KR100425364B1 - 더블암형 로봇 - Google Patents

더블암형 로봇 Download PDF

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Publication number
KR100425364B1
KR100425364B1 KR10-2001-0013291A KR20010013291A KR100425364B1 KR 100425364 B1 KR100425364 B1 KR 100425364B1 KR 20010013291 A KR20010013291 A KR 20010013291A KR 100425364 B1 KR100425364 B1 KR 100425364B1
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KR
South Korea
Prior art keywords
arm
arms
robot
double
sets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR10-2001-0013291A
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English (en)
Korean (ko)
Other versions
KR20010092685A (ko
Inventor
야자와타카유키
Original Assignee
가부시기가이샤 산교세이기 세이사꾸쇼
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=18599712&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR100425364(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 가부시기가이샤 산교세이기 세이사꾸쇼 filed Critical 가부시기가이샤 산교세이기 세이사꾸쇼
Publication of KR20010092685A publication Critical patent/KR20010092685A/ko
Application granted granted Critical
Publication of KR100425364B1 publication Critical patent/KR100425364B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
    • B25J9/0087—Dual arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/046—Revolute coordinate type

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR10-2001-0013291A 2000-03-23 2001-03-15 더블암형 로봇 Expired - Lifetime KR100425364B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000-82983 2000-03-23
JP2000082983A JP3973006B2 (ja) 2000-03-23 2000-03-23 ダブルアーム型ロボット

Publications (2)

Publication Number Publication Date
KR20010092685A KR20010092685A (ko) 2001-10-26
KR100425364B1 true KR100425364B1 (ko) 2004-03-30

Family

ID=18599712

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0013291A Expired - Lifetime KR100425364B1 (ko) 2000-03-23 2001-03-15 더블암형 로봇

Country Status (3)

Country Link
JP (1) JP3973006B2 (enExample)
KR (1) KR100425364B1 (enExample)
TW (1) TW501969B (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101276014B1 (ko) * 2004-04-16 2013-06-19 액셀리스 테크놀로지스, 인크. 워크피스 프로세싱 시스템
KR101346882B1 (ko) * 2006-12-01 2014-01-02 니혼 덴산 산쿄 가부시키가이샤 암 구동 장치 및 산업용 로보트
KR101585684B1 (ko) * 2008-08-26 2016-01-14 니혼 덴산 산쿄 가부시키가이샤 산업용 로보트
KR200484525Y1 (ko) 2016-11-17 2017-09-26 주식회사 본테크 스틸 벨트를 갖는 기판반송로봇

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003076141A1 (en) * 2002-03-12 2003-09-18 Rorze Corporation End effecter for carrying sheet, carrier having the end effecter, and sheet processing system
WO2003102475A1 (fr) * 2002-06-03 2003-12-11 Sankyo Seiki Mfg. Co., Ltd. Module d'assemblage propre, appareillage de production le contenant, robot industriel et systeme antipollution
JP2004009172A (ja) * 2002-06-04 2004-01-15 Yaskawa Electric Corp 多関節ロボットおよびその制御装置
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇
KR20040038783A (ko) * 2002-10-30 2004-05-08 가부시기가이샤 산교세이기 세이사꾸쇼 산업용 로봇
KR101032340B1 (ko) * 2004-11-22 2011-05-06 엘지디스플레이 주식회사 평판표시장치용 기판이송로봇
JP2006321019A (ja) * 2005-05-19 2006-11-30 Nidec Sankyo Corp ダブルアーム型ロボット
KR100759890B1 (ko) 2006-02-01 2007-09-18 주식회사 에스에프에이 스토커 장치
KR100760200B1 (ko) * 2006-05-03 2007-09-20 삼성전자주식회사 반송로봇
CN101484281B (zh) * 2006-07-11 2011-10-26 株式会社安川电机 多关节机器人及配线方法
JP4655228B2 (ja) * 2006-07-11 2011-03-23 株式会社安川電機 多関節ロボットおよび多関節ロボットの移送方法
JP4168410B2 (ja) * 2006-07-11 2008-10-22 株式会社安川電機 多関節ロボット
WO2008023560A1 (en) * 2006-08-21 2008-02-28 Kabushiki Kaisha Yaskawa Denki Double arm robot
JP4770663B2 (ja) * 2006-09-20 2011-09-14 株式会社安川電機 基板吸着装置およびそれを用いた基板搬送ロボット
KR100810488B1 (ko) * 2006-11-15 2008-03-07 주식회사 로보스타 더블암형 로봇
JP5006927B2 (ja) * 2007-03-26 2012-08-22 日本電産サンキョー株式会社 産業用ロボット及びその運搬方法
PL1982799T3 (pl) * 2007-04-10 2010-10-29 Erowa Ag Układ manipulacji
JP5177835B2 (ja) * 2007-04-27 2013-04-10 株式会社安川電機 双腕型ロボットマニピュレータ
KR101183807B1 (ko) 2007-09-13 2012-09-17 가부시키가이샤 야스카와덴키 이송 로봇, 이송 로봇의 이송 방법, 및 이송 로봇의 제어 방법
KR100955405B1 (ko) * 2008-03-26 2010-04-29 가부시키가이샤 야스카와덴키 다관절 로봇 및 그의 감속기 교환 방법
KR101502130B1 (ko) * 2008-07-10 2015-03-13 주식회사 원익아이피에스 반송장치, 그가 설치된 반송챔버 및 이를 포함하는진공처리시스템
JP2010023195A (ja) * 2008-07-22 2010-02-04 Nidec Sankyo Corp 産業用ロボット
JP2010064219A (ja) * 2008-09-12 2010-03-25 Yaskawa Electric Corp 多関節ロボット
JP5263945B2 (ja) * 2008-09-17 2013-08-14 株式会社レクザム ダブルアーム型ロボット
EP2353797B1 (en) 2008-10-07 2014-08-06 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer robot and system
JP5474328B2 (ja) * 2008-10-07 2014-04-16 川崎重工業株式会社 基板搬送ロボット
KR200466172Y1 (ko) * 2010-04-28 2013-04-09 히라따기꼬오 가부시키가이샤 기판반송로봇
JP5578973B2 (ja) * 2010-07-16 2014-08-27 日本電産サンキョー株式会社 産業用ロボット
JP2012024900A (ja) * 2010-07-27 2012-02-09 Rexxam Co Ltd ダブルアーム型ロボット
JP4962880B2 (ja) * 2010-11-05 2012-06-27 株式会社安川電機 多関節ロボット及び生産設備の製造方法
KR101682465B1 (ko) * 2010-11-17 2016-12-05 삼성전자 주식회사 기판이송로봇
JP5847393B2 (ja) * 2010-11-30 2016-01-20 川崎重工業株式会社 搬送ロボット
KR101689896B1 (ko) * 2011-11-29 2016-12-27 현대중공업 주식회사 승강이송로봇용 부품교체장치
CN102602039B (zh) * 2012-03-29 2015-09-23 奇瑞汽车股份有限公司 一种压力机机械手的传送机构
CN103624772A (zh) * 2013-12-06 2014-03-12 苏州晓炎自动化设备有限公司 一种机器人回转底座
JP2018000126A (ja) * 2016-07-05 2018-01-11 シンフォニアテクノロジー株式会社 細胞搬送装置
CN106216859B (zh) * 2016-08-17 2018-02-27 江苏大学 一种激光间接冲击成形柔性加载的快速取用装置及其方法
JP6873881B2 (ja) * 2017-10-13 2021-05-19 日本電産サンキョー株式会社 産業用ロボット
CN109877824A (zh) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 一种单取纠偏机器人及其纠偏方法
CN109877822A (zh) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 一种双取纠偏双臂机器人及其纠偏方法
CN109879052A (zh) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 一种单放纠偏机器人及其纠偏方法
CN111376232B (zh) * 2018-12-30 2023-09-29 昆山智能装备研究院 一种双臂搬运机器人
JP2021046273A (ja) * 2019-09-17 2021-03-25 株式会社ダイフク 物品搬送装置
JP7222378B2 (ja) * 2020-05-13 2023-02-15 株式会社ダイフク 物品搬送装置
TWI831505B (zh) * 2022-12-07 2024-02-01 迅得機械股份有限公司 收放板機構及移載機構
CN117798954B (zh) * 2024-03-01 2024-05-07 灌云利民再生资源科技发展有限公司 一种瓦楞纸卷取放机械手

Citations (5)

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Publication number Priority date Publication date Assignee Title
JPH05109866A (ja) * 1991-10-16 1993-04-30 Nec Corp ウエハ移載ロボツト
JPH06126663A (ja) * 1992-10-16 1994-05-10 Toshiba Corp 複腕ロボット
JPH06262553A (ja) * 1993-03-08 1994-09-20 Hitachi Ltd ダブルアーム機構ロボット
JPH09102526A (ja) * 1995-10-05 1997-04-15 Kokusai Electric Co Ltd 真空内基板搬送装置
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置

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DE2852821B1 (de) * 1978-12-07 1980-04-30 Walter Reis Maschinenbau, 8753 Obernburg Manipulator
JPS58109284A (ja) * 1981-12-22 1983-06-29 株式会社小松製作所 ロボツト装置
JPH0163137U (enExample) * 1987-10-16 1989-04-24
JP2919925B2 (ja) * 1990-07-26 1999-07-19 東京エレクトロン株式会社 処理装置
JP2831820B2 (ja) * 1990-07-30 1998-12-02 株式会社プラズマシステム 基板搬送装置
JPH04163937A (ja) * 1990-10-29 1992-06-09 Fujitsu Ltd 半導体製造装置
JP3011034B2 (ja) * 1994-10-31 2000-02-21 村田機械株式会社 自動倉庫
JP3129985B2 (ja) * 1997-03-25 2001-01-31 新明和工業株式会社 クリーンロボット

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05109866A (ja) * 1991-10-16 1993-04-30 Nec Corp ウエハ移載ロボツト
JPH06126663A (ja) * 1992-10-16 1994-05-10 Toshiba Corp 複腕ロボット
JPH06262553A (ja) * 1993-03-08 1994-09-20 Hitachi Ltd ダブルアーム機構ロボット
JPH09102526A (ja) * 1995-10-05 1997-04-15 Kokusai Electric Co Ltd 真空内基板搬送装置
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101276014B1 (ko) * 2004-04-16 2013-06-19 액셀리스 테크놀로지스, 인크. 워크피스 프로세싱 시스템
KR101346882B1 (ko) * 2006-12-01 2014-01-02 니혼 덴산 산쿄 가부시키가이샤 암 구동 장치 및 산업용 로보트
KR101585684B1 (ko) * 2008-08-26 2016-01-14 니혼 덴산 산쿄 가부시키가이샤 산업용 로보트
KR200484525Y1 (ko) 2016-11-17 2017-09-26 주식회사 본테크 스틸 벨트를 갖는 기판반송로봇

Also Published As

Publication number Publication date
KR20010092685A (ko) 2001-10-26
JP3973006B2 (ja) 2007-09-05
JP2001274218A (ja) 2001-10-05
TW501969B (en) 2002-09-11

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