JP2005186259A5 - - Google Patents

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Publication number
JP2005186259A5
JP2005186259A5 JP2003434775A JP2003434775A JP2005186259A5 JP 2005186259 A5 JP2005186259 A5 JP 2005186259A5 JP 2003434775 A JP2003434775 A JP 2003434775A JP 2003434775 A JP2003434775 A JP 2003434775A JP 2005186259 A5 JP2005186259 A5 JP 2005186259A5
Authority
JP
Japan
Prior art keywords
link arm
transfer mechanism
link
linear transfer
vertical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003434775A
Other languages
English (en)
Japanese (ja)
Other versions
JP4276534B2 (ja
JP2005186259A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003434775A priority Critical patent/JP4276534B2/ja
Priority claimed from JP2003434775A external-priority patent/JP4276534B2/ja
Publication of JP2005186259A publication Critical patent/JP2005186259A/ja
Publication of JP2005186259A5 publication Critical patent/JP2005186259A5/ja
Application granted granted Critical
Publication of JP4276534B2 publication Critical patent/JP4276534B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003434775A 2003-12-26 2003-12-26 搬送ロボット Expired - Fee Related JP4276534B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003434775A JP4276534B2 (ja) 2003-12-26 2003-12-26 搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003434775A JP4276534B2 (ja) 2003-12-26 2003-12-26 搬送ロボット

Publications (3)

Publication Number Publication Date
JP2005186259A JP2005186259A (ja) 2005-07-14
JP2005186259A5 true JP2005186259A5 (enExample) 2006-12-28
JP4276534B2 JP4276534B2 (ja) 2009-06-10

Family

ID=34791731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003434775A Expired - Fee Related JP4276534B2 (ja) 2003-12-26 2003-12-26 搬送ロボット

Country Status (1)

Country Link
JP (1) JP4276534B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100765901B1 (ko) * 2006-06-12 2007-10-10 세메스 주식회사 기판 처리 장치 및 상기 장치에서 기판을 로딩하는 방법
JPWO2008120294A1 (ja) 2007-03-02 2010-07-15 株式会社ダイヘン 搬送装置
KR101312989B1 (ko) * 2007-03-08 2013-10-01 주식회사 로보스타 진공 환경 작업용 반송 로봇
JP2008246644A (ja) 2007-03-30 2008-10-16 Daihen Corp 搬送装置
JP4955447B2 (ja) 2007-04-26 2012-06-20 株式会社ダイヘン 搬送装置
KR101781808B1 (ko) 2009-01-11 2017-10-23 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법
KR101198442B1 (ko) * 2011-12-20 2012-11-06 삼익티에이치케이 주식회사 산업용 고속로봇
US9033644B2 (en) 2012-07-05 2015-05-19 Applied Materials, Inc. Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub
KR101268111B1 (ko) 2013-03-14 2013-05-29 주식회사 티이에스 기판 이송 장치
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置
KR102350673B1 (ko) * 2021-03-05 2022-01-12 (주)볼타오토메이션 반송로봇용 쿼드블레이드 타입의 반송암모듈

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