JP4276534B2 - 搬送ロボット - Google Patents

搬送ロボット Download PDF

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Publication number
JP4276534B2
JP4276534B2 JP2003434775A JP2003434775A JP4276534B2 JP 4276534 B2 JP4276534 B2 JP 4276534B2 JP 2003434775 A JP2003434775 A JP 2003434775A JP 2003434775 A JP2003434775 A JP 2003434775A JP 4276534 B2 JP4276534 B2 JP 4276534B2
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JP
Japan
Prior art keywords
link arm
transfer mechanism
linear transfer
link
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003434775A
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English (en)
Japanese (ja)
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JP2005186259A5 (enExample
JP2005186259A (ja
Inventor
弘敬 小川
直也 村田
剛之 松崎
隆文 浦谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
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Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2003434775A priority Critical patent/JP4276534B2/ja
Publication of JP2005186259A publication Critical patent/JP2005186259A/ja
Publication of JP2005186259A5 publication Critical patent/JP2005186259A5/ja
Application granted granted Critical
Publication of JP4276534B2 publication Critical patent/JP4276534B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2003434775A 2003-12-26 2003-12-26 搬送ロボット Expired - Fee Related JP4276534B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003434775A JP4276534B2 (ja) 2003-12-26 2003-12-26 搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003434775A JP4276534B2 (ja) 2003-12-26 2003-12-26 搬送ロボット

Publications (3)

Publication Number Publication Date
JP2005186259A JP2005186259A (ja) 2005-07-14
JP2005186259A5 JP2005186259A5 (enExample) 2006-12-28
JP4276534B2 true JP4276534B2 (ja) 2009-06-10

Family

ID=34791731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003434775A Expired - Fee Related JP4276534B2 (ja) 2003-12-26 2003-12-26 搬送ロボット

Country Status (1)

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JP (1) JP4276534B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100765901B1 (ko) * 2006-06-12 2007-10-10 세메스 주식회사 기판 처리 장치 및 상기 장치에서 기판을 로딩하는 방법
JPWO2008120294A1 (ja) 2007-03-02 2010-07-15 株式会社ダイヘン 搬送装置
KR101312989B1 (ko) * 2007-03-08 2013-10-01 주식회사 로보스타 진공 환경 작업용 반송 로봇
JP2008246644A (ja) 2007-03-30 2008-10-16 Daihen Corp 搬送装置
JP4955447B2 (ja) 2007-04-26 2012-06-20 株式会社ダイヘン 搬送装置
KR101781808B1 (ko) 2009-01-11 2017-10-23 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법
KR101198442B1 (ko) * 2011-12-20 2012-11-06 삼익티에이치케이 주식회사 산업용 고속로봇
US9033644B2 (en) 2012-07-05 2015-05-19 Applied Materials, Inc. Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub
KR101268111B1 (ko) 2013-03-14 2013-05-29 주식회사 티이에스 기판 이송 장치
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置
KR102350673B1 (ko) * 2021-03-05 2022-01-12 (주)볼타오토메이션 반송로봇용 쿼드블레이드 타입의 반송암모듈

Also Published As

Publication number Publication date
JP2005186259A (ja) 2005-07-14

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