JP4955447B2 - 搬送装置 - Google Patents
搬送装置 Download PDFInfo
- Publication number
- JP4955447B2 JP4955447B2 JP2007116524A JP2007116524A JP4955447B2 JP 4955447 B2 JP4955447 B2 JP 4955447B2 JP 2007116524 A JP2007116524 A JP 2007116524A JP 2007116524 A JP2007116524 A JP 2007116524A JP 4955447 B2 JP4955447 B2 JP 4955447B2
- Authority
- JP
- Japan
- Prior art keywords
- bevel gear
- drive
- transmission shaft
- linear movement
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 claims description 153
- 230000005540 biological transmission Effects 0.000 claims description 75
- 230000033001 locomotion Effects 0.000 claims description 50
- 230000009467 reduction Effects 0.000 claims description 12
- 230000002452 interceptive effect Effects 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/19—Gearing
- Y10T74/19502—Pivotally supported
- Y10T74/19521—Bevel
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
- Y10T74/20323—Robotic arm including flaccid drive element
Description
GL 移動行程
M3 モータ(駆動源)
M4 モータ(駆動源)
Os 旋回軸線
O1,O3,O5 水平軸線
W ワーク
1 固定ベース
2,2’ 旋回ベース
3,3’ 直線移動機構
4A ハンド(第1の)
4B ハンド(第2の)
21’ 円筒軸(下位部)
22’ ハウジング(上位部)
25 第1の伝動軸
26 第2の伝動軸
32A,32B ガイドレール
33A,33A’ 第1の駆動機構
33B,33B’ 第2の駆動機構
34a 区間
35 第1の連係部材
36 第2の連係部材
37 第1の係合部材
38 第2の係合部材
42a,42b 連結部材
252,262 ベベルギア(第1のベベルギア)
331a ベベルギア(第2のベベルギア)
333A,333A’ ベベルギア機構(第1のベベルギア機構)
333B,333B’ ベベルギア機構(第2のベベルギア機構)
334 減速機構
335 駆動プーリ
336a〜336f プーリ
337 出力ベルト
339 回転軸
339b ベベルギア(第1のベベルギア)
Claims (3)
- 固定ベースと、この固定ベースに対して垂直状の旋回軸線周りに旋回可能に支持された旋回ベースと、この旋回ベースに支持された直線移動機構と、この直線移動機構に支持され、この直線移動機構の作動によりワークを水平直線状の移動行程に沿って搬送するハンドと、上記固定ベース内に配置された駆動源と、上記旋回軸線に沿って配置され、上記駆動源からの駆動力を上記直線移動機構に伝達するための伝動軸と、を備えた搬送装置であって、
上記直線移動機構は、水平軸線周りに回転可能に支持された駆動プーリを含む複数のプーリ、および、垂直面内に沿うように上記複数のプーリに掛け回され、上記移動行程の平行線に沿う所定の区間を往復動する出力ベルトを含んで構成された駆動機構と、上記ハンドを移動可能に支持するガイドレールと、を有し、
上記ハンドは、連結部材を介して上記出力ベルトに連結されており、
上記駆動機構は、上記伝動軸と上記駆動プーリとの間に介在させられ、上記伝動軸の一端に設けられた第1のベベルギアと、この第1のベベルギアに噛み合わされ、上記伝動軸の回転を上記駆動プーリに伝達するための第2のベベルギアと、を有するベベルギア機構を含んで構成されており、
上記ハンドは、上記移動行程に沿って相互に干渉することなく移動可能とされた第1および第2のハンドを含み、
上記駆動機構は、上記第1および第2のハンドをそれぞれ駆動する第1および第2の駆動機構を含んでいるとともに、
上記伝動軸は、上記第1および第2の駆動機構に対応して同軸状に配置された第1および第2の伝動軸からなっており、
上記ベベルギア機構は、上記第1および第2の駆動機構、ならびに上記第1および第2の伝動軸にそれぞれ対応するように構成された第1および第2のベベルギア機構を含んでいることを特徴とする、搬送装置。 - 上記第1および第2の伝動軸は、その一方が他方に内挿通されている、請求項1に記載の搬送装置。
- 上記第2のベベルギアと上記駆動プーリとの間には、減速機構が設けられている、請求項1または2に記載の搬送装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007116524A JP4955447B2 (ja) | 2007-04-26 | 2007-04-26 | 搬送装置 |
US12/150,144 US7665950B2 (en) | 2007-04-26 | 2008-04-25 | Transfer apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007116524A JP4955447B2 (ja) | 2007-04-26 | 2007-04-26 | 搬送装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011236669A Division JP5255683B2 (ja) | 2011-10-28 | 2011-10-28 | 搬送装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008272847A JP2008272847A (ja) | 2008-11-13 |
JP2008272847A5 JP2008272847A5 (ja) | 2010-04-02 |
JP4955447B2 true JP4955447B2 (ja) | 2012-06-20 |
Family
ID=39939641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007116524A Active JP4955447B2 (ja) | 2007-04-26 | 2007-04-26 | 搬送装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7665950B2 (ja) |
JP (1) | JP4955447B2 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101488649B1 (ko) * | 2008-10-07 | 2015-02-04 | 가와사키 쥬코교 가부시키가이샤 | 기판 반송 로봇 및 시스템 |
CN103237634B (zh) * | 2010-10-08 | 2016-12-14 | 布鲁克斯自动化公司 | 同轴驱动的真空机器人 |
JP5985817B2 (ja) | 2011-12-06 | 2016-09-06 | 株式会社ダイヘン | ベルト駆動装置 |
CN103317510A (zh) * | 2013-05-09 | 2013-09-25 | 京东方科技集团股份有限公司 | 一种机械手设备 |
CN103531508B (zh) * | 2013-10-17 | 2016-05-18 | 深圳市华星光电技术有限公司 | 基板运输设备及运输方法 |
JP6190692B2 (ja) * | 2013-10-22 | 2017-08-30 | 日本電産サンキョー株式会社 | 産業用ロボット |
CN104741289B (zh) * | 2013-12-25 | 2017-11-21 | 昆山国显光电有限公司 | 基板传送装置及涂布装置 |
JP6276090B2 (ja) * | 2014-03-31 | 2018-02-07 | 株式会社ダイヘン | 搬送装置、搬送システム |
JP6306927B2 (ja) * | 2014-04-15 | 2018-04-04 | 株式会社荏原製作所 | 反転機、基板処理装置、及び、反転機の傾き調整方法 |
KR20150142361A (ko) | 2014-06-11 | 2015-12-22 | 삼성전자주식회사 | 링크 구조체 |
JP2017064900A (ja) * | 2015-09-30 | 2017-04-06 | 株式会社ダイヘン | 搬送装置 |
CN106958629B (zh) * | 2016-01-11 | 2019-04-30 | 上银科技股份有限公司 | 皮带式线性传动模块 |
CN210384059U (zh) * | 2018-09-12 | 2020-04-24 | 苏州铸正机器人有限公司 | 辅助手术装置 |
KR102348261B1 (ko) | 2021-05-31 | 2022-01-10 | (주) 티로보틱스 | 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇 |
KR102307690B1 (ko) * | 2021-06-25 | 2021-10-05 | (주) 티로보틱스 | 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5135349A (en) * | 1990-05-17 | 1992-08-04 | Cybeq Systems, Inc. | Robotic handling system |
JP2004165579A (ja) * | 2002-09-18 | 2004-06-10 | Seiko Instruments Inc | 真空処理装置 |
JP4276534B2 (ja) | 2003-12-26 | 2009-06-10 | 株式会社ダイヘン | 搬送ロボット |
DE102004008289B4 (de) * | 2004-02-20 | 2006-07-27 | Integrated Dynamics Engineering Gmbh | Roboterführungseinheit zur Bereitstellung einer Präzisionsbewegung eines Gegenstands |
KR100576150B1 (ko) * | 2004-08-12 | 2006-05-03 | 세메스 주식회사 | 기판 이송 장치 |
JP4369851B2 (ja) * | 2004-11-01 | 2009-11-25 | 株式会社ダイヘン | 直線移動機構およびこれを用いた搬送ロボット |
-
2007
- 2007-04-26 JP JP2007116524A patent/JP4955447B2/ja active Active
-
2008
- 2008-04-25 US US12/150,144 patent/US7665950B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2008272847A (ja) | 2008-11-13 |
US7665950B2 (en) | 2010-02-23 |
US20080273957A1 (en) | 2008-11-06 |
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