MY144004A - Composite stamper for imprint lithography - Google Patents

Composite stamper for imprint lithography

Info

Publication number
MY144004A
MY144004A MYPI20044959A MYPI20044959A MY144004A MY 144004 A MY144004 A MY 144004A MY PI20044959 A MYPI20044959 A MY PI20044959A MY PI20044959 A MYPI20044959 A MY PI20044959A MY 144004 A MY144004 A MY 144004A
Authority
MY
Malaysia
Prior art keywords
stamper
imprint lithography
layer
composite
composite stamper
Prior art date
Application number
MYPI20044959A
Other languages
English (en)
Inventor
Andrew M Homola
Original Assignee
Wd Media Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wd Media Inc filed Critical Wd Media Inc
Publication of MY144004A publication Critical patent/MY144004A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/565—Consisting of shell-like structures supported by backing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
MYPI20044959A 2003-12-19 2004-11-30 Composite stamper for imprint lithography MY144004A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/741,316 US7632087B2 (en) 2003-12-19 2003-12-19 Composite stamper for imprint lithography

Publications (1)

Publication Number Publication Date
MY144004A true MY144004A (en) 2011-07-29

Family

ID=34678115

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20044959A MY144004A (en) 2003-12-19 2004-11-30 Composite stamper for imprint lithography

Country Status (4)

Country Link
US (3) US7632087B2 (enExample)
JP (1) JP4712370B2 (enExample)
DE (1) DE102004055223A1 (enExample)
MY (1) MY144004A (enExample)

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US7632087B2 (en) 2009-12-15
JP4712370B2 (ja) 2011-06-29
US20070245909A1 (en) 2007-10-25
DE102004055223A1 (de) 2005-07-21
JP2005183985A (ja) 2005-07-07
US20050133954A1 (en) 2005-06-23
US20100024962A1 (en) 2010-02-04
US8038863B2 (en) 2011-10-18

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