JP4492926B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4492926B2 JP4492926B2 JP2003398419A JP2003398419A JP4492926B2 JP 4492926 B2 JP4492926 B2 JP 4492926B2 JP 2003398419 A JP2003398419 A JP 2003398419A JP 2003398419 A JP2003398419 A JP 2003398419A JP 4492926 B2 JP4492926 B2 JP 4492926B2
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- test
- pad
- internal circuit
- bonding pad
- bonding
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- 239000004065 semiconductor Substances 0.000 title claims description 65
- 238000012360 testing method Methods 0.000 claims description 140
- 239000000523 sample Substances 0.000 claims description 27
- 239000004020 conductor Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 103
- 239000002184 metal Substances 0.000 description 48
- 229910052751 metal Inorganic materials 0.000 description 48
- 239000010931 gold Substances 0.000 description 15
- 239000011229 interlayer Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 230000006378 damage Effects 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Description
に示されるように、Au層801に対してテストプローブ802が接触させられてテストが行われる。その結果、テストプローブが針状になっており、少なくともAuよりも硬い導電材料で形成されているため、当該テストプローブ802に削り取られたAuが付着する。このため、付着したAuを除去すべく、頻繁に針先のクリーニングを行う必要があり、スループットが低下する。さらに頻繁にクリーニングすると針先形状が磨耗し太くなってしまうため、テストプローブ802の寿命が低下する。また、テストプローブ802に付着したAuによる測定歩留りの悪化を招く可能性も高い。
本発明にかかる半導体装置は、内部回路と電気的に接続されるとともにボンディング部材と接合されるボンディング用パッドと、前記内部回路と電気的に接続されるとともにテストにおいてテストプローブが接触するテスト用パッドとを備える半導体装置であって、前記テスト用パッドは、前記ボンディング用パッドと半導体チップ周辺部との間に設けられ、前記ボンディング用パッド及び前記テスト用パッドの下層に前記内部回路が形成されており、前記ボンディング用パッドと前記内部回路との間には、絶縁膜上に配線が形成されていない層が少なくとも1層あり、前記ボンディング用パッドから前記内部回路の最上層までの距離よりも、前記テスト用パッドから前記内部回路の最上層までの距離の方が長い。
前記テスト用パッドと前記内部回路との間には、絶縁膜上に配線が形成されていない層が少なくとも1層あり、前記テスト用パッドと前記内部回路との間における配線が形成されていない領域の厚さは、前記ボンディング用パッドと前記内部回路との間における配線が形成されていない領域の厚さより厚いことが望ましい。
図1に本発明にかかる半導体装置である半導体チップ100の上面図を示す。図に示されるように、当該半導体チップ100の周辺領域には、ボンディング用パッド1とテスト用パッド2の2種類のパッドが設けられている。この例では、全てのボンディング用パッド1に対してテスト用パッド2が設けられ、半導体チップ100上には、ロジック回路100a及びメモリセルアレイ100bが設けられているものとする。なお、ロジック回路100a、メモリセルアレイ100bやパッドを接続する配線についても図示を省略する。また、ボンディング用パッド1の近傍には、入出力回路(I/O回路、入力保護回路等)が設けられているものとする。
本発明の実施の形態2では、ボンディング用パッドの下層のみならずテスト用パッドの下層にも内部回路を形成している。このとき、テスト用パッドから離間して内部回路を形成することとしている。より詳細には、テスト用パッドの下層の内部回路は、ボンディング用パッドの下層において形成された内部回路よりも下層に設けられている。
上述の例では、ボンディング用パッド1とテスト用パッド2は、半導体チップ100の周辺領域に設けていたが、これに限らず、中央付近に設けても良く、また、半導体チップ100の全域に亘って設けるようにしてもよい。
2 テスト用パッド
3 メタル層
4 内部回路
5 スルーホール領域
6 カバー層
7 スルーホール
100b メモリセルアレイ
100a ロジック回路
100 半導体チップ
Claims (10)
- 内部回路と電気的に接続されるとともにボンディング部材と接合されるボンディング用パッドと、前記内部回路と電気的に接続されるとともにテストにおいてテストプローブが接触するテスト用パッドとを備える半導体装置であって、
前記テスト用パッドは、前記ボンディング用パッドと半導体チップ周辺部との間に設けられ、
前記ボンディング用パッド及び前記テスト用パッドの下層に前記内部回路が形成されており、前記ボンディング用パッドと前記内部回路との間には、絶縁膜上に配線が形成されていない層が少なくとも1層あり、前記テスト用パッドの下層に形成された内部回路は、前記ボンディング用パッドの下層に形成された内部回路よりも下方に形成されている半導体装置。 - 内部回路と電気的に接続されるとともにボンディング部材と接合されるボンディング用パッドと、前記内部回路と電気的に接続されるとともにテストにおいてテストプローブが接触するテスト用パッドとを備える半導体装置であって、
前記テスト用パッドは、前記ボンディング用パッドと半導体チップ周辺部との間に設けられ、
前記ボンディング用パッド及び前記テスト用パッドの下層に前記内部回路が形成されており、前記ボンディング用パッドと前記内部回路との間には、絶縁膜上に配線が形成されていない層が少なくとも1層あり、前記ボンディング用パッドから前記内部回路の最上層までの距離よりも、前記テスト用パッドから前記内部回路の最上層までの距離の方が長い半導体装置。 - 前記テスト用パッドと前記内部回路との間には、絶縁膜上に配線が形成されていない層が少なくとも1層あり、前記テスト用パッドと前記内部回路との間における配線が形成されていない領域の厚さは、前記ボンディング用パッドと前記内部回路との間における配線が形成されていない領域の厚さより厚いことを特徴とする請求項1又は2に記載の半導体装置。
- 前記ボンディング用パッドと前記テスト用パッドとは、前記半導体装置の周辺領域に形成されていることを特徴とする請求項1乃至3のいずれか1項に記載の半導体装置。
- 前記ボンディング用パッドの下層に形成され、スルーホールを介して当該ボンディング用パッドと接続された導電体層を備えたことを特徴とする請求項1乃至4のいずれか1項に記載の半導体装置。
- 前記テスト用パッドの下層に形成され、スルーホールを介して当該テスト用パッドと接続された導電体層を備えたことを特徴とする請求項1乃至5のいずれか1項に記載の半導体装置。
- 前記ボンディング用パッドと前記テスト用パッドの間において、当該ボンディング用パッド及び当該テスト用パッドと、下層に位置する複数の導電体層を接続するスルーホールを備えたことを特徴とする請求項1乃至6のいずれか1項に記載の半導体装置。
- 前記内部回路は、不揮発性メモリを含む請求項1記載の半導体装置。
- 前記ボンディング用パッドの下部の配線層の数は、前記ボンディング用パッドの下部を除く内部回路の配線層の数よりも少ないことを特徴とする請求項1乃至7のいずれか1項に記載の半導体装置。
- 前記テストは、少なくとも2回以上行われることを特徴とする請求項1に記載の半導体装置。
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JP4822880B2 (ja) * | 2006-03-02 | 2011-11-24 | 株式会社リコー | 半導体ウエハ、半導体装置及び半導体装置の製造方法 |
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JP5033071B2 (ja) * | 2008-06-24 | 2012-09-26 | ラピスセミコンダクタ株式会社 | 半導体装置の製造方法 |
JP4892027B2 (ja) * | 2009-03-23 | 2012-03-07 | 株式会社東芝 | 半導体記憶装置 |
US8421073B2 (en) * | 2010-10-26 | 2013-04-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Test structures for through silicon vias (TSVs) of three dimensional integrated circuit (3DIC) |
TWI483361B (zh) * | 2012-03-23 | 2015-05-01 | Chipmos Technologies Inc | 半導體封裝基板以及半導體封裝結構 |
JP2013206905A (ja) * | 2012-03-27 | 2013-10-07 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
JP6305375B2 (ja) * | 2015-07-10 | 2018-04-04 | ラピスセミコンダクタ株式会社 | 半導体装置および半導体装置の製造方法 |
KR20180138472A (ko) * | 2017-06-21 | 2018-12-31 | 에스케이하이닉스 주식회사 | 테스트 회로를 포함하는 반도체 장치 |
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KR20220076258A (ko) | 2020-11-30 | 2022-06-08 | 에스케이하이닉스 주식회사 | 서로 다른 표면적의 칩 패드들을 구비하는 반도체 칩, 및 상기 반도체 칩을 포함하는 반도체 패키지 |
KR20240030452A (ko) * | 2022-08-30 | 2024-03-07 | 삼성전자주식회사 | 반도체 칩, 및 그 반도체 칩을 포함한 반도체 패키지 |
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