JP4744665B2 - 基板検査装置及び基板検査システム - Google Patents

基板検査装置及び基板検査システム Download PDF

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Publication number
JP4744665B2
JP4744665B2 JP2000072848A JP2000072848A JP4744665B2 JP 4744665 B2 JP4744665 B2 JP 4744665B2 JP 2000072848 A JP2000072848 A JP 2000072848A JP 2000072848 A JP2000072848 A JP 2000072848A JP 4744665 B2 JP4744665 B2 JP 4744665B2
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JP2001266125A (ja
JP2001266125A5 (enExample
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武博 高橋
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Olympus Corp
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Olympus Corp
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  • Length Measuring Devices By Optical Means (AREA)
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JP2000072848A 2000-03-15 2000-03-15 基板検査装置及び基板検査システム Expired - Fee Related JP4744665B2 (ja)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140070822A (ko) * 2012-11-27 2014-06-11 엘지디스플레이 주식회사 디스플레이 장치의 검사 시스템 및 검사 방법
KR20180018105A (ko) * 2016-08-12 2018-02-21 에스케이하이닉스 주식회사 반도체 패턴 계측을 위한 이미지 분석 장치 및 방법과, 이를 이용한 이미지 분석 시스템

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100689694B1 (ko) * 2001-12-27 2007-03-08 삼성전자주식회사 웨이퍼상에 발생된 결함을 검출하는 방법 및 장치
JP4088448B2 (ja) * 2002-01-21 2008-05-21 日本総合住生活株式会社 外壁検査装置および外壁検査方法並びに外壁検査診断システム
JP2006220644A (ja) * 2005-01-14 2006-08-24 Hitachi High-Technologies Corp パターン検査方法及びその装置
JP2009014617A (ja) * 2007-07-06 2009-01-22 Olympus Corp 基板外観検査装置
JP2014066628A (ja) * 2012-09-26 2014-04-17 Ricoh Co Ltd 画像検査装置、画像検査システム及び画像検査方法
KR101478790B1 (ko) 2013-10-14 2015-01-06 (주)에이티테크놀러지 인쇄회로기판의 테스트 장치
JP6953712B2 (ja) * 2016-12-26 2021-10-27 住友ゴム工業株式会社 タイヤの外観検査装置
CN110033724A (zh) * 2019-04-19 2019-07-19 陈波 一种广告液晶显示屏缺陷自动检测系统
CN114372544A (zh) * 2022-01-12 2022-04-19 江苏视睿迪光电有限公司 一种显示屏缺陷的记录装置及方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301151A (ja) * 1988-05-30 1989-12-05 Fujitsu Ltd プリント配線検査装置
JPH03186707A (ja) * 1989-12-18 1991-08-14 Hitachi Ltd 欠陥検査装置
JPH03194415A (ja) * 1989-12-22 1991-08-26 Fujitsu Ltd パターン検査装置及びパターン検査方法
JPH04285845A (ja) * 1991-03-14 1992-10-09 Fujitsu Ltd 検査装置
JP3415943B2 (ja) * 1994-09-29 2003-06-09 オリンパス光学工業株式会社 欠陥種別判定装置及びプロセス管理システム
JPH09138200A (ja) * 1995-11-14 1997-05-27 Nkk Corp 帯状体の表面欠陥判定方法
JPH09281057A (ja) * 1996-04-15 1997-10-31 Hitachi Ltd 被検査物の欠陥情報収集方法
JP3752338B2 (ja) * 1997-01-31 2006-03-08 オリンパス株式会社 マクロ検査装置及びプロセスモニタリング方法
JPH10222673A (ja) * 1997-02-12 1998-08-21 Hitachi Ltd パターン検査方法及び検査装置
JPH10325809A (ja) * 1997-05-26 1998-12-08 Fujimori Kogyo Kk ウェブの欠陥検査装置及びウェブの欠陥検査方法
JPH11173827A (ja) * 1997-12-12 1999-07-02 Canon Inc 物体の欠陥検査装置および方法、記録媒体
JP2002505436A (ja) * 1998-02-25 2002-02-19 エム．シェパード スティーヴン 物質の非破壊評価のためのデータ統合と登録方法
JP4105809B2 (ja) * 1998-09-08 2008-06-25 株式会社ルネサステクノロジ 外観検査方法および外観検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140070822A (ko) * 2012-11-27 2014-06-11 엘지디스플레이 주식회사 디스플레이 장치의 검사 시스템 및 검사 방법
KR102008474B1 (ko) * 2012-11-27 2019-08-08 엘지디스플레이 주식회사 디스플레이 장치의 검사 시스템 및 검사 방법
KR20180018105A (ko) * 2016-08-12 2018-02-21 에스케이하이닉스 주식회사 반도체 패턴 계측을 위한 이미지 분석 장치 및 방법과, 이를 이용한 이미지 분석 시스템
KR102290488B1 (ko) * 2016-08-12 2021-08-18 에스케이하이닉스 주식회사 반도체 패턴 계측을 위한 이미지 분석 장치 및 방법과, 이를 이용한 이미지 분석 시스템

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