ATE453734T1 - Mehrfachbeschichtung mit exzellenten haftungs- und gleiteigenschaften und herstellungsverfahren - Google Patents

Mehrfachbeschichtung mit exzellenten haftungs- und gleiteigenschaften und herstellungsverfahren

Info

Publication number
ATE453734T1
ATE453734T1 AT06006427T AT06006427T ATE453734T1 AT E453734 T1 ATE453734 T1 AT E453734T1 AT 06006427 T AT06006427 T AT 06006427T AT 06006427 T AT06006427 T AT 06006427T AT E453734 T1 ATE453734 T1 AT E453734T1
Authority
AT
Austria
Prior art keywords
layer
excellent adhesion
sliding properties
manufacturing process
multiple coating
Prior art date
Application number
AT06006427T
Other languages
English (en)
Inventor
Ken Inoue
Kenichi Inoue
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Application granted granted Critical
Publication of ATE453734T1 publication Critical patent/ATE453734T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Lubricants (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Paints Or Removers (AREA)
AT06006427T 2005-04-13 2006-03-28 Mehrfachbeschichtung mit exzellenten haftungs- und gleiteigenschaften und herstellungsverfahren ATE453734T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005116098A JP4771202B2 (ja) 2005-04-13 2005-04-13 密着性と摺動特性に優れた複合皮膜およびその製造方法

Publications (1)

Publication Number Publication Date
ATE453734T1 true ATE453734T1 (de) 2010-01-15

Family

ID=36463411

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06006427T ATE453734T1 (de) 2005-04-13 2006-03-28 Mehrfachbeschichtung mit exzellenten haftungs- und gleiteigenschaften und herstellungsverfahren

Country Status (6)

Country Link
US (1) US7485372B2 (de)
EP (1) EP1712654B1 (de)
JP (1) JP4771202B2 (de)
CN (1) CN100513167C (de)
AT (1) ATE453734T1 (de)
DE (1) DE602006011386D1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111304616A (zh) * 2020-04-03 2020-06-19 中国科学院兰州化学物理研究所 一种掺杂Ti、C的二硫化钼基纳米复合薄膜的制备方法

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JP2010012744A (ja) * 2008-07-07 2010-01-21 Shimano Inc 合成樹脂複合体
CN102115867A (zh) * 2009-12-30 2011-07-06 深圳森丰真空镀膜有限公司 用镀膜技术提高金属抗腐耐磨自润滑性能的方法
DE112011104820B4 (de) * 2011-02-01 2016-10-27 Osg Corporation Hartlaminarbeschichtung
US9101979B2 (en) 2011-10-31 2015-08-11 California Institute Of Technology Methods for fabricating gradient alloy articles with multi-functional properties
RU2495950C1 (ru) * 2012-06-26 2013-10-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2495952C1 (ru) * 2012-07-03 2013-10-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
AR092945A1 (es) * 2012-10-10 2015-05-06 Oerlikon Trading Ag Trübbach Recubrimiento para usos a altas temperaturas con solicitacion tribologica
RU2548863C2 (ru) * 2013-07-19 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2545958C2 (ru) * 2013-07-26 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2545972C2 (ru) * 2013-07-26 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2548553C2 (ru) * 2013-08-02 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
CN103805949B (zh) * 2014-02-17 2016-07-27 武汉大学 二硫化钼自润滑复合涂层及覆有该复合涂层的活塞环
KR101640912B1 (ko) * 2014-07-03 2016-07-20 현대자동차주식회사 고온 저마찰성 코팅층 및 이의 제조방법
CN105463391B (zh) * 2015-01-09 2018-02-06 天津职业技术师范大学 一种纳米晶ZrB2超硬涂层及制备方法
GB201507524D0 (en) * 2015-05-01 2015-06-17 Teer Coatings Ltd Improvements to molybdenum containing coatings
CN104862648B (zh) * 2015-06-16 2017-09-22 张平 一种抗摩擦磨损性能优异的MoS2‑Ti复合膜及其制备方法
JP7028403B2 (ja) * 2015-12-07 2022-03-02 アイエイチアイ ベルネックス アーゲー コーティングされた押出工具
RU2643536C1 (ru) * 2017-04-04 2018-02-02 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения износостойкого покрытия для режущего инструмента
CN108103454B (zh) * 2017-11-30 2019-10-11 厦门金鹭特种合金有限公司 一种高光滑涂层刀具及其制作方法
CN109267042B (zh) * 2018-10-17 2020-07-03 中国兵器工业第五九研究所 钢铁材料耐磨自润滑涂层的制备方法
CN110735120B (zh) * 2019-10-31 2021-08-13 江苏科技大学 NbN/MoSN/MoS2硬质自润滑纳米结构复合膜及制备方法
CN111172498A (zh) 2020-01-19 2020-05-19 中国科学院宁波材料技术与工程研究所 二硫化钼/二硫化钨多层掺钽薄膜及其制备方法与应用
CN111485212B (zh) * 2020-06-04 2022-02-22 兰州文理学院 一种亚10纳米级仿生结构二硫化钼-碳多层薄膜制备方法
CN114318270B (zh) * 2022-01-07 2023-12-15 仪征亚新科双环活塞环有限公司 一种提高活塞环外圆面硬质镀层磨合期摩擦学性能的磨合涂层及其制备方法
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Also Published As

Publication number Publication date
US7485372B2 (en) 2009-02-03
JP2006291324A (ja) 2006-10-26
CN100513167C (zh) 2009-07-15
EP1712654B1 (de) 2009-12-30
US20060234081A1 (en) 2006-10-19
DE602006011386D1 (de) 2010-02-11
CN1846990A (zh) 2006-10-18
EP1712654A1 (de) 2006-10-18
JP4771202B2 (ja) 2011-09-14

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