FR2900417B1 - Film multicouche dur a base de carbone amorphe et element a surface dure ayant le film sur une surface - Google Patents

Film multicouche dur a base de carbone amorphe et element a surface dure ayant le film sur une surface

Info

Publication number
FR2900417B1
FR2900417B1 FR0701463A FR0701463A FR2900417B1 FR 2900417 B1 FR2900417 B1 FR 2900417B1 FR 0701463 A FR0701463 A FR 0701463A FR 0701463 A FR0701463 A FR 0701463A FR 2900417 B1 FR2900417 B1 FR 2900417B1
Authority
FR
France
Prior art keywords
amorphous carbon
film
hard
layer
base layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0701463A
Other languages
English (en)
Other versions
FR2900417A1 (fr
Inventor
Kenji Yamamoto
Katsuhiro Matsukado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of FR2900417A1 publication Critical patent/FR2900417A1/fr
Application granted granted Critical
Publication of FR2900417B1 publication Critical patent/FR2900417B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Abstract

On met à disposition un film de carbone amorphe (DLC) ayant une excellente adhérence à une température élevée. Un film multicouche dur à base de carbone amorphe, qui est formé sur une surface d'un substrat, comprend une couche de base formée sur le côté substrat, une couche de surface formée sur le côté surface, et une couche à gradient de composition formée entre la couche de base et la couche de surface, où la couche de base comprend un nitrure ou un carbonitrure d'un élément M exprimé par la formule (1) suivante, la couche de surface comprend un film de carbone amorphe contenant 50 % atomiques ou plus de C, et la couche à gradient de composition est une couche dans laquelle l'élément M et l'azote diminuent, et le carbone augmente, de la couche de base au film de carbone amorphe :M1-x-yCxNy ... (1)(où M est au moins un élément choisi parmi les éléments du Groupe 4A du Tableau Périodique, les éléments du Groupe 5A, les éléments du Groupe 6A, Al, et Si, et x et y désignent les rapports atomiques dans la formule, et x vaut 0,5 ou moins, y vaut 0,03 ou plus, et 1-x-y est supérieur à 0).
FR0701463A 2006-04-27 2007-02-28 Film multicouche dur a base de carbone amorphe et element a surface dure ayant le film sur une surface Expired - Fee Related FR2900417B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006123668A JP4704950B2 (ja) 2006-04-27 2006-04-27 非晶質炭素系硬質多層膜及びこの膜を表面に備えた硬質表面部材

Publications (2)

Publication Number Publication Date
FR2900417A1 FR2900417A1 (fr) 2007-11-02
FR2900417B1 true FR2900417B1 (fr) 2011-01-21

Family

ID=38565028

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0701463A Expired - Fee Related FR2900417B1 (fr) 2006-04-27 2007-02-28 Film multicouche dur a base de carbone amorphe et element a surface dure ayant le film sur une surface

Country Status (6)

Country Link
US (1) US7887919B2 (fr)
JP (1) JP4704950B2 (fr)
KR (2) KR20070105895A (fr)
CN (1) CN100586709C (fr)
DE (1) DE102007010595B4 (fr)
FR (1) FR2900417B1 (fr)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120144985A1 (en) * 2007-06-22 2012-06-14 Fn Manufacturing Llc Light Weight Machine Gun
JP2009155721A (ja) * 2007-12-03 2009-07-16 Kobe Steel Ltd 摺動性に優れる硬質皮膜とその硬質皮膜の形成方法
WO2009099226A1 (fr) 2008-02-06 2009-08-13 Kanagawa Prefecture Élément coulissant revêtu de carbone sous forme de diamant amorphe et son procédé de fabrication
DE102008016864B3 (de) * 2008-04-02 2009-10-22 Federal-Mogul Burscheid Gmbh Kolbenring
DE102008042896A1 (de) * 2008-10-16 2010-04-22 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung eines Gleitelements und Gleitelement, insbesondere Kolbenring oder Zylinderlaufbuchse eines Verbrennungsmotors
CN102216487B (zh) * 2008-10-29 2014-07-02 Ntn株式会社 硬质多层膜成型体及其制造方法
JP5222764B2 (ja) * 2009-03-24 2013-06-26 株式会社神戸製鋼所 積層皮膜および積層皮膜被覆部材
CN101554790B (zh) * 2009-05-18 2012-07-04 浙江大学 一种超硬碳薄膜及其制备方法
CN102002684B (zh) * 2009-08-31 2014-07-30 日立金属株式会社 滑动部件
JP5418405B2 (ja) * 2010-05-31 2014-02-19 日立ツール株式会社 摺動部品の使用方法および該摺動部品を用いた摺動装置
JP5141654B2 (ja) * 2009-08-31 2013-02-13 日立ツール株式会社 摺動部品
US20110254138A1 (en) * 2010-04-15 2011-10-20 International Business Machines Corporation Low-temperature absorber film and method of fabrication
JP6116910B2 (ja) * 2010-11-30 2017-04-19 株式会社野村鍍金 導電性硬質炭素膜及びその成膜方法
US9528180B2 (en) * 2011-03-02 2016-12-27 Oerlikon Surface Solutions Ag, Pfaffikon Sliding component coated with metal-comprising carbon layer for improving wear and friction behavior by tribological applications under lubricated conditions
JP2012224043A (ja) * 2011-04-22 2012-11-15 Hitachi Ltd Ｄｌｃ膜を備えた摺動部材
FR2975404B1 (fr) * 2011-05-19 2014-01-24 Hydromecanique & Frottement Piece avec revetement dlc et procede d'application du revetement dlc
CN102286719A (zh) * 2011-07-21 2011-12-21 中国第一汽车股份有限公司 一种应用于汽车铝合金运动摩擦副表面耐磨涂层
CN102286726A (zh) * 2011-07-21 2011-12-21 中国第一汽车股份有限公司 一种应用于汽车普通碳钢运动摩擦副表面耐磨涂层
CN102286723A (zh) * 2011-07-21 2011-12-21 中国第一汽车股份有限公司 一种应用于汽车高合金钢运动摩擦副表面耐磨涂层
AT511605B1 (de) * 2011-12-12 2013-01-15 High Tech Coatings Gmbh Kohlenstoffbasierende beschichtung
WO2014147805A1 (fr) * 2013-03-22 2014-09-25 日鍛バルブ株式会社 Film de revêtement à base de carbone sous forme de diamant amorphe (cda) et poussoir de soupape revêtu
US9371576B2 (en) * 2013-07-15 2016-06-21 GM Global Technology Operations LLC Coated tool and methods of making and using the coated tool
US10612123B2 (en) * 2015-02-04 2020-04-07 The University Of Akron Duplex surface treatment for titanium alloys
JP7106194B2 (ja) 2016-03-01 2022-07-26 エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン ジルコニウム接着膜を備えた水素フリー炭素被覆部
JP2018031334A (ja) * 2016-08-26 2018-03-01 三菱重工コンプレッサ株式会社 積層構造、及び、積層構造を有する機械部品
CN106756828B (zh) * 2016-12-14 2019-04-16 文晓斌 一种含钨自润滑刀具镀层制备方法
WO2018112910A1 (fr) * 2016-12-23 2018-06-28 深圳市金洲精工科技股份有限公司 Revêtement composite de dispositif de coupe, dispositif de coupe et procédé de préparation d'un revêtement composite de dispositif de coupe
CN107937871A (zh) * 2017-10-20 2018-04-20 上海交通大学 一种燃料电池双极板复合涂层及其制备方法
DE102018125631A1 (de) * 2018-10-16 2020-04-16 Schaeffler Technologies AG & Co. KG Schichtsystem, Rollelement und Verfahren
CN112030121B (zh) * 2019-06-03 2023-06-02 中国科学院宁波材料技术与工程研究所 宽温域减摩耐磨MoCN复合薄膜、其制备方法及应用
CN110273127A (zh) * 2019-07-22 2019-09-24 上海妙壳新材料科技有限公司 一种刀具涂层及其生产设备
EP4031690A1 (fr) * 2019-09-19 2022-07-27 Oerlikon Surface Solutions AG, Pfäffikon Substrat pourvu d'un système stratifié contenant du nitrure de molybdène et procédé de revêtement pour la réalisation d'un système stratifié
CN113699498B (zh) * 2021-08-20 2023-09-29 中国科学院宁波材料技术与工程研究所 一种碳化VAlN硬质固体润滑涂层及其制备方法
CN113699483A (zh) * 2021-08-31 2021-11-26 东风商用车有限公司 一种齿轮的表面处理技术及齿轮

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE453474B (sv) * 1984-06-27 1988-02-08 Santrade Ltd Kompoundkropp belagd med skikt av polykristallin diamant
CA2061944C (fr) 1991-03-08 1999-01-26 Naoya Omori Materiau dur carbone et diamante ou materiau du genre
JPH07109034B2 (ja) 1991-04-08 1995-11-22 ワイケイケイ株式会社 硬質多層膜形成体およびその製造方法
US5626963A (en) 1993-07-07 1997-05-06 Sanyo Electric Co., Ltd. Hard-carbon-film-coated substrate and apparatus for forming the same
JP3231165B2 (ja) * 1993-11-15 2001-11-19 キヤノン株式会社 光学素子成形用型及びその製造方法
JPH0813148A (ja) * 1994-06-28 1996-01-16 Toshiba Tungaloy Co Ltd 耐剥離性ダイヤモンド被覆部材
JPH0874032A (ja) 1994-09-12 1996-03-19 Nissin Electric Co Ltd 硬質炭素膜被覆部材及びその製造方法
DE19826259A1 (de) * 1997-06-16 1998-12-17 Bosch Gmbh Robert Verfahren und Einrichtung zum Vakuumbeschichten eines Substrates
JP3918895B2 (ja) * 1998-11-05 2007-05-23 山口県 低摩擦係数の複合硬質皮膜の形成法及び複合硬質皮膜
JP2000256850A (ja) 1999-03-04 2000-09-19 Riken Corp ダイヤモンドライクカーボン薄膜及びその製造方法
DE60040365D1 (de) * 1999-07-08 2008-11-13 Sumitomo Electric Industries Harte Beschichtung und beschichtetes Bauteil
JP4560964B2 (ja) * 2000-02-25 2010-10-13 住友電気工業株式会社 非晶質炭素被覆部材
DE10018143C5 (de) 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
JP2002088465A (ja) 2000-09-11 2002-03-27 Matsushita Electric Ind Co Ltd 金属基材への硬質炭素膜の成膜方法
US6881475B2 (en) 2001-06-13 2005-04-19 Sumitomo Electric Industries, Ltd Amorphous carbon coated tool and fabrication method thereof
JP4139102B2 (ja) 2001-12-06 2008-08-27 株式会社デンソー ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
JP4122387B2 (ja) * 2002-03-15 2008-07-23 山口県 複合硬質皮膜、その製造方法及び成膜装置
JP4253184B2 (ja) * 2002-12-27 2009-04-08 株式会社神戸製鋼所 密着性に優れた硬質皮膜およびその製造方法
CN100387754C (zh) 2005-10-12 2008-05-14 中国地质大学（北京） 一种含铬类金刚石薄膜的制备方法

Also Published As

Publication number Publication date
JP2007291484A (ja) 2007-11-08
US20070254187A1 (en) 2007-11-01
US7887919B2 (en) 2011-02-15
KR20090029239A (ko) 2009-03-20
DE102007010595A1 (de) 2007-11-08
DE102007010595B4 (de) 2013-08-29
KR101177162B1 (ko) 2012-08-24
CN101062602A (zh) 2007-10-31
KR20070105895A (ko) 2007-10-31
CN100586709C (zh) 2010-02-03
FR2900417A1 (fr) 2007-11-02
JP4704950B2 (ja) 2011-06-22

Similar Documents

Publication Publication Date Title
FR2900417B1 (fr) Film multicouche dur a base de carbone amorphe et element a surface dure ayant le film sur une surface
SE0402162D0 (sv) Multilayered film having excellent wear resistance, heat resistance and adhesion to substrate and method for producing the same
KR101000241B1 (ko) 성형용 치공구용 경질 피막 피복 부재 및 성형용 치공구
EP1674663A3 (fr) Revetement de barrière thérmique, élément revetu d'un revetement de barrière thérmique et son procédé de fabrication.
DE602008005748D1 (de) Spannungsreduzierte Ni-P/Pd-Stapel für Waferoberfläche
FR2890983B1 (fr) Composition d'electrodeposition destinee au revetement d'une surface d'un substrat par un metal.
WO2007118061A3 (fr) Milieux de diffusion de gaz à nano-dimension
MA32144B1 (fr) Article réfléchissant
WO2009054140A1 (fr) Dispositif à semi-conducteur et son procédé de fabrication
WO2008123958A3 (fr) Substrats inorganiques avec des couches de surface hydrophobes
ATE458698T1 (de) Filme aus mehrschichtigen kohlenstoff-nanoröhren
JP2009504448A5 (fr)
WO2006073435A3 (fr) Revetements nanocomposites multicouche d'extreme durete
JP2009504919A (ja) 四面体炭素膜を備える層状構造体により被覆した基板
EP1640475A3 (fr) Composés précurseurs pour la déposition de la céramique et des films métalliques et méthodes pour leur préparation
DK1828071T3 (da) Fremgangsmåde til fremstilling af et glasagtigt substrat med antimikrobielle egenskaber
WO2007124310A3 (fr) Procédé d'utilisation de plasma thermique pour produire une couche superficielle composite fonctionnellement calibrée sur des métaux
WO2008033167A3 (fr) Substrats de biopuces nanoparticulaires
DE502008003135D1 (de) Verbund aus mindestens zwei halbleitersubstraten sowie herstellungsverfahren
TW200625517A (en) Gradient deposition of low-k CVD materials
EP1842942A3 (fr) Substrat cristallin en GaN
EP1889948A3 (fr) Revêtement céramique bicouche
WO2006069068A3 (fr) Article enduit a couche de protection amovible, et procedes correspondants
TW200712486A (en) Continuous range hydrogen sensor
TW200833864A (en) Filming method for III-group nitride semiconductor laminated structure

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

PLFP Fee payment

Year of fee payment: 12

PLFP Fee payment

Year of fee payment: 14

ST Notification of lapse

Effective date: 20211005