JP4088453B2 - 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置 - Google Patents

垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置 Download PDF

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Publication number
JP4088453B2
JP4088453B2 JP2002036126A JP2002036126A JP4088453B2 JP 4088453 B2 JP4088453 B2 JP 4088453B2 JP 2002036126 A JP2002036126 A JP 2002036126A JP 2002036126 A JP2002036126 A JP 2002036126A JP 4088453 B2 JP4088453 B2 JP 4088453B2
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Prior art keywords
magnetic
length
film
track width
track
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Expired - Fee Related
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JP2002036126A
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English (en)
Japanese (ja)
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JP2003242607A5 (enExample
JP2003242607A (ja
Inventor
敦 中村
正文 望月
智弘 岡田
公俊 江藤
功 布川
良昭 川戸
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株式会社日立グローバルストレージテクノロジーズ
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Priority to JP2002036126A priority Critical patent/JP4088453B2/ja
Priority to US10/314,156 priority patent/US6813116B2/en
Publication of JP2003242607A publication Critical patent/JP2003242607A/ja
Priority to US10/974,807 priority patent/US6891697B2/en
Priority to US11/116,301 priority patent/US6995949B2/en
Publication of JP2003242607A5 publication Critical patent/JP2003242607A5/ja
Application granted granted Critical
Publication of JP4088453B2 publication Critical patent/JP4088453B2/ja
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1871—Shaping or contouring of the transducing or guiding surface
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
  • Recording Or Reproducing By Magnetic Means (AREA)
JP2002036126A 2002-02-14 2002-02-14 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置 Expired - Fee Related JP4088453B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002036126A JP4088453B2 (ja) 2002-02-14 2002-02-14 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置
US10/314,156 US6813116B2 (en) 2002-02-14 2002-12-09 Magnetic heads for perpendicular recording and magnetic recording disk apparatus using the same
US10/974,807 US6891697B2 (en) 2002-02-14 2004-10-28 Magnetic heads for perpendicular recording and magnetic recording disk apparatus using the same
US11/116,301 US6995949B2 (en) 2002-02-14 2005-04-28 Magnetic heads for perpendicular recording and magnetic recording disk apparatus using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002036126A JP4088453B2 (ja) 2002-02-14 2002-02-14 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005035401A Division JP2005183002A (ja) 2005-02-14 2005-02-14 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置

Publications (3)

Publication Number Publication Date
JP2003242607A JP2003242607A (ja) 2003-08-29
JP2003242607A5 JP2003242607A5 (enExample) 2005-09-02
JP4088453B2 true JP4088453B2 (ja) 2008-05-21

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JP2002036126A Expired - Fee Related JP4088453B2 (ja) 2002-02-14 2002-02-14 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置

Country Status (2)

Country Link
US (3) US6813116B2 (enExample)
JP (1) JP4088453B2 (enExample)

Families Citing this family (107)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4139546B2 (ja) * 2000-03-14 2008-08-27 株式会社日立グローバルストレージテクノロジーズ 垂直磁気ディスク装置
JP4088453B2 (ja) * 2002-02-14 2008-05-21 株式会社日立グローバルストレージテクノロジーズ 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置
JP2004103092A (ja) * 2002-09-09 2004-04-02 Hitachi Ltd 垂直記録用磁気ヘッド及びその製造方法、並びに垂直記録用磁気ヘッドを搭載した磁気ディスク装置
JP2004259306A (ja) * 2003-02-24 2004-09-16 Hitachi Ltd 磁気記録媒体および磁気記録媒体の製造方法
US7196871B2 (en) * 2003-09-26 2007-03-27 Hitachi Global Storage Technologies Netherlands B.V. Head for perpendicular recording with a floating trailing shield
US7002775B2 (en) * 2003-09-30 2006-02-21 Hitachi Global Storage Technologies Netherlands B.V. Head for perpendicular magnetic recording with a shield structure connected to the return pole piece
JP4028476B2 (ja) 2003-11-28 2007-12-26 Ｔｄｋ株式会社 薄膜磁気ヘッドの製造方法
US20050219743A1 (en) * 2004-04-06 2005-10-06 Headway Technologies, Inc. Perpendicular write head with tapered main pole
JP2005317144A (ja) 2004-04-30 2005-11-10 Alps Electric Co Ltd 磁気ヘッド及びその製造方法
US7253991B2 (en) * 2004-04-30 2007-08-07 Hitachi Global Storage Technologies Netherlands B.V. Planar perpendicular recording head
US7296337B2 (en) * 2004-05-25 2007-11-20 Hitachi Global Storage Technologies Netherlands B.V. Notched trailing shield for perpendicular write head
US7414816B2 (en) * 2004-05-28 2008-08-19 Hitachi Global Storage Technologies Netherlands B.V. Planar magnetic thin film head
US7184233B2 (en) * 2004-06-04 2007-02-27 Quantum Corporation Dual source tracking servo systems and associated methods
US7440229B2 (en) 2004-06-18 2008-10-21 Headway Technologies, Inc. Thin-film magnetic head having a write shield layer
US7580222B2 (en) 2004-06-18 2009-08-25 Headway Technologies, Inc. Thin-film magnetic head, a head gimbal assembly and hard disk drive
US7227720B2 (en) 2004-06-21 2007-06-05 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same
US7193816B2 (en) 2004-06-21 2007-03-20 Headway Technologies Magnetic head for perpendicular magnetic recording and method of manufacturing same
JP2006018902A (ja) * 2004-06-30 2006-01-19 Toshiba Corp ディスクリートトラック媒体を有する垂直磁気記録装置
US7468864B2 (en) 2004-07-01 2008-12-23 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same
US7296338B2 (en) * 2004-07-30 2007-11-20 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording
US20060056093A1 (en) * 2004-09-10 2006-03-16 Ehrlich Richard M Method for microjog calibration by read-write zone
US7516538B2 (en) 2004-09-20 2009-04-14 Headway Technologies, Inc. Method of manufacturing a magnetic head for perpendicular magnetic recording
JP3780290B2 (ja) 2004-09-29 2006-05-31 Ｔｄｋ株式会社 磁気記録再生装置
US7333296B2 (en) 2004-10-07 2008-02-19 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording including pole-layer-encasing layer that opens in the top surface thereof and nonmagnetic conductive layer disposed on the top surface of the pole-layer-encasing layer
US7253992B2 (en) * 2004-11-04 2007-08-07 Hitachi Global Storage Technologies Netherlands, B.V. Single-pole recording head having trapezoidal main pole and bevel angle promotion layer and methods of fabricating the same
US7417825B2 (en) 2004-11-12 2008-08-26 Headway Technologies, Inc. Thin film magnetic head structure, adapted to manufacture a thin film magnetic head
US7558020B2 (en) 2004-11-12 2009-07-07 Headway Technologies, Inc. Thin-film magnetic head structure having a magnetic pole tip with an even width portion method of manufacturing thereof, and thin-film magnetic head having a magnetic pole tip with an even width portion
US7433151B2 (en) 2004-12-28 2008-10-07 Headway Technologies, Inc. Method of manufacturing magnetic head using magnetic head sub-structure with indicators for indicating the location of the ABS
US7903372B2 (en) * 2005-01-11 2011-03-08 Samsung Electronics Co., Ltd. Magnetic recording head and method of manufacturing the same
KR100682914B1 (ko) * 2005-01-11 2007-02-15 삼성전자주식회사 자기 기록헤드 및 그 제조 방법
US7369361B2 (en) 2005-02-07 2008-05-06 Headway Technologies, Inc. Magnetic head and magnetic head substructure including resistor element whose resistance corresponds to the length of the track width defining portion of the pole layer
JP2006221744A (ja) 2005-02-10 2006-08-24 Shinka Jitsugyo Kk 薄膜磁気ヘッドおよびその製造方法、ならびに磁気記録装置
US7518824B2 (en) 2005-03-07 2009-04-14 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording that has a pole layer having a shape for easy forming, reducing track width and improved writing characteristics
JP2006294163A (ja) * 2005-04-13 2006-10-26 Hitachi Global Storage Technologies Netherlands Bv ディスク装置
KR100718127B1 (ko) * 2005-04-28 2007-05-14 삼성전자주식회사 수직 자기 기록헤드
US7663839B2 (en) 2005-05-16 2010-02-16 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording with encasing layer
US7463450B2 (en) 2005-05-23 2008-12-09 Headweay Technologies, Inc. Thin film magnetic head
US7375925B2 (en) * 2005-05-27 2008-05-20 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same
US7313863B2 (en) * 2005-06-07 2008-01-01 Headway Technologies, Inc. Method to form a cavity having inner walls of varying slope
US7365942B2 (en) 2005-06-22 2008-04-29 Headway Technologies, Inc. Thin-film magnetic head
US7468863B2 (en) 2005-07-05 2008-12-23 Headway Technologies, Inc. Thin-film magnetic head structure adapted to manufacture a thin-film head having a base magnetic pole part, a yoke magnetic pole part, and an intervening insulative film
US7492555B2 (en) 2005-07-13 2009-02-17 Headway Technologies, Inc. Thin-film magnetic head structure, method of manufacturing the same, and thin-film magnetic head
US7336442B2 (en) 2005-08-22 2008-02-26 Headway Technologies, Inc. Magnetic head and method of manufacturing same, and magnetic head substructure
JP2007149223A (ja) * 2005-11-28 2007-06-14 Toshiba Corp ディスク記憶装置及び磁気ヘッド
US7508629B2 (en) 2005-11-30 2009-03-24 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording that has a structure to suppress protrusion of an end portion of a shield layer resulting from heat generated by a coil, and method of manufacturing same
KR100652446B1 (ko) * 2005-12-03 2006-12-01 삼성전자주식회사 디스크의 적응적 기록 밀도 조정 방법 및 이용한 디스크드라이브와 디스크
JP2007184036A (ja) * 2006-01-06 2007-07-19 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド及びその製造方法
KR100745762B1 (ko) 2006-02-15 2007-08-02 삼성전자주식회사 수직 자기 헤드 및 그 제조방법
JP2007220209A (ja) * 2006-02-16 2007-08-30 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド、磁気記録再生装置及び磁気ヘッドの製造方法
JP2007220208A (ja) * 2006-02-16 2007-08-30 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド、磁気記録再生装置及び磁気ヘッドの製造方法
US7609479B2 (en) * 2006-03-10 2009-10-27 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same
US7721415B2 (en) 2006-04-19 2010-05-25 Headway Technologies, Inc Method of manufacturing a thin-film magnetic head
JP2007293977A (ja) * 2006-04-24 2007-11-08 Fujitsu Ltd 磁気ヘッド、及び磁気ディスク装置
US7587811B2 (en) * 2006-04-25 2009-09-15 Hitachi Global Storage Technologies Netherlands B.V. Method for manufacturing a magnetic write head for perpendicular magnetic data recording
US7551394B2 (en) 2006-07-12 2009-06-23 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording having a multilayer shield structure and method of manufacturing same
JP2008041138A (ja) * 2006-08-02 2008-02-21 Yamagata Fujitsu Ltd 記録媒体および記録媒体の製造方法
US7843665B2 (en) 2006-09-11 2010-11-30 Headway Technologies, Inc. Perpendicular magnetic recording head with nonmagnetic metal layer even with top face of pole layer
US8467147B2 (en) 2006-10-13 2013-06-18 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same
KR20090074074A (ko) * 2006-11-14 2009-07-03 후지쯔 가부시끼가이샤 자기 기억 장치
US20080198508A1 (en) * 2007-02-15 2008-08-21 Fujitsu Limited Magnetic head for perpendicular magnetic recording and magnetic disk drive
US7796361B2 (en) * 2007-03-26 2010-09-14 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same
US20100062606A1 (en) * 2007-04-11 2010-03-11 Ulvac, Inc. Dry etching method
US7916425B2 (en) * 2007-06-21 2011-03-29 Headway Technologies, Inc. Magnetic head having angled pole portions
US7924528B2 (en) * 2007-09-05 2011-04-12 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same
US8176623B2 (en) 2007-12-21 2012-05-15 Headway Technologies, Inc. Method of manufacturing a magnetic head for perpendicular magnetic recording
WO2009090738A1 (ja) * 2008-01-17 2009-07-23 Fujitsu Limited 磁気記録ヘッドの製造方法
US8146236B1 (en) * 2008-03-28 2012-04-03 Western Digital (Fremont), Llc Method for providing a perpendicular magnetic recording (PMR) transducer
US8310782B2 (en) * 2008-04-04 2012-11-13 Seagate Technology Llc Dedicated ID-OD writer with beveled pole tips and method of manufacture
US8259411B2 (en) * 2008-05-07 2012-09-04 Seagate Technology Llc Fabrication of trapezoidal pole for magnetic recording
US8221636B2 (en) * 2008-05-12 2012-07-17 Headway Technologies, Inc. Method of manufacturing magnetic head for perpendicular magnetic recording
JP2009283067A (ja) * 2008-05-22 2009-12-03 Hitachi Global Storage Technologies Netherlands Bv 垂直記録用磁気ヘッド及び磁気記録装置
US7910011B2 (en) * 2008-05-28 2011-03-22 Headway Technologies, Inc. Method of manufacturing magnetic head for perpendicular magnetic recording
US7907360B2 (en) * 2008-07-14 2011-03-15 Seagate Technology Llc Setting writer boundaries for multiple writers
JP2010134977A (ja) * 2008-12-02 2010-06-17 Toshiba Storage Device Corp 磁気記録媒体及び磁気記憶装置
US8196285B1 (en) 2008-12-17 2012-06-12 Western Digital (Fremont), Llc Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask
JP2010146646A (ja) * 2008-12-19 2010-07-01 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッドスライダ、その製造方法、及び磁気ディスク装置
US8110085B2 (en) * 2008-12-30 2012-02-07 Hitachi Global Storage Technologies Netherlands B.V. Assisted deposition, narrow trench damascene process for manufacturing a write pole of a magnetic write head
US8254060B1 (en) 2009-04-17 2012-08-28 Western Digital (Fremont), Llc Straight top main pole for PMR bevel writer
JP2010250919A (ja) * 2009-04-20 2010-11-04 Toshiba Storage Device Corp 磁気記録ヘッドおよび磁気記憶装置
US8225488B1 (en) 2009-05-22 2012-07-24 Western Digital (Fremont), Llc Method for providing a perpendicular magnetic recording (PMR) pole
US9346672B1 (en) 2009-08-04 2016-05-24 Western Digital (Fremont), Llc Methods for fabricating damascene write poles using ruthenium hard masks
JP5610507B2 (ja) * 2009-09-17 2014-10-22 エイチジーエスティーネザーランドビーブイ ヘッドスライダ及び磁気ディスク装置
US8287748B2 (en) * 2009-12-23 2012-10-16 Headway Technologies, Inc. Method of manufacturing magnetic head for perpendicular magnetic recording
JP2011192348A (ja) * 2010-03-15 2011-09-29 Hitachi Ltd 垂直記録磁気ヘッド、その製造方法及び磁気ディスク装置
KR20110110941A (ko) * 2010-04-02 2011-10-10 삼성전자주식회사 하드디스크 드라이브
US8264798B1 (en) 2010-06-23 2012-09-11 Western Digital (Fremont), Llc Systems and methods for providing magnetic recording heads adapted for writing shingled tracks
US8184399B2 (en) * 2010-09-27 2012-05-22 Headway Technologies, Inc. Magnetic write head with thin and thick portions for balancing writability and ate
JP5638405B2 (ja) * 2010-10-08 2014-12-10 パナソニック株式会社 基板のプラズマ処理方法
US8705205B1 (en) 2011-06-27 2014-04-22 Western Digital (Fremont), Llc Magnetic recording head having a dual sidewall angle
US8760805B2 (en) * 2011-07-05 2014-06-24 Tdk Corporation Thin film magnetic head, thin film magnetic head device, and magnetic recording/reproducing apparatus
US8320078B1 (en) * 2012-02-29 2012-11-27 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording write head with antiparallel-coupled laminated main pole having a tapered trailing edge
US8520337B1 (en) 2012-03-30 2013-08-27 Western Digital (Fremont), Llc Perpendicular magnetic recording writer pole with leading and trailing bevel side wall angles at air bearing surface
JP2013211073A (ja) * 2012-03-30 2013-10-10 Hitachi High-Technologies Corp 磁気ヘッド検査装置及び磁気ヘッド検査方法
US8792208B1 (en) 2012-05-25 2014-07-29 Western Digital (Fremont), Llc Method for providing side shields having non-conformal regions for a magnetic recording transducer
US8941948B2 (en) 2012-06-18 2015-01-27 HGST Netherlands B.V. Perpendicular recording head with leading bump in the main pole having narrow leading gap (LG)
US9478236B1 (en) 2012-09-28 2016-10-25 Western Digital (Fremont), Llc Perpendicular magnetic recording write head
US8830625B2 (en) 2012-11-29 2014-09-09 Seagate Technology Llc Data writer with tapered side shield sidewalls
JP2014211934A (ja) * 2013-04-19 2014-11-13 株式会社日立製作所 高周波磁界アシスト磁気記録ヘッド及びその製造方法
US9263067B1 (en) 2013-05-29 2016-02-16 Western Digital (Fremont), Llc Process for making PMR writer with constant side wall angle
US9275657B1 (en) 2013-08-14 2016-03-01 Western Digital (Fremont), Llc Process for making PMR writer with non-conformal side gaps
US9343086B1 (en) 2013-09-11 2016-05-17 Western Digital (Fremont), Llc Magnetic recording write transducer having an improved sidewall angle profile
US9007719B1 (en) 2013-10-23 2015-04-14 Western Digital (Fremont), Llc Systems and methods for using double mask techniques to achieve very small features
US9280990B1 (en) 2013-12-11 2016-03-08 Western Digital (Fremont), Llc Method for fabricating a magnetic writer using multiple etches
US9305583B1 (en) 2014-02-18 2016-04-05 Western Digital (Fremont), Llc Method for fabricating a magnetic writer using multiple etches of damascene materials
US8988825B1 (en) 2014-02-28 2015-03-24 Western Digital (Fremont, LLC Method for fabricating a magnetic writer having half-side shields
US9286919B1 (en) 2014-12-17 2016-03-15 Western Digital (Fremont), Llc Magnetic writer having a dual side gap
US9431038B1 (en) 2015-06-29 2016-08-30 Western Digital (Fremont), Llc Method for fabricating a magnetic write pole having an improved sidewall angle profile

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6504675B1 (en) * 2000-01-12 2003-01-07 Seagate Technology Llc Perpendicular magnetic recording heads with write pole shaped to reduce skew effects during writing
JP4139546B2 (ja) 2000-03-14 2008-08-27 株式会社日立グローバルストレージテクノロジーズ 垂直磁気ディスク装置
US6710973B2 (en) * 2000-09-18 2004-03-23 Hitachi, Ltd. Single pole type recording head including tapered edges
JP2002092821A (ja) 2000-09-18 2002-03-29 Hitachi Ltd 単磁極型磁気ヘッド及びそれを搭載した磁気ディスク装置
JP3866512B2 (ja) * 2000-12-26 2007-01-10 アルプス電気株式会社 垂直磁気記録ヘッドの製造方法
JP4130868B2 (ja) * 2001-03-19 2008-08-06 株式会社日立グローバルストレージテクノロジーズ 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置
US6809899B1 (en) * 2001-08-20 2004-10-26 Western Digital (Fremont), Inc. Magnetic heads for perpendicular recording with trapezoidal pole tips
JP4088453B2 (ja) * 2002-02-14 2008-05-21 株式会社日立グローバルストレージテクノロジーズ 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置

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Publication number Publication date
US20030151850A1 (en) 2003-08-14
US6813116B2 (en) 2004-11-02
JP2003242607A (ja) 2003-08-29
US20050185335A1 (en) 2005-08-25
US6995949B2 (en) 2006-02-07
US20050057853A1 (en) 2005-03-17
US6891697B2 (en) 2005-05-10

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