JP3871764B2 - 反射型の表示装置 - Google Patents
反射型の表示装置 Download PDFInfo
- Publication number
- JP3871764B2 JP3871764B2 JP09293497A JP9293497A JP3871764B2 JP 3871764 B2 JP3871764 B2 JP 3871764B2 JP 09293497 A JP09293497 A JP 09293497A JP 9293497 A JP9293497 A JP 9293497A JP 3871764 B2 JP3871764 B2 JP 3871764B2
- Authority
- JP
- Japan
- Prior art keywords
- display device
- film
- electrode
- reflective
- drain electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 121
- 239000004973 liquid crystal related substance Substances 0.000 claims description 67
- 239000010410 layer Substances 0.000 claims description 38
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 23
- 229910052719 titanium Inorganic materials 0.000 claims description 23
- 239000010936 titanium Substances 0.000 claims description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 20
- 229910052782 aluminium Inorganic materials 0.000 claims description 20
- 239000011229 interlayer Substances 0.000 claims description 17
- 229920001721 polyimide Polymers 0.000 claims description 13
- 239000003990 capacitor Substances 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 9
- 239000004642 Polyimide Substances 0.000 claims description 5
- 239000004593 Epoxy Substances 0.000 claims description 2
- 239000004952 Polyamide Substances 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 150000001408 amides Chemical class 0.000 claims description 2
- 230000010365 information processing Effects 0.000 claims description 2
- 229920002647 polyamide Polymers 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000009719 polyimide resin Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 239000010407 anodic oxide Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 210000003128 head Anatomy 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
- H10D30/6743—Silicon
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09293497A JP3871764B2 (ja) | 1997-03-26 | 1997-03-26 | 反射型の表示装置 |
| US09/046,196 US6225966B1 (en) | 1997-03-26 | 1998-03-23 | Display device |
| KR10-1998-0010438A KR100483817B1 (ko) | 1997-03-26 | 1998-03-26 | 표시장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09293497A JP3871764B2 (ja) | 1997-03-26 | 1997-03-26 | 反射型の表示装置 |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006219135A Division JP4294664B2 (ja) | 2006-08-11 | 2006-08-11 | 表示装置 |
| JP2006250880A Division JP4294669B2 (ja) | 2006-09-15 | 2006-09-15 | 表示装置 |
| JP2006250879A Division JP2007004204A (ja) | 2006-09-15 | 2006-09-15 | 表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10268340A JPH10268340A (ja) | 1998-10-09 |
| JPH10268340A5 JPH10268340A5 (enExample) | 2005-02-24 |
| JP3871764B2 true JP3871764B2 (ja) | 2007-01-24 |
Family
ID=14068322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09293497A Expired - Lifetime JP3871764B2 (ja) | 1997-03-26 | 1997-03-26 | 反射型の表示装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6225966B1 (enExample) |
| JP (1) | JP3871764B2 (enExample) |
| KR (1) | KR100483817B1 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003177419A (ja) * | 1998-01-30 | 2003-06-27 | Sharp Corp | 液晶表示装置における基板および液晶表示装置 |
| JP3378820B2 (ja) * | 1999-01-20 | 2003-02-17 | 三洋電機株式会社 | 垂直配向型液晶表示装置 |
| US6680487B1 (en) * | 1999-05-14 | 2004-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor comprising a TFT provided on a substrate having an insulating surface and method of fabricating the same |
| TW465122B (en) * | 1999-12-15 | 2001-11-21 | Semiconductor Energy Lab | Light-emitting device |
| JP2001174847A (ja) * | 1999-12-21 | 2001-06-29 | Nippon Telegr & Teleph Corp <Ntt> | 光学素子および該光学素子を用いた表示装置 |
| US6563559B2 (en) * | 2000-02-02 | 2003-05-13 | Sanyo Electric Co., Ltd. | Reflective liquid crystal display having increase luminance for each display pixel |
| US6559594B2 (en) | 2000-02-03 | 2003-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
| TW507258B (en) * | 2000-02-29 | 2002-10-21 | Semiconductor Systems Corp | Display device and method for fabricating the same |
| TW480576B (en) * | 2000-05-12 | 2002-03-21 | Semiconductor Energy Lab | Semiconductor device and method for manufacturing same |
| TWI224806B (en) * | 2000-05-12 | 2004-12-01 | Semiconductor Energy Lab | Semiconductor device and manufacturing method thereof |
| US7633471B2 (en) * | 2000-05-12 | 2009-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and electric appliance |
| JP2002162645A (ja) * | 2000-09-14 | 2002-06-07 | Sony Corp | 半透過型液晶表示装置 |
| JP3573160B2 (ja) * | 2000-12-14 | 2004-10-06 | セイコーエプソン株式会社 | 電気光学パネルおよび電子機器 |
| JP3520417B2 (ja) * | 2000-12-14 | 2004-04-19 | セイコーエプソン株式会社 | 電気光学パネルおよび電子機器 |
| US6937211B2 (en) * | 2001-09-27 | 2005-08-30 | Koninklijke Philips Electronics N.V. | Apparatus and system for abstract visual representation of audio signals |
| JP2003330388A (ja) * | 2002-05-15 | 2003-11-19 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
| JP4371104B2 (ja) * | 2002-09-30 | 2009-11-25 | セイコーエプソン株式会社 | 電気光学装置および電子機器 |
| KR100886268B1 (ko) * | 2002-10-18 | 2009-03-04 | 하이디스 테크놀로지 주식회사 | 액정표시장치 및 그 제조방법 |
| US20040164299A1 (en) * | 2003-02-24 | 2004-08-26 | Gem Line Technology Co., Ltd. | Reflective type thin film transistor display device and methods for fabricating the same |
| JP4083752B2 (ja) | 2005-01-31 | 2008-04-30 | 三菱電機株式会社 | アクティブマトリクス基板及びその製造方法 |
| JP2006245527A (ja) * | 2005-02-07 | 2006-09-14 | Fuji Photo Film Co Ltd | 固体撮像素子 |
| JP4663485B2 (ja) | 2005-11-04 | 2011-04-06 | 三菱電機株式会社 | 薄膜トランジスタアレイ及びその製造方法、半透過型液晶表示装置 |
| JP4651580B2 (ja) * | 2006-05-31 | 2011-03-16 | 株式会社 日立ディスプレイズ | 液晶表示装置 |
| JP4205144B2 (ja) * | 2007-10-12 | 2009-01-07 | 三菱電機株式会社 | アクティブマトリクス基板及びその製造方法 |
| JP5655567B2 (ja) * | 2008-10-06 | 2015-01-21 | 旭硝子株式会社 | 電子デバイス用基板、その製造方法、これを用いた電子デバイス、その製造方法及び有機led素子用基板 |
| KR102316458B1 (ko) * | 2015-03-24 | 2021-10-25 | 삼성디스플레이 주식회사 | 액정 표시장치 |
| JP6762793B2 (ja) * | 2016-07-29 | 2020-09-30 | 株式会社ジャパンディスプレイ | 電子機器及びその製造方法 |
| CN117631357A (zh) * | 2022-08-11 | 2024-03-01 | 瀚宇彩晶股份有限公司 | 显示面板 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02210330A (ja) * | 1981-01-09 | 1990-08-21 | Semiconductor Energy Lab Co Ltd | 液晶電気光学装置 |
| JPS58139173A (ja) * | 1982-02-15 | 1983-08-18 | 株式会社東芝 | マトリクス形液晶表示装置 |
| JP2859896B2 (ja) * | 1988-11-15 | 1999-02-24 | 株式会社東芝 | 液晶表示装置 |
| JPH02245741A (ja) * | 1989-03-17 | 1990-10-01 | Matsushita Electric Ind Co Ltd | 反射型液晶表示デバイス |
| JPH032839A (ja) * | 1989-05-31 | 1991-01-09 | Matsushita Electric Ind Co Ltd | 反射型液晶ライトバルブ素子 |
| JP3078554B2 (ja) * | 1989-11-08 | 2000-08-21 | セイコーエプソン株式会社 | 反射型液晶表示装置 |
| JPH03164716A (ja) * | 1989-11-24 | 1991-07-16 | Matsushita Electron Corp | 反射型液晶画像表示装置 |
| JPH03175430A (ja) * | 1989-12-05 | 1991-07-30 | Nec Corp | 反射型液晶表示装置 |
| JP2604867B2 (ja) * | 1990-01-11 | 1997-04-30 | 松下電器産業株式会社 | 反射型液晶表示デバイス |
| JPH03227062A (ja) * | 1990-01-31 | 1991-10-08 | Matsushita Electron Corp | 薄膜トランジスタアレイ |
| JP2622183B2 (ja) * | 1990-04-05 | 1997-06-18 | シャープ株式会社 | アクティブマトリクス表示装置 |
| JPH0431827A (ja) * | 1990-05-29 | 1992-02-04 | Alps Electric Co Ltd | 液晶表示素子 |
| JPH0431831A (ja) * | 1990-05-29 | 1992-02-04 | Citizen Watch Co Ltd | 半導体基板を用いた液晶表示装置 |
| JPH04305627A (ja) * | 1991-04-03 | 1992-10-28 | Sharp Corp | アクティブマトリクス基板の製造方法 |
| KR970001735B1 (en) * | 1991-04-05 | 1997-02-14 | Sharp Kk | A liquid crystal display device and a liquid crystal display system using the liquid crystal display device |
| DE69220643T2 (de) * | 1991-09-10 | 1998-01-22 | Sharp Kk | Flüssigkristall-Anzeigegerät vom Reflexionstyp und Verfahren zu dessen Herstellung |
| JPH05188398A (ja) * | 1992-01-16 | 1993-07-30 | Canon Inc | 液晶表示パネル及び該液晶表示パネルを用いた投写表示装置 |
| JP3172841B2 (ja) * | 1992-02-19 | 2001-06-04 | 株式会社日立製作所 | 薄膜トランジスタとその製造方法及び液晶表示装置 |
| JPH05264716A (ja) * | 1992-03-18 | 1993-10-12 | Matsushita Electric Ind Co Ltd | 携帯型gps受信機 |
| JPH07248508A (ja) * | 1994-03-14 | 1995-09-26 | Toshiba Corp | 液晶表示装置 |
| JP3097945B2 (ja) * | 1994-10-03 | 2000-10-10 | シャープ株式会社 | 反射型液晶表示装置の製造方法 |
| JP3085633B2 (ja) * | 1994-11-08 | 2000-09-11 | シャープ株式会社 | 反射型液晶表示装置 |
| JP3512496B2 (ja) * | 1994-11-25 | 2004-03-29 | 株式会社半導体エネルギー研究所 | Soi型半導体集積回路の作製方法 |
| JP3439552B2 (ja) * | 1994-12-08 | 2003-08-25 | 富士通ディスプレイテクノロジーズ株式会社 | 薄膜トランジスタ基板及び液晶表示装置 |
| JPH08160463A (ja) * | 1994-12-09 | 1996-06-21 | Sanyo Electric Co Ltd | 反射型液晶表示装置 |
| JPH08220657A (ja) * | 1994-12-15 | 1996-08-30 | Nikon Corp | 投射装置 |
| JP3307181B2 (ja) * | 1995-07-31 | 2002-07-24 | ソニー株式会社 | 透過型表示装置 |
-
1997
- 1997-03-26 JP JP09293497A patent/JP3871764B2/ja not_active Expired - Lifetime
-
1998
- 1998-03-23 US US09/046,196 patent/US6225966B1/en not_active Expired - Lifetime
- 1998-03-26 KR KR10-1998-0010438A patent/KR100483817B1/ko not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR100483817B1 (ko) | 2005-08-05 |
| KR19980080689A (ko) | 1998-11-25 |
| US6225966B1 (en) | 2001-05-01 |
| JPH10268340A (ja) | 1998-10-09 |
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