DE60023176T2 - Sputtertarget und verfahren zur herstellung eines solchen targets - Google Patents
Sputtertarget und verfahren zur herstellung eines solchen targets Download PDFInfo
- Publication number
- DE60023176T2 DE60023176T2 DE60023176T DE60023176T DE60023176T2 DE 60023176 T2 DE60023176 T2 DE 60023176T2 DE 60023176 T DE60023176 T DE 60023176T DE 60023176 T DE60023176 T DE 60023176T DE 60023176 T2 DE60023176 T2 DE 60023176T2
- Authority
- DE
- Germany
- Prior art keywords
- zinc
- metal
- sputterable material
- target
- sputtertarget
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract 5
- 229910052725 zinc Inorganic materials 0.000 abstract 5
- 239000011701 zinc Substances 0.000 abstract 5
- 239000000463 material Substances 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 4
- 229910052751 metal Inorganic materials 0.000 abstract 4
- 239000011159 matrix material Substances 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 238000005477 sputtering target Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C18/00—Alloys based on zinc
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16896599P | 1999-12-03 | 1999-12-03 | |
PCT/US2000/042533 WO2001042522A2 (en) | 1999-12-03 | 2000-12-01 | Sputtering target and methods of making same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60023176D1 DE60023176D1 (de) | 2006-02-23 |
DE60023176T2 true DE60023176T2 (de) | 2006-06-14 |
Family
ID=22613726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60023176T Expired - Lifetime DE60023176T2 (de) | 1999-12-03 | 2000-12-01 | Sputtertarget und verfahren zur herstellung eines solchen targets |
Country Status (8)
Country | Link |
---|---|
US (1) | US6787003B2 (de) |
EP (1) | EP1235948B1 (de) |
JP (1) | JP4851672B2 (de) |
AT (1) | ATE306571T1 (de) |
AU (1) | AU4515201A (de) |
DE (1) | DE60023176T2 (de) |
ES (1) | ES2250229T3 (de) |
WO (1) | WO2001042522A2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002027057A2 (en) * | 2000-09-25 | 2002-04-04 | Cardinal Cg Company | Sputtering target and method of making same |
JP3355373B1 (ja) * | 2001-06-14 | 2002-12-09 | 鈴鹿工業高等専門学校長 | すず−亜鉛合金膜の製造方法 |
EP1419284A1 (de) * | 2001-08-13 | 2004-05-19 | N.V. Bekaert S.A. | Sputter-target |
EP1693483B1 (de) | 2002-08-02 | 2009-10-07 | Idemitsu Kosan Co., Ltd. | Sputtertarget, Sinterkörper, unter deren Verwendung gebildeter leitfähiger Film, organische EL-Vorrichtung und für diesen verwendetes Substrat |
WO2004016823A1 (ja) * | 2002-08-12 | 2004-02-26 | Nikko Materials Company, Limited | シリコン基板又はシリコンスパッタリングターゲット及びこれらの製造方法 |
US7118726B2 (en) | 2002-12-13 | 2006-10-10 | Clark Manufacturing, Llc | Method for making oxide compounds |
US20050072668A1 (en) * | 2003-10-06 | 2005-04-07 | Heraeus, Inc. | Sputter target having modified surface texture |
CN1668162A (zh) | 2004-01-22 | 2005-09-14 | 佳能株式会社 | 防止带电膜和使用它的隔板及图像显示装置 |
US20050236270A1 (en) * | 2004-04-23 | 2005-10-27 | Heraeus, Inc. | Controlled cooling of sputter targets |
US20060144697A1 (en) * | 2005-01-06 | 2006-07-06 | Centre Luxembourgeois de Recherches pour le Verre et la Ceramique S.A. (C.R.V.C.) Dudelange | Method of making coated article by sputtering cast target to form zinc oxide inclusive layer(s) |
US20060289304A1 (en) * | 2005-06-22 | 2006-12-28 | Guardian Industries Corp. | Sputtering target with slow-sputter layer under target material |
US8123919B2 (en) * | 2005-09-20 | 2012-02-28 | Guardian Industries Corp. | Sputtering target with bonding layer of varying thickness under target material |
WO2007053586A2 (en) * | 2005-11-01 | 2007-05-10 | Cardinal Cg Company | Reactive sputter deposition processes and equipment |
US20070134500A1 (en) * | 2005-12-14 | 2007-06-14 | Klaus Hartig | Sputtering targets and methods for depositing film containing tin and niobium |
US20070289869A1 (en) * | 2006-06-15 | 2007-12-20 | Zhifei Ye | Large Area Sputtering Target |
AT504220B1 (de) * | 2006-12-13 | 2008-04-15 | Miba Gleitlager Gmbh | Gleitlager |
PL2294241T3 (pl) * | 2008-07-08 | 2012-05-31 | Bekaert Advanced Coatings | Sposób wytwarzania tarczy tlenkowej do rozpylania jonowego, zawierającej pierwszą i drugą fazę |
WO2014120485A1 (en) * | 2013-02-01 | 2014-08-07 | Applied Materials, Inc. | Doped zinc target |
CN103320760B (zh) * | 2013-07-12 | 2015-04-15 | 长春理工大学 | MgZnO薄膜叠靶射频磁控溅射制备方法 |
EP2947175A1 (de) * | 2014-05-21 | 2015-11-25 | Heraeus Deutschland GmbH & Co. KG | CuSn, CuZn und Cu2ZnSn Sputtertargets |
US20160133826A1 (en) * | 2014-11-06 | 2016-05-12 | Agency For Science, Technology & Research | Method of making lead-free ceramic coating |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3318828C2 (de) * | 1983-05-24 | 1986-01-02 | Interpane Entwicklungs- und Beratungsgesellschaft mbH & Co. KG, 3471 Lauenförde | Verfahren zum Aufbonden von Targetmaterial |
US4610771A (en) | 1984-10-29 | 1986-09-09 | Ppg Industries, Inc. | Sputtered films of metal alloy oxides and method of preparation thereof |
JPS61158622A (ja) * | 1984-12-29 | 1986-07-18 | 大阪特殊合金株式会社 | 透明導電膜の製造方法及びその装置 |
JPS63190156A (ja) * | 1987-01-31 | 1988-08-05 | Toyoda Gosei Co Ltd | 金属溶射法 |
JPH0539566A (ja) * | 1991-02-19 | 1993-02-19 | Mitsubishi Materials Corp | スパツタリング用ターゲツト及びその製造方法 |
US5171411A (en) | 1991-05-21 | 1992-12-15 | The Boc Group, Inc. | Rotating cylindrical magnetron structure with self supporting zinc alloy target |
US5922176A (en) * | 1992-06-12 | 1999-07-13 | Donnelly Corporation | Spark eliminating sputtering target and method for using and making same |
US5693203A (en) * | 1992-09-29 | 1997-12-02 | Japan Energy Corporation | Sputtering target assembly having solid-phase bonded interface |
JPH06346232A (ja) * | 1993-06-11 | 1994-12-20 | Asahi Glass Co Ltd | スパッタリング用ターゲットおよびその製造方法 |
JPH08109472A (ja) * | 1994-10-14 | 1996-04-30 | Asahi Glass Co Ltd | スパッタリング用ターゲットおよびその製造方法 |
DE19626732B4 (de) | 1996-07-03 | 2009-01-29 | W.C. Heraeus Gmbh | Vorrichtung und Verfahren zum Herstellen und Recyclen von Sputtertargets |
JPH11181563A (ja) * | 1997-12-17 | 1999-07-06 | Daido Steel Co Ltd | 表面硬化アルミニウム部材およびその製造方法 |
US6899953B1 (en) * | 1998-05-08 | 2005-05-31 | Ppg Industries Ohio, Inc. | Shippable heat-treatable sputter coated article and zinc cathode sputtering target containing low amounts of tin |
-
2000
- 2000-12-01 EP EP00992611A patent/EP1235948B1/de not_active Expired - Lifetime
- 2000-12-01 JP JP2001544390A patent/JP4851672B2/ja not_active Expired - Fee Related
- 2000-12-01 WO PCT/US2000/042533 patent/WO2001042522A2/en active IP Right Grant
- 2000-12-01 AU AU45152/01A patent/AU4515201A/en not_active Abandoned
- 2000-12-01 ES ES00992611T patent/ES2250229T3/es not_active Expired - Lifetime
- 2000-12-01 US US10/148,464 patent/US6787003B2/en not_active Expired - Fee Related
- 2000-12-01 AT AT00992611T patent/ATE306571T1/de not_active IP Right Cessation
- 2000-12-01 DE DE60023176T patent/DE60023176T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2001042522A2 (en) | 2001-06-14 |
JP2003516473A (ja) | 2003-05-13 |
EP1235948A2 (de) | 2002-09-04 |
US6787003B2 (en) | 2004-09-07 |
ATE306571T1 (de) | 2005-10-15 |
WO2001042522A3 (en) | 2002-05-02 |
AU4515201A (en) | 2001-06-18 |
JP4851672B2 (ja) | 2012-01-11 |
EP1235948B1 (de) | 2005-10-12 |
US20020192390A1 (en) | 2002-12-19 |
DE60023176D1 (de) | 2006-02-23 |
ES2250229T3 (es) | 2006-04-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |