JP3973006B2 - ダブルアーム型ロボット - Google Patents

ダブルアーム型ロボット Download PDF

Info

Publication number
JP3973006B2
JP3973006B2 JP2000082983A JP2000082983A JP3973006B2 JP 3973006 B2 JP3973006 B2 JP 3973006B2 JP 2000082983 A JP2000082983 A JP 2000082983A JP 2000082983 A JP2000082983 A JP 2000082983A JP 3973006 B2 JP3973006 B2 JP 3973006B2
Authority
JP
Japan
Prior art keywords
arm
arms
sets
double
rotation center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000082983A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001274218A (ja
JP2001274218A5 (enExample
Inventor
隆之 矢澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=18599712&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3973006(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to JP2000082983A priority Critical patent/JP3973006B2/ja
Priority to TW090105393A priority patent/TW501969B/zh
Priority to KR10-2001-0013291A priority patent/KR100425364B1/ko
Publication of JP2001274218A publication Critical patent/JP2001274218A/ja
Publication of JP2001274218A5 publication Critical patent/JP2001274218A5/ja
Application granted granted Critical
Publication of JP3973006B2 publication Critical patent/JP3973006B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
    • B25J9/0087—Dual arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/046—Revolute coordinate type

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2000082983A 2000-03-23 2000-03-23 ダブルアーム型ロボット Expired - Lifetime JP3973006B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000082983A JP3973006B2 (ja) 2000-03-23 2000-03-23 ダブルアーム型ロボット
TW090105393A TW501969B (en) 2000-03-23 2001-03-08 Double-arm robot
KR10-2001-0013291A KR100425364B1 (ko) 2000-03-23 2001-03-15 더블암형 로봇

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000082983A JP3973006B2 (ja) 2000-03-23 2000-03-23 ダブルアーム型ロボット

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2006109567A Division JP3973048B2 (ja) 2006-04-12 2006-04-12 ダブルアーム型ロボット
JP2006280935A Division JP4519824B2 (ja) 2006-10-16 2006-10-16 ダブルアーム型ロボット

Publications (3)

Publication Number Publication Date
JP2001274218A JP2001274218A (ja) 2001-10-05
JP2001274218A5 JP2001274218A5 (enExample) 2006-02-16
JP3973006B2 true JP3973006B2 (ja) 2007-09-05

Family

ID=18599712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000082983A Expired - Lifetime JP3973006B2 (ja) 2000-03-23 2000-03-23 ダブルアーム型ロボット

Country Status (3)

Country Link
JP (1) JP3973006B2 (enExample)
KR (1) KR100425364B1 (enExample)
TW (1) TW501969B (enExample)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003076141A1 (en) * 2002-03-12 2003-09-18 Rorze Corporation End effecter for carrying sheet, carrier having the end effecter, and sheet processing system
WO2003102475A1 (fr) * 2002-06-03 2003-12-11 Sankyo Seiki Mfg. Co., Ltd. Module d'assemblage propre, appareillage de production le contenant, robot industriel et systeme antipollution
JP2004009172A (ja) * 2002-06-04 2004-01-15 Yaskawa Electric Corp 多関節ロボットおよびその制御装置
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇
KR20040038783A (ko) * 2002-10-30 2004-05-08 가부시기가이샤 산교세이기 세이사꾸쇼 산업용 로봇
US7246985B2 (en) * 2004-04-16 2007-07-24 Axcelis Technologies, Inc. Work-piece processing system
KR101032340B1 (ko) * 2004-11-22 2011-05-06 엘지디스플레이 주식회사 평판표시장치용 기판이송로봇
JP2006321019A (ja) * 2005-05-19 2006-11-30 Nidec Sankyo Corp ダブルアーム型ロボット
KR100759890B1 (ko) 2006-02-01 2007-09-18 주식회사 에스에프에이 스토커 장치
KR100760200B1 (ko) * 2006-05-03 2007-09-20 삼성전자주식회사 반송로봇
CN101484281B (zh) * 2006-07-11 2011-10-26 株式会社安川电机 多关节机器人及配线方法
JP4655228B2 (ja) * 2006-07-11 2011-03-23 株式会社安川電機 多関節ロボットおよび多関節ロボットの移送方法
JP4168410B2 (ja) * 2006-07-11 2008-10-22 株式会社安川電機 多関節ロボット
WO2008023560A1 (en) * 2006-08-21 2008-02-28 Kabushiki Kaisha Yaskawa Denki Double arm robot
JP4770663B2 (ja) * 2006-09-20 2011-09-14 株式会社安川電機 基板吸着装置およびそれを用いた基板搬送ロボット
KR100810488B1 (ko) * 2006-11-15 2008-03-07 주식회사 로보스타 더블암형 로봇
JP5016302B2 (ja) * 2006-12-01 2012-09-05 日本電産サンキョー株式会社 アーム駆動装置及び産業用ロボット
JP5006927B2 (ja) * 2007-03-26 2012-08-22 日本電産サンキョー株式会社 産業用ロボット及びその運搬方法
PL1982799T3 (pl) * 2007-04-10 2010-10-29 Erowa Ag Układ manipulacji
JP5177835B2 (ja) * 2007-04-27 2013-04-10 株式会社安川電機 双腕型ロボットマニピュレータ
KR101183807B1 (ko) 2007-09-13 2012-09-17 가부시키가이샤 야스카와덴키 이송 로봇, 이송 로봇의 이송 방법, 및 이송 로봇의 제어 방법
KR100955405B1 (ko) * 2008-03-26 2010-04-29 가부시키가이샤 야스카와덴키 다관절 로봇 및 그의 감속기 교환 방법
KR101502130B1 (ko) * 2008-07-10 2015-03-13 주식회사 원익아이피에스 반송장치, 그가 설치된 반송챔버 및 이를 포함하는진공처리시스템
JP2010023195A (ja) * 2008-07-22 2010-02-04 Nidec Sankyo Corp 産業用ロボット
JP5280132B2 (ja) * 2008-08-26 2013-09-04 日本電産サンキョー株式会社 産業用ロボット
JP2010064219A (ja) * 2008-09-12 2010-03-25 Yaskawa Electric Corp 多関節ロボット
JP5263945B2 (ja) * 2008-09-17 2013-08-14 株式会社レクザム ダブルアーム型ロボット
EP2353797B1 (en) 2008-10-07 2014-08-06 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer robot and system
JP5474328B2 (ja) * 2008-10-07 2014-04-16 川崎重工業株式会社 基板搬送ロボット
KR200466172Y1 (ko) * 2010-04-28 2013-04-09 히라따기꼬오 가부시키가이샤 기판반송로봇
JP5578973B2 (ja) * 2010-07-16 2014-08-27 日本電産サンキョー株式会社 産業用ロボット
JP2012024900A (ja) * 2010-07-27 2012-02-09 Rexxam Co Ltd ダブルアーム型ロボット
JP4962880B2 (ja) * 2010-11-05 2012-06-27 株式会社安川電機 多関節ロボット及び生産設備の製造方法
KR101682465B1 (ko) * 2010-11-17 2016-12-05 삼성전자 주식회사 기판이송로봇
JP5847393B2 (ja) * 2010-11-30 2016-01-20 川崎重工業株式会社 搬送ロボット
KR101689896B1 (ko) * 2011-11-29 2016-12-27 현대중공업 주식회사 승강이송로봇용 부품교체장치
CN102602039B (zh) * 2012-03-29 2015-09-23 奇瑞汽车股份有限公司 一种压力机机械手的传送机构
CN103624772A (zh) * 2013-12-06 2014-03-12 苏州晓炎自动化设备有限公司 一种机器人回转底座
JP2018000126A (ja) * 2016-07-05 2018-01-11 シンフォニアテクノロジー株式会社 細胞搬送装置
CN106216859B (zh) * 2016-08-17 2018-02-27 江苏大学 一种激光间接冲击成形柔性加载的快速取用装置及其方法
KR200484525Y1 (ko) 2016-11-17 2017-09-26 주식회사 본테크 스틸 벨트를 갖는 기판반송로봇
JP6873881B2 (ja) * 2017-10-13 2021-05-19 日本電産サンキョー株式会社 産業用ロボット
CN109877824A (zh) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 一种单取纠偏机器人及其纠偏方法
CN109877822A (zh) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 一种双取纠偏双臂机器人及其纠偏方法
CN109879052A (zh) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 一种单放纠偏机器人及其纠偏方法
CN111376232B (zh) * 2018-12-30 2023-09-29 昆山智能装备研究院 一种双臂搬运机器人
JP2021046273A (ja) * 2019-09-17 2021-03-25 株式会社ダイフク 物品搬送装置
JP7222378B2 (ja) * 2020-05-13 2023-02-15 株式会社ダイフク 物品搬送装置
TWI831505B (zh) * 2022-12-07 2024-02-01 迅得機械股份有限公司 收放板機構及移載機構
CN117798954B (zh) * 2024-03-01 2024-05-07 灌云利民再生资源科技发展有限公司 一种瓦楞纸卷取放机械手

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2852821B1 (de) * 1978-12-07 1980-04-30 Walter Reis Maschinenbau, 8753 Obernburg Manipulator
JPS58109284A (ja) * 1981-12-22 1983-06-29 株式会社小松製作所 ロボツト装置
JPH0163137U (enExample) * 1987-10-16 1989-04-24
JP2919925B2 (ja) * 1990-07-26 1999-07-19 東京エレクトロン株式会社 処理装置
JP2831820B2 (ja) * 1990-07-30 1998-12-02 株式会社プラズマシステム 基板搬送装置
JPH04163937A (ja) * 1990-10-29 1992-06-09 Fujitsu Ltd 半導体製造装置
JPH05109866A (ja) * 1991-10-16 1993-04-30 Nec Corp ウエハ移載ロボツト
JPH06126663A (ja) * 1992-10-16 1994-05-10 Toshiba Corp 複腕ロボット
JPH06262553A (ja) * 1993-03-08 1994-09-20 Hitachi Ltd ダブルアーム機構ロボット
JP3011034B2 (ja) * 1994-10-31 2000-02-21 村田機械株式会社 自動倉庫
JPH09102526A (ja) * 1995-10-05 1997-04-15 Kokusai Electric Co Ltd 真空内基板搬送装置
JP3129985B2 (ja) * 1997-03-25 2001-01-31 新明和工業株式会社 クリーンロボット
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置

Also Published As

Publication number Publication date
KR20010092685A (ko) 2001-10-26
JP2001274218A (ja) 2001-10-05
TW501969B (en) 2002-09-11
KR100425364B1 (ko) 2004-03-30

Similar Documents

Publication Publication Date Title
JP3973006B2 (ja) ダブルアーム型ロボット
TWI357375B (enExample)
KR100955405B1 (ko) 다관절 로봇 및 그의 감속기 교환 방법
JPWO2009034795A1 (ja) 基板搬送ロボット、真空処理装置
JP4519824B2 (ja) ダブルアーム型ロボット
JP2011199121A (ja) 搬送装置
JP3973048B2 (ja) ダブルアーム型ロボット
US7814811B2 (en) Articulated robot
KR100996562B1 (ko) 다관절 로봇
JPH10581A (ja) ワーク搬送ロボット
JP2008307677A (ja) 多関節ロボット
JPH09181142A (ja) 基板搬送装置および中間受渡し装置
JP2000243809A (ja) 多関節ロボット装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051228

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20051228

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060315

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20060306

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060515

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060816

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061016

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070109

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070312

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070606

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070606

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 3973006

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100622

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100622

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100622

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100622

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110622

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110622

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120622

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120622

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120622

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130622

Year of fee payment: 6

EXPY Cancellation because of completion of term