JP2564712B2 - 半導体メモリ装置の製造方法 - Google Patents
半導体メモリ装置の製造方法Info
- Publication number
- JP2564712B2 JP2564712B2 JP3148392A JP14839291A JP2564712B2 JP 2564712 B2 JP2564712 B2 JP 2564712B2 JP 3148392 A JP3148392 A JP 3148392A JP 14839291 A JP14839291 A JP 14839291A JP 2564712 B2 JP2564712 B2 JP 2564712B2
- Authority
- JP
- Japan
- Prior art keywords
- forming
- impurity diffusion
- diffusion region
- region
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000012535 impurity Substances 0.000 claims description 108
- 238000009792 diffusion process Methods 0.000 claims description 88
- 239000000758 substrate Substances 0.000 claims description 44
- 230000002093 peripheral effect Effects 0.000 claims description 36
- 125000006850 spacer group Chemical group 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 22
- 238000003860 storage Methods 0.000 claims description 19
- 229920002120 photoresistant polymer Polymers 0.000 claims description 17
- 239000011229 interlayer Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 15
- 239000003990 capacitor Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 11
- 239000010410 layer Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000007547 defect Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 229910052785 arsenic Inorganic materials 0.000 description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004148 unit process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/34—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the transistor being at least partially in a trench in the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823468—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate sidewall spacers, e.g. double spacers, particular spacer material or shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
- H10B12/0335—Making a connection between the transistor and the capacitor, e.g. plug
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
- H10B12/053—Making the transistor the transistor being at least partially in a trench in the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/39—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench
- H10B12/395—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench the transistor being vertical
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/48—Data lines or contacts therefor
- H10B12/485—Bit line contacts
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910004394A KR940000510B1 (ko) | 1991-03-20 | 1991-03-20 | 반도체 메모리장치 및 그 제조방법 |
KR4394 | 1991-03-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04320059A JPH04320059A (ja) | 1992-11-10 |
JP2564712B2 true JP2564712B2 (ja) | 1996-12-18 |
Family
ID=19312269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3148392A Expired - Lifetime JP2564712B2 (ja) | 1991-03-20 | 1991-06-20 | 半導体メモリ装置の製造方法 |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP2564712B2 (it) |
KR (1) | KR940000510B1 (it) |
DE (1) | DE4117703C2 (it) |
FR (1) | FR2674373B1 (it) |
GB (1) | GB2253937B (it) |
IT (1) | IT1247968B (it) |
TW (1) | TW199236B (it) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6258671B1 (en) | 1997-05-13 | 2001-07-10 | Micron Technology, Inc. | Methods of providing spacers over conductive line sidewalls, methods of forming sidewall spacers over etched line sidewalls, and methods of forming conductive lines |
DE10121011B4 (de) * | 2001-04-28 | 2004-11-04 | Infineon Technologies Ag | Verfahren zur maskenlosen Kontaktlochdotierung bei DRAMs/eDRAMs und entsprechend hergestellter Speicherchip |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4364075A (en) * | 1980-09-02 | 1982-12-14 | Intel Corporation | CMOS Dynamic RAM cell and method of fabrication |
JPS60164570A (ja) * | 1984-02-06 | 1985-08-27 | 株式会社東芝 | 扉ロツク装置 |
JPS61156962A (ja) * | 1984-12-27 | 1986-07-16 | Nec Corp | 構内電子交換システム |
JPS61156862A (ja) * | 1984-12-28 | 1986-07-16 | Toshiba Corp | 半導体記憶装置 |
JPS61218165A (ja) * | 1985-03-25 | 1986-09-27 | Hitachi Ltd | 半導体記憶装置及び製造方法 |
JPH0821682B2 (ja) * | 1987-04-24 | 1996-03-04 | 株式会社日立製作所 | 半導体装置の製造方法 |
JP2810042B2 (ja) * | 1987-09-16 | 1998-10-15 | 株式会社日立製作所 | 半導体集積回路装置 |
JPH01231364A (ja) * | 1988-03-11 | 1989-09-14 | Hitachi Ltd | 半導体集積回路装置 |
JPH0821687B2 (ja) * | 1989-05-31 | 1996-03-04 | 富士通株式会社 | 半導体装置及びその製造方法 |
JP2673385B2 (ja) * | 1989-10-26 | 1997-11-05 | 三菱電機株式会社 | 半導体装置 |
DE4034169C2 (de) * | 1989-10-26 | 1994-05-19 | Mitsubishi Electric Corp | DRAM mit einem Speicherzellenfeld und Herstellungsverfahren dafür |
-
1991
- 1991-03-20 KR KR1019910004394A patent/KR940000510B1/ko not_active IP Right Cessation
- 1991-05-27 TW TW080104126A patent/TW199236B/zh not_active IP Right Cessation
- 1991-05-30 DE DE4117703A patent/DE4117703C2/de not_active Expired - Lifetime
- 1991-05-30 FR FR9106512A patent/FR2674373B1/fr not_active Expired - Fee Related
- 1991-06-04 IT ITMI911513A patent/IT1247968B/it active IP Right Grant
- 1991-06-05 GB GB9112136A patent/GB2253937B/en not_active Expired - Lifetime
- 1991-06-20 JP JP3148392A patent/JP2564712B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ITMI911513A0 (it) | 1991-06-04 |
TW199236B (it) | 1993-02-01 |
GB2253937A (en) | 1992-09-23 |
KR940000510B1 (ko) | 1994-01-21 |
GB9112136D0 (en) | 1991-07-24 |
IT1247968B (it) | 1995-01-05 |
DE4117703A1 (de) | 1992-09-24 |
FR2674373A1 (fr) | 1992-09-25 |
KR920018890A (ko) | 1992-10-22 |
DE4117703C2 (de) | 1994-12-22 |
JPH04320059A (ja) | 1992-11-10 |
FR2674373B1 (fr) | 2001-07-06 |
ITMI911513A1 (it) | 1992-12-04 |
GB2253937B (en) | 1995-10-25 |
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