JP4601769B2 - フォトマスク用保護膜転写シート及び保護膜転写方法 - Google Patents

フォトマスク用保護膜転写シート及び保護膜転写方法 Download PDF

Info

Publication number
JP4601769B2
JP4601769B2 JP2000154453A JP2000154453A JP4601769B2 JP 4601769 B2 JP4601769 B2 JP 4601769B2 JP 2000154453 A JP2000154453 A JP 2000154453A JP 2000154453 A JP2000154453 A JP 2000154453A JP 4601769 B2 JP4601769 B2 JP 4601769B2
Authority
JP
Japan
Prior art keywords
protective film
photomask
adhesive layer
film transfer
transfer sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000154453A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001337443A (ja
JP2001337443A5 (enExample
Inventor
光則 丸山
進 栗嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kimoto Co Ltd
Original Assignee
Kimoto Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kimoto Co Ltd filed Critical Kimoto Co Ltd
Priority to JP2000154453A priority Critical patent/JP4601769B2/ja
Priority to US09/863,324 priority patent/US7087297B2/en
Publication of JP2001337443A publication Critical patent/JP2001337443A/ja
Publication of JP2001337443A5 publication Critical patent/JP2001337443A5/ja
Application granted granted Critical
Publication of JP4601769B2 publication Critical patent/JP4601769B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B44—DECORATIVE ARTS
    • B44C—PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
    • B44C1/00—Processes, not specifically provided for elsewhere, for producing decorative surface effects
    • B44C1/16—Processes, not specifically provided for elsewhere, for producing decorative surface effects for applying transfer pictures or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/48—Protective coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2839—Web or sheet containing structurally defined element or component and having an adhesive outermost layer with release or antistick coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2848—Three or more layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2852—Adhesive compositions
    • Y10T428/2878—Adhesive compositions including addition polymer from unsaturated monomer
    • Y10T428/2891—Adhesive compositions including addition polymer from unsaturated monomer including addition polymer from alpha-beta unsaturated carboxylic acid [e.g., acrylic acid, methacrylic acid, etc.] Or derivative thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Laminated Bodies (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Decoration By Transfer Pictures (AREA)
JP2000154453A 2000-05-25 2000-05-25 フォトマスク用保護膜転写シート及び保護膜転写方法 Expired - Fee Related JP4601769B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000154453A JP4601769B2 (ja) 2000-05-25 2000-05-25 フォトマスク用保護膜転写シート及び保護膜転写方法
US09/863,324 US7087297B2 (en) 2000-05-25 2001-05-24 Protective film transfer sheet for photo masks and a method for transferring a protective film using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000154453A JP4601769B2 (ja) 2000-05-25 2000-05-25 フォトマスク用保護膜転写シート及び保護膜転写方法

Publications (3)

Publication Number Publication Date
JP2001337443A JP2001337443A (ja) 2001-12-07
JP2001337443A5 JP2001337443A5 (enExample) 2007-06-28
JP4601769B2 true JP4601769B2 (ja) 2010-12-22

Family

ID=18659544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000154453A Expired - Fee Related JP4601769B2 (ja) 2000-05-25 2000-05-25 フォトマスク用保護膜転写シート及び保護膜転写方法

Country Status (2)

Country Link
US (1) US7087297B2 (enExample)
JP (1) JP4601769B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4118082B2 (ja) * 2002-05-08 2008-07-16 株式会社きもと フォトマスク用保護膜修正方法
JP5359889B2 (ja) 2008-01-24 2013-12-04 日立化成株式会社 クラッド層形成用樹脂組成物およびこれを用いたクラッド層形成用樹脂フィルム、これらを用いた光導波路ならびに光モジュール
ES2861300T3 (es) * 2012-02-20 2021-10-06 Basf Se Potenciación de la actividad antimicrobiana de biocidas con polímeros

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132097A (ja) * 1986-11-21 1988-06-04 大日本印刷株式会社 転写シ−トおよび転写方法
KR930001852B1 (ko) * 1987-08-10 1993-03-15 이데미쯔세끼유가가꾸 가부시기가이샤 내구성 패턴 형성용부재
JPH03229781A (ja) * 1990-02-02 1991-10-11 Toyo Ink Mfg Co Ltd 熱硬化性粘着剤組成物
JP2922283B2 (ja) * 1990-09-28 1999-07-19 日本カーバイド工業株式会社 熱硬化性感圧接着剤組成物用アクリル系共重合体
JP3281026B2 (ja) * 1992-03-03 2002-05-13 日東電工株式会社 放射線硬化型熱時感圧接着剤及びその接着テープ
JPH05279643A (ja) * 1992-03-31 1993-10-26 Nitto Denko Corp 表面保護シート及び表面保護方法
JP2545011B2 (ja) * 1992-03-31 1996-10-16 日東電工株式会社 表面保護体の製造方法
JP3046455B2 (ja) * 1992-05-13 2000-05-29 日東電工株式会社 電子部品連設用テープ
JP3176428B2 (ja) * 1992-05-14 2001-06-18 積水化学工業株式会社 光重合性組成物及び粘弾性製品の製造方法
JPH05331435A (ja) * 1992-06-03 1993-12-14 Sekisui Chem Co Ltd 布粘着テープ
JPH0620601A (ja) 1992-07-07 1994-01-28 Matsushita Electric Works Ltd 放電ランプにおける水銀の封入方法
JPH06157995A (ja) * 1992-11-26 1994-06-07 Toyo Ink Mfg Co Ltd 熱硬化性粘着シートを用いた接着方法
JPH0748549A (ja) * 1993-08-05 1995-02-21 Dainippon Ink & Chem Inc 感圧接着テープ、シート又はラベル並びにそれに使用する活性エネルギー線硬化性組成物
KR960705889A (ko) * 1993-11-10 1996-11-08 로저 알. 탐테 감압성 열경화성 접착제(pressure sensitive thermosetting adhesives)
JPH08198989A (ja) * 1995-01-27 1996-08-06 Toray Ind Inc 積層ポリエステルフィルム及び昇華型感熱転写材
JP3574524B2 (ja) * 1996-02-23 2004-10-06 積水化学工業株式会社 フォトマスク保護用粘着フィルムの製造方法
JP4030629B2 (ja) * 1997-11-05 2008-01-09 リンテック株式会社 接着シート及び粘着積層物

Also Published As

Publication number Publication date
US20020000287A1 (en) 2002-01-03
JP2001337443A (ja) 2001-12-07
US7087297B2 (en) 2006-08-08

Similar Documents

Publication Publication Date Title
WO2006064884A1 (ja) 活性エネルギー線硬化性樹脂組成物およびその用途
JP2004034393A (ja) 水圧転写用フィルム及びそれを用いた水圧転写体の製造方法
WO2000020228A1 (en) Transfer material, surface-protective sheet, and process for producing molded article with these
JP2006163082A (ja) 光学部材及びその製造方法、並びに液晶表示装置
US5085907A (en) Abrasion-resistant protective laminates
JPS6059878B2 (ja) 転写絵付方法
JP6416176B2 (ja) 印刷可能な機能性ハードコートフィルムおよびその製造方法
KR100489225B1 (ko) 사진유제면 보호층 전사시트 및 보호층부착 포토마스크
JP4601769B2 (ja) フォトマスク用保護膜転写シート及び保護膜転写方法
JP2829035B2 (ja) 多層シート材料及びその製造方法
JPS6355534B2 (enExample)
JP2003344982A (ja) 写真乳剤面保護層転写シート及び写真乳剤面保護層の形成方法並びに保護層付きフォトマスク
JP3574524B2 (ja) フォトマスク保護用粘着フィルムの製造方法
JPS63126797A (ja) 硬化性保護層を有する転写シ−トおよび転写方法
JPH01202492A (ja) 硬化性保護層を有する転写シートおよび転写方法
JP2002258464A (ja) フォトマスク用保護膜転写シート
JP4252765B2 (ja) フォトマスク画像面からの異物除去方法
JPS63132096A (ja) 転写シ−ト
JP2013210473A (ja) 感光性樹脂凸版用印刷原版
JPS61114898A (ja) 転写シ−ト及びこれを用いる表面硬化層の形成方法
JP2002154180A (ja) 複層材料、補強材及びその施工方法
JP4904979B2 (ja) 積層体
JP2649051B2 (ja) 転写シートの製造方法
JP2004291439A (ja) 水圧転写用フィルム及びそれを用いた水圧転写体の製造方法
JPH039899A (ja) 転写箔

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070511

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070511

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20080623

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080630

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090929

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091029

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100309

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100921

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100929

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131008

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4601769

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

RD05 Notification of revocation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7425

Effective date: 20120319

A072 Dismissal of procedure [no reply to invitation to correct request for examination]

Free format text: JAPANESE INTERMEDIATE CODE: A072

Effective date: 20120807

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131008

Year of fee payment: 3

RD07 Notification of extinguishment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: R3D07

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees