JP2023550350A5 - - Google Patents
Info
- Publication number
- JP2023550350A5 JP2023550350A5 JP2023528696A JP2023528696A JP2023550350A5 JP 2023550350 A5 JP2023550350 A5 JP 2023550350A5 JP 2023528696 A JP2023528696 A JP 2023528696A JP 2023528696 A JP2023528696 A JP 2023528696A JP 2023550350 A5 JP2023550350 A5 JP 2023550350A5
- Authority
- JP
- Japan
- Prior art keywords
- heater
- temperature
- sensor
- chamber wall
- pressure gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063114287P | 2020-11-16 | 2020-11-16 | |
| US63/114,287 | 2020-11-16 | ||
| PCT/US2021/072211 WO2022104316A1 (en) | 2020-11-16 | 2021-11-03 | Thermal conductivity gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023550350A JP2023550350A (ja) | 2023-12-01 |
| JP2023550350A5 true JP2023550350A5 (enExample) | 2024-09-11 |
Family
ID=78806755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023528696A Pending JP2023550350A (ja) | 2020-11-16 | 2021-11-03 | 熱伝導真空計 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11808643B2 (enExample) |
| EP (1) | EP4244590A1 (enExample) |
| JP (1) | JP2023550350A (enExample) |
| KR (1) | KR20230105680A (enExample) |
| CN (1) | CN116547510A (enExample) |
| TW (1) | TWI911324B (enExample) |
| WO (1) | WO2022104316A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2601179A (en) * | 2020-11-23 | 2022-05-25 | Edwards Ltd | Thermal conductivity vacuum gauge assembly |
| US12123794B2 (en) * | 2022-10-11 | 2024-10-22 | Mks Instruments, Inc. | Pirani gauge with model of power dissipation |
| WO2025087805A1 (de) * | 2023-10-26 | 2025-05-01 | Ph-Instruments GmbH | Druckmessvorrichtung |
| DE102023131656B9 (de) * | 2023-11-14 | 2026-03-26 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Verfahren zum Betreiben eines Pirani-Drucksensors und Anordnung zum Betreiben des Pirani-Drucksensors |
| DE102024108521B4 (de) * | 2024-03-26 | 2026-01-08 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Verfahren zum Betreiben eines Pirani-Drucksensors und Vorrichtung |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05281073A (ja) | 1992-04-03 | 1993-10-29 | Ulvac Japan Ltd | ピラニ真空計 |
| JP3188752B2 (ja) * | 1992-04-27 | 2001-07-16 | 日本真空技術株式会社 | ピラニ真空計 |
| TW457367B (en) * | 2000-09-01 | 2001-10-01 | Winbond Electronics Corp | Protection tube structure of vacuum pressure gauge |
| US6973834B1 (en) | 2004-10-18 | 2005-12-13 | A.T.C.T. Advanced Thermal Chips Technologies Ltd. | Method and apparatus for measuring pressure of a fluid medium and applications thereof |
| US7207224B2 (en) | 2005-06-10 | 2007-04-24 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
| US7331237B2 (en) | 2006-02-01 | 2008-02-19 | Brooks Automation, Inc. | Technique for improving Pirani gauge temperature compensation over its full pressure range |
| JP4995617B2 (ja) * | 2006-08-21 | 2012-08-08 | 光照 木村 | 熱伝導型センサとこれを用いた熱伝導型計測装置 |
| US7613586B2 (en) | 2007-01-16 | 2009-11-03 | Honeywell International Inc. | Thermal vacuum gauge |
| JP4962908B2 (ja) * | 2007-03-23 | 2012-06-27 | 住友電気工業株式会社 | 真空ゲージを備える屋外設置器具 |
| US8171801B2 (en) | 2008-12-19 | 2012-05-08 | Institut National D'optique | Micro-thermistor gas pressure sensor |
| JP2010151622A (ja) * | 2008-12-25 | 2010-07-08 | Canon Anelva Corp | 熱伝導型真空計及びそれを備えた真空容器を有する真空処理装置 |
| JP5264572B2 (ja) * | 2009-03-11 | 2013-08-14 | 本田技研工業株式会社 | 車両用圧力センサ |
| DE102013012434A1 (de) * | 2012-07-30 | 2014-01-30 | Heinz Plöchinger | Sensoren zur Erfassung von Fluid-Eigenschaften mit Wärmeverlustausgleich und dessen Betriebsweise |
| US8893554B2 (en) | 2012-11-20 | 2014-11-25 | Hamilton Sundstrand Corporation | System and method for passively compensating pressure sensors |
| JP2014126503A (ja) * | 2012-12-27 | 2014-07-07 | Azbil Corp | 静電容量型圧力センサ |
| JP6261463B2 (ja) | 2014-06-27 | 2018-01-17 | 東京エレクトロン株式会社 | 圧力測定装置および圧力測定方法 |
| CN205620073U (zh) * | 2016-05-20 | 2016-10-05 | 合肥鑫晟光电科技有限公司 | 一种压力监测设备 |
| WO2018194925A1 (en) | 2017-04-21 | 2018-10-25 | Mks Instruments, Inc. | End point detection for lyophilization |
| US10753816B2 (en) | 2017-06-15 | 2020-08-25 | Kevin Kornelsen | Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure |
| JP6843708B2 (ja) * | 2017-06-28 | 2021-03-17 | アズビル株式会社 | 静電容量型圧力センサ |
| JP6937673B2 (ja) * | 2017-11-29 | 2021-09-22 | アズビル株式会社 | 真空室異常検出装置および隔膜真空計並びに真空室異常検出方法 |
| US10845263B2 (en) | 2018-04-17 | 2020-11-24 | Mks Instruments, Inc. | Thermal conductivity gauge |
| US10914717B2 (en) * | 2018-05-09 | 2021-02-09 | Mks Instruments, Inc. | Method and apparatus for partial pressure detection |
| EP3690417A1 (en) | 2019-02-01 | 2020-08-05 | Sens4 A/S | Apparatus for heat-loss vacuum measurement with improved temperature compensation and extended measurement range |
| US11428596B2 (en) * | 2020-09-16 | 2022-08-30 | Wisenstech Ltd. | Vacuum gauge with an extended dynamic measurement range |
| JP7674147B2 (ja) * | 2021-05-17 | 2025-05-09 | アズビル株式会社 | 隔膜真空計 |
-
2021
- 2021-11-03 EP EP21815859.0A patent/EP4244590A1/en active Pending
- 2021-11-03 US US17/453,450 patent/US11808643B2/en active Active
- 2021-11-03 JP JP2023528696A patent/JP2023550350A/ja active Pending
- 2021-11-03 CN CN202180076545.9A patent/CN116547510A/zh active Pending
- 2021-11-03 WO PCT/US2021/072211 patent/WO2022104316A1/en not_active Ceased
- 2021-11-03 KR KR1020237019113A patent/KR20230105680A/ko active Pending
- 2021-11-10 TW TW110141843A patent/TWI911324B/zh active
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