JP4712370B2 - インプリント・リソグラフィのための複合スタンパ - Google Patents

インプリント・リソグラフィのための複合スタンパ Download PDF

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Publication number
JP4712370B2
JP4712370B2 JP2004365869A JP2004365869A JP4712370B2 JP 4712370 B2 JP4712370 B2 JP 4712370B2 JP 2004365869 A JP2004365869 A JP 2004365869A JP 2004365869 A JP2004365869 A JP 2004365869A JP 4712370 B2 JP4712370 B2 JP 4712370B2
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Japan
Prior art keywords
layer
stamper
patterned
embossable
imprint
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Expired - Fee Related
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JP2004365869A
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English (en)
Japanese (ja)
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JP2005183985A (ja
JP2005183985A5 (enExample
Inventor
アンドリュー・エム・ホモラ
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コマーグ・インコーポレーテッド
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Publication of JP2005183985A5 publication Critical patent/JP2005183985A5/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/565—Consisting of shell-like structures supported by backing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining

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  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
JP2004365869A 2003-12-19 2004-12-17 インプリント・リソグラフィのための複合スタンパ Expired - Fee Related JP4712370B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/741,316 US7632087B2 (en) 2003-12-19 2003-12-19 Composite stamper for imprint lithography
US10/741,316 2003-12-19

Publications (3)

Publication Number Publication Date
JP2005183985A JP2005183985A (ja) 2005-07-07
JP2005183985A5 JP2005183985A5 (enExample) 2008-02-07
JP4712370B2 true JP4712370B2 (ja) 2011-06-29

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JP2004365869A Expired - Fee Related JP4712370B2 (ja) 2003-12-19 2004-12-17 インプリント・リソグラフィのための複合スタンパ

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Country Link
US (3) US7632087B2 (enExample)
JP (1) JP4712370B2 (enExample)
DE (1) DE102004055223A1 (enExample)
MY (1) MY144004A (enExample)

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US20070245909A1 (en) 2007-10-25
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US20050133954A1 (en) 2005-06-23
US20100024962A1 (en) 2010-02-04
MY144004A (en) 2011-07-29
US8038863B2 (en) 2011-10-18

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