US20160133826A1 (en) * 2014-11-06 2016-05-12 Agency For Science, Technology & Research Method of making lead-free ceramic coating

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61158622A (ja) * 1984-12-29 1986-07-18 大阪特殊合金株式会社 透明導電膜の製造方法及びその装置
JPS63190156A (ja) * 1987-01-31 1988-08-05 Toyoda Gosei Co Ltd 金属溶射法
JPH0539566A (ja) * 1991-02-19 1993-02-19 Mitsubishi Materials Corp スパツタリング用ターゲツト及びその製造方法
JPH06346232A (ja) * 1993-06-11 1994-12-20 Asahi Glass Co Ltd スパッタリング用ターゲットおよびその製造方法
JPH08109472A (ja) * 1994-10-14 1996-04-30 Asahi Glass Co Ltd スパッタリング用ターゲットおよびその製造方法
JPH11181563A (ja) * 1997-12-17 1999-07-06 Daido Steel Co Ltd 表面硬化アルミニウム部材およびその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3318828C2 (de) * 1983-05-24 1986-01-02 Interpane Entwicklungs- und Beratungsgesellschaft mbH & Co. KG, 3471 Lauenförde Verfahren zum Aufbonden von Targetmaterial
US4610771A (en) 1984-10-29 1986-09-09 Ppg Industries, Inc. Sputtered films of metal alloy oxides and method of preparation thereof
US5171411A (en) * 1991-05-21 1992-12-15 The Boc Group, Inc. Rotating cylindrical magnetron structure with self supporting zinc alloy target
US5922176A (en) * 1992-06-12 1999-07-13 Donnelly Corporation Spark eliminating sputtering target and method for using and making same
US5693203A (en) * 1992-09-29 1997-12-02 Japan Energy Corporation Sputtering target assembly having solid-phase bonded interface
DE19626732B4 (de) * 1996-07-03 2009-01-29 W.C. Heraeus Gmbh Vorrichtung und Verfahren zum Herstellen und Recyclen von Sputtertargets
US6899953B1 (en) * 1998-05-08 2005-05-31 Ppg Industries Ohio, Inc. Shippable heat-treatable sputter coated article and zinc cathode sputtering target containing low amounts of tin

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61158622A (ja) * 1984-12-29 1986-07-18 大阪特殊合金株式会社 透明導電膜の製造方法及びその装置
JPS63190156A (ja) * 1987-01-31 1988-08-05 Toyoda Gosei Co Ltd 金属溶射法
JPH0539566A (ja) * 1991-02-19 1993-02-19 Mitsubishi Materials Corp スパツタリング用ターゲツト及びその製造方法
JPH06346232A (ja) * 1993-06-11 1994-12-20 Asahi Glass Co Ltd スパッタリング用ターゲットおよびその製造方法
JPH08109472A (ja) * 1994-10-14 1996-04-30 Asahi Glass Co Ltd スパッタリング用ターゲットおよびその製造方法
JPH11181563A (ja) * 1997-12-17 1999-07-06 Daido Steel Co Ltd 表面硬化アルミニウム部材およびその製造方法

Also Published As

Publication number Publication date
EP1235948B1 (en) 2005-10-12
EP1235948A2 (en) 2002-09-04
DE60023176D1 (de) 2006-02-23
JP2003516473A (ja) 2003-05-13
US6787003B2 (en) 2004-09-07
AU4515201A (en) 2001-06-18
ATE306571T1 (de) 2005-10-15
DE60023176T2 (de) 2006-06-14
US20020192390A1 (en) 2002-12-19
WO2001042522A3 (en) 2002-05-02
WO2001042522A2 (en) 2001-06-14
ES2250229T3 (es) 2006-04-16

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