JP3927711B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP3927711B2
JP3927711B2 JP34607498A JP34607498A JP3927711B2 JP 3927711 B2 JP3927711 B2 JP 3927711B2 JP 34607498 A JP34607498 A JP 34607498A JP 34607498 A JP34607498 A JP 34607498A JP 3927711 B2 JP3927711 B2 JP 3927711B2
Authority
JP
Japan
Prior art keywords
movable member
liquid
gap forming
forming
discharge head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP34607498A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11235827A5 (enExample
JPH11235827A (ja
Inventor
知之 廣木
照夫 尾崎
良行 今仲
一郎 斉藤
雅彦 久保田
博之 石永
正彦 小川
雅実 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to DE69823461T priority Critical patent/DE69823461T2/de
Priority to EP98123169A priority patent/EP0920996B1/en
Priority to JP34607498A priority patent/JP3927711B2/ja
Priority to US09/206,279 priority patent/US6196667B1/en
Publication of JPH11235827A publication Critical patent/JPH11235827A/ja
Publication of JPH11235827A5 publication Critical patent/JPH11235827A5/ja
Application granted granted Critical
Publication of JP3927711B2 publication Critical patent/JP3927711B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14048—Movable member in the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP34607498A 1997-12-05 1998-12-04 液体吐出ヘッドの製造方法 Expired - Fee Related JP3927711B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE69823461T DE69823461T2 (de) 1997-12-05 1998-12-04 Flüssigkeitsausstosskopf, Herstellungsverfahren des Flüssigkeitsausstosskopfes, Kassette mit diesem Flüssigkeitsausstosskopf und Flüssigkeitsausstossvorrichtung
EP98123169A EP0920996B1 (en) 1997-12-05 1998-12-04 Liquid discharging head, method of manufacturing the liquid discharging head, head cartridge carrying the liquid discharging head thereon and liquid discharging apparatus
JP34607498A JP3927711B2 (ja) 1997-12-05 1998-12-04 液体吐出ヘッドの製造方法
US09/206,279 US6196667B1 (en) 1997-12-05 1998-12-07 Liquid discharging head, method of manufacturing the liquid discharging head, head cartridge carrying the liquid discharging head thereon and liquid discharging apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP33610597 1997-12-05
JP9-336105 1997-12-05
JP34607498A JP3927711B2 (ja) 1997-12-05 1998-12-04 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JPH11235827A JPH11235827A (ja) 1999-08-31
JPH11235827A5 JPH11235827A5 (enExample) 2004-10-21
JP3927711B2 true JP3927711B2 (ja) 2007-06-13

Family

ID=26575359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34607498A Expired - Fee Related JP3927711B2 (ja) 1997-12-05 1998-12-04 液体吐出ヘッドの製造方法

Country Status (4)

Country Link
US (1) US6196667B1 (enExample)
EP (1) EP0920996B1 (enExample)
JP (1) JP3927711B2 (enExample)
DE (1) DE69823461T2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6886915B2 (en) * 1999-10-19 2005-05-03 Silverbrook Research Pty Ltd Fluid supply mechanism for a printhead
US6378993B1 (en) 1998-12-03 2002-04-30 Canon Kabushiki Kaisha Liquid discharge head, producing method therefor and liquid discharge apparatus
AUPQ130399A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V9)
AUPQ130899A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V12)
AUPQ131099A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V8)
US6435661B1 (en) 1999-09-03 2002-08-20 Canon Kabushiki Kaisha Liquid discharge head, liquid discharge method and liquid discharge apparatus
JP3584193B2 (ja) 2000-02-15 2004-11-04 キヤノン株式会社 液体吐出ヘッド、液体吐出装置及び前記液体吐出ヘッドの製造方法
US6435670B1 (en) 2000-02-15 2002-08-20 Canon Kabushiki Kaisha Liquid discharge head, liquid discharge method, liquid discharge apparatus, recovery method for liquid discharge head, and fluid structure body
US6834423B2 (en) 2000-07-31 2004-12-28 Canon Kabushiki Kaisha Method of manufacturing a liquid discharge head
JP4095368B2 (ja) 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
JP2003311982A (ja) * 2002-04-23 2003-11-06 Canon Inc 液体吐出ヘッド
CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
JP4459037B2 (ja) * 2004-12-01 2010-04-28 キヤノン株式会社 液体吐出ヘッド

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
US4611219A (en) 1981-12-29 1986-09-09 Canon Kabushiki Kaisha Liquid-jetting head
JPS6159911A (ja) 1984-08-30 1986-03-27 Nec Corp 切換スイツチ回路
JPS6159914A (ja) 1984-08-31 1986-03-27 Fujitsu Ltd デイジタル圧縮装置
US5479197A (en) 1991-07-11 1995-12-26 Canon Kabushiki Kaisha Head for recording apparatus
JP3342279B2 (ja) 1995-01-13 2002-11-05 キヤノン株式会社 液体吐出方法、液体吐出ヘッドおよび該液体吐出ヘッドの製造方法
TW312658B (enExample) * 1995-01-13 1997-08-11 Canon Kk
JP3706671B2 (ja) * 1995-04-14 2005-10-12 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドを用いたヘッドカートリッジ、液体吐出装置、および液体吐出方法
DE69626879T2 (de) * 1995-04-26 2004-02-05 Canon K.K. Flüssigkeitsausstosskopf, Flüssigkeitsausstossgerät und Flüssigkeitsausstossverfahren
US6154237A (en) * 1995-12-05 2000-11-28 Canon Kabushiki Kaisha Liquid ejecting method, liquid ejecting head and liquid ejecting apparatus in which motion of a movable member is controlled
US5880752A (en) * 1996-05-09 1999-03-09 Hewlett-Packard Company Print system for ink-jet pens
JP3542460B2 (ja) * 1996-06-07 2004-07-14 キヤノン株式会社 液体吐出方法及び液体吐出装置

Also Published As

Publication number Publication date
DE69823461T2 (de) 2005-04-14
US6196667B1 (en) 2001-03-06
DE69823461D1 (de) 2004-06-03
EP0920996A2 (en) 1999-06-09
EP0920996A3 (en) 2000-07-05
EP0920996B1 (en) 2004-04-28
JPH11235827A (ja) 1999-08-31

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