JP2005223123A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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Abstract
【解決手段】本発明の半導体装置は、半導体素子50や配線57上に絶縁膜59を介して、少なくとも2種類の材料、ここではTiN膜61、Al膜62の2層構造のパッドを備え、下層膜の材料のヤング率が上層膜の材料のヤング率より大きいことを特徴とする。
この構成により、プローブ検査あるいはワイヤボンド等の接続工程において生じる絶縁膜59への応力を分散させることができ、絶縁膜59にクラックが生じないようにできる。
【選択図】図1
Description
素子7の上に複数層の絶縁膜8、素子の内部配線9が形成されていて、パッドと接続する最上層の配線12があり、配線12の上層にパシベーション膜10、ポリイミド膜11が形成されていて、その上部に配線12上の開口部を介して接続されるパッド13が形成されている。パッド13と内部配線9との間はクラックによるショートが生じないように絶縁膜8、パシベーション膜10、ポリイミド膜11と厚い絶縁膜を形成している。
上記方法のように、メッキ法で形成すると容易に厚い膜を形成できるので、Ni膜のヤング率が約220000MPaとヤング率が比較的小さいが、絶縁膜59の厚さを薄くしても良いし、パッド表面にかける応力が大きくなっても良いのでプロセス条件の余裕度を上げることができる。
81があり、プローブ検査用のパッド82a、82b、82cはESD80上に、外部接続用パッド83a、83b、83cは内部素子81上に設ける。そうすると、外部接続用パッドの間隔を広くすることができるので接続が容易になる。また、プローブ検査用パッド下の絶縁膜はP−Si3N4膜59に加えてSiO2膜55、54が形成されている。故に、ESD上に設けたパッド下の絶縁膜は素子上に設けたパッド下の絶縁膜よりも厚くなる。さらに5〜8層配線と多層配線になれば、より一層絶縁膜の厚さが大きくなる。そのため、プローブ検査時の局所応力が少々大きくなっても絶縁膜にクラックが入ることはないので、プローブ検査条件の応力に対する余裕度が上がる。
51、52、54、55 SiO2膜
57 Cu配線
58 メモリー冗長回路用フューズCu配線
59 P−SiN膜
60 コンタクトホール
61 TiN膜
62 Al膜
70 TiW膜
72 Ni膜
73 Au膜
Claims (8)
- 回路素子あるいは配線の上に絶縁膜を介して形成された外部接続用電極パッドである導電体薄膜が、少なくとも2層の材料で形成されており、前記絶縁膜と接する下層導電体薄膜は上層の導電体薄膜よりもヤング率が大きいことを特徴とする半導体装置。
- 下層導電体薄膜はヤング率が120000MPa以上の材料で構成されていることを特徴とする請求項1記載の半導体装置。
- 上層導電体薄膜は厚さ600nm以上2000nm以下のアルミニウムもしくはアルミニウムを主成分とした合金層で形成されており、下層導電体薄膜は厚さ100nm以上のTiN膜で形成されていることを特徴とする請求項1記載の半導体装置。
- 導電体薄膜が下層から上層に向けて、TiW層、Ni層、Au層であることを特徴とする請求項1記載の半導体装置。
- 下層導電体薄膜がTiN―W−TiNの3層構造で構成されていることを特徴とする請求項1記載の半導体装置。
- Wに変えて、Tiよりヤング率が大きい材料とすることを特徴とする請求項5記載の半導体装置。
- 半導体基板上に形成された回路素子あるいは配線上に最上層の絶縁膜を形成する工程と、前記最上層の絶縁膜上全面に第1の導電体薄膜を形成する工程と、前記第1の導電体薄膜上の所定の領域に感光性樹脂膜を形成する工程と、前記感光性樹脂膜をマスクにして、前記第1の導電体薄膜上に第2、第3の導電体薄膜を選択的に形成する工程と、前記感光性樹脂膜を除去する工程と、前記第2、第3の導電体薄膜をマスクとして前記第1の導電体薄膜を選択的に除去する工程とを備え、前記第2の導電体薄膜は前記第3の導電体薄膜よりもヤング率の大きい材料を用い、前記第1、第2、第3の導電体薄膜で外部接続用電極パッドを構成することを特徴とする半導体装置の製造方法。
- 第2の導電体薄膜はNi、第3の導電体薄膜はAuとし、メッキ方法で所定の厚さ形成することを特徴とする請求項7記載の半導体装置の製造方法。
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008108825A (ja) * | 2006-10-24 | 2008-05-08 | Denso Corp | 半導体装置 |
US7642653B2 (en) | 2006-10-24 | 2010-01-05 | Denso Corporation | Semiconductor device, wiring of semiconductor device, and method of forming wiring |
US7956473B2 (en) | 2007-07-23 | 2011-06-07 | Renesas Electronics Corporation | Semiconductor device |
JP2012243890A (ja) * | 2011-05-18 | 2012-12-10 | Denso Corp | 半導体装置およびその製造方法 |
JP2014072386A (ja) * | 2012-09-28 | 2014-04-21 | Rohm Co Ltd | 半導体装置 |
JP2015161700A (ja) * | 2014-02-26 | 2015-09-07 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法 |
EP3067923A1 (en) * | 2015-02-18 | 2016-09-14 | Renesas Electronics Corporation | Semiconductor device and method of manufacturing the same |
WO2020113385A1 (zh) * | 2018-12-03 | 2020-06-11 | 深圳市柔宇科技有限公司 | 显示面板以及显示模组 |
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2004
- 2004-02-05 JP JP2004029094A patent/JP2005223123A/ja active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008108825A (ja) * | 2006-10-24 | 2008-05-08 | Denso Corp | 半導体装置 |
US7642653B2 (en) | 2006-10-24 | 2010-01-05 | Denso Corporation | Semiconductor device, wiring of semiconductor device, and method of forming wiring |
US7956473B2 (en) | 2007-07-23 | 2011-06-07 | Renesas Electronics Corporation | Semiconductor device |
TWI455218B (zh) * | 2007-07-23 | 2014-10-01 | Renesas Electronics Corp | 半導體裝置及其製造方法 |
JP2012243890A (ja) * | 2011-05-18 | 2012-12-10 | Denso Corp | 半導体装置およびその製造方法 |
JP2014072386A (ja) * | 2012-09-28 | 2014-04-21 | Rohm Co Ltd | 半導体装置 |
JP2015161700A (ja) * | 2014-02-26 | 2015-09-07 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法 |
EP3067923A1 (en) * | 2015-02-18 | 2016-09-14 | Renesas Electronics Corporation | Semiconductor device and method of manufacturing the same |
US10586777B2 (en) | 2015-02-18 | 2020-03-10 | Renesas Electronics Corporation | Semiconductor device and method of manufacturing the same |
WO2020113385A1 (zh) * | 2018-12-03 | 2020-06-11 | 深圳市柔宇科技有限公司 | 显示面板以及显示模组 |
CN113169147A (zh) * | 2018-12-03 | 2021-07-23 | 深圳市柔宇科技股份有限公司 | 显示面板以及显示模组 |
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