JP5283911B2 - 切削装置 - Google Patents
切削装置 Download PDFInfo
- Publication number
- JP5283911B2 JP5283911B2 JP2008003842A JP2008003842A JP5283911B2 JP 5283911 B2 JP5283911 B2 JP 5283911B2 JP 2008003842 A JP2008003842 A JP 2008003842A JP 2008003842 A JP2008003842 A JP 2008003842A JP 5283911 B2 JP5283911 B2 JP 5283911B2
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- JP
- Japan
- Prior art keywords
- plate
- small piece
- chuck table
- cutting
- small
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
14 チャックテーブルユニット
18 支持基台
20 チャックテーブル
22 小片吸着テーブル
26 切削ユニット
30 スピンドル
32 切削ブレード
34 アライメントユニット
36 撮像装置
56 長穴
58 吸引パイプ
62 板状物
64 小片基板
Claims (1)
- 板状物を保持し回転可能なチャックテーブルと、該チャックテーブルに保持された板状物を小片に分割する切削ブレードが装着された切削手段を備えた切削装置であって、
該チャックテーブルは、複数の小片吸着テーブルに分割されており、各小片吸着テーブルは真空吸引源に接続され、板状物の切削によって分割された複数の小片板状物を吸引保持可能に構成され、
該各小片吸着テーブルは、集合離反手段により該各小片吸着テーブルが互いに接触する集合位置と互いに離反した離反位置との間で移動されることを特徴とする切削装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008003842A JP5283911B2 (ja) | 2008-01-11 | 2008-01-11 | 切削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008003842A JP5283911B2 (ja) | 2008-01-11 | 2008-01-11 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009166143A JP2009166143A (ja) | 2009-07-30 |
JP5283911B2 true JP5283911B2 (ja) | 2013-09-04 |
Family
ID=40967927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008003842A Active JP5283911B2 (ja) | 2008-01-11 | 2008-01-11 | 切削装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5283911B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110497545A (zh) * | 2019-08-13 | 2019-11-26 | 安徽晶天新能源科技有限责任公司 | 一种太阳能硅片生产加工工艺 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102856187B (zh) * | 2012-08-16 | 2015-01-21 | 常州天合光能有限公司 | 一种太阳能电池片手动裂片装置 |
CN103337554B (zh) * | 2013-06-06 | 2016-12-28 | 常州天合光能有限公司 | 太阳能电池片电动裂片装置 |
JP6109975B1 (ja) * | 2016-01-08 | 2017-04-05 | キヤノンマシナリー株式会社 | 基板切断装置 |
JP1560673S (ja) * | 2016-02-09 | 2019-09-24 | ||
CN105932107B (zh) * | 2016-05-27 | 2017-06-20 | 江西日普升能源科技股份有限公司 | 一种光伏电池片的拨片设备及其拨片方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62249446A (ja) * | 1986-04-23 | 1987-10-30 | Hitachi Ltd | 保持装置およびその使用方法 |
JPS6416610A (en) * | 1987-07-10 | 1989-01-20 | Nippon Mining Co | Cleaving device |
JP4733805B2 (ja) * | 2000-04-03 | 2011-07-27 | ソニー株式会社 | 矩形部材を棒状部材に形成する加工方法および加工装置 |
KR100724474B1 (ko) * | 2002-10-22 | 2007-06-04 | 엘지.필립스 엘시디 주식회사 | 액정 표시패널의 절단 장치 및 이를 이용한 절단방법 |
JP2004223797A (ja) * | 2003-01-21 | 2004-08-12 | Kyoto Seisakusho Co Ltd | 脆性材料の切断加工方法および切断加工装置 |
JP2004330417A (ja) * | 2003-04-30 | 2004-11-25 | Towa Corp | 基板の切断方法、切断装置および基板吸着固定機構 |
JP2005066789A (ja) * | 2003-08-26 | 2005-03-17 | Tdk Corp | 集合部材分割装置 |
JP4447392B2 (ja) * | 2004-07-23 | 2010-04-07 | 株式会社ディスコ | ウエーハの分割方法および分割装置 |
CN101909806B (zh) * | 2007-12-27 | 2013-06-12 | 三星钻石工业股份有限公司 | 激光加工装置 |
-
2008
- 2008-01-11 JP JP2008003842A patent/JP5283911B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110497545A (zh) * | 2019-08-13 | 2019-11-26 | 安徽晶天新能源科技有限责任公司 | 一种太阳能硅片生产加工工艺 |
Also Published As
Publication number | Publication date |
---|---|
JP2009166143A (ja) | 2009-07-30 |
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