JP4328412B2 - 振動型アクチュエータおよび振動型駆動装置 - Google Patents

振動型アクチュエータおよび振動型駆動装置 Download PDF

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Publication number
JP4328412B2
JP4328412B2 JP13448799A JP13448799A JP4328412B2 JP 4328412 B2 JP4328412 B2 JP 4328412B2 JP 13448799 A JP13448799 A JP 13448799A JP 13448799 A JP13448799 A JP 13448799A JP 4328412 B2 JP4328412 B2 JP 4328412B2
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Japan
Prior art keywords
vibration
axis
type actuator
vibrating body
vibration type
Prior art date
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Expired - Fee Related
Application number
JP13448799A
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English (en)
Japanese (ja)
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JP2000324862A (ja
JP2000324862A5 (enExample
Inventor
隆司 前野
研治郎 竹村
一郎 奥村
信行 小島
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13448799A priority Critical patent/JP4328412B2/ja
Priority to US09/569,255 priority patent/US6380660B1/en
Publication of JP2000324862A publication Critical patent/JP2000324862A/ja
Publication of JP2000324862A5 publication Critical patent/JP2000324862A5/ja
Application granted granted Critical
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/0035—Cylindrical vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP13448799A 1999-05-14 1999-05-14 振動型アクチュエータおよび振動型駆動装置 Expired - Fee Related JP4328412B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13448799A JP4328412B2 (ja) 1999-05-14 1999-05-14 振動型アクチュエータおよび振動型駆動装置
US09/569,255 US6380660B1 (en) 1999-05-14 2000-05-11 Vibration type actuator and vibration type driving apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13448799A JP4328412B2 (ja) 1999-05-14 1999-05-14 振動型アクチュエータおよび振動型駆動装置

Publications (3)

Publication Number Publication Date
JP2000324862A JP2000324862A (ja) 2000-11-24
JP2000324862A5 JP2000324862A5 (enExample) 2006-06-29
JP4328412B2 true JP4328412B2 (ja) 2009-09-09

Family

ID=15129485

Family Applications (1)

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JP13448799A Expired - Fee Related JP4328412B2 (ja) 1999-05-14 1999-05-14 振動型アクチュエータおよび振動型駆動装置

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Country Link
US (1) US6380660B1 (enExample)
JP (1) JP4328412B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4726167B2 (ja) * 2001-03-12 2011-07-20 キヤノン株式会社 振動波駆動装置
DE10146703A1 (de) * 2001-09-21 2003-04-10 Elliptec Resonant Actuator Ag Piezomotor mit Führung
JP4838463B2 (ja) * 2001-09-25 2011-12-14 キヤノン株式会社 振動型アクチュエータおよび振動型駆動装置
US7141914B2 (en) * 2001-12-07 2006-11-28 Chip-Man Technologies Oy Micromanipulator including piezoelectric benders
JP3828418B2 (ja) * 2001-12-21 2006-10-04 アスモ株式会社 超音波モータ、及び超音波モータのステータ
JP4027090B2 (ja) * 2001-12-27 2007-12-26 キヤノン株式会社 振動体および振動波駆動装置
JP4086690B2 (ja) * 2003-03-19 2008-05-14 キヤノン株式会社 マニピュレータ
JP4276914B2 (ja) * 2003-09-18 2009-06-10 オリンパス株式会社 振動波リニアモータ及びその駆動方法
JP4756916B2 (ja) * 2005-05-31 2011-08-24 キヤノン株式会社 振動波モータ
JP2007060888A (ja) * 2005-07-26 2007-03-08 Pentax Corp 二次元移動装置
JP4780770B2 (ja) * 2006-04-10 2011-09-28 株式会社豊田自動織機 振動アクチュエータ
US7593774B2 (en) * 2006-07-25 2009-09-22 Biotronik Crm Patent Ag Cardiac pacemaker
JP5144097B2 (ja) * 2007-03-23 2013-02-13 太平洋セメント株式会社 超音波モータ装置
JP2012023939A (ja) * 2010-07-16 2012-02-02 Olympus Corp 超音波モータユニット
JP6771939B2 (ja) 2016-04-25 2020-10-21 キヤノン株式会社 振動型アクチュエータ及び電子機器
CN112455635B (zh) * 2020-10-26 2022-04-22 南京航空航天大学 一种压电驱动划水式潜航器

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59201684A (ja) 1983-04-30 1984-11-15 Canon Inc 振動波モ−タ
JPS59201685A (ja) 1983-04-30 1984-11-15 Canon Inc 振動波モ−タ
JPS6013481A (ja) 1983-07-04 1985-01-23 Canon Inc 振動波モ−タ
DE3433768A1 (de) * 1983-09-16 1985-04-18 Hitachi Maxell, Ltd., Ibaraki, Osaka Piezo-elektrischer motor
JPS60170472A (ja) 1984-02-10 1985-09-03 Canon Inc 振動波モ−タ
JPS61224880A (ja) 1985-03-29 1986-10-06 Canon Inc 振動波モ−タ
US4752711A (en) 1985-03-29 1988-06-21 Canon Kabushiki Kaisha Vibration wave motor
JPS61224881A (ja) 1985-03-29 1986-10-06 Canon Inc 振動波モ−タ
JPS61224882A (ja) 1985-03-29 1986-10-06 Canon Inc 振動波モ−タ
GB2183929B (en) 1985-08-05 1989-11-15 Canon Kk Vibration wave motor
US4771203A (en) 1986-02-24 1988-09-13 Canon Kabushiki Kaisha Vibration wave motor
US4734610A (en) 1986-03-25 1988-03-29 Canon Kabushiki Kaisha Vibration wave motor
JPS62262675A (ja) 1986-05-09 1987-11-14 Canon Inc 振動波駆動装置
US5099166A (en) 1987-01-12 1992-03-24 Canon Kabushiki Kaisha Vibration wave driven motor
JP2614635B2 (ja) * 1988-04-12 1997-05-28 日立マクセル株式会社 電歪公転子及び単相超音波モータ
JP2612050B2 (ja) 1988-09-19 1997-05-21 キヤノン株式会社 振動波モータ
EP0383309B1 (en) 1989-02-14 1997-06-04 Canon Kabushiki Kaisha Vibration wave motor
JPH03183376A (ja) 1989-12-08 1991-08-09 Canon Inc 振動波モータ
JP2996477B2 (ja) 1990-02-05 1999-12-27 キヤノン株式会社 振動波駆動装置
JP2993702B2 (ja) 1990-04-02 1999-12-27 キヤノン株式会社 振動波駆動装置
JP2879955B2 (ja) 1990-08-03 1999-04-05 キヤノン株式会社 振動波駆動装置
JP2925272B2 (ja) 1990-08-31 1999-07-28 キヤノン株式会社 振動波モータ
JP3107933B2 (ja) 1992-12-03 2000-11-13 キヤノン株式会社 振動波駆動装置および振動波駆動装置を備えた装置
JP3179601B2 (ja) 1992-12-17 2001-06-25 キヤノン株式会社 振動波モータおよび振動波モータを備えた装置
JP3245245B2 (ja) * 1993-02-05 2002-01-07 沖電気工業株式会社 超音波モータ及び超音波搬送装置
JP3059031B2 (ja) 1993-09-22 2000-07-04 キヤノン株式会社 振動波駆動装置及び振動波駆動装置を備えた装置
DE69416989T2 (de) 1993-12-27 1999-08-26 Canon K.K. Vibrationswellenantrieb
JP3402816B2 (ja) 1994-12-22 2003-05-06 キヤノン株式会社 超音波モータの駆動回路
JP3432321B2 (ja) 1995-01-31 2003-08-04 太平洋セメント株式会社 積層セラミックス圧電体素子
US5760529A (en) 1995-04-24 1998-06-02 Canon Kabushiki Kaisha Vibration wave actuator and system using the same
US5949178A (en) 1995-04-26 1999-09-07 Canon Kabushiki Kaisha Vibration wave driving apparatus and a vibration member, and manufacturing method of the apparatus and the member
US5814919A (en) 1995-04-28 1998-09-29 Canon Kabushiki Kaisha Electro-mechanical energy conversion element and a vibration wave actuator using the electro-mechanical energy conversion element
DE19757139A1 (de) * 1997-12-20 1999-06-24 Philips Patentverwaltung Antriebsvorrichtung für wenigstens zwei Rotationselemente mit wenigstens einem piezoelektrischen Antriebselement

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Publication number Publication date
JP2000324862A (ja) 2000-11-24
US6380660B1 (en) 2002-04-30

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