TW200528755A - Optical scanner control method, optical scanner and laser machining apparatus - Google Patents
Optical scanner control method, optical scanner and laser machining apparatus Download PDFInfo
- Publication number
- TW200528755A TW200528755A TW093123068A TW93123068A TW200528755A TW 200528755 A TW200528755 A TW 200528755A TW 093123068 A TW093123068 A TW 093123068A TW 93123068 A TW93123068 A TW 93123068A TW 200528755 A TW200528755 A TW 200528755A
- Authority
- TW
- Taiwan
- Prior art keywords
- mirror
- actuator
- scanner
- angle
- signal
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000003754 machining Methods 0.000 title abstract description 4
- 230000003287 optical effect Effects 0.000 title description 3
- 230000007246 mechanism Effects 0.000 claims description 29
- 230000008859 change Effects 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 14
- 230000009471 action Effects 0.000 claims description 7
- 238000012937 correction Methods 0.000 claims description 4
- 230000004044 response Effects 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 2
- 239000011435 rock Substances 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 47
- 238000010586 diagram Methods 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- 230000006870 function Effects 0.000 description 7
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000005553 drilling Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000004907 flux Effects 0.000 description 3
- 239000002689 soil Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009118 appropriate response Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004295 calcium sulphite Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
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- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
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- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004043050A JP4533640B2 (ja) | 2004-02-19 | 2004-02-19 | ガルバノスキャナの制御方法およびガルバノスキャナ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200528755A true TW200528755A (en) | 2005-09-01 |
| TWI344550B TWI344550B (https=) | 2011-07-01 |
Family
ID=34836451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093123068A TW200528755A (en) | 2004-02-19 | 2004-08-02 | Optical scanner control method, optical scanner and laser machining apparatus |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7270270B2 (https=) |
| JP (1) | JP4533640B2 (https=) |
| KR (1) | KR101080101B1 (https=) |
| CN (1) | CN100432743C (https=) |
| DE (1) | DE102004042031B4 (https=) |
| TW (1) | TW200528755A (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005047217A1 (de) * | 2005-10-01 | 2007-04-05 | Carl Zeiss Jena Gmbh | Verfahren zur Steuerung eines optischen Scanners und Steuereinrichtung für einen optischen Scanner |
| DE102005047218B4 (de) * | 2005-10-01 | 2021-10-07 | Carl Zeiss Microscopy Gmbh | Verfahren zur Steuerung eines optischen Scanners, optischer Scanner und Laser-Scanning-Mikroskop |
| KR100686806B1 (ko) * | 2005-12-29 | 2007-02-26 | 삼성에스디아이 주식회사 | 레이저 스캐너를 이용한 기판 패턴 노광 방법 |
| JP5654234B2 (ja) * | 2006-08-22 | 2015-01-14 | ケンブリッジ テクノロジー インコーポレイテッド | Ｘ−ｙ高速穴あけシステム |
| WO2008052365A1 (en) | 2006-10-30 | 2008-05-08 | Autonosys Inc. | Scanning system for lidar |
| JP4990213B2 (ja) * | 2008-05-09 | 2012-08-01 | 日立ビアメカニクス株式会社 | ガルバノスキャナ装置およびガルバノスキャナ装置を備えるレーザ加工装置 |
| KR101154536B1 (ko) * | 2010-09-13 | 2012-06-13 | 박세진 | 도광판 가공장치 |
| AT511283B1 (de) * | 2011-03-21 | 2013-01-15 | Seibt Kristl & Co Gmbh | Vorrichtung und verfahren zur korrektur von strangströmen einer drehstrommaschine |
| JP5711032B2 (ja) * | 2011-03-31 | 2015-04-30 | ビアメカニクス株式会社 | レーザ加工装置 |
| JP5574354B2 (ja) * | 2012-03-09 | 2014-08-20 | 株式会社トヨコー | 塗膜除去方法及びレーザー塗膜除去装置 |
| JP6062219B2 (ja) * | 2012-11-14 | 2017-01-18 | ビアメカニクス株式会社 | 回転体の制御装置及びレーザ加工装置 |
| JP6234231B2 (ja) * | 2014-01-07 | 2017-11-22 | キヤノン株式会社 | 駆動装置および物品処理装置 |
| JP7177603B2 (ja) * | 2018-05-14 | 2022-11-24 | ビアメカニクス株式会社 | ガルバノスキャナ制御装置 |
| CN109865943A (zh) * | 2019-01-08 | 2019-06-11 | 合肥泰沃达智能装备有限公司 | 一种超高速区块链激光雕刻系统 |
| KR102752194B1 (ko) | 2024-04-04 | 2025-01-10 | 주식회사 시스앤제이 | 레이저 조사 장치 및 이의 동작 방법 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5856880A (en) * | 1991-06-17 | 1999-01-05 | Uniphase Telecommunications Products, Inc. | Laser assisted thermo-electric poling of ferroelectric material |
| JP2720744B2 (ja) * | 1992-12-28 | 1998-03-04 | 三菱電機株式会社 | レーザ加工機 |
| JPH10328871A (ja) * | 1997-06-02 | 1998-12-15 | Matsushita Electric Ind Co Ltd | レーザ加工装置の照射位置補正方法 |
| US6188078B1 (en) | 1999-05-04 | 2001-02-13 | Lockheed Martin Missiles & Space Company | Optical metrology device for precision angular measurement of a pointing mirror |
| DE19963010B4 (de) | 1999-12-22 | 2005-02-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zur Laserbearbeitung von Werkstücken |
| JP2002006255A (ja) | 2000-06-23 | 2002-01-09 | Hitachi Via Mechanics Ltd | スキャナおよびレーザ加工機 |
| JP2002040356A (ja) * | 2000-07-28 | 2002-02-06 | Sumitomo Heavy Ind Ltd | ガルバノ制御方法及び制御装置 |
| KR100873237B1 (ko) * | 2000-09-21 | 2008-12-10 | 지에스아이 루모닉스 코포레이션 | 디지털 제어 서보 시스템 |
| JP2002137074A (ja) * | 2000-10-31 | 2002-05-14 | Hitachi Via Mechanics Ltd | レーザ加工方法およびレーザ加工機 |
| JP4770057B2 (ja) * | 2001-05-14 | 2011-09-07 | 三菱電機株式会社 | レーザ加工機及びレーザ加工方法 |
| JP4698092B2 (ja) * | 2001-07-11 | 2011-06-08 | 住友重機械工業株式会社 | ガルバノスキャナ装置及びその制御方法 |
| JP4580600B2 (ja) * | 2001-09-11 | 2010-11-17 | 住友重機械工業株式会社 | ガルバノスキャナの制御方法、装置、及び、ガルバノスキャナ |
| JP3607898B2 (ja) * | 2002-02-15 | 2005-01-05 | 住友重機械工業株式会社 | 揺動反射鏡装置 |
| JP3800124B2 (ja) * | 2002-04-18 | 2006-07-26 | 三菱電機株式会社 | ガルバノスキャナ |
| JP4567989B2 (ja) * | 2004-02-06 | 2010-10-27 | 日立ビアメカニクス株式会社 | 移動体のサーボ制御装置及びレーザ加工装置 |
-
2004
- 2004-02-19 JP JP2004043050A patent/JP4533640B2/ja not_active Expired - Lifetime
- 2004-08-02 TW TW093123068A patent/TW200528755A/zh not_active IP Right Cessation
- 2004-08-24 CN CNB2004100569911A patent/CN100432743C/zh not_active Expired - Lifetime
- 2004-08-30 KR KR1020040068685A patent/KR101080101B1/ko not_active Expired - Lifetime
- 2004-08-31 DE DE102004042031.9A patent/DE102004042031B4/de not_active Expired - Lifetime
- 2004-08-31 US US10/929,519 patent/US7270270B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR20050082999A (ko) | 2005-08-24 |
| US7270270B2 (en) | 2007-09-18 |
| CN100432743C (zh) | 2008-11-12 |
| KR101080101B1 (ko) | 2011-11-04 |
| DE102004042031A1 (de) | 2005-09-08 |
| DE102004042031B4 (de) | 2023-01-12 |
| TWI344550B (https=) | 2011-07-01 |
| JP4533640B2 (ja) | 2010-09-01 |
| JP2005234215A (ja) | 2005-09-02 |
| US20050184156A1 (en) | 2005-08-25 |
| CN1658011A (zh) | 2005-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |