JP3750123B2 - 投影光学系 - Google Patents

投影光学系 Download PDF

Info

Publication number
JP3750123B2
JP3750123B2 JP10570796A JP10570796A JP3750123B2 JP 3750123 B2 JP3750123 B2 JP 3750123B2 JP 10570796 A JP10570796 A JP 10570796A JP 10570796 A JP10570796 A JP 10570796A JP 3750123 B2 JP3750123 B2 JP 3750123B2
Authority
JP
Japan
Prior art keywords
lens
lens group
optical system
projection optical
object side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10570796A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09292568A (ja
JPH09292568A5 (enExample
Inventor
均 松澤
豊 末永
美佐子 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=14414829&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3750123(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP10570796A priority Critical patent/JP3750123B2/ja
Priority to KR1019960018480A priority patent/KR100446130B1/ko
Priority to DE69629277T priority patent/DE69629277T2/de
Priority to EP96108775A priority patent/EP0803755B1/en
Priority to US08/901,681 priority patent/US5781278A/en
Publication of JPH09292568A publication Critical patent/JPH09292568A/ja
Publication of JPH09292568A5 publication Critical patent/JPH09292568A5/ja
Publication of JP3750123B2 publication Critical patent/JP3750123B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
JP10570796A 1996-04-25 1996-04-25 投影光学系 Expired - Lifetime JP3750123B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP10570796A JP3750123B2 (ja) 1996-04-25 1996-04-25 投影光学系
KR1019960018480A KR100446130B1 (ko) 1996-04-25 1996-05-29 투영광학계및노광장치와그노광방법
DE69629277T DE69629277T2 (de) 1996-04-25 1996-05-31 Optisches Projektionssystem und damit ausgerüstetes Belichtungsgerät
EP96108775A EP0803755B1 (en) 1996-04-25 1996-05-31 Projection optical system and exposure apparatus with the same
US08/901,681 US5781278A (en) 1996-04-25 1997-07-28 Projection optical system and exposure apparatus with the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10570796A JP3750123B2 (ja) 1996-04-25 1996-04-25 投影光学系

Publications (3)

Publication Number Publication Date
JPH09292568A JPH09292568A (ja) 1997-11-11
JPH09292568A5 JPH09292568A5 (enExample) 2004-07-08
JP3750123B2 true JP3750123B2 (ja) 2006-03-01

Family

ID=14414829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10570796A Expired - Lifetime JP3750123B2 (ja) 1996-04-25 1996-04-25 投影光学系

Country Status (5)

Country Link
US (1) US5781278A (enExample)
EP (1) EP0803755B1 (enExample)
JP (1) JP3750123B2 (enExample)
KR (1) KR100446130B1 (enExample)
DE (1) DE69629277T2 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE38465E1 (en) 1994-12-14 2004-03-16 Nikon Corporation Exposure apparatus
JP3500745B2 (ja) * 1994-12-14 2004-02-23 株式会社ニコン 投影光学系、投影露光装置及び投影露光方法
JPH116957A (ja) * 1997-04-25 1999-01-12 Nikon Corp 投影光学系および投影露光装置並びに投影露光方法
JP3925576B2 (ja) 1997-07-24 2007-06-06 株式会社ニコン 投影光学系、該光学系を備えた露光装置、及び該装置を用いたデバイスの製造方法
JPH1195095A (ja) 1997-09-22 1999-04-09 Nikon Corp 投影光学系
US6700645B1 (en) 1998-01-22 2004-03-02 Nikon Corporation Projection optical system and exposure apparatus and method
JPH11214293A (ja) 1998-01-22 1999-08-06 Nikon Corp 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法
US6198576B1 (en) * 1998-07-16 2001-03-06 Nikon Corporation Projection optical system and exposure apparatus
DE19855108A1 (de) 1998-11-30 2000-05-31 Zeiss Carl Fa Mikrolithographisches Reduktionsobjektiv, Projektionsbelichtungsanlage und -Verfahren
WO2000033138A1 (de) * 1998-11-30 2000-06-08 Carl Zeiss Hochaperturiges projektionsobjektiv mit minimalem blendenfehler
DE19855157A1 (de) * 1998-11-30 2000-05-31 Zeiss Carl Fa Projektionsobjektiv
DE19901756B4 (de) * 1999-01-18 2004-02-05 Siemens Ag Verfahren zum Betrieb einer eine Teilnehmeranschlußleitung teilnehmerseitig oder vermittungsseitig abschließenden Einrichtung in einem Datenübertragungsnetz
JP2001051193A (en) * 1999-06-03 2001-02-23 Nikon Corp Projection optical system projection exposing device provided with the system and manufacture of device
US6600550B1 (en) * 1999-06-03 2003-07-29 Nikon Corporation Exposure apparatus, a photolithography method, and a device manufactured by the same
WO2001023933A1 (en) * 1999-09-29 2001-04-05 Nikon Corporation Projection optical system
WO2001023935A1 (en) 1999-09-29 2001-04-05 Nikon Corporation Projection exposure method and apparatus and projection optical system
KR100866818B1 (ko) * 2000-12-11 2008-11-04 가부시키가이샤 니콘 투영광학계 및 이 투영광학계를 구비한 노광장치
DE10064685A1 (de) * 2000-12-22 2002-07-04 Zeiss Carl Lithographieobjektiv mit einer ersten Linsengruppe, bestehend ausschließlich aus Linsen positiver Brechkraft
JP2002244034A (ja) 2001-02-21 2002-08-28 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
JP2002323652A (ja) 2001-02-23 2002-11-08 Nikon Corp 投影光学系，該投影光学系を備えた投影露光装置および投影露光方法
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20080151364A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR20170129271A (ko) 2004-05-17 2017-11-24 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
US7511798B2 (en) 2004-07-30 2009-03-31 Asml Holding N.V. Off-axis catadioptric projection optical system for lithography
US20080019574A1 (en) * 2006-07-20 2008-01-24 Anthony Scalise Machine-controlled image cropping with default
KR101407076B1 (ko) 2012-05-24 2014-06-13 주식회사 비엘시스템 근적외선을 이용한 인쇄판 프린터용 고해상도 노광장치
CN116736494B (zh) * 2023-08-14 2023-11-03 武汉高明兰光电科技有限公司 微光夜视镜头

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336326B2 (enExample) * 1972-12-26 1978-10-02
JPS59149312A (ja) * 1983-02-16 1984-08-27 Asahi Optical Co Ltd 大口径比写真レンズ
US4666273A (en) * 1983-10-05 1987-05-19 Nippon Kogaku K. K. Automatic magnification correcting system in a projection optical apparatus
GB2153543B (en) * 1983-12-28 1988-09-01 Canon Kk A projection exposure apparatus
US4811055A (en) * 1984-02-27 1989-03-07 Canon Kabushiki Kaisha Projection exposure apparatus
JPS60188917A (ja) * 1984-03-07 1985-09-26 Asahi Optical Co Ltd 近距離撮影用レンズ系
US4772107A (en) * 1986-11-05 1988-09-20 The Perkin-Elmer Corporation Wide angle lens with improved flat field characteristics
JPH0812329B2 (ja) * 1986-11-06 1996-02-07 株式会社シグマ 投影レンズ
US4770477A (en) * 1986-12-04 1988-09-13 The Perkin-Elmer Corporation Lens usable in the ultraviolet
US5105075A (en) * 1988-09-19 1992-04-14 Canon Kabushiki Kaisha Projection exposure apparatus
JPH0442208A (ja) * 1990-06-08 1992-02-12 Dainippon Screen Mfg Co Ltd テレセントリック投影レンズ
JP3041939B2 (ja) * 1990-10-22 2000-05-15 株式会社ニコン 投影レンズ系
US5172275A (en) * 1990-12-14 1992-12-15 Eastman Kodak Company Apochromatic relay lens systems suitable for use in a high definition telecine apparatus
US5572364A (en) * 1991-09-13 1996-11-05 Mitsubishi Denki Kabushiki Kaisha Projection lens system
JP3298131B2 (ja) * 1991-10-24 2002-07-02 株式会社ニコン 縮小投影レンズ
JPH06300965A (ja) * 1993-04-13 1994-10-28 Nikon Corp 広角レンズ
US5589988A (en) * 1993-04-26 1996-12-31 Nikon Corporation Retrofocus-type wide angle lens system having a fixed front lens group and a movable rear lens group
JP3255490B2 (ja) * 1993-06-08 2002-02-12 富士写真光機株式会社 レトロフォーカス型大口径レンズ
US5557472A (en) * 1993-06-16 1996-09-17 Asahi Kogaku Kogyo Kabushiki Kaisha Fast aspherical lens system
US5404247A (en) * 1993-08-02 1995-04-04 International Business Machines Corporation Telecentric and achromatic f-theta scan lens system and method of use

Also Published As

Publication number Publication date
DE69629277D1 (de) 2003-09-04
JPH09292568A (ja) 1997-11-11
KR970071147A (ko) 1997-11-07
KR100446130B1 (ko) 2005-07-04
EP0803755A2 (en) 1997-10-29
EP0803755B1 (en) 2003-07-30
DE69629277T2 (de) 2004-05-13
EP0803755A3 (en) 2000-03-08
US5781278A (en) 1998-07-14

Similar Documents

Publication Publication Date Title
JP3750123B2 (ja) 投影光学系
JP3624973B2 (ja) 投影光学系
JP3454390B2 (ja) 投影光学系、投影露光装置及び投影露光方法
JP3819048B2 (ja) 投影光学系及びそれを備えた露光装置並びに露光方法
JP3500745B2 (ja) 投影光学系、投影露光装置及び投影露光方法
JPH11214293A (ja) 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法
US5930049A (en) Projection optical system and method of using such system for manufacturing devices
JP3823436B2 (ja) 投影光学系
JPH1079345A (ja) 投影光学系及び露光装置
JPH07140384A (ja) 投影光学系及び投影露光装置
JPH07140385A (ja) 投影光学系及び投影露光装置
JPH1197344A (ja) 投影光学系、該光学系を備えた露光装置、及び該装置を用いたデバイスの製造方法
KR100522503B1 (ko) 투영광학계 및 이것을 가진 투영노광장치, 그리고디바이스제조방법
KR100386870B1 (ko) 투영광학계및노광장치
JP4300509B2 (ja) 投影光学系、露光装置、および露光方法
JP3423644B2 (ja) 投影光学系及びそれを用いた投影露光装置
JP2003202494A (ja) 投影光学系、露光装置及びデバイスの製造方法
JP2000121933A (ja) 投影光学系及びそれを備えた露光装置並びにデバイス製造方法
JP2000056219A (ja) 投影光学系
JP2000056218A (ja) 投影光学系およびそれを備えた露光装置ならびに半導体デバイス製造方法
USRE38465E1 (en) Exposure apparatus
JP2000131607A (ja) 投影光学系
JP2000352667A (ja) 投影光学系及びそれを用いた投影露光装置

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050207

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050905

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051011

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20051114

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20051127

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081216

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20161216

Year of fee payment: 11

EXPY Cancellation because of completion of term