JP3835556B2 - 半導体装置の製造方法及び半導体装置の製造装置 - Google Patents
半導体装置の製造方法及び半導体装置の製造装置 Download PDFInfo
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- JP3835556B2 JP3835556B2 JP2003366081A JP2003366081A JP3835556B2 JP 3835556 B2 JP3835556 B2 JP 3835556B2 JP 2003366081 A JP2003366081 A JP 2003366081A JP 2003366081 A JP2003366081 A JP 2003366081A JP 3835556 B2 JP3835556 B2 JP 3835556B2
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Description
前記樹脂を硬化させることを含む。本発明によれば、半導体チップの側方に至るように樹脂部が形成される。そのため、配線基板と半導体チップとを強固に固着することができる。また、本発明によれば、ボンディングツールの凹部によって、樹脂部の形状を制御することができる。そのため、設計通りの大きさの半導体装置を製造することができる。すなわち、本発明によれば、信頼性及び実装性に優れた半導体装置を製造することができる。
(2)この半導体装置の製造方法において、
前記ボンディングツールの前記凹部の周囲の部分を、前記配線基板と非接触としてもよい。これによれば、樹脂をボンディングツールの凹部外に排出させることができるため、樹脂を過剰に設けた場合であっても、設計通りの大きさの半導体装置を製造することができる。
(3)この半導体装置の製造方法において、
前記ボンディングツールの前記凹部の前記底面には凸部が形成されてなり、
前記凸部の突出面によって前記半導体チップを押圧して、前記凹部内における前記半導体チップ及び前記凸部の側方空間に前記樹脂を充填させてもよい。
(4)この半導体装置の製造方法において、
前記樹脂を流動させる工程を、前記樹脂を加熱しながら行ってもよい。これによれば、樹脂をボンディングツールの凹部内に充填させやすくなるため、半導体装置の製造効率を高めることができる。
(5)この半導体装置の製造方法において、
前記樹脂は熱硬化性樹脂であってもよい。
(6)この半導体装置の製造方法において、
前記半導体チップ及び前記樹脂と前記ボンディングツールとの間に、前記樹脂付着防止用のシートを介在させてもよい。これによれば、ボンディングツールに樹脂が付着することを防止することができるため、1つのボンディングツールを連続的に利用することができ、半導体装置の製造効率を高めることができる。
(7)この半導体装置の製造方法において、
前記樹脂を硬化させる工程を、前記ボンディングツールを押し下げた状態で行ってもよい。これによれば、樹脂部の外形を設計通りに形成することができるため、信頼性及び実装性に優れた半導体装置を製造することができる。
(8)本発明に係る半導体装置は、上記方法によって製造されてなる。
(9)本発明に係る半導体装置の製造装置は、凹部を有するボンディングツールと、
前記ボンディングツールを上下させるアクチュエータと、
を含み、
前記凹部内に半導体チップが配置された状態で、前記アクチュエータによって前記ボンディングツールを配線基板に向かって押し下げて、前記凹部の底面によって前記半導体チップを押圧して前記半導体チップと前記配線基板との間に設けられた樹脂を流動させて、前記凹部内における前記半導体チップの側方空間に前記樹脂を充填させる。本発明によれば、半導体チップの側方に至るように樹脂部を形成することができる。そのため、配線基板と半導体チップとを強固に固着させることができる。また、本発明によれば、ボンディングツールの凹部によって、樹脂部の形状を制御することができる。そのため、設計通りの大きさの半導体装置を製造することができる。すなわち、本発明によれば、信頼性及び実装性に優れた半導体装置を製造することができる。
(10)この半導体装置の製造装置において、
前記アクチュエータは、前記ボンディングツールを、前記凹部の周囲の部分が前記配線基板と非接触となるように駆動してもよい。これによれば、樹脂をボンディングツールの凹部外に排出させることができるため、樹脂を過剰に設けた場合であっても、設計通りの大きさの半導体装置を製造することができる。
(11)この半導体装置の製造装置において、
前記ボンディングツールの前記凹部の前記底面には凸部が形成されてなり、
前記凸部の突出面によって前記半導体チップを押圧して、前記凹部内における前記半導体チップ及び前記凸部の側方空間に前記樹脂を充填させてもよい。
(12)この半導体装置の製造装置において、
ヒーターをさらに含んでもよい。
(13)この半導体装置の製造装置において、
前記半導体チップ及び前記樹脂と前記ボンディングツールとの間に介在する、前記樹脂付着防止用のシートをさらに含んでもよい。これによれば、1つのボンディングツールを連続的に利用することができるため、半導体装置の製造効率を高めることができる。
Claims (10)
- 凹部を有するボンディングツールを、前記凹部内に半導体チップが配置された状態で配線基板に向かって押し下げて、前記凹部の底面によって前記半導体チップを押圧して前記半導体チップと前記配線基板との間に設けられた樹脂を流動させて、前記凹部内における前記半導体チップの側方空間に前記樹脂を充填させること、及び、
前記樹脂を硬化させることを含み、
前記ボンディングツールの前記凹部の前記底面には凸部が形成されてなり、
前記凹部内における前記半導体チップの側方空間に前記樹脂を充填させる工程では、
前記凸部の突出面によって前記半導体チップを押圧して、前記凹部内における前記半導体チップ及び前記凸部の側方空間に前記樹脂を充填させる半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記ボンディングツールの前記凹部の周囲の部分を、前記配線基板と非接触とする半導体装置の製造方法。 - 請求項1又は請求項2記載の半導体装置の製造方法において、
前記樹脂を流動させる工程を、前記樹脂を加熱しながら行う半導体装置の製造方法。 - 請求項1から請求項3のいずれかに記載の半導体装置の製造方法において、
前記樹脂は熱硬化性樹脂である半導体装置の製造方法。 - 請求項1から請求項4のいずれかに記載の半導体装置の製造方法において、
前記半導体チップ及び前記樹脂と前記ボンディングツールとの間に、前記樹脂付着防止用のシートを介在させる半導体装置の製造方法。 - 請求項1から請求項5のいずれかに記載の半導体装置の製造方法において、
前記樹脂を硬化させる工程を、前記ボンディングツールを押し下げた状態で行う半導体装置の製造方法。 - 凹部を有するボンディングツールと、
前記ボンディングツールを上下させるアクチュエータと、
を含み、
前記ボンディングツールの前記凹部の底面には凸部が形成されてなり、
前記凹部内に半導体チップが配置された状態で、前記アクチュエータによって前記ボンディングツールを配線基板に向かって押し下げて、前記凹部の前記底面に形成された前記凸部の突出面によって前記半導体チップを押圧して前記半導体チップと前記配線基板との間に設けられた樹脂を流動させて、前記凹部内における前記半導体チップ及び前記凸部の側方空間に前記樹脂を充填させる半導体装置の製造装置。 - 請求項7記載の半導体装置の製造装置において、
前記アクチュエータは、前記ボンディングツールを、前記凹部の周囲の部分が前記配線基板と非接触となるように駆動する半導体装置の製造装置。 - 請求項7又は請求項8記載の半導体装置の製造装置において、
ヒーターをさらに含む半導体装置の製造装置。 - 請求項7から請求項9のいずれかに記載の半導体装置の製造装置において、
前記半導体チップ及び前記樹脂と前記ボンディングツールとの間に介在する、前記樹脂付着防止用のシートをさらに含む半導体装置の製造装置。
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JP2003366081A JP3835556B2 (ja) | 2003-10-27 | 2003-10-27 | 半導体装置の製造方法及び半導体装置の製造装置 |
CNB2004100850286A CN100352023C (zh) | 2003-10-27 | 2004-10-13 | 半导体装置的制造方法以及半导体装置的制造装置 |
US10/973,991 US7179687B2 (en) | 2003-10-27 | 2004-10-26 | Semiconductor device and its manufacturing method, and semiconductor device manufacturing system |
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US20070020812A1 (en) * | 2005-07-20 | 2007-01-25 | Phoenix Precision Technology Corp. | Circuit board structure integrated with semiconductor chip and method of fabricating the same |
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JP4577228B2 (ja) | 2006-02-09 | 2010-11-10 | セイコーエプソン株式会社 | 半導体装置および半導体装置の製造方法 |
JP4876618B2 (ja) | 2006-02-21 | 2012-02-15 | セイコーエプソン株式会社 | 半導体装置および半導体装置の製造方法 |
CN101983419B (zh) * | 2008-04-04 | 2012-08-08 | 索尼化学&信息部件株式会社 | 半导体装置及其制造方法 |
JP5349189B2 (ja) * | 2009-07-28 | 2013-11-20 | 新光電気工業株式会社 | 電子部品装置の製造方法及び治具 |
KR101163222B1 (ko) * | 2010-09-13 | 2012-07-06 | 에스케이하이닉스 주식회사 | 반도체 패키지 및 그 제조방법 |
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CN104916553A (zh) * | 2014-03-11 | 2015-09-16 | 东莞高伟光学电子有限公司 | 将半导体器件或元件焊接到基板上的方法和装置 |
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US9949380B2 (en) * | 2015-02-27 | 2018-04-17 | Panasonic Intellectual Property Management Co., Ltd. | Manufacturing method of electronic component, electronic component, and manufacturing apparatus of electronic component |
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US9576928B2 (en) * | 2015-02-27 | 2017-02-21 | Kulicke And Soffa Industries, Inc. | Bond head assemblies, thermocompression bonding systems and methods of assembling and operating the same |
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JP3104438B2 (ja) | 1992-11-04 | 2000-10-30 | 松下電器産業株式会社 | 部品実装装置 |
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CN1612309A (zh) | 2005-05-04 |
JP2005129847A (ja) | 2005-05-19 |
CN100352023C (zh) | 2007-11-28 |
US7179687B2 (en) | 2007-02-20 |
US20050112803A1 (en) | 2005-05-26 |
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