JP4771202B2 - 密着性と摺動特性に優れた複合皮膜およびその製造方法 - Google Patents

密着性と摺動特性に優れた複合皮膜およびその製造方法 Download PDF

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Publication number
JP4771202B2
JP4771202B2 JP2005116098A JP2005116098A JP4771202B2 JP 4771202 B2 JP4771202 B2 JP 4771202B2 JP 2005116098 A JP2005116098 A JP 2005116098A JP 2005116098 A JP2005116098 A JP 2005116098A JP 4771202 B2 JP4771202 B2 JP 4771202B2
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JP
Japan
Prior art keywords
film
molybdenum disulfide
coating
lubricating
composite
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Expired - Fee Related
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JP2005116098A
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English (en)
Japanese (ja)
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JP2006291324A5 (enExample
JP2006291324A (ja
Inventor
健 井上
謙一 井上
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Proterial Ltd
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Hitachi Metals Ltd
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Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP2005116098A priority Critical patent/JP4771202B2/ja
Priority to US11/375,255 priority patent/US7485372B2/en
Priority to AT06006427T priority patent/ATE453734T1/de
Priority to DE602006011386T priority patent/DE602006011386D1/de
Priority to EP06006427A priority patent/EP1712654B1/en
Priority to CNB2006100753270A priority patent/CN100513167C/zh
Publication of JP2006291324A publication Critical patent/JP2006291324A/ja
Publication of JP2006291324A5 publication Critical patent/JP2006291324A5/ja
Application granted granted Critical
Publication of JP4771202B2 publication Critical patent/JP4771202B2/ja
Anticipated expiration legal-status Critical
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Lubricants (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Paints Or Removers (AREA)
JP2005116098A 2005-04-13 2005-04-13 密着性と摺動特性に優れた複合皮膜およびその製造方法 Expired - Fee Related JP4771202B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005116098A JP4771202B2 (ja) 2005-04-13 2005-04-13 密着性と摺動特性に優れた複合皮膜およびその製造方法
US11/375,255 US7485372B2 (en) 2005-04-13 2006-03-15 Multi-layer coating having excellent adhesion and sliding properties and production method thereof
DE602006011386T DE602006011386D1 (de) 2005-04-13 2006-03-28 Mehrfachbeschichtung mit exzellenten Haftungs- und Gleiteigenschaften und Herstellungsverfahren
EP06006427A EP1712654B1 (en) 2005-04-13 2006-03-28 Multi-layer coating having excellent adhesion and sliding properties and production method thereof
AT06006427T ATE453734T1 (de) 2005-04-13 2006-03-28 Mehrfachbeschichtung mit exzellenten haftungs- und gleiteigenschaften und herstellungsverfahren
CNB2006100753270A CN100513167C (zh) 2005-04-13 2006-04-12 具有优异粘合力和滑动性能的多层被覆层及其制备方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005116098A JP4771202B2 (ja) 2005-04-13 2005-04-13 密着性と摺動特性に優れた複合皮膜およびその製造方法

Publications (3)

Publication Number Publication Date
JP2006291324A JP2006291324A (ja) 2006-10-26
JP2006291324A5 JP2006291324A5 (enExample) 2008-04-24
JP4771202B2 true JP4771202B2 (ja) 2011-09-14

Family

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Family Applications (1)

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JP2005116098A Expired - Fee Related JP4771202B2 (ja) 2005-04-13 2005-04-13 密着性と摺動特性に優れた複合皮膜およびその製造方法

Country Status (6)

Country Link
US (1) US7485372B2 (enExample)
EP (1) EP1712654B1 (enExample)
JP (1) JP4771202B2 (enExample)
CN (1) CN100513167C (enExample)
AT (1) ATE453734T1 (enExample)
DE (1) DE602006011386D1 (enExample)

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EP1918421B1 (en) * 2006-09-27 2017-03-15 Hitachi Metals, Ltd. Hard-material-coated member excellent in durability
PL2252673T3 (pl) * 2008-03-13 2014-01-31 Doerken Ewald Ag Sposób regulacji współczynnika tarcia powierzchni elementu metalowego
JP2010012744A (ja) * 2008-07-07 2010-01-21 Shimano Inc 合成樹脂複合体
CN102115867A (zh) * 2009-12-30 2011-07-06 深圳森丰真空镀膜有限公司 用镀膜技术提高金属抗腐耐磨自润滑性能的方法
RU2424377C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2424376C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2424370C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2424372C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
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RU2495950C1 (ru) * 2012-06-26 2013-10-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
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RU2545972C2 (ru) * 2013-07-26 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2545958C2 (ru) * 2013-07-26 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2548553C2 (ru) * 2013-08-02 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
CN103805949B (zh) * 2014-02-17 2016-07-27 武汉大学 二硫化钼自润滑复合涂层及覆有该复合涂层的活塞环
KR101640912B1 (ko) * 2014-07-03 2016-07-20 현대자동차주식회사 고온 저마찰성 코팅층 및 이의 제조방법
CN105463391B (zh) * 2015-01-09 2018-02-06 天津职业技术师范大学 一种纳米晶ZrB2超硬涂层及制备方法
GB201507524D0 (en) * 2015-05-01 2015-06-17 Teer Coatings Ltd Improvements to molybdenum containing coatings
CN104862648B (zh) * 2015-06-16 2017-09-22 张平 一种抗摩擦磨损性能优异的MoS2‑Ti复合膜及其制备方法
EP3387164B1 (en) * 2015-12-07 2024-01-17 IHI Bernex AG Coated extrusion tool
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CN110735120B (zh) * 2019-10-31 2021-08-13 江苏科技大学 NbN/MoSN/MoS2硬质自润滑纳米结构复合膜及制备方法
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CN111304616A (zh) * 2020-04-03 2020-06-19 中国科学院兰州化学物理研究所 一种掺杂Ti、C的二硫化钼基纳米复合薄膜的制备方法
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CN116497457B (zh) * 2023-05-29 2023-09-12 中国科学院宁波材料技术与工程研究所 一种低摩擦长寿命的超晶格复合涂层及其制备方法与用途
CN117364041A (zh) * 2023-10-17 2024-01-09 南京航空航天大学 一种耐磨蚀的梯度碳氮高熵陶瓷涂层及制备方法
WO2025202285A1 (en) 2024-03-26 2025-10-02 Fundación Tecnalia Research & Innovation Method of preparation of solid multi-layer lubricant coatings

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Also Published As

Publication number Publication date
US7485372B2 (en) 2009-02-03
EP1712654B1 (en) 2009-12-30
US20060234081A1 (en) 2006-10-19
ATE453734T1 (de) 2010-01-15
EP1712654A1 (en) 2006-10-18
JP2006291324A (ja) 2006-10-26
CN100513167C (zh) 2009-07-15
CN1846990A (zh) 2006-10-18
DE602006011386D1 (de) 2010-02-11

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