JP4533640B2 - ガルバノスキャナの制御方法およびガルバノスキャナ - Google Patents

ガルバノスキャナの制御方法およびガルバノスキャナ Download PDF

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Publication number
JP4533640B2
JP4533640B2 JP2004043050A JP2004043050A JP4533640B2 JP 4533640 B2 JP4533640 B2 JP 4533640B2 JP 2004043050 A JP2004043050 A JP 2004043050A JP 2004043050 A JP2004043050 A JP 2004043050A JP 4533640 B2 JP4533640 B2 JP 4533640B2
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JP
Japan
Prior art keywords
galvano scanner
mirror
signal
actuator
swing angle
Prior art date
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Expired - Lifetime
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JP2004043050A
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English (en)
Japanese (ja)
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JP2005234215A (ja
Inventor
治明 大槻
聡一 遠山
健太 関
弥市 大久保
大介 北村
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Via Mechanics Ltd
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Hitachi Via Mechanics Ltd
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Filing date
Publication date
Application filed by Hitachi Via Mechanics Ltd filed Critical Hitachi Via Mechanics Ltd
Priority to JP2004043050A priority Critical patent/JP4533640B2/ja
Priority to TW093123068A priority patent/TW200528755A/zh
Priority to CNB2004100569911A priority patent/CN100432743C/zh
Priority to KR1020040068685A priority patent/KR101080101B1/ko
Priority to US10/929,519 priority patent/US7270270B2/en
Priority to DE102004042031.9A priority patent/DE102004042031B4/de
Publication of JP2005234215A publication Critical patent/JP2005234215A/ja
Application granted granted Critical
Publication of JP4533640B2 publication Critical patent/JP4533640B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2004043050A 2004-02-19 2004-02-19 ガルバノスキャナの制御方法およびガルバノスキャナ Expired - Lifetime JP4533640B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2004043050A JP4533640B2 (ja) 2004-02-19 2004-02-19 ガルバノスキャナの制御方法およびガルバノスキャナ
TW093123068A TW200528755A (en) 2004-02-19 2004-08-02 Optical scanner control method, optical scanner and laser machining apparatus
CNB2004100569911A CN100432743C (zh) 2004-02-19 2004-08-24 电扫描器的控制方法、电扫描器
KR1020040068685A KR101080101B1 (ko) 2004-02-19 2004-08-30 갈바노 스캐너의 제어 방법 및 갈바노 스캐너 및 레이저가공기
US10/929,519 US7270270B2 (en) 2004-02-19 2004-08-31 Optical scanner control method, optical scanner and laser machining apparatus
DE102004042031.9A DE102004042031B4 (de) 2004-02-19 2004-08-31 Steuerverfahren für einen optischen Scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004043050A JP4533640B2 (ja) 2004-02-19 2004-02-19 ガルバノスキャナの制御方法およびガルバノスキャナ

Publications (2)

Publication Number Publication Date
JP2005234215A JP2005234215A (ja) 2005-09-02
JP4533640B2 true JP4533640B2 (ja) 2010-09-01

Family

ID=34836451

Family Applications (1)

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JP2004043050A Expired - Lifetime JP4533640B2 (ja) 2004-02-19 2004-02-19 ガルバノスキャナの制御方法およびガルバノスキャナ

Country Status (6)

Country Link
US (1) US7270270B2 (https=)
JP (1) JP4533640B2 (https=)
KR (1) KR101080101B1 (https=)
CN (1) CN100432743C (https=)
DE (1) DE102004042031B4 (https=)
TW (1) TW200528755A (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005047217A1 (de) * 2005-10-01 2007-04-05 Carl Zeiss Jena Gmbh Verfahren zur Steuerung eines optischen Scanners und Steuereinrichtung für einen optischen Scanner
DE102005047218B4 (de) * 2005-10-01 2021-10-07 Carl Zeiss Microscopy Gmbh Verfahren zur Steuerung eines optischen Scanners, optischer Scanner und Laser-Scanning-Mikroskop
KR100686806B1 (ko) * 2005-12-29 2007-02-26 삼성에스디아이 주식회사 레이저 스캐너를 이용한 기판 패턴 노광 방법
JP5654234B2 (ja) * 2006-08-22 2015-01-14 ケンブリッジ テクノロジー インコーポレイテッド Ｘ−ｙ高速穴あけシステム
WO2008052365A1 (en) 2006-10-30 2008-05-08 Autonosys Inc. Scanning system for lidar
JP4990213B2 (ja) * 2008-05-09 2012-08-01 日立ビアメカニクス株式会社 ガルバノスキャナ装置およびガルバノスキャナ装置を備えるレーザ加工装置
KR101154536B1 (ko) * 2010-09-13 2012-06-13 박세진 도광판 가공장치
AT511283B1 (de) * 2011-03-21 2013-01-15 Seibt Kristl & Co Gmbh Vorrichtung und verfahren zur korrektur von strangströmen einer drehstrommaschine
JP5711032B2 (ja) * 2011-03-31 2015-04-30 ビアメカニクス株式会社 レーザ加工装置
JP5574354B2 (ja) * 2012-03-09 2014-08-20 株式会社トヨコー 塗膜除去方法及びレーザー塗膜除去装置
JP6062219B2 (ja) * 2012-11-14 2017-01-18 ビアメカニクス株式会社 回転体の制御装置及びレーザ加工装置
JP6234231B2 (ja) * 2014-01-07 2017-11-22 キヤノン株式会社 駆動装置および物品処理装置
JP7177603B2 (ja) * 2018-05-14 2022-11-24 ビアメカニクス株式会社 ガルバノスキャナ制御装置
CN109865943A (zh) * 2019-01-08 2019-06-11 合肥泰沃达智能装备有限公司 一种超高速区块链激光雕刻系统
KR102752194B1 (ko) 2024-04-04 2025-01-10 주식회사 시스앤제이 레이저 조사 장치 및 이의 동작 방법

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5856880A (en) * 1991-06-17 1999-01-05 Uniphase Telecommunications Products, Inc. Laser assisted thermo-electric poling of ferroelectric material
JP2720744B2 (ja) * 1992-12-28 1998-03-04 三菱電機株式会社 レーザ加工機
JPH10328871A (ja) * 1997-06-02 1998-12-15 Matsushita Electric Ind Co Ltd レーザ加工装置の照射位置補正方法
US6188078B1 (en) 1999-05-04 2001-02-13 Lockheed Martin Missiles & Space Company Optical metrology device for precision angular measurement of a pointing mirror
DE19963010B4 (de) 1999-12-22 2005-02-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur Laserbearbeitung von Werkstücken
JP2002006255A (ja) 2000-06-23 2002-01-09 Hitachi Via Mechanics Ltd スキャナおよびレーザ加工機
JP2002040356A (ja) * 2000-07-28 2002-02-06 Sumitomo Heavy Ind Ltd ガルバノ制御方法及び制御装置
KR100873237B1 (ko) * 2000-09-21 2008-12-10 지에스아이 루모닉스 코포레이션 디지털 제어 서보 시스템
JP2002137074A (ja) * 2000-10-31 2002-05-14 Hitachi Via Mechanics Ltd レーザ加工方法およびレーザ加工機
JP4770057B2 (ja) * 2001-05-14 2011-09-07 三菱電機株式会社 レーザ加工機及びレーザ加工方法
JP4698092B2 (ja) * 2001-07-11 2011-06-08 住友重機械工業株式会社 ガルバノスキャナ装置及びその制御方法
JP4580600B2 (ja) * 2001-09-11 2010-11-17 住友重機械工業株式会社 ガルバノスキャナの制御方法、装置、及び、ガルバノスキャナ
JP3607898B2 (ja) * 2002-02-15 2005-01-05 住友重機械工業株式会社 揺動反射鏡装置
JP3800124B2 (ja) * 2002-04-18 2006-07-26 三菱電機株式会社 ガルバノスキャナ
JP4567989B2 (ja) * 2004-02-06 2010-10-27 日立ビアメカニクス株式会社 移動体のサーボ制御装置及びレーザ加工装置

Also Published As

Publication number Publication date
KR20050082999A (ko) 2005-08-24
TW200528755A (en) 2005-09-01
US7270270B2 (en) 2007-09-18
CN100432743C (zh) 2008-11-12
KR101080101B1 (ko) 2011-11-04
DE102004042031A1 (de) 2005-09-08
DE102004042031B4 (de) 2023-01-12
TWI344550B (https=) 2011-07-01
JP2005234215A (ja) 2005-09-02
US20050184156A1 (en) 2005-08-25
CN1658011A (zh) 2005-08-24

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