JP4164438B2 - 半導体光素子の製造方法 - Google Patents
半導体光素子の製造方法 Download PDFInfo
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- JP4164438B2 JP4164438B2 JP2003382026A JP2003382026A JP4164438B2 JP 4164438 B2 JP4164438 B2 JP 4164438B2 JP 2003382026 A JP2003382026 A JP 2003382026A JP 2003382026 A JP2003382026 A JP 2003382026A JP 4164438 B2 JP4164438 B2 JP 4164438B2
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Description
さらに、第三の公知例として、 非特許文献4において、活性層のメサストライプを結晶成長装置内での塩素系ガス処理のみで形成する技術が報告されている。しかし、報告された技術をInGaAlAs系BHレーザに適用するには、大きな課題がある。第一に気相でのエッチングであるため、エッチングの深さが限定される。この結果、活性層両側の電流阻止層を充分に厚くできない等、実用水準のBH構造形成に対しては課題がある。第二にInGaAlAs系材料が活性層の場合、InGaAlAs系材料の気相エッチングが困難であり、長時間のエッチングにより結晶表面が荒れる等の問題が発生する。BHレーザとして望ましいメサストライプを形成するためには、結晶成長装置内での気相エッチングだけではなく、ウエットエッチング等、結晶成長装置外部でのエッチング技術が必要になる。
本願発明の実施例1、波長1.3μm帯のファブリ-ペロ(Fabry-Pelot)レーザについて説明する。
図3は、本発明の実施例1での断面図である。n型InP基板101の上に、活性層102、p型InPクラッド層103、p型InGaAs層104の多層構造を順次形成する。この多層構造の結晶成長には、有機金属気相成長法(MOVPE: Metal Organic Vapor Phase Epitaxy)を用いた。活性層102は、InGaAlAs系多重量子井戸(MQW: Multiple Quantum Wells)からなり、発光波長は1300nmに設定した。活性層の両側はFeを添加した半絶縁性InP121で埋めこまれている。この埋めこみヘテロ(BH:Buried Heterostructure)構造の形成工程を図4(a)から(d)に示す。
本実施例で示した製造工程により、InGaAlAs系BHレーザの特性ならびに信頼性が向上する。
また、本実施例ではファブリ-ペロ(Fabry-Pelot)レーザを取り上げているが、分布帰還型(DFB: Distributed FeedBack)レーザに対しても、本技術は容易に適用できる。さらに、波長帯についても、1300nm帯だけに限定されるものではなく、1550nm帯の赤外光源にも適用することもできる。
図5および図6は、実施例1から派生した構造として、本願発明の実施例2を示す。本実施例は、埋め込みヘテロ構造を二段階の埋め込み工程で形成したレーザを示す。
まず第一の結晶成長工程で、p型InP基板201の上に、活性層202、n型InPクラッド層203を形成する。活性層はInGaAlAs系MQW構造で構成され、その発光波長は1300nmに設定した。
本発明の実施例3として、光の伝播方向への導波路集積に適用した例を示す。図7はInGaAlAs系レーザとInGaAsP系スポットサイズ変換光導波路とを集積した素子構造を示す。
第一の結晶成長工程では、p型InP基板301上に光導波路としての多層構造を形成するため、コア層として、活性層302、n型InPクラッド層303を順次形成する。活性層302は、InGaAlAs系MQW構造からなり、その発振波長は1300nmとした。
上記の多層構造を形成した後、活性領域の多層構造の上部に保護マスクとして、窒化ケイ素(以下SiNと略記)膜 311を被覆する。このSiNマスクを用いて、図8(b)(c)に示すように、活性層を選択的にエッチングで除去する。例えば、誘導結合プラズマ(ICP: Inductive Coupled Plasma)等によるドライエッチングと燐酸または硫酸を主成分とする溶液を用いた選択性ウエットエッチングを併用することで、エッチングをp型InP基板301上で停止できる。
本発明の実施例4として、本発明を利得結合型DFBレーザの形成に適用した例を図9に示す。図9は、利得結合型DFBレーザの光導波路を側方から見た断面図である。
第一の結晶成長工程で、p型InP基板401上にp型InAlAs層402、p型InGaAlAs光閉じ込め層403、InGaAlAs系MQW活性層404、n型InGaAlAs光閉じ込め層405、n型InPクラッド層406を順次形成する。
図10は、本発明の実施例5として、アバランシェ・フォト-ダイオード(APD:Avalanche Photo Diode)に本発明を適用した例を示す。n型InP501上に、n型InAlAs増倍層502、p-InAlAs電界緩和層503、光吸収層p-InGaAs504、電極接触層p-InGaAs505を順次積層する。この多層構造は、分子線エピタキシ法(MBE: Molecular Beam Epitaxy)により形成した。結晶成長の後、酸化ケイ素(SiO2)でマスク511を形成し、光吸収層をメサ状にエッチングする(図10(b))。メサを形成したウエハ表面には電界緩和層であるInAlAs503が現れる。エッチングしたメサを半絶縁性半導体で埋めこむために、露出したInAlAs503の表面を清浄化する。前記の実施例と同様、MOVPE装置内での塩化水素ガスによる清浄化に引き続き、メサは半絶縁性InPで埋め込まれる。半絶縁性InP512で埋めこんだ後、ガード・リング(guard ring)形成のため、メサ周辺に埋めこみ層512を残し、外周をエッチングする。メサ外周のエッチングの後は、表面絶縁膜521の形成、p極電極522およびn極電極523の形成を経て、素子は完成する。これらの工程は、公知の技術と差がないため、詳細な記載は省略する。
図11は、12は、本発明の実施例6として、波長650nm帯の埋め込みリッジ形レーザの形成工程に本発明を適用した場合の実施形態を示す。
n型GaAs601上に、n型AlGaInPクラッド層602、活性層603、p型AlGaInPクラッド層604、を順次積層する。活性層は、GaInPとAlGaInPのMQW構造からなる。これら多層構造は、MOVPE法により形成した。結晶成長の後、酸化ケイ素(SiO2)でマスク611を形成し、これをマスクとして、p型AlGaInPクラッド層604を凸状(以下、リッジと略記)にエッチングする(図12(b))。リッジの形成には、ICPを用いたドライエッチングとHClを用いたウエットエッチングを併用する。リッジを形成したウエハ表面を、MOVPE装置内に導入し、ウエハ表面を塩化水素ガスで清浄化する。前記の実施例と同様、MOVPE装置内での塩化水素ガスによる清浄化に引き続き、電流阻止構造を形成する。電流阻止構造は、n型AlInP層621、n型GaAs層622、p型GaAs層623の三層を積層して形成される(図12(c))。
電流阻止層の形成後、酸化ケイ素膜611を除去し、第二の埋め込み工程として、p型GaAs電極接触層631を積層する。これらの層を積層したの値、表面絶縁膜641の形成、p極電極651およびn極電極652の形成を経て、素子は完成する。
以上のように、本発明は、InPを基板とした通信用の赤外波長領域の光源だけでなく、GaAsを基板とする可視光源にも適用できる。
221…酸化ケイ素(SiO2)をマスク、231…(111)B面、241…p型InP、242…n型InP、243…p型InP 、251…n型InPクラッド層、252…n型InGaAsP電極接触層、261…酸化ケイ素(SiO2)膜、271…n極電極、272…p極電極、
301…p型InP、302…活性層、303…n型InPクラッド層、311…窒化ケイ素膜、321…テーパ導波路、322…InPクラッド層、331…n型InPクラッド層、 332…n型InGaAsP電極接触層、
401…p型InP基板、402…p型InAlAs層、403…p型InGaAlAs光閉じ込め層、404…MQW活性層、405…n型InGaAlAs光閉じ込め層、406…n型InPクラッド層、
411…レジストパタン、421…n型InPクラッド層、
501…n型InP基板、502…n型InAlAs増倍層、503…p-InAlAs電界緩和層、 504…光吸収層p-InGaAs、505…p-InGaAs、511…酸化ケイ素マスク、512…半絶縁性InP、521…表面絶縁膜、522…p極電極、533…n極電極、
601…n型GaAs基板、602…n型AlGaInPクラッド層、603…活性層、604…p型AlGaInPクラッド層、611…酸化ケイ素マスク、512…半絶縁性InP、 621…n型AlInP、622…n型GaAs、623…p型GaAs、631…p型GaAs、641…表面絶縁膜、642…p極電極、643…n極電極。
Claims (1)
- InP基板上にInGaAlAs系材料よりなる活性層、p型クラッド層および化合物半導体層が積層され、その上に部分的に設けたマスク材を有する積層体を準備する工程、
前記積層体の前記マスク材をマスクとして前記積層体をウエットエッチングによりエッチングして前記活性層のメサ側壁部をストライプ状にし、
前記ウエットエッチングしたウエハを結晶成長装置内に設けたプレート板上に設置し、
前記結晶成長装置内に塩素を含有するガスを導入することにより前記メサ側壁部を清浄化し、その清浄化工程を継続することにより、前記メサ側壁部の下側にある前記InP基板の側壁に(111)B面が現れるようにし、
それに引き続いて前記メサ側壁部を、半導体材料の結晶成長により埋め込む工程を有することを特徴とする半導体光素子の製造方法。
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US7473936B2 (en) * | 2005-01-11 | 2009-01-06 | Semileds Corporation | Light emitting diodes (LEDs) with improved light extraction by roughening |
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JP4951267B2 (ja) * | 2006-04-27 | 2012-06-13 | 日本オプネクスト株式会社 | 半導体レーザ素子の製造方法 |
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JP4770645B2 (ja) * | 2006-08-28 | 2011-09-14 | 三菱電機株式会社 | 半導体レーザ素子の製造方法 |
JP4928988B2 (ja) | 2007-03-07 | 2012-05-09 | 日本オプネクスト株式会社 | 半導体光装置およびその製造方法 |
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CN109154697B (zh) | 2016-05-20 | 2020-11-10 | 镁可微波技术有限公司 | 半导体激光器和用于使半导体激光器平坦化的方法 |
CN108233175B (zh) * | 2018-01-31 | 2019-09-06 | 湖北光安伦科技有限公司 | 一种掩埋AlGaInAs DFB激光器的制作方法 |
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