JP2023550350A - 熱伝導真空計 - Google Patents

熱伝導真空計 Download PDF

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Publication number
JP2023550350A
JP2023550350A JP2023528696A JP2023528696A JP2023550350A JP 2023550350 A JP2023550350 A JP 2023550350A JP 2023528696 A JP2023528696 A JP 2023528696A JP 2023528696 A JP2023528696 A JP 2023528696A JP 2023550350 A JP2023550350 A JP 2023550350A
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JP
Japan
Prior art keywords
temperature
sensor
pressure gauge
pressure
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023528696A
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English (en)
Japanese (ja)
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JP2023550350A5 (enExample
Inventor
ブラッカー・ジェラルド・エー
スウィニー・ティモシー・シー
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MKS Instruments Inc
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MKS Instruments Inc
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Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of JP2023550350A publication Critical patent/JP2023550350A/ja
Publication of JP2023550350A5 publication Critical patent/JP2023550350A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/14—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured using thermocouples

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Drying Of Solid Materials (AREA)
JP2023528696A 2020-11-16 2021-11-03 熱伝導真空計 Pending JP2023550350A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063114287P 2020-11-16 2020-11-16
US63/114,287 2020-11-16
PCT/US2021/072211 WO2022104316A1 (en) 2020-11-16 2021-11-03 Thermal conductivity gauge

Publications (2)

Publication Number Publication Date
JP2023550350A true JP2023550350A (ja) 2023-12-01
JP2023550350A5 JP2023550350A5 (enExample) 2024-09-11

Family

ID=78806755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023528696A Pending JP2023550350A (ja) 2020-11-16 2021-11-03 熱伝導真空計

Country Status (7)

Country Link
US (1) US11808643B2 (enExample)
EP (1) EP4244590A1 (enExample)
JP (1) JP2023550350A (enExample)
KR (1) KR20230105680A (enExample)
CN (1) CN116547510A (enExample)
TW (1) TWI911324B (enExample)
WO (1) WO2022104316A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2601179A (en) * 2020-11-23 2022-05-25 Edwards Ltd Thermal conductivity vacuum gauge assembly
US12123794B2 (en) * 2022-10-11 2024-10-22 Mks Instruments, Inc. Pirani gauge with model of power dissipation
WO2025087805A1 (de) * 2023-10-26 2025-05-01 Ph-Instruments GmbH Druckmessvorrichtung
DE102023131656B9 (de) * 2023-11-14 2026-03-26 Vacom Vakuum Komponenten & Messtechnik Gmbh Verfahren zum Betreiben eines Pirani-Drucksensors und Anordnung zum Betreiben des Pirani-Drucksensors
DE102024108521B4 (de) * 2024-03-26 2026-01-08 Vacom Vakuum Komponenten & Messtechnik Gmbh Verfahren zum Betreiben eines Pirani-Drucksensors und Vorrichtung

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281073A (ja) * 1992-04-03 1993-10-29 Ulvac Japan Ltd ピラニ真空計
JP2008233057A (ja) * 2006-08-21 2008-10-02 Mitsuteru Kimura 熱伝導型センサとこれを用いた熱伝導型計測装置
JP2008241264A (ja) * 2007-03-23 2008-10-09 Sumitomo Electric Ind Ltd 真空ゲージを備える屋外設置器具
JP2010151622A (ja) * 2008-12-25 2010-07-08 Canon Anelva Corp 熱伝導型真空計及びそれを備えた真空容器を有する真空処理装置
US20140026640A1 (en) * 2012-07-30 2014-01-30 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
JP2019100758A (ja) * 2017-11-29 2019-06-24 アズビル株式会社 真空室異常検出装置および隔膜真空計並びに真空室異常検出方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3188752B2 (ja) * 1992-04-27 2001-07-16 日本真空技術株式会社 ピラニ真空計
TW457367B (en) * 2000-09-01 2001-10-01 Winbond Electronics Corp Protection tube structure of vacuum pressure gauge
US6973834B1 (en) 2004-10-18 2005-12-13 A.T.C.T. Advanced Thermal Chips Technologies Ltd. Method and apparatus for measuring pressure of a fluid medium and applications thereof
US7207224B2 (en) 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7331237B2 (en) 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
US7613586B2 (en) 2007-01-16 2009-11-03 Honeywell International Inc. Thermal vacuum gauge
US8171801B2 (en) 2008-12-19 2012-05-08 Institut National D'optique Micro-thermistor gas pressure sensor
JP5264572B2 (ja) * 2009-03-11 2013-08-14 本田技研工業株式会社 車両用圧力センサ
US8893554B2 (en) 2012-11-20 2014-11-25 Hamilton Sundstrand Corporation System and method for passively compensating pressure sensors
JP2014126503A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
JP6261463B2 (ja) 2014-06-27 2018-01-17 東京エレクトロン株式会社 圧力測定装置および圧力測定方法
CN205620073U (zh) * 2016-05-20 2016-10-05 合肥鑫晟光电科技有限公司 一种压力监测设备
WO2018194925A1 (en) 2017-04-21 2018-10-25 Mks Instruments, Inc. End point detection for lyophilization
US10753816B2 (en) 2017-06-15 2020-08-25 Kevin Kornelsen Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure
JP6843708B2 (ja) * 2017-06-28 2021-03-17 アズビル株式会社 静電容量型圧力センサ
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
US10914717B2 (en) * 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection
EP3690417A1 (en) 2019-02-01 2020-08-05 Sens4 A/S Apparatus for heat-loss vacuum measurement with improved temperature compensation and extended measurement range
US11428596B2 (en) * 2020-09-16 2022-08-30 Wisenstech Ltd. Vacuum gauge with an extended dynamic measurement range
JP7674147B2 (ja) * 2021-05-17 2025-05-09 アズビル株式会社 隔膜真空計

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281073A (ja) * 1992-04-03 1993-10-29 Ulvac Japan Ltd ピラニ真空計
JP2008233057A (ja) * 2006-08-21 2008-10-02 Mitsuteru Kimura 熱伝導型センサとこれを用いた熱伝導型計測装置
JP2008241264A (ja) * 2007-03-23 2008-10-09 Sumitomo Electric Ind Ltd 真空ゲージを備える屋外設置器具
JP2010151622A (ja) * 2008-12-25 2010-07-08 Canon Anelva Corp 熱伝導型真空計及びそれを備えた真空容器を有する真空処理装置
US20140026640A1 (en) * 2012-07-30 2014-01-30 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
JP2019100758A (ja) * 2017-11-29 2019-06-24 アズビル株式会社 真空室異常検出装置および隔膜真空計並びに真空室異常検出方法

Also Published As

Publication number Publication date
US20220155172A1 (en) 2022-05-19
EP4244590A1 (en) 2023-09-20
TW202235836A (zh) 2022-09-16
CN116547510A (zh) 2023-08-04
WO2022104316A1 (en) 2022-05-19
TWI911324B (zh) 2026-01-11
US11808643B2 (en) 2023-11-07
KR20230105680A (ko) 2023-07-11

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