CN100513167C - 具有优异粘合力和滑动性能的多层被覆层及其制备方法 - Google Patents

具有优异粘合力和滑动性能的多层被覆层及其制备方法 Download PDF

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CN100513167C
CN100513167C CNB2006100753270A CN200610075327A CN100513167C CN 100513167 C CN100513167 C CN 100513167C CN B2006100753270 A CNB2006100753270 A CN B2006100753270A CN 200610075327 A CN200610075327 A CN 200610075327A CN 100513167 C CN100513167 C CN 100513167C
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China
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layer
lubricating layer
coating
hard formation
source
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Expired - Fee Related
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Chinese (zh)
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CN1846990A (zh
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井上健
井上谦一
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Proterial Ltd
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Hitachi Metals Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Lubricants (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Paints Or Removers (AREA)
CNB2006100753270A 2005-04-13 2006-04-12 具有优异粘合力和滑动性能的多层被覆层及其制备方法 Expired - Fee Related CN100513167C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005116098A JP4771202B2 (ja) 2005-04-13 2005-04-13 密着性と摺動特性に優れた複合皮膜およびその製造方法
JP2005116098 2005-04-13

Publications (2)

Publication Number Publication Date
CN1846990A CN1846990A (zh) 2006-10-18
CN100513167C true CN100513167C (zh) 2009-07-15

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Country Status (6)

Country Link
US (1) US7485372B2 (enExample)
EP (1) EP1712654B1 (enExample)
JP (1) JP4771202B2 (enExample)
CN (1) CN100513167C (enExample)
AT (1) ATE453734T1 (enExample)
DE (1) DE602006011386D1 (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1918421B1 (en) * 2006-09-27 2017-03-15 Hitachi Metals, Ltd. Hard-material-coated member excellent in durability
PL2252673T3 (pl) * 2008-03-13 2014-01-31 Doerken Ewald Ag Sposób regulacji współczynnika tarcia powierzchni elementu metalowego
JP2010012744A (ja) * 2008-07-07 2010-01-21 Shimano Inc 合成樹脂複合体
CN102115867A (zh) * 2009-12-30 2011-07-06 深圳森丰真空镀膜有限公司 用镀膜技术提高金属抗腐耐磨自润滑性能的方法
RU2424377C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2424376C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2424370C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2424372C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
DE112011104820B4 (de) * 2011-02-01 2016-10-27 Osg Corporation Hartlaminarbeschichtung
US9101979B2 (en) 2011-10-31 2015-08-11 California Institute Of Technology Methods for fabricating gradient alloy articles with multi-functional properties
RU2495950C1 (ru) * 2012-06-26 2013-10-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2495952C1 (ru) * 2012-07-03 2013-10-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
AR092945A1 (es) * 2012-10-10 2015-05-06 Oerlikon Trading Ag Trübbach Recubrimiento para usos a altas temperaturas con solicitacion tribologica
RU2548863C2 (ru) * 2013-07-19 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2545972C2 (ru) * 2013-07-26 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2545958C2 (ru) * 2013-07-26 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2548553C2 (ru) * 2013-08-02 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
CN103805949B (zh) * 2014-02-17 2016-07-27 武汉大学 二硫化钼自润滑复合涂层及覆有该复合涂层的活塞环
KR101640912B1 (ko) * 2014-07-03 2016-07-20 현대자동차주식회사 고온 저마찰성 코팅층 및 이의 제조방법
CN105463391B (zh) * 2015-01-09 2018-02-06 天津职业技术师范大学 一种纳米晶ZrB2超硬涂层及制备方法
GB201507524D0 (en) * 2015-05-01 2015-06-17 Teer Coatings Ltd Improvements to molybdenum containing coatings
CN104862648B (zh) * 2015-06-16 2017-09-22 张平 一种抗摩擦磨损性能优异的MoS2‑Ti复合膜及其制备方法
EP3387164B1 (en) * 2015-12-07 2024-01-17 IHI Bernex AG Coated extrusion tool
RU2643536C1 (ru) * 2017-04-04 2018-02-02 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения износостойкого покрытия для режущего инструмента
CN108103454B (zh) * 2017-11-30 2019-10-11 厦门金鹭特种合金有限公司 一种高光滑涂层刀具及其制作方法
CN109267042B (zh) * 2018-10-17 2020-07-03 中国兵器工业第五九研究所 钢铁材料耐磨自润滑涂层的制备方法
CN110735120B (zh) * 2019-10-31 2021-08-13 江苏科技大学 NbN/MoSN/MoS2硬质自润滑纳米结构复合膜及制备方法
CN111172498A (zh) * 2020-01-19 2020-05-19 中国科学院宁波材料技术与工程研究所 二硫化钼/二硫化钨多层掺钽薄膜及其制备方法与应用
CN111304616A (zh) * 2020-04-03 2020-06-19 中国科学院兰州化学物理研究所 一种掺杂Ti、C的二硫化钼基纳米复合薄膜的制备方法
CN111485212B (zh) * 2020-06-04 2022-02-22 兰州文理学院 一种亚10纳米级仿生结构二硫化钼-碳多层薄膜制备方法
CN114318270B (zh) * 2022-01-07 2023-12-15 仪征亚新科双环活塞环有限公司 一种提高活塞环外圆面硬质镀层磨合期摩擦学性能的磨合涂层及其制备方法
CN116497457B (zh) * 2023-05-29 2023-09-12 中国科学院宁波材料技术与工程研究所 一种低摩擦长寿命的超晶格复合涂层及其制备方法与用途
CN117364041A (zh) * 2023-10-17 2024-01-09 南京航空航天大学 一种耐磨蚀的梯度碳氮高熵陶瓷涂层及制备方法
WO2025202285A1 (en) 2024-03-26 2025-10-02 Fundación Tecnalia Research & Innovation Method of preparation of solid multi-layer lubricant coatings

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61255998A (ja) 1985-05-10 1986-11-13 Mitsubishi Heavy Ind Ltd 複合潤滑被膜
CA2078245A1 (en) * 1991-09-23 1993-03-24 Roland Dubach Machining tools
DE69329161T2 (de) 1992-02-27 2001-01-11 Hauzer Industries B.V., Venlo Verbesserungen von Verfahren der physikalischen Dampfphasen-Abscheidung
JPH07268620A (ja) 1994-03-28 1995-10-17 Nikon Corp 低荷重で使用される硫化モリブデン潤滑膜
US5843533A (en) * 1995-03-23 1998-12-01 Lockheed Martin Energy Systems, Inc. CVD method of forming self-lubricating composites
US6423419B1 (en) * 1995-07-19 2002-07-23 Teer Coatings Limited Molybdenum-sulphur coatings
GB9514773D0 (en) 1995-07-19 1995-09-20 Teer Coatings Ltd Methods for improving the sputter deposition of metal-sulphur coatings e.g.molybdenum disulphide(MoS2) coatings
EP1076728A1 (en) 1998-04-27 2001-02-21 European Community (EC) A low friction coating for a cutting tool
JP2000001768A (ja) * 1998-06-16 2000-01-07 Nippon Coating Center Kk 固体潤滑性を有する複合耐磨耗性硬質皮膜、並びに皮膜付き物品
EP1161572B1 (de) * 1999-03-03 2003-06-18 Widia GmbH Schneideinsatz zum zerspanen von metallischen werkstoffen mit einer molybdänsulfid enthaltenden beschichtung und verfahren zu dessen herstellung
DE19957668A1 (de) * 1999-03-03 2000-09-07 Widia Gmbh Werkzeug mit einer Molybdänsulfidschicht und Verfahren zu dessen Herstellung
JP2001140057A (ja) * 1999-11-17 2001-05-22 Toyota Motor Corp 自己潤滑摺動材料
JP2002307128A (ja) * 2001-04-10 2002-10-22 Hitachi Metals Ltd 耐焼付き性および耐摩耗性に優れた温熱間加工用被覆工具
ATE509139T1 (de) 2001-03-30 2011-05-15 Hitachi Metals Ltd Beschichtetes schneidwerkzeug für warm/und heissverformen
JP4756434B2 (ja) * 2001-06-14 2011-08-24 日立金属株式会社 皮膜形成装置
US7147939B2 (en) * 2003-02-27 2006-12-12 Kennametal Inc. Coated carbide tap

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
The structure of tribologically improved MoS2-metalcompositecoatings and their industrial applications. V.C.Fox等.Surface and Coatings Technology,Vol.116-119. 1999 *

Also Published As

Publication number Publication date
US7485372B2 (en) 2009-02-03
EP1712654B1 (en) 2009-12-30
JP4771202B2 (ja) 2011-09-14
US20060234081A1 (en) 2006-10-19
ATE453734T1 (de) 2010-01-15
EP1712654A1 (en) 2006-10-18
JP2006291324A (ja) 2006-10-26
CN1846990A (zh) 2006-10-18
DE602006011386D1 (de) 2010-02-11

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