JP4447392B2 - ウエーハの分割方法および分割装置 - Google Patents
ウエーハの分割方法および分割装置 Download PDFInfo
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- JP4447392B2 JP4447392B2 JP2004215111A JP2004215111A JP4447392B2 JP 4447392 B2 JP4447392 B2 JP 4447392B2 JP 2004215111 A JP2004215111 A JP 2004215111A JP 2004215111 A JP2004215111 A JP 2004215111A JP 4447392 B2 JP4447392 B2 JP 4447392B2
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- 238000000034 method Methods 0.000 title description 35
- 230000001681 protective effect Effects 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 description 58
- 238000005520 cutting process Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 12
- 238000012360 testing method Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000011218 segmentation Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910009372 YVO4 Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- -1 gallium nitride compound Chemical class 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0052—Means for supporting or holding work during breaking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/57—Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
- B28D5/0023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rectilinearly
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/30—Breaking or tearing apparatus
- Y10T225/307—Combined with preliminary weakener or with nonbreaking cutter
- Y10T225/321—Preliminary weakener
- Y10T225/325—With means to apply moment of force to weakened work
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Dicing (AREA)
Description
基台に所定方向に移動可能に配設された移動テーブル上に配設され、筒状の本体と該本体の上端に設けられた環状のフレーム保持部材とを具備し、該フレーム保持部材上にウエーハの一方の面に貼着した保護テープが装着されている環状のフレームを支持するフレーム保持手段と、
該基台上に配設され該フレーム保持手段に該環状のフレームに装着された該保護テープを介して支持されたウエーハを分割予定ラインの両側において該保護テープを介して吸引保持し分割予定ラインと直交する方向に引張力を作用せしめる張力付与手段と、を具備し、
該張力付与手段は、該フレーム保持手段の該筒状の本体内に配設され分割予定ラインの両側において該保護テープを介して吸引保持する第1の吸引保持部材および第2の吸引保持部材と、該第1の吸引保持部材と該第2の吸引保持部材を互いに離反する方向に移動せしめる移動手段とからなっている、
ことを特徴とするウエーハの分割装置が提供される。
この変質層形成行程は、先ず上述した図2に示すレーザー加工装置1のチャックテーブル11上に半導体ウエーハ10を裏面10bを上にして載置し、該チャックテーブル11上に半導体ウエーハ10を吸着保持する。半導体ウエーハ10を吸引保持したチャックテーブル11は、図示しない移動機構によって撮像手段13の直下に位置付けられる。
光源 :LD励起QスイッチNd:YVO4スレーザー
波長 :1064nmのパルスレーザー
パルス出力 :10μJ
集光スポット径 :φ1μm
パルス幅 :100nsec
集光点のピークパワー密度:1.3×1010W/cm2
繰り返し周波数 :100kHz
加工送り速度 :100mm/秒
図8にはウエーハの分割装置の斜視図が示されており、図9には図8に示す分割装置の要部を分解して示す斜視図が示されている。図示の実施形態におけるウエーハの分割装置2は、基台3と、該基台3上に矢印Yで示す方向に移動可能に配設された移動テーブル4を具備している。基台3は矩形状に形成され、その両側部上面には矢印Yで示す方向に2本の案内レール31、32が互いに平行に配設されている。なお、2本の案内レールのうち一方案内レール31には、その上面に断面がV字状の案内溝311が形成されている。
上記図7に示すように分割予定ライン101に沿って強度が低下せしめられた半導体ウエーハ10を保護テープ16を介して支持した環状のフレーム15を、図11に示すようにフレーム保持手段6を構成するフレーム保持部材62の載置面621上に載置し、クランプ機構63によってフレーム保持部材62に固定する。
11:レーザー加工装置のチャックテーブル
12:レーザー光線照射手段
13:撮像手段
2:ウエーハの分割装置
3:基台
4:移動テーブル
5:移動手段
6:フレーム保持手段
7:回動手段
8:張力付与手段
81:第1の吸引保持部材
82:第2の吸引保持部材
9:検出手段
10:半導体ウエーハ
101:分割予定ライン
102:回路
110:変質層
15:環状のフレーム
16:保護テープ
Claims (2)
- 表面に格子状に形成された複数の分割予定ラインに沿って強度が低下せしめられているウエーハを、分割予定ラインに沿って分割するウエーハの分割装置であって、
基台に所定方向に移動可能に配設された移動テーブル上に配設され、筒状の本体と該本体の上端に設けられた環状のフレーム保持部材とを具備し、該フレーム保持部材上にウエーハの一方の面に貼着した保護テープが装着されている環状のフレームを支持するフレーム保持手段と、
該基台上に配設され該フレーム保持手段に該環状のフレームに装着された該保護テープを介して支持されたウエーハを分割予定ラインの両側において該保護テープを介して吸引保持し分割予定ラインと直交する方向に引張力を作用せしめる張力付与手段と、を具備し、
該張力付与手段は、該フレーム保持手段の該筒状の本体内に配設され分割予定ラインの両側において該保護テープを介して吸引保持する第1の吸引保持部材および第2の吸引保持部材と、該第1の吸引保持部材と該第2の吸引保持部材を互いに離反する方向に移動せしめる移動手段とからなっている、
ことを特徴とするウエーハの分割装置。 - 該フレーム保持手段は該移動テーブルに回動可能に支持されており、該フレーム保持手段を回動せしめる回動手段を備えている、請求項1記載のウエーハの分割装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004215111A JP4447392B2 (ja) | 2004-07-23 | 2004-07-23 | ウエーハの分割方法および分割装置 |
SG200504506A SG119321A1 (en) | 2004-07-23 | 2005-07-18 | Wafer dividing method and apparatus |
US11/183,828 US7063083B2 (en) | 2004-07-23 | 2005-07-19 | Wafer dividing method and apparatus |
DE200510033953 DE102005033953B4 (de) | 2004-07-23 | 2005-07-20 | Waferteilungsverfahren und -vorrichtung |
CNB2005100849688A CN100446188C (zh) | 2004-07-23 | 2005-07-22 | 晶片分割方法和装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004215111A JP4447392B2 (ja) | 2004-07-23 | 2004-07-23 | ウエーハの分割方法および分割装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006040988A JP2006040988A (ja) | 2006-02-09 |
JP4447392B2 true JP4447392B2 (ja) | 2010-04-07 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004215111A Active JP4447392B2 (ja) | 2004-07-23 | 2004-07-23 | ウエーハの分割方法および分割装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7063083B2 (ja) |
JP (1) | JP4447392B2 (ja) |
CN (1) | CN100446188C (ja) |
DE (1) | DE102005033953B4 (ja) |
SG (1) | SG119321A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4511903B2 (ja) * | 2004-10-20 | 2010-07-28 | 株式会社ディスコ | ウエーハの分割装置 |
JP2006128211A (ja) * | 2004-10-26 | 2006-05-18 | Disco Abrasive Syst Ltd | ウエーハの分割装置 |
JP2013080972A (ja) * | 2005-11-10 | 2013-05-02 | Renesas Electronics Corp | 半導体装置の製造方法 |
WO2007055010A1 (ja) | 2005-11-10 | 2007-05-18 | Renesas Technology Corp. | 半導体装置の製造方法および半導体装置 |
JP2007214417A (ja) * | 2006-02-10 | 2007-08-23 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP4767711B2 (ja) * | 2006-02-16 | 2011-09-07 | 株式会社ディスコ | ウエーハの分割方法 |
DE102007006806A1 (de) * | 2007-02-07 | 2008-08-14 | Mauser-Werke Oberndorf Maschinenbau Gmbh | Bruchtrennverfahren |
JP5283911B2 (ja) * | 2008-01-11 | 2013-09-04 | 株式会社ディスコ | 切削装置 |
US8342374B2 (en) * | 2009-02-11 | 2013-01-01 | Insight Promotions, Llc | Fragile premium separator |
JP2011129740A (ja) | 2009-12-18 | 2011-06-30 | Disco Abrasive Syst Ltd | ウエーハ分割装置およびレーザー加工機 |
JP5508133B2 (ja) * | 2010-05-19 | 2014-05-28 | 株式会社ディスコ | 板状物の分割装置 |
JP2013008769A (ja) * | 2011-06-23 | 2013-01-10 | Sumitomo Electric Ind Ltd | 炭化珪素基板の製造方法 |
JP6047392B2 (ja) * | 2012-12-13 | 2016-12-21 | 株式会社ディスコ | 分割装置および分割方法 |
KR20180064605A (ko) * | 2016-12-05 | 2018-06-15 | 삼성디스플레이 주식회사 | 레이저 가공용 워크 테이블 및 이의 동작 방법 |
TWI722172B (zh) * | 2017-04-20 | 2021-03-21 | 矽品精密工業股份有限公司 | 切割方法 |
CN109664037B (zh) * | 2018-12-18 | 2020-01-31 | 中国科学院西安光学精密机械研究所 | 一种实现具有周向特征筒形件定位的方法 |
EP3705862B1 (en) * | 2019-03-05 | 2023-07-05 | Infineon Technologies AG | Method and device for monitoring a dicing tape tension |
JP2022114636A (ja) * | 2021-01-27 | 2022-08-08 | 株式会社ディスコ | ウエーハの分割方法、及び分割装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3766638A (en) * | 1970-08-31 | 1973-10-23 | Hugle Ind Inc | Wafer spreader |
US3918150A (en) * | 1974-02-08 | 1975-11-11 | Gen Electric | System for separating a semiconductor wafer into discrete pellets |
US4296542A (en) * | 1980-07-11 | 1981-10-27 | Presco, Inc. | Control of small parts in a manufacturing operation |
JPS59117235A (ja) * | 1982-12-24 | 1984-07-06 | Hitachi Yonezawa Denshi Kk | ウエハブレ−キング方法および装置 |
US4653680A (en) * | 1985-04-25 | 1987-03-31 | Regan Barrie F | Apparatus for breaking semiconductor wafers and the like |
EP0720521A4 (en) * | 1994-07-20 | 1996-12-18 | Loomis Ind Inc | DEVICE AND METHOD FOR CUTTING SEMICONDUCTOR DISC |
JPH10116801A (ja) * | 1996-10-09 | 1998-05-06 | Rohm Co Ltd | 基板分割方法及びその基板分割を用いた発光素子製造 方法 |
JP3326384B2 (ja) * | 1998-03-12 | 2002-09-24 | 古河電気工業株式会社 | 半導体ウエハーの劈開方法およびその装置 |
JP4488590B2 (ja) * | 1999-07-28 | 2010-06-23 | 株式会社ディスコ | 被加工物の分割方法 |
JP3408805B2 (ja) | 2000-09-13 | 2003-05-19 | 浜松ホトニクス株式会社 | 切断起点領域形成方法及び加工対象物切断方法 |
JP2002246335A (ja) * | 2001-02-20 | 2002-08-30 | Umc Japan | 半導体ウェハ分割方法 |
JP2003007652A (ja) * | 2001-06-26 | 2003-01-10 | Mitsubishi Electric Corp | 半導体チップの製造方法 |
US8268704B2 (en) * | 2002-03-12 | 2012-09-18 | Hamamatsu Photonics K.K. | Method for dicing substrate |
TW549560U (en) * | 2002-11-18 | 2003-08-21 | Ind Tech Res Inst | Rotational positioning mechanism for separating brittle material |
US6756562B1 (en) * | 2003-01-10 | 2004-06-29 | Kabushiki Kaisha Toshiba | Semiconductor wafer dividing apparatus and semiconductor device manufacturing method |
JP2005129607A (ja) | 2003-10-22 | 2005-05-19 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
TWI249762B (en) * | 2003-12-03 | 2006-02-21 | Ind Tech Res Inst | Sheet cutting device |
-
2004
- 2004-07-23 JP JP2004215111A patent/JP4447392B2/ja active Active
-
2005
- 2005-07-18 SG SG200504506A patent/SG119321A1/en unknown
- 2005-07-19 US US11/183,828 patent/US7063083B2/en active Active
- 2005-07-20 DE DE200510033953 patent/DE102005033953B4/de active Active
- 2005-07-22 CN CNB2005100849688A patent/CN100446188C/zh active Active
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Publication number | Publication date |
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DE102005033953B4 (de) | 2013-09-26 |
US20060016443A1 (en) | 2006-01-26 |
SG119321A1 (en) | 2006-02-28 |
CN100446188C (zh) | 2008-12-24 |
JP2006040988A (ja) | 2006-02-09 |
CN1734723A (zh) | 2006-02-15 |
DE102005033953A1 (de) | 2006-03-16 |
US7063083B2 (en) | 2006-06-20 |
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