JP4582980B2 - 多孔性セラミック研磨複合材料を含むメタルボンド研磨物品およびそれを用いたワークピースの研磨方法 - Google Patents

多孔性セラミック研磨複合材料を含むメタルボンド研磨物品およびそれを用いたワークピースの研磨方法 Download PDF

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Publication number
JP4582980B2
JP4582980B2 JP2001509433A JP2001509433A JP4582980B2 JP 4582980 B2 JP4582980 B2 JP 4582980B2 JP 2001509433 A JP2001509433 A JP 2001509433A JP 2001509433 A JP2001509433 A JP 2001509433A JP 4582980 B2 JP4582980 B2 JP 4582980B2
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Prior art keywords
polishing
composite material
ceramic
article
backing
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Expired - Fee Related
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Japanese (ja)
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JP2003504218A5 (https=
JP2003504218A (ja
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ニーガス・ビー・アデフリス
カール・ピー・エリクソン
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP2001509433A 1999-07-09 2000-07-06 多孔性セラミック研磨複合材料を含むメタルボンド研磨物品およびそれを用いたワークピースの研磨方法 Expired - Fee Related JP4582980B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/350,580 1999-07-09
US09/350,580 US6319108B1 (en) 1999-07-09 1999-07-09 Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece
PCT/US2000/018522 WO2001004227A2 (en) 1999-07-09 2000-07-06 Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece

Publications (3)

Publication Number Publication Date
JP2003504218A JP2003504218A (ja) 2003-02-04
JP2003504218A5 JP2003504218A5 (https=) 2010-08-12
JP4582980B2 true JP4582980B2 (ja) 2010-11-17

Family

ID=23377342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001509433A Expired - Fee Related JP4582980B2 (ja) 1999-07-09 2000-07-06 多孔性セラミック研磨複合材料を含むメタルボンド研磨物品およびそれを用いたワークピースの研磨方法

Country Status (8)

Country Link
US (1) US6319108B1 (https=)
EP (1) EP1198529A2 (https=)
JP (1) JP4582980B2 (https=)
KR (1) KR20020029075A (https=)
CN (1) CN1359322A (https=)
AU (1) AU5917400A (https=)
TW (1) TW533229B (https=)
WO (1) WO2001004227A2 (https=)

Families Citing this family (243)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9238207B2 (en) 1997-04-04 2016-01-19 Chien-Min Sung Brazed diamond tools and methods for making the same
US9409280B2 (en) 1997-04-04 2016-08-09 Chien-Min Sung Brazed diamond tools and methods for making the same
US9221154B2 (en) 1997-04-04 2015-12-29 Chien-Min Sung Diamond tools and methods for making the same
US9463552B2 (en) 1997-04-04 2016-10-11 Chien-Min Sung Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
KR20010020807A (ko) 1999-05-03 2001-03-15 조셉 제이. 스위니 고정 연마재 제품을 사전-조절하는 방법
JP2001179609A (ja) * 1999-12-28 2001-07-03 Roki Techno Co Ltd 研磨パッド
US6848970B2 (en) 2002-09-16 2005-02-01 Applied Materials, Inc. Process control in electrochemically assisted planarization
US6962524B2 (en) 2000-02-17 2005-11-08 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7670468B2 (en) 2000-02-17 2010-03-02 Applied Materials, Inc. Contact assembly and method for electrochemical mechanical processing
US7374644B2 (en) 2000-02-17 2008-05-20 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7029365B2 (en) 2000-02-17 2006-04-18 Applied Materials Inc. Pad assembly for electrochemical mechanical processing
US7125477B2 (en) 2000-02-17 2006-10-24 Applied Materials, Inc. Contacts for electrochemical processing
US7678245B2 (en) 2000-02-17 2010-03-16 Applied Materials, Inc. Method and apparatus for electrochemical mechanical processing
US7066800B2 (en) * 2000-02-17 2006-06-27 Applied Materials Inc. Conductive polishing article for electrochemical mechanical polishing
US7303662B2 (en) 2000-02-17 2007-12-04 Applied Materials, Inc. Contacts for electrochemical processing
US7077721B2 (en) 2000-02-17 2006-07-18 Applied Materials, Inc. Pad assembly for electrochemical mechanical processing
US6991528B2 (en) 2000-02-17 2006-01-31 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7059948B2 (en) 2000-12-22 2006-06-13 Applied Materials Articles for polishing semiconductor substrates
US6979248B2 (en) 2002-05-07 2005-12-27 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7303462B2 (en) 2000-02-17 2007-12-04 Applied Materials, Inc. Edge bead removal by an electro polishing process
CA2337973A1 (en) * 2000-03-22 2001-09-22 Illinois Tool Works Inc. Weather resistant anti-slip panels
CA2408249A1 (en) * 2000-05-09 2001-11-15 3M Innovative Properties Company Porous abrasive article having ceramic abrasive composites, methods of making, and methods of use
KR100373846B1 (ko) * 2000-06-12 2003-02-26 지앤피테크놀로지 주식회사 반도체 및 광학부품용 연마패드 및 그 제조방법
US6736869B1 (en) 2000-08-28 2004-05-18 Micron Technology, Inc. Method for forming a planarizing pad for planarization of microelectronic substrates
US6838382B1 (en) 2000-08-28 2005-01-04 Micron Technology, Inc. Method and apparatus for forming a planarizing pad having a film and texture elements for planarization of microelectronic substrates
AU2002213054A1 (en) 2000-10-06 2002-04-15 3M Innovative Properties Company Ceramic aggregate particles
US6521004B1 (en) 2000-10-16 2003-02-18 3M Innovative Properties Company Method of making an abrasive agglomerate particle
MXPA03003290A (es) 2000-10-16 2004-05-04 3M Innovative Properties Co Metodo de fabricacion de particulas aglomeradas.
DE60141700D1 (de) 2000-10-16 2010-05-12 3M Innovative Properties Co Atteilchen
US8062098B2 (en) 2000-11-17 2011-11-22 Duescher Wayne O High speed flat lapping platen
US8256091B2 (en) 2000-11-17 2012-09-04 Duescher Wayne O Equal sized spherical beads
US8545583B2 (en) 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
US7632434B2 (en) 2000-11-17 2009-12-15 Wayne O. Duescher Abrasive agglomerate coated raised island articles
US7520800B2 (en) 2003-04-16 2009-04-21 Duescher Wayne O Raised island abrasive, lapping apparatus and method of use
US7344432B2 (en) 2001-04-24 2008-03-18 Applied Materials, Inc. Conductive pad with ion exchange membrane for electrochemical mechanical polishing
US7137879B2 (en) * 2001-04-24 2006-11-21 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7544114B2 (en) * 2002-04-11 2009-06-09 Saint-Gobain Technology Company Abrasive articles with novel structures and methods for grinding
US6988937B2 (en) * 2002-04-11 2006-01-24 Saint-Gobain Abrasives Technology Company Method of roll grinding
US6679758B2 (en) * 2002-04-11 2004-01-20 Saint-Gobain Abrasives Technology Company Porous abrasive articles with agglomerated abrasives
US7090565B2 (en) * 2002-04-11 2006-08-15 Saint-Gobain Abrasives Technology Company Method of centerless grinding
USD482587S1 (en) 2002-07-26 2003-11-25 3M Innovative Properties Company Abrasive product
DE10243104A1 (de) * 2002-09-17 2004-03-25 Gebr. Brasseler Gmbh & Co. Kg Rotierendes Instrument aus Keramik
US6863825B2 (en) 2003-01-29 2005-03-08 Union Oil Company Of California Process for removing arsenic from aqueous streams
KR100590202B1 (ko) * 2003-08-29 2006-06-15 삼성전자주식회사 연마 패드 및 그 형성방법
US20050060945A1 (en) * 2003-09-23 2005-03-24 3M Innovative Properties Company Method of making a coated abrasive
US20050064805A1 (en) * 2003-09-23 2005-03-24 3M Innovative Properties Company Structured abrasive article
US7267700B2 (en) * 2003-09-23 2007-09-11 3M Innovative Properties Company Structured abrasive with parabolic sides
US7300479B2 (en) * 2003-09-23 2007-11-27 3M Innovative Properties Company Compositions for abrasive articles
US20050060944A1 (en) * 2003-09-23 2005-03-24 3M Innovative Properties Company Method of making a coated abrasive
US20050060941A1 (en) * 2003-09-23 2005-03-24 3M Innovative Properties Company Abrasive article and methods of making the same
US20050060942A1 (en) * 2003-09-23 2005-03-24 3M Innovative Properties Company Structured abrasive article
KR100558075B1 (ko) * 2003-09-26 2006-03-07 신우유니온(주) 굳은살 손질용 연마도구 및 그 제조방법
US7090894B2 (en) * 2004-02-10 2006-08-15 General Electric Company Bondcoat for the application of TBC's and wear coatings to oxide ceramic matrix
KR100545795B1 (ko) * 2004-02-17 2006-01-24 에스케이씨 주식회사 연마 패드의 기재 패드와 이를 이용한 다층 패드
WO2005077602A1 (en) * 2004-02-17 2005-08-25 Skc Co., Ltd. Base pad polishing pad and multi-layer pad comprising the same
US20070060026A1 (en) 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
US20060258276A1 (en) * 2005-05-16 2006-11-16 Chien-Min Sung Superhard cutters and associated methods
US7658666B2 (en) * 2004-08-24 2010-02-09 Chien-Min Sung Superhard cutters and associated methods
US7762872B2 (en) * 2004-08-24 2010-07-27 Chien-Min Sung Superhard cutters and associated methods
JP2006088315A (ja) * 2004-08-24 2006-04-06 Shapton Kk 砥石修正器、砥石の製造方法および砥石修正器、砥石
US7084064B2 (en) 2004-09-14 2006-08-01 Applied Materials, Inc. Full sequence metal and barrier layer electrochemical mechanical processing
US7520968B2 (en) 2004-10-05 2009-04-21 Applied Materials, Inc. Conductive pad design modification for better wafer-pad contact
US7875091B2 (en) * 2005-02-22 2011-01-25 Saint-Gobain Abrasives, Inc. Rapid tooling system and methods for manufacturing abrasive articles
US7867302B2 (en) * 2005-02-22 2011-01-11 Saint-Gobain Abrasives, Inc. Rapid tooling system and methods for manufacturing abrasive articles
US7524345B2 (en) * 2005-02-22 2009-04-28 Saint-Gobain Abrasives, Inc. Rapid tooling system and methods for manufacturing abrasive articles
US7427340B2 (en) 2005-04-08 2008-09-23 Applied Materials, Inc. Conductive pad
US8622787B2 (en) 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8398466B2 (en) 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
JP4734041B2 (ja) * 2005-06-15 2011-07-27 株式会社ディスコ ビトリファイドボンド砥石の製造方法
US7169031B1 (en) 2005-07-28 2007-01-30 3M Innovative Properties Company Self-contained conditioning abrasive article
US7494519B2 (en) * 2005-07-28 2009-02-24 3M Innovative Properties Company Abrasive agglomerate polishing method
US7722691B2 (en) * 2005-09-30 2010-05-25 Saint-Gobain Abrasives, Inc. Abrasive tools having a permeable structure
TW200726582A (en) * 2005-10-04 2007-07-16 Mitsubishi Materials Corp Rotary tool for processing flexible materials
US7594845B2 (en) * 2005-10-20 2009-09-29 3M Innovative Properties Company Abrasive article and method of modifying the surface of a workpiece
DE102005057384A1 (de) * 2005-11-30 2007-05-31 Nanogate Ag Silikatumhüllte Teilchen in einer Metallschicht
KR100761847B1 (ko) * 2005-12-07 2007-09-28 삼성전자주식회사 연마 입자가 내재된 연마 패드, 이의 제조 방법, 및 이를포함하는 화학적 기계적 연마 장치
US7840305B2 (en) * 2006-06-28 2010-11-23 3M Innovative Properties Company Abrasive articles, CMP monitoring system and method
FI121654B (sv) 2006-07-10 2011-02-28 Kwh Mirka Ab Oy Förfarande för tillverkning av en flexibel sliprondell och en flexibel sliprondell
TWI355986B (en) * 2006-11-16 2012-01-11 Chien Min Sung Superhard cutters and associated methods
US8066874B2 (en) 2006-12-28 2011-11-29 Molycorp Minerals, Llc Apparatus for treating a flow of an aqueous solution containing arsenic
FI20075533A7 (fi) * 2007-07-10 2009-01-11 Oy Kwh Mirka Ab Hiomatuote ja menetelmä tämän valmistamiseksi
US8894731B2 (en) * 2007-10-01 2014-11-25 Saint-Gobain Abrasives, Inc. Abrasive processing of hard and /or brittle materials
US8349764B2 (en) 2007-10-31 2013-01-08 Molycorp Minerals, Llc Composition for treating a fluid
US20090107919A1 (en) 2007-10-31 2009-04-30 Chevron U.S.A. Inc. Apparatus and process for treating an aqueous solution containing chemical contaminants
US20090107925A1 (en) 2007-10-31 2009-04-30 Chevron U.S.A. Inc. Apparatus and process for treating an aqueous solution containing biological contaminants
CN101903131B (zh) 2007-11-13 2013-01-02 宋健民 Cmp垫修整器
TWI388402B (en) 2007-12-06 2013-03-11 Methods for orienting superabrasive particles on a surface and associated tools
US8123828B2 (en) 2007-12-27 2012-02-28 3M Innovative Properties Company Method of making abrasive shards, shaped abrasive particles with an opening, or dish-shaped abrasive particles
EP2242618B1 (en) 2007-12-27 2020-09-23 3M Innovative Properties Company Shaped, fractured abrasive particle, abrasive article using same and method of making
JP4400677B2 (ja) * 2008-02-25 2010-01-20 株式会社村田製作所 薄刃砥石
US20090236147A1 (en) * 2008-03-20 2009-09-24 Baker Hughes Incorporated Lubricated Diamond Bearing Drill Bit
JP5596030B2 (ja) * 2008-06-26 2014-09-24 スリーエム イノベイティブ プロパティズ カンパニー 多孔質エレメントを有する研磨パッド及びその製造方法と使用方法
WO2010002832A2 (en) * 2008-07-02 2010-01-07 Saint-Gobain Abrasives, Inc. Abrasive slicing tool for electronics industry
US8226737B2 (en) * 2008-07-03 2012-07-24 3M Innovative Properties Company Fixed abrasive particles and articles made therefrom
KR100901087B1 (ko) * 2008-08-11 2009-06-08 소우섭 미세분말이 부착된 유리구조체 및 그 제조방법
DE102008056368A1 (de) * 2008-11-07 2010-05-12 Esk Ceramics Gmbh & Co. Kg Sicherungselement für Schraubverbindungen und dessen Verwendung
RU2506152C2 (ru) 2008-12-17 2014-02-10 3М Инновейтив Пропертиз Компани Фасонные абразивные частицы с канавками
US8142532B2 (en) * 2008-12-17 2012-03-27 3M Innovative Properties Company Shaped abrasive particles with an opening
US8142531B2 (en) * 2008-12-17 2012-03-27 3M Innovative Properties Company Shaped abrasive particles with a sloping sidewall
US10137556B2 (en) 2009-06-22 2018-11-27 3M Innovative Properties Company Shaped abrasive particles with low roundness factor
US8142891B2 (en) 2008-12-17 2012-03-27 3M Innovative Properties Company Dish-shaped abrasive particles with a recessed surface
CN102458771A (zh) * 2009-04-17 2012-05-16 3M创新有限公司 采用转移制品制造的平面磨料制品及其制造方法
CN101602192B (zh) * 2009-06-29 2011-12-14 云南光电辅料有限公司 磨料表面改性改善金属基磨具加工光洁度的方法
RU2569254C2 (ru) * 2009-08-14 2015-11-20 Сэнт-Гобэн Эбрейзивс, Инк. Абразивное изделие
WO2011020109A2 (en) * 2009-08-14 2011-02-17 Saint-Gobain Abrasives, Inc. Abrasive articles including abrasive particles bonded to an elongated body, and methods of forming thereof
CN102097190B (zh) * 2009-12-09 2012-10-03 沈阳临德陶瓷研发有限公司 一种硼硅酸盐玻璃绝缘子用黑色标记釉的制备方法
US8480772B2 (en) * 2009-12-22 2013-07-09 3M Innovative Properties Company Transfer assisted screen printing method of making shaped abrasive particles and the resulting shaped abrasive particles
CN103221180A (zh) 2010-09-21 2013-07-24 铼钻科技股份有限公司 具有基本平坦颗粒尖端的超研磨工具及其相关方法
DE102010052518A1 (de) * 2010-11-26 2012-05-31 Brillux Gmbh & Co. Kg Beschichtungsmasse mit Funkeleffekt
US8708781B2 (en) * 2010-12-05 2014-04-29 Ethicon, Inc. Systems and methods for grinding refractory metals and refractory metal alloys
TWI466990B (zh) 2010-12-30 2015-01-01 聖高拜磨料有限公司 磨料物品及形成方法
EP2658680B1 (en) 2010-12-31 2020-12-09 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles comprising abrasive particles having particular shapes and methods of forming such articles
US9233863B2 (en) 2011-04-13 2016-01-12 Molycorp Minerals, Llc Rare earth removal of hydrated and hydroxyl species
WO2012162430A2 (en) 2011-05-23 2012-11-29 Chien-Min Sung Cmp pad dresser having leveled tips and associated methods
WO2013003830A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particles of silicon nitride
EP2726248B1 (en) 2011-06-30 2019-06-19 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
KR101618040B1 (ko) 2011-09-16 2016-05-04 생-고뱅 어브레이시브즈, 인코포레이티드 연마 물품 및 형성방법
US9517546B2 (en) 2011-09-26 2016-12-13 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming
JP5869680B2 (ja) 2011-09-29 2016-02-24 サンーゴバン アブレイシブズ，インコーポレイティド バリア層を有する細長い基板本体に結合した研磨粒子を含む研磨物品及びその形成方法
BR112014016237A8 (pt) * 2011-12-29 2017-07-04 3M Innovative Properties Co artigo abrasivo revestido e método para fabricação do mesmo
WO2013102177A1 (en) 2011-12-30 2013-07-04 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle and method of forming same
PL2797716T3 (pl) 2011-12-30 2021-07-05 Saint-Gobain Ceramics & Plastics, Inc. Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania
BR112014016159A8 (pt) 2011-12-30 2017-07-04 Saint Gobain Ceramics formação de partículas abrasivas moldadas
EP2802436B1 (en) 2012-01-10 2019-09-25 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having complex shapes
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
US20130225051A1 (en) * 2012-02-27 2013-08-29 Raymond Vankouwenberg Abrasive pad assembly
WO2013149209A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
WO2013147892A1 (en) * 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive article and method of forming
EP2852473B1 (en) 2012-05-23 2020-12-23 Saint-Gobain Ceramics & Plastics Inc. Shaped abrasive particles and methods of forming same
TW201402274A (zh) * 2012-06-29 2014-01-16 聖高拜磨料有限公司 研磨物品及形成方法
TW201404527A (zh) 2012-06-29 2014-02-01 聖高拜磨料有限公司 研磨物品及形成方法
TWI477343B (zh) 2012-06-29 2015-03-21 Saint Gobain Abrasives Inc 研磨物品及形成方法
TWI474889B (zh) 2012-06-29 2015-03-01 聖高拜磨料有限公司 研磨物品及形成方法
EP2866977B8 (en) 2012-06-29 2023-01-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
CN108015685B (zh) 2012-10-15 2020-07-14 圣戈班磨料磨具有限公司 具有特定形状的磨粒
US20140134933A1 (en) 2012-11-09 2014-05-15 Di-Coat Corporation Abrading tools and methods of making same
WO2014106173A1 (en) 2012-12-31 2014-07-03 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
WO2014131936A1 (en) * 2013-02-26 2014-09-04 Kwh Mirka Ltd A method to provide an abrasive product surface and abrasive products thereof
WO2014131937A1 (en) * 2013-02-26 2014-09-04 Kwh Mirka Ltd A method to provide an abrasive product and abrasive products thereof
PL2978566T3 (pl) 2013-03-29 2024-07-15 Saint-Gobain Abrasives, Inc. Cząstki ścierne o określonych kształtach i sposoby formowania takich cząstek
TW201441355A (zh) 2013-04-19 2014-11-01 聖高拜磨料有限公司 研磨製品及其形成方法
CN103223643B (zh) * 2013-05-03 2015-10-28 鲁启华 一种超薄刀片
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
TWI589404B (zh) * 2013-06-28 2017-07-01 聖高拜磨料有限公司 基於向日葵圖案之經塗佈的研磨製品
TW201500535A (zh) 2013-06-28 2015-01-01 Saint Gobain Abrasives Inc 具有混合型結合劑之多功能磨料製品
ITVR20130167A1 (it) 2013-07-18 2015-01-19 Abra On S R L Abrasivo flessibile per la levigatura di superfici
CN103496988B (zh) * 2013-09-04 2015-04-29 西安交通大学 Cbn磨粒氧化处理及用其制备陶瓷结合剂cbn磨具的方法
WO2015048011A1 (en) 2013-09-25 2015-04-02 3M Innovative Properties Company Multi-layered polishing pads
EP3049215B1 (en) * 2013-09-25 2021-04-14 3M Innovative Properties Company Composite ceramic abrasive polishing solution
KR101889698B1 (ko) 2013-09-30 2018-08-21 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성 방법
BR112016010724B1 (pt) 2013-11-12 2021-11-16 3M Innovative Properties Company Artigo abrasivo estruturado
CN104511851A (zh) * 2013-11-19 2015-04-15 东莞金太阳研磨股份有限公司 一种pcb印刷线路板抛光轮的制备方法
JP6561058B2 (ja) 2013-12-09 2019-08-14 スリーエム イノベイティブ プロパティズ カンパニー 集塊性研磨粒子、その粒子を含む研磨物品、及びその製造方法
CN103632687A (zh) * 2013-12-19 2014-03-12 广东金潮集团有限公司 一种cd光盘电镀材料
EP3089850B1 (en) * 2013-12-30 2021-12-08 Saint-Gobain Abrasives, Inc. Composite bodies and methods of forming the same
MX380754B (es) 2013-12-31 2025-03-12 Saint Gobain Abrasives Inc Artículo abrasivo que incluye partículas abrasivas perfiladas.
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
US9975787B2 (en) 2014-03-07 2018-05-22 Secure Natural Resources Llc Removal of arsenic from aqueous streams with cerium (IV) oxide compositions
CN103862396A (zh) * 2014-03-21 2014-06-18 苏州远东砂轮有限公司 一种对中高密度板进行磨削的专用磨具及其制造方法
JP6484647B2 (ja) 2014-04-14 2019-03-13 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド 成形研磨粒子を含む研磨物品
EP4306610A3 (en) 2014-04-14 2024-04-03 Saint-Gobain Ceramics and Plastics, Inc. Abrasive article including shaped abrasive particles
US9902045B2 (en) 2014-05-30 2018-02-27 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
CN104209875B (zh) * 2014-09-26 2016-08-24 郑州磨料磨具磨削研究所有限公司 一种超硬材料磨具及其制备方法
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
KR20240015167A (ko) 2014-10-17 2024-02-02 어플라이드 머티어리얼스, 인코포레이티드 애디티브 제조 프로세스들을 이용한 복합 재료 특성들을 갖는 ｃｍｐ 패드 구성
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
RU2017121313A (ru) 2014-12-01 2019-01-10 Сен-Гобен Абразивс, Инк. Абразивное изделие, содержащее агломераты, которые содержат карбид кремния и неорганический связующий материал
EP3227051A4 (en) * 2014-12-01 2019-01-16 Saint-Gobain Abrasives, Inc. GRINDING WITH AGGLOMERATES WITH SILICON CARBIDE AND INORGANIC COMPOUND MATERIAL
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
EP3237147B1 (en) * 2014-12-23 2020-02-19 Saint-Gobain Ceramics&Plastics, Inc. Shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
CA2972440C (en) * 2014-12-31 2020-04-28 Saint-Gobain Abrasives, Inc. Aggregates of diamond with vitrified bond
US10767058B1 (en) * 2015-02-26 2020-09-08 United States Of America As Represented By The Administrator Of Nasa Controlled release materials for anti-corrosion agents
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
CN116967949A (zh) 2015-03-31 2023-10-31 圣戈班磨料磨具有限公司 固定磨料制品和其形成方法
US10556316B2 (en) 2015-05-13 2020-02-11 3M Innovative Properties Company Polishing pads and systems for and methods of using same
ES2779751T3 (es) * 2015-05-22 2020-08-19 Thermolon Korea Co Ltd Revestimiento cerámico mejorado
WO2016201104A1 (en) 2015-06-11 2016-12-15 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
JP6865180B2 (ja) 2015-06-19 2021-04-28 スリーエム イノベイティブ プロパティズ カンパニー ある範囲内のランダムな回転配向を有する研磨粒子付き研磨物品
TWI664057B (zh) * 2015-06-29 2019-07-01 美商聖高拜磨料有限公司 研磨物品及形成方法
JP6964588B2 (ja) * 2015-09-08 2021-11-10 スリーエム イノベイティブ プロパティズ カンパニー 砥粒凝集体を伴う砥粒回転ツール
EP3347162A4 (en) 2015-09-08 2019-05-15 3M Innovative Properties Company FLEXIBLE GRINDING TOOL
CN105252425A (zh) * 2015-09-10 2016-01-20 苏州瑞美科材料科技有限公司 一种金属制品磨具
TWI754275B (zh) * 2015-10-16 2022-02-01 美商應用材料股份有限公司 拋光墊及形成其之方法
JP6940495B2 (ja) 2015-10-30 2021-09-29 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
CN105598860A (zh) * 2015-12-25 2016-05-25 江苏锋芒复合材料科技集团有限公司 一种有色金属磨削用抗堵塞磨具及其制造方法
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
US20170232571A1 (en) * 2016-02-11 2017-08-17 Corning Incorporated Edge finishing apparatus and methods for laminate production
CN108603076A (zh) * 2016-02-16 2018-09-28 3M创新有限公司 抛光系统以及制备和使用抛光系统的方法
MX2018009428A (es) * 2016-02-22 2018-11-09 Almt Corp Herramienta abrasiva.
KR102313436B1 (ko) 2016-05-10 2021-10-19 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자들 및 그 형성 방법
WO2017197006A1 (en) 2016-05-10 2017-11-16 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles and methods of forming same
JP2019527148A (ja) * 2016-07-20 2019-09-26 スリーエム イノベイティブ プロパティズ カンパニー 成形ガラス化研磨凝集体、研磨物品、及び研磨方法
EP4349896A3 (en) 2016-09-29 2024-06-12 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
US11072732B2 (en) 2016-10-25 2021-07-27 3M Innovative Properties Company Magnetizable abrasive particles and abrasive articles including them
CN109843509A (zh) 2016-10-25 2019-06-04 3M创新有限公司 结构化磨料制品及其制备方法
CN109863568B (zh) 2016-10-25 2020-05-15 3M创新有限公司 制备可磁化磨料颗粒的方法
CN109890564B (zh) 2016-10-25 2022-04-29 3M创新有限公司 具有成形磨粒的成形玻璃化磨料团聚物、磨料制品和相关方法
CN109890930B (zh) 2016-10-25 2021-03-16 3M创新有限公司 可磁化磨料颗粒及其制备方法
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
EP3589450A4 (en) * 2017-02-28 2021-04-07 3M Innovative Properties Company METAL BOND ABRASIVE ARTICLES AND METHOD FOR MANUFACTURING METAL BOND ABRASIVE ARTICLES
CN107243803A (zh) * 2017-05-27 2017-10-13 青岛鲁航气囊护舷有限公司 一种半圆型护舷弧面打磨装置
CN107234537B (zh) * 2017-05-27 2023-08-15 青岛鲁航气囊护舷有限公司 一种滚筒式护舷弧面打磨装置
CN107116420A (zh) * 2017-05-27 2017-09-01 青岛鲁航气囊护舷有限公司 一种双曲面磨砂装置
US10865148B2 (en) 2017-06-21 2020-12-15 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
JP6980341B2 (ja) * 2017-09-28 2021-12-15 株式会社ディスコ 保護部材の加工方法
CN107457713A (zh) * 2017-10-19 2017-12-12 柳州凯通新材料科技有限公司 一种金刚石砂轮用材料
US20190143486A1 (en) * 2017-11-16 2019-05-16 Acme United Corporation Long-life abrasive pad assembly
JP7158147B2 (ja) * 2018-01-05 2022-10-21 スリーエム イノベイティブ プロパティズ カンパニー 研磨シート及び研磨方法
US12006464B2 (en) 2018-03-01 2024-06-11 3M Innovative Properties Company Shaped siliceous abrasive agglomerate with shaped abrasive particles, abrasive articles, and related methods
CN112512748A (zh) 2018-07-23 2021-03-16 3M创新有限公司 包括聚酯背衬和底漆层的制品及相关方法
CN109133978A (zh) * 2018-08-31 2019-01-04 王召惠 一种高强度高导热多孔陶瓷的制备方法
WO2020050932A1 (en) 2018-09-04 2020-03-12 Applied Materials, Inc. Formulations for advanced polishing pads
EP3948702A4 (en) 2019-03-29 2023-07-26 Saint-Gobain Abrasives, Inc. POWER LOOP SOLUTIONS
WO2020206382A1 (en) 2019-04-03 2020-10-08 Saint-Gobain Abrasives, Inc. Abrasive article, abrasive system and method for using and forming same
CN110016322A (zh) * 2019-05-09 2019-07-16 东莞市中微纳米科技有限公司 微米级磁性复合磨料和水基磁流变抛光液
EP4081370A4 (en) 2019-12-27 2024-04-24 Saint-Gobain Ceramics & Plastics Inc. ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CN114867582B (zh) 2019-12-27 2024-10-18 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
KR102877276B1 (ko) 2019-12-27 2025-10-28 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. 연마 물품 및 이의 형성 방법
CN115812021A (zh) * 2020-07-10 2023-03-17 圣戈班磨料磨具有限公司 粘结的磨料制品及其制备方法
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
CN113087529B (zh) * 2021-04-06 2021-10-26 湖南泰鑫瓷业有限公司 一种高韧性陶瓷刀具的生产工艺
CN113635228B (zh) * 2021-09-03 2022-07-01 郑州磨料磨具磨削研究所有限公司 一种半导体材料加工用自修整砂轮及其制备方法和应用
CN113696108A (zh) * 2021-09-10 2021-11-26 天津中屹铭科技有限公司 一种高耐磨长寿命金刚石砂轮及制备方法
EP4457054A4 (en) 2021-12-30 2026-01-14 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CA3241421A1 (en) 2021-12-30 2023-07-06 Anthony MARTONE Abrasive articles and methods of forming same
EP4457055A4 (en) 2021-12-30 2025-12-24 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CN115433582B (zh) * 2022-09-20 2023-06-06 湖南大学 一种金刚石颗粒表面的腐蚀方法
WO2026038183A1 (en) 2024-08-14 2026-02-19 3M Innovative Properties Company Adhesive composition including a polyurethane and isocyanate and related articles and methods
CN121893115A (zh) * 2025-10-28 2026-04-21 清华大学 晶圆减薄用砂轮的胶粘层、制备方法及晶圆减薄用砂轮

Family Cites Families (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2216728A (en) 1935-12-31 1940-10-08 Carborundum Co Abrasive article and method of making the same
BE530127A (https=) * 1953-11-25
US3916584A (en) 1973-03-22 1975-11-04 Minnesota Mining & Mfg Spheroidal composite particle and method of making
US3957593A (en) 1975-01-31 1976-05-18 Keene Corporation Method of forming an abrasive tool
US4047902A (en) 1975-04-01 1977-09-13 Wiand Richard K Metal-plated abrasive product and method of manufacturing the product
SE451687B (sv) * 1980-12-29 1987-10-26 Norton Co Agglomererade slipmedelspartiklar
JPS59110537A (ja) 1982-12-17 1984-06-26 Matsushita Electric Ind Co Ltd 脆性材料面取り加工方法
JPS59156760U (ja) * 1983-02-21 1984-10-20 リョービ株式会社 電動式包丁砥ぎ器用ダイヤモンド砥石
JPS6080562A (ja) 1983-10-07 1985-05-08 Disco Abrasive Sys Ltd 電着砥石
US4609581A (en) 1985-04-15 1986-09-02 Minnesota Mining And Manufacturing Company Coated abrasive sheet material with loop attachment means
US4652275A (en) 1985-08-07 1987-03-24 Minnesota Mining And Manufacturing Company Erodable agglomerates and abrasive products containing the same
JPH058051Y2 (https=) * 1986-09-29 1993-03-01
GB8701553D0 (en) 1987-01-24 1987-02-25 Interface Developments Ltd Abrasive article
JPS6451273A (en) * 1987-08-19 1989-02-27 Hitachi Ltd Grinding wheel
US4931069A (en) 1987-10-30 1990-06-05 Wiand Ronald C Abrasive tool with improved swarf clearance and method of making
US4776862A (en) 1987-12-08 1988-10-11 Wiand Ronald C Brazing of diamond
US5022895A (en) 1988-02-14 1991-06-11 Wiand Ronald C Multilayer abrading tool and process
US4908046A (en) 1989-02-14 1990-03-13 Wiand Ronald C Multilayer abrading tool and process
JP2651831B2 (ja) * 1988-02-22 1997-09-10 旭ダイヤモンド工業株式会社 超砥粒ホイール及びその製造方法
US5254194A (en) 1988-05-13 1993-10-19 Minnesota Mining And Manufacturing Company Coated abrasive sheet material with loop material for attachment incorporated therein
US5133782A (en) 1989-02-14 1992-07-28 Wiand Ronald C Multilayer abrading tool having an irregular abrading surface and process
US4945686A (en) 1989-02-14 1990-08-07 Wiand Ronald C Multilayer abrading tool having an irregular abrading surface and process
US4968326A (en) 1989-10-10 1990-11-06 Wiand Ronald C Method of brazing of diamond to substrate
US5131924A (en) 1990-02-02 1992-07-21 Wiand Ronald C Abrasive sheet and method
US5203881A (en) 1990-02-02 1993-04-20 Wiand Ronald C Abrasive sheet and method
EP0449509B1 (en) 1990-03-30 1995-02-22 Ronald Carlysle Wiand Marble, granite and stone finishing method and abrasive pads therefor
US5607488A (en) 1990-05-21 1997-03-04 Wiand; Ronald C. Molded abrasive article and process
US5174795A (en) 1990-05-21 1992-12-29 Wiand Ronald C Flexible abrasive pad with ramp edge surface
US5209760A (en) 1990-05-21 1993-05-11 Wiand Ronald C Injection molded abrasive pad
US5232470A (en) 1990-05-21 1993-08-03 Wiand Ronald C Flexible one-piece diamond sheet material with spaced apart abrasive portions
US5106394A (en) 1990-10-01 1992-04-21 The United States Of America As Represented By The Secretary Of The Navy Fiber optic polishing system
US5136818A (en) 1990-10-01 1992-08-11 The United States Of America As Represented By The Secretary Of The Navy Method of polishing optical fiber
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5197249A (en) 1991-02-07 1993-03-30 Wiand Ronald C Diamond tool with non-abrasive segments
US5106392A (en) 1991-03-14 1992-04-21 General Electric Company Multigrain abrasive particles
US5127197A (en) 1991-04-25 1992-07-07 Brukvoort Wesley J Abrasive article and processes for producing it
US5251802A (en) * 1991-04-25 1993-10-12 Minnesota Mining And Manufacturing Company Abrasive article and processes for producing it
US5247765A (en) 1991-07-23 1993-09-28 Abrasive Technology Europe, S.A. Abrasive product comprising a plurality of discrete composite abrasive pellets in a resilient resin matrix
GB2263911B (en) 1991-12-10 1995-11-08 Minnesota Mining & Mfg Tool comprising abrasives in an electrodeposited metal binder dispersed in a binder matrix
US5219462A (en) 1992-01-13 1993-06-15 Minnesota Mining And Manufacturing Company Abrasive article having abrasive composite members positioned in recesses
DE4217720C1 (de) * 1992-05-29 1993-11-04 Starck H C Gmbh Co Kg Gesinterte verbundschleifkoerper, verfahren zu ihrer herstellung sowie deren verwendung
ES2108879T3 (es) 1992-12-17 1998-01-01 Minnesota Mining & Mfg Suspensiones de viscosidad reducida, articulos abrasivos hechos de las mismas y metodos para fabricar dichos articulos.
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
CA2115889A1 (en) 1993-03-18 1994-09-19 David E. Broberg Coated abrasive article having diluent particles and shaped abrasive particles
US5549962A (en) 1993-06-30 1996-08-27 Minnesota Mining And Manufacturing Company Precisely shaped particles and method of making the same
CH686787A5 (de) 1993-10-15 1996-06-28 Diametal Ag Schleifbelag fuer Schleifwerkzeuge und Verfahren zur Herstellung des Schleifbelages.
US5505747A (en) 1994-01-13 1996-04-09 Minnesota Mining And Manufacturing Company Method of making an abrasive article
DE69509219T2 (de) 1994-01-13 1999-09-23 Minnesota Mining And Mfg. Co., Saint Paul Schleifartikel, verfahren zur herstellung desselben, und schleifmaschine
KR970701118A (ko) 1994-02-22 1997-03-17 로저 로이 템트 연마 물품, 이의 제조 방법 및 이를 표면 마무리용으로서 사용하는 방법(abrasive article, a method of making same, and a method of using same for finishing)
EP0783394B1 (en) * 1994-09-30 2003-05-14 Minnesota Mining And Manufacturing Company Coated abrasive article and method for preparing the same
US5656045A (en) 1995-06-07 1997-08-12 Wiand Ronald C Method of spaced distribution for diamond abrasive articles
JP3234762B2 (ja) 1996-02-26 2001-12-04 シャープ株式会社 半導体装置の製造方法
US6019666A (en) 1997-05-09 2000-02-01 Rodel Holdings Inc. Mosaic polishing pads and methods relating thereto
JP3052896B2 (ja) 1997-06-13 2000-06-19 日本電気株式会社 研磨布表面のドレス治具及びその製造方法
WO1999010129A1 (en) 1997-08-26 1999-03-04 Ning Wang A pad for chemical-mechanical polishing and apparatus and methods of manufacture thereof

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TW533229B (en) 2003-05-21
CN1359322A (zh) 2002-07-17
AU5917400A (en) 2001-01-30
US6319108B1 (en) 2001-11-20
EP1198529A2 (en) 2002-04-24
WO2001004227A3 (en) 2001-09-07
JP2003504218A (ja) 2003-02-04
WO2001004227A2 (en) 2001-01-18
KR20020029075A (ko) 2002-04-17

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