DE602006011386D1 - Mehrfachbeschichtung mit exzellenten Haftungs- und Gleiteigenschaften und Herstellungsverfahren - Google Patents

Mehrfachbeschichtung mit exzellenten Haftungs- und Gleiteigenschaften und Herstellungsverfahren

Info

Publication number
DE602006011386D1
DE602006011386D1 DE602006011386T DE602006011386T DE602006011386D1 DE 602006011386 D1 DE602006011386 D1 DE 602006011386D1 DE 602006011386 T DE602006011386 T DE 602006011386T DE 602006011386 T DE602006011386 T DE 602006011386T DE 602006011386 D1 DE602006011386 D1 DE 602006011386D1
Authority
DE
Germany
Prior art keywords
excellent adhesion
layer
sliding properties
manufacturing processes
multiple coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006011386T
Other languages
English (en)
Inventor
Ken Inoue
Kenichi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Publication of DE602006011386D1 publication Critical patent/DE602006011386D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Lubricants (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
DE602006011386T 2005-04-13 2006-03-28 Mehrfachbeschichtung mit exzellenten Haftungs- und Gleiteigenschaften und Herstellungsverfahren Active DE602006011386D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005116098A JP4771202B2 (ja) 2005-04-13 2005-04-13 密着性と摺動特性に優れた複合皮膜およびその製造方法

Publications (1)

Publication Number Publication Date
DE602006011386D1 true DE602006011386D1 (de) 2010-02-11

Family

ID=36463411

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006011386T Active DE602006011386D1 (de) 2005-04-13 2006-03-28 Mehrfachbeschichtung mit exzellenten Haftungs- und Gleiteigenschaften und Herstellungsverfahren

Country Status (6)

Country Link
US (1) US7485372B2 (de)
EP (1) EP1712654B1 (de)
JP (1) JP4771202B2 (de)
CN (1) CN100513167C (de)
AT (1) ATE453734T1 (de)
DE (1) DE602006011386D1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1918421B1 (de) * 2006-09-27 2017-03-15 Hitachi Metals, Ltd. Hartstoffbeschichtetes Werkstück mit ausgezeichneter Haltbarkeit
ES2428913T3 (es) * 2008-03-13 2013-11-12 Ewald Dörken Ag Procedimiento para el ajuste del coeficiente de fricción de una pieza de trabajo metálica
JP2010012744A (ja) * 2008-07-07 2010-01-21 Shimano Inc 合成樹脂複合体
CN102115867A (zh) * 2009-12-30 2011-07-06 深圳森丰真空镀膜有限公司 用镀膜技术提高金属抗腐耐磨自润滑性能的方法
DE112011104820B4 (de) * 2011-02-01 2016-10-27 Osg Corporation Hartlaminarbeschichtung
US9101979B2 (en) 2011-10-31 2015-08-11 California Institute Of Technology Methods for fabricating gradient alloy articles with multi-functional properties
RU2495950C1 (ru) * 2012-06-26 2013-10-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2495952C1 (ru) * 2012-07-03 2013-10-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
AR092945A1 (es) * 2012-10-10 2015-05-06 Oerlikon Trading Ag Trübbach Recubrimiento para usos a altas temperaturas con solicitacion tribologica
RU2548863C2 (ru) * 2013-07-19 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2545972C2 (ru) * 2013-07-26 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2545958C2 (ru) * 2013-07-26 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2548553C2 (ru) * 2013-08-02 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
CN103805949B (zh) * 2014-02-17 2016-07-27 武汉大学 二硫化钼自润滑复合涂层及覆有该复合涂层的活塞环
KR101640912B1 (ko) * 2014-07-03 2016-07-20 현대자동차주식회사 고온 저마찰성 코팅층 및 이의 제조방법
CN105463391B (zh) * 2015-01-09 2018-02-06 天津职业技术师范大学 一种纳米晶ZrB2超硬涂层及制备方法
GB201507524D0 (en) * 2015-05-01 2015-06-17 Teer Coatings Ltd Improvements to molybdenum containing coatings
CN104862648B (zh) * 2015-06-16 2017-09-22 张平 一种抗摩擦磨损性能优异的MoS2‑Ti复合膜及其制备方法
CN108699686B (zh) * 2015-12-07 2021-01-26 Ihi伯尔纳股份公司 涂覆挤出工具
RU2643536C1 (ru) * 2017-04-04 2018-02-02 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения износостойкого покрытия для режущего инструмента
CN108103454B (zh) * 2017-11-30 2019-10-11 厦门金鹭特种合金有限公司 一种高光滑涂层刀具及其制作方法
CN109267042B (zh) * 2018-10-17 2020-07-03 中国兵器工业第五九研究所 钢铁材料耐磨自润滑涂层的制备方法
CN110735120B (zh) * 2019-10-31 2021-08-13 江苏科技大学 NbN/MoSN/MoS2硬质自润滑纳米结构复合膜及制备方法
CN111172498A (zh) * 2020-01-19 2020-05-19 中国科学院宁波材料技术与工程研究所 二硫化钼/二硫化钨多层掺钽薄膜及其制备方法与应用
CN111304616A (zh) * 2020-04-03 2020-06-19 中国科学院兰州化学物理研究所 一种掺杂Ti、C的二硫化钼基纳米复合薄膜的制备方法
CN111485212B (zh) * 2020-06-04 2022-02-22 兰州文理学院 一种亚10纳米级仿生结构二硫化钼-碳多层薄膜制备方法
CN114318270B (zh) * 2022-01-07 2023-12-15 仪征亚新科双环活塞环有限公司 一种提高活塞环外圆面硬质镀层磨合期摩擦学性能的磨合涂层及其制备方法
CN116497457B (zh) * 2023-05-29 2023-09-12 中国科学院宁波材料技术与工程研究所 一种低摩擦长寿命的超晶格复合涂层及其制备方法与用途

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61255998A (ja) 1985-05-10 1986-11-13 Mitsubishi Heavy Ind Ltd 複合潤滑被膜
CA2078245A1 (en) 1991-09-23 1993-03-24 Roland Dubach Machining tools
EP0558061B1 (de) 1992-02-27 2000-08-09 Hauzer Industries Bv Verbesserungen von Verfahren der physikalischen Dampfphasen-Abscheidung
JPH07268620A (ja) 1994-03-28 1995-10-17 Nikon Corp 低荷重で使用される硫化モリブデン潤滑膜
US5843533A (en) * 1995-03-23 1998-12-01 Lockheed Martin Energy Systems, Inc. CVD method of forming self-lubricating composites
GB9514773D0 (en) 1995-07-19 1995-09-20 Teer Coatings Ltd Methods for improving the sputter deposition of metal-sulphur coatings e.g.molybdenum disulphide(MoS2) coatings
US6423419B1 (en) 1995-07-19 2002-07-23 Teer Coatings Limited Molybdenum-sulphur coatings
JP2002513088A (ja) 1998-04-27 2002-05-08 ヨーロピアン コミュニティー レプレゼンティッド バイ ザ コミッション オブ ザ ヨーロピアン コミュニティーズ 切削工具用の低摩擦コーティング
JP2000001768A (ja) * 1998-06-16 2000-01-07 Nippon Coating Center Kk 固体潤滑性を有する複合耐磨耗性硬質皮膜、並びに皮膜付き物品
ES2197083T3 (es) 1999-03-03 2004-01-01 Widia Gmbh Pieza de corte para arrancar virutas de materiales metalicos con un revestimiento que contiene sulfuro de molibdeno y procedimiento para su fabricacion.
US6521349B1 (en) * 1999-03-03 2003-02-18 Widia Gmbh Tool with a molybdenum sulfide coating and method for producing the same
JP2001140057A (ja) * 1999-11-17 2001-05-22 Toyota Motor Corp 自己潤滑摺動材料
JP2002307128A (ja) * 2001-04-10 2002-10-22 Hitachi Metals Ltd 耐焼付き性および耐摩耗性に優れた温熱間加工用被覆工具
ATE509139T1 (de) 2001-03-30 2011-05-15 Hitachi Metals Ltd Beschichtetes schneidwerkzeug für warm/und heissverformen
JP4756434B2 (ja) * 2001-06-14 2011-08-24 日立金属株式会社 皮膜形成装置
US7147939B2 (en) * 2003-02-27 2006-12-12 Kennametal Inc. Coated carbide tap

Also Published As

Publication number Publication date
US7485372B2 (en) 2009-02-03
EP1712654B1 (de) 2009-12-30
JP2006291324A (ja) 2006-10-26
CN1846990A (zh) 2006-10-18
EP1712654A1 (de) 2006-10-18
JP4771202B2 (ja) 2011-09-14
CN100513167C (zh) 2009-07-15
ATE453734T1 (de) 2010-01-15
US20060234081A1 (en) 2006-10-19

Similar Documents

Publication Publication Date Title
DE602006011386D1 (de) Mehrfachbeschichtung mit exzellenten Haftungs- und Gleiteigenschaften und Herstellungsverfahren
US7820293B2 (en) Substrate coated with a layered structure comprising a tetrahedral carbon coating
US7947372B2 (en) Substrate coated with a layered structure comprising a tetrahedral carbon layer and a softer outer layer
WO2008129528A3 (en) Coated cutting tool
DE60038783D1 (de) Hartschichten auf Komponenten
ATE467696T1 (de) Hartbeschichtung für ein formgebungswerkzeug und formgebungswerkzeug
US10131988B2 (en) Sliding element, in particular piston ring, and combination of a sliding element with a mating running element
SE0600104L (sv) Belagt skär
DE602004004150D1 (de) Substrat mit zwischenüberzug und hartem kohlenstoffüberzug
JP2006291324A5 (de)
DE602006009162D1 (de) Beschichtetes Hartmetallschneidwerkzeug mit einer harten verschleissfesten Schicht für Hochgeschwindigkeitsschneiden von Hartstahl
DK1657323T3 (da) Glideelement med fortrinlig slidbestandighed i vandbaserede miljöer
EP1905863A3 (de) Gleitelement
SE0500648L (sv) Belagt skär
DE602008005651D1 (de) Texturgehärtetes Alpha-Aluminium-beschichtetes Werkzeug
FR2900417B1 (fr) Film multicouche dur a base de carbone amorphe et element a surface dure ayant le film sur une surface
CN107835866B (zh) 滑动构件及活塞环
JP2009534524A5 (de)
KR102112891B1 (ko) 고온에서 사용 가능한 마찰 응력을 갖는 코팅
ATE455379T1 (de) Beschichtungen aus m(n+1)ax(n)-material für elektrische kontaktelemente
JP5090389B2 (ja) Ｄｌｃコーティングルアー
SE0502747L (sv) Belagt hårdmetallskär, sätt att framställa detta samt dess användning för svarvning
SE0202107D0 (sv) Surface modified stainless steel
RU2012108615A (ru) Трибология в сочетании с коррозионной стойкостью: новое семейство pvd-и pacvd-покрытий
WO2009003206A3 (de) Al-Ti-Ru-N-C HARTSTOFFSCHICHT

Legal Events

Date Code Title Description
8364 No opposition during term of opposition